FR2396879A1 - Cryopompe - Google Patents

Cryopompe

Info

Publication number
FR2396879A1
FR2396879A1 FR7720554A FR7720554A FR2396879A1 FR 2396879 A1 FR2396879 A1 FR 2396879A1 FR 7720554 A FR7720554 A FR 7720554A FR 7720554 A FR7720554 A FR 7720554A FR 2396879 A1 FR2396879 A1 FR 2396879A1
Authority
FR
France
Prior art keywords
walls
cryopump
partitions
adsorbent
gases
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7720554A
Other languages
English (en)
Other versions
FR2396879B1 (fr
Inventor
Jacques Carle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
Original Assignee
Air Liquide SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA filed Critical Air Liquide SA
Priority to FR7720554A priority Critical patent/FR2396879A1/fr
Priority to DE7878400040T priority patent/DE2860052D1/de
Priority to EP78400040A priority patent/EP0000311B1/fr
Priority to US05/919,944 priority patent/US4198829A/en
Priority to JP1978091869U priority patent/JPS5933911Y2/ja
Publication of FR2396879A1 publication Critical patent/FR2396879A1/fr
Application granted granted Critical
Publication of FR2396879B1 publication Critical patent/FR2396879B1/fr
Granted legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D8/00—Cold traps; Cold baffles
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Abstract

La présente invention concerne une cryopompe. Cette cryopompe incorpore des parois de piégeage par condensation (face externe 16 des cloisons 4) et des parois de piégeage par adsorption (face interne 14 des cloisons 4) et ces parois définissent une zone confinée 20 en position de fermeture, isolant l'adsorbant des gaz condensables. Une fois ces gaz condensés sur les faces 16, les parois 4 sont ouvertes pour mettre en présence les nappes adsorbantes 14 avec le restant de l'enceinte de pompage 1. Application au vide propre et profond (élaboration de couches minces notamment).
FR7720554A 1977-07-05 1977-07-05 Cryopompe Granted FR2396879A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR7720554A FR2396879A1 (fr) 1977-07-05 1977-07-05 Cryopompe
DE7878400040T DE2860052D1 (en) 1977-07-05 1978-06-28 Cryogenic pump
EP78400040A EP0000311B1 (fr) 1977-07-05 1978-06-28 Cryopompe
US05/919,944 US4198829A (en) 1977-07-05 1978-06-28 Cryopumps
JP1978091869U JPS5933911Y2 (ja) 1977-07-05 1978-07-05 クライオポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7720554A FR2396879A1 (fr) 1977-07-05 1977-07-05 Cryopompe

Publications (2)

Publication Number Publication Date
FR2396879A1 true FR2396879A1 (fr) 1979-02-02
FR2396879B1 FR2396879B1 (fr) 1980-08-01

Family

ID=9192966

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7720554A Granted FR2396879A1 (fr) 1977-07-05 1977-07-05 Cryopompe

Country Status (5)

Country Link
US (1) US4198829A (fr)
EP (1) EP0000311B1 (fr)
JP (1) JPS5933911Y2 (fr)
DE (1) DE2860052D1 (fr)
FR (1) FR2396879A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0053784A1 (fr) * 1980-12-10 1982-06-16 Leybold-Heraeus GmbH Cryostat combiné avec une machine frigorifique

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
DE3014207C2 (de) * 1980-04-14 1983-12-29 Bfg Glassgroup, Paris Isolierglaseinheit mit Innenscheibe, Außenscheibe und Gasfüllung im Zwischenraum
JPS58160552A (ja) * 1982-03-18 1983-09-24 Toyota Motor Corp 内燃機関の点火時期制御方法
DE3216591A1 (de) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe mit jalousieartigem baffle
US4531372A (en) * 1982-08-27 1985-07-30 Comptech, Incorporated Cryogenic pump having maximum aperture throttled part
US4479361A (en) * 1983-03-02 1984-10-30 The United States Of America As Represented By The United States Department Of Energy Gas pump with movable gas pumping panels
US4494381A (en) * 1983-05-13 1985-01-22 Helix Technology Corporation Cryopump with improved adsorption capacity
US4559787A (en) * 1984-12-04 1985-12-24 The United States Of America As Represented By The United States Department Of Energy Vacuum pump apparatus
US4907413A (en) * 1988-06-02 1990-03-13 Grumman Aerospace Corporation Regenerable cryosorption pump with movable physical barrier and physical barrier thereof
US5301511A (en) * 1992-06-12 1994-04-12 Helix Technology Corporation Cryopump and cryopanel having frost concentrating device
WO1994000212A1 (fr) * 1992-06-24 1994-01-06 Extek Cryogenics Inc. Pompe cryogenique
IT1302694B1 (it) 1998-10-19 2000-09-29 Getters Spa Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.
ITCO20110037A1 (it) * 2011-09-09 2013-03-10 Nuovo Pignone Spa Sistema di tenuta per attuatore e metodo
US8863494B2 (en) * 2011-10-06 2014-10-21 Hamilton Sundstrand Space Systems International, Inc. Turbine outlet frozen gas capture apparatus and method
DE102015217006A1 (de) * 2015-09-04 2017-03-09 Brose Fahrzeugteile Gmbh & Co. Kg, Coburg Vorrichtung mit Bodenabdeckung für einen Laderaum

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3019809A (en) * 1960-09-13 1962-02-06 Ipsen Ind Inc Combined vacuum valve and cold trap
FR1407342A (fr) * 1963-08-16 1965-07-30 Little Inc A Réfrigérateur cryogène à cycle fermé et appareil le comprenant
US3296773A (en) * 1964-03-24 1967-01-10 Union Carbide Corp Adsorbent-coated thermal panels
FR2321609A1 (fr) * 1975-08-22 1977-03-18 Air Liquide Cryopompe a regeneration

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0053784A1 (fr) * 1980-12-10 1982-06-16 Leybold-Heraeus GmbH Cryostat combiné avec une machine frigorifique

Also Published As

Publication number Publication date
EP0000311A1 (fr) 1979-01-10
FR2396879B1 (fr) 1980-08-01
EP0000311B1 (fr) 1980-07-23
JPS5933911Y2 (ja) 1984-09-20
JPS5420008U (fr) 1979-02-08
US4198829A (en) 1980-04-22
DE2860052D1 (en) 1980-11-13

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Legal Events

Date Code Title Description
ST Notification of lapse