IT1302694B1 - Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea. - Google Patents

Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.

Info

Publication number
IT1302694B1
IT1302694B1 IT1998MI002235A ITMI982235A IT1302694B1 IT 1302694 B1 IT1302694 B1 IT 1302694B1 IT 1998MI002235 A IT1998MI002235 A IT 1998MI002235A IT MI982235 A ITMI982235 A IT MI982235A IT 1302694 B1 IT1302694 B1 IT 1302694B1
Authority
IT
Italy
Prior art keywords
trapump
getter
temperature
line
shielding device
Prior art date
Application number
IT1998MI002235A
Other languages
English (en)
Inventor
Marco Moraja
Luca Viale
Original Assignee
Getters Spa
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Getters Spa filed Critical Getters Spa
Priority to IT1998MI002235A priority Critical patent/IT1302694B1/it
Publication of ITMI982235A0 publication Critical patent/ITMI982235A0/it
Priority to JP2000577411A priority patent/JP3759879B2/ja
Priority to AU10747/00A priority patent/AU1074700A/en
Priority to DE69915448T priority patent/DE69915448T2/de
Priority to EP99954344A priority patent/EP1045990B1/en
Priority to PCT/IT1999/000332 priority patent/WO2000023713A1/it
Publication of ITMI982235A1 publication Critical patent/ITMI982235A1/it
Priority to US09/578,650 priority patent/US6309184B1/en
Application granted granted Critical
Publication of IT1302694B1 publication Critical patent/IT1302694B1/it

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
IT1998MI002235A 1998-10-19 1998-10-19 Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea. IT1302694B1 (it)

Priority Applications (7)

Application Number Priority Date Filing Date Title
IT1998MI002235A IT1302694B1 (it) 1998-10-19 1998-10-19 Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.
JP2000577411A JP3759879B2 (ja) 1998-10-19 1999-10-19 ゲッターポンプとターボポンプの間に一直線に接続された温度応答可動型遮へい装置
AU10747/00A AU1074700A (en) 1998-10-19 1999-10-19 Temperature-responsive mobile shielding device between a getter pump and a molecular pump
DE69915448T DE69915448T2 (de) 1998-10-19 1999-10-19 Temperaturgesteuertes leitungsventil zwischen einer getter-pumpe und einer turbomolekularpumpe
EP99954344A EP1045990B1 (en) 1998-10-19 1999-10-19 Temperature-responsive mobile shielding device between a getter pump and a molecular pump
PCT/IT1999/000332 WO2000023713A1 (it) 1998-10-19 1999-10-19 Temperature-responsive mobile shielding device between a getter pump and a molecular pump mutually connected in line
US09/578,650 US6309184B1 (en) 1998-10-19 2000-05-25 Temperature-responsive mobile shielding device between a getter pump and a turbo pump mutually connected in line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IT1998MI002235A IT1302694B1 (it) 1998-10-19 1998-10-19 Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.

Publications (3)

Publication Number Publication Date
ITMI982235A0 ITMI982235A0 (it) 1998-10-19
ITMI982235A1 ITMI982235A1 (it) 2000-04-19
IT1302694B1 true IT1302694B1 (it) 2000-09-29

Family

ID=11380888

Family Applications (1)

Application Number Title Priority Date Filing Date
IT1998MI002235A IT1302694B1 (it) 1998-10-19 1998-10-19 Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.

Country Status (7)

Country Link
US (1) US6309184B1 (it)
EP (1) EP1045990B1 (it)
JP (1) JP3759879B2 (it)
AU (1) AU1074700A (it)
DE (1) DE69915448T2 (it)
IT (1) IT1302694B1 (it)
WO (1) WO2000023713A1 (it)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4657463B2 (ja) * 2001-02-01 2011-03-23 エドワーズ株式会社 真空ポンプ
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
AT501186B1 (de) * 2004-07-28 2006-11-15 Konstantin Technologies Gmbh Transferbehältnis
AT501616B1 (de) * 2004-07-30 2006-10-15 Konstantin Technologies Gmbh Nicht evaporierender getter
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
US7850432B2 (en) * 2006-09-14 2010-12-14 Gamma Vacuum, Llc Ion pump having emission containment
US8299424B2 (en) * 2007-04-30 2012-10-30 Woods Hole Oceanographic Institution Systems and methods for analyzing underwater, subsurface and atmospheric environments
ITMI20090402A1 (it) 2009-03-17 2010-09-18 Getters Spa Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
EP2246573B1 (de) * 2009-04-28 2013-02-13 Hsr Ag Schutzvorrichtung für Hochvakuumpumpen
DE102011100311A1 (de) * 2011-05-03 2012-11-08 Pfeiffer Vacuum Gmbh Vorrichtung mit einer Leitstruktur
ITMI20121732A1 (it) * 2012-10-15 2014-04-16 Getters Spa Pompa getter
KR101461008B1 (ko) * 2013-09-13 2014-11-13 주식회사 포스코 진공용 전자기파 차폐율 조절 장치
EP3161315B1 (en) * 2014-06-26 2017-12-20 Saes Getters S.p.A. Getter pumping system
IT201800007349A1 (it) 2018-07-19 2020-01-19 Apparecchio multistadio per vuoto con separazione degli stadi controllata da un attuatore in lega a memoria di forma
US11578707B1 (en) 2022-04-28 2023-02-14 Honeywell International Inc. Shape memory alloy enclosure for non-evaporable getters

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396879A1 (fr) * 1977-07-05 1979-02-02 Air Liquide Cryopompe
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
JPS58160552A (ja) * 1982-03-18 1983-09-24 Toyota Motor Corp 内燃機関の点火時期制御方法
JPS5977178A (ja) * 1982-10-22 1984-05-02 Keiichi Yasukawa 温度別分流弁
JPS5980583A (ja) * 1982-10-29 1984-05-10 Matsushita Electric Ind Co Ltd 流量調節装置
JPS6191440A (ja) * 1984-10-11 1986-05-09 Matsushita Electric Ind Co Ltd 空気調和機のヒ−タ過熱防止装置
DE3773646D1 (de) * 1987-01-28 1991-11-14 Leybold Ag Regelbare drossel fuer eine vakuumpumpe, insbesondere kryopumpe.
US4791791A (en) * 1988-01-20 1988-12-20 Varian Associates, Inc. Cryosorption surface for a cryopump
US5056319A (en) * 1989-03-18 1991-10-15 Leybold Aktiengesellschaft Refrigerator-operated apparatus
JPH03258976A (ja) * 1990-03-08 1991-11-19 Mitsubishi Electric Corp 真空装置における真空の再生方法
JPH04369500A (ja) * 1991-06-18 1992-12-22 Seiko Seiki Co Ltd 放射線装置
IT1292175B1 (it) * 1997-06-17 1999-01-25 Getters Spa Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare

Also Published As

Publication number Publication date
WO2000023713A1 (it) 2000-04-27
US6309184B1 (en) 2001-10-30
DE69915448T2 (de) 2004-12-23
ITMI982235A0 (it) 1998-10-19
ITMI982235A1 (it) 2000-04-19
JP2002527681A (ja) 2002-08-27
EP1045990A1 (en) 2000-10-25
EP1045990B1 (en) 2004-03-10
AU1074700A (en) 2000-05-08
DE69915448D1 (de) 2004-04-15
JP3759879B2 (ja) 2006-03-29

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