DE69915448D1 - Temperaturgesteuertes leitungsventil zwischen einer getter-pumpe und einer turbomolekularpumpe - Google Patents

Temperaturgesteuertes leitungsventil zwischen einer getter-pumpe und einer turbomolekularpumpe

Info

Publication number
DE69915448D1
DE69915448D1 DE69915448T DE69915448T DE69915448D1 DE 69915448 D1 DE69915448 D1 DE 69915448D1 DE 69915448 T DE69915448 T DE 69915448T DE 69915448 T DE69915448 T DE 69915448T DE 69915448 D1 DE69915448 D1 DE 69915448D1
Authority
DE
Germany
Prior art keywords
pump
temperature controlled
line valve
controlled line
getter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69915448T
Other languages
English (en)
Other versions
DE69915448T2 (de
Inventor
Marco Moraja
Luca Viale
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SAES Getters SpA
Original Assignee
SAES Getters SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SAES Getters SpA filed Critical SAES Getters SpA
Application granted granted Critical
Publication of DE69915448D1 publication Critical patent/DE69915448D1/de
Publication of DE69915448T2 publication Critical patent/DE69915448T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE69915448T 1998-10-19 1999-10-19 Temperaturgesteuertes leitungsventil zwischen einer getter-pumpe und einer turbomolekularpumpe Expired - Fee Related DE69915448T2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
ITMI982235 1998-10-19
IT1998MI002235A IT1302694B1 (it) 1998-10-19 1998-10-19 Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.
PCT/IT1999/000332 WO2000023713A1 (en) 1998-10-19 1999-10-19 Temperature-responsive mobile shielding device between a getter pump and a molecular pump

Publications (2)

Publication Number Publication Date
DE69915448D1 true DE69915448D1 (de) 2004-04-15
DE69915448T2 DE69915448T2 (de) 2004-12-23

Family

ID=11380888

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69915448T Expired - Fee Related DE69915448T2 (de) 1998-10-19 1999-10-19 Temperaturgesteuertes leitungsventil zwischen einer getter-pumpe und einer turbomolekularpumpe

Country Status (7)

Country Link
US (1) US6309184B1 (de)
EP (1) EP1045990B1 (de)
JP (1) JP3759879B2 (de)
AU (1) AU1074700A (de)
DE (1) DE69915448T2 (de)
IT (1) IT1302694B1 (de)
WO (1) WO2000023713A1 (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4657463B2 (ja) * 2001-02-01 2011-03-23 エドワーズ株式会社 真空ポンプ
US7021888B2 (en) * 2003-12-16 2006-04-04 Universities Research Association, Inc. Ultra-high speed vacuum pump system with first stage turbofan and second stage turbomolecular pump
AT501186B1 (de) * 2004-07-28 2006-11-15 Konstantin Technologies Gmbh Transferbehältnis
AT501616B1 (de) * 2004-07-30 2006-10-15 Konstantin Technologies Gmbh Nicht evaporierender getter
US7313922B2 (en) * 2004-09-24 2008-01-01 Brooks Automation, Inc. High conductance cryopump for type III gas pumping
US7850432B2 (en) * 2006-09-14 2010-12-14 Gamma Vacuum, Llc Ion pump having emission containment
US8299424B2 (en) * 2007-04-30 2012-10-30 Woods Hole Oceanographic Institution Systems and methods for analyzing underwater, subsurface and atmospheric environments
ITMI20090402A1 (it) * 2009-03-17 2010-09-18 Getters Spa Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica
EP2246573B1 (de) * 2009-04-28 2013-02-13 Hsr Ag Schutzvorrichtung für Hochvakuumpumpen
DE102011100311A1 (de) * 2011-05-03 2012-11-08 Pfeiffer Vacuum Gmbh Vorrichtung mit einer Leitstruktur
ITMI20121732A1 (it) * 2012-10-15 2014-04-16 Getters Spa Pompa getter
KR101461008B1 (ko) * 2013-09-13 2014-11-13 주식회사 포스코 진공용 전자기파 차폐율 조절 장치
CN107076133B (zh) * 2014-06-26 2019-06-18 工程吸气公司 吸气剂泵送系统
IT201800007349A1 (it) 2018-07-19 2020-01-19 Apparecchio multistadio per vuoto con separazione degli stadi controllata da un attuatore in lega a memoria di forma
US11578707B1 (en) 2022-04-28 2023-02-14 Honeywell International Inc. Shape memory alloy enclosure for non-evaporable getters

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2396879A1 (fr) * 1977-07-05 1979-02-02 Air Liquide Cryopompe
US4295338A (en) * 1979-10-18 1981-10-20 Varian Associates, Inc. Cryogenic pumping apparatus with replaceable pumping surface elements
JPS58160552A (ja) * 1982-03-18 1983-09-24 Toyota Motor Corp 内燃機関の点火時期制御方法
JPS5977178A (ja) * 1982-10-22 1984-05-02 Keiichi Yasukawa 温度別分流弁
JPS5980583A (ja) * 1982-10-29 1984-05-10 Matsushita Electric Ind Co Ltd 流量調節装置
JPS6191440A (ja) * 1984-10-11 1986-05-09 Matsushita Electric Ind Co Ltd 空気調和機のヒ−タ過熱防止装置
EP0276346B1 (de) * 1987-01-28 1991-10-09 Leybold Aktiengesellschaft Regelbare Drossel für eine Vakuumpumpe, insbesondere Kryopumpe
US4791791A (en) * 1988-01-20 1988-12-20 Varian Associates, Inc. Cryosorption surface for a cryopump
US5056319A (en) * 1989-03-18 1991-10-15 Leybold Aktiengesellschaft Refrigerator-operated apparatus
JPH03258976A (ja) * 1990-03-08 1991-11-19 Mitsubishi Electric Corp 真空装置における真空の再生方法
JPH04369500A (ja) * 1991-06-18 1992-12-22 Seiko Seiki Co Ltd 放射線装置
IT1292175B1 (it) * 1997-06-17 1999-01-25 Getters Spa Pompa getter particolarmente adatta per l'uso a monte,in prossimita' e coassialmente ad una pompa turbomolecolare

Also Published As

Publication number Publication date
JP3759879B2 (ja) 2006-03-29
EP1045990B1 (de) 2004-03-10
US6309184B1 (en) 2001-10-30
AU1074700A (en) 2000-05-08
DE69915448T2 (de) 2004-12-23
ITMI982235A0 (it) 1998-10-19
ITMI982235A1 (it) 2000-04-19
EP1045990A1 (de) 2000-10-25
IT1302694B1 (it) 2000-09-29
JP2002527681A (ja) 2002-08-27
WO2000023713A1 (en) 2000-04-27

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee