DE3773646D1 - Regelbare drossel fuer eine vakuumpumpe, insbesondere kryopumpe. - Google Patents

Regelbare drossel fuer eine vakuumpumpe, insbesondere kryopumpe.

Info

Publication number
DE3773646D1
DE3773646D1 DE8787101153T DE3773646T DE3773646D1 DE 3773646 D1 DE3773646 D1 DE 3773646D1 DE 8787101153 T DE8787101153 T DE 8787101153T DE 3773646 T DE3773646 T DE 3773646T DE 3773646 D1 DE3773646 D1 DE 3773646D1
Authority
DE
Germany
Prior art keywords
vacuum pump
strip
cryopump
rod
adjustable throttle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE8787101153T
Other languages
English (en)
Inventor
Wilhelm Strasser
Axel Veit
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Application granted granted Critical
Publication of DE3773646D1 publication Critical patent/DE3773646D1/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/8741—With common operator
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/87265—Dividing into parallel flow paths with recombining
    • Y10T137/87507—Electrical actuator

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE8787101153T 1987-01-28 1987-01-28 Regelbare drossel fuer eine vakuumpumpe, insbesondere kryopumpe. Expired - Fee Related DE3773646D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP87101153A EP0276346B1 (de) 1987-01-28 1987-01-28 Regelbare Drossel für eine Vakuumpumpe, insbesondere Kryopumpe

Publications (1)

Publication Number Publication Date
DE3773646D1 true DE3773646D1 (de) 1991-11-14

Family

ID=8196708

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8787101153T Expired - Fee Related DE3773646D1 (de) 1987-01-28 1987-01-28 Regelbare drossel fuer eine vakuumpumpe, insbesondere kryopumpe.

Country Status (3)

Country Link
US (1) US4803845A (de)
EP (1) EP0276346B1 (de)
DE (1) DE3773646D1 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH686384A5 (de) * 1992-07-21 1996-03-15 Marcel Kohler Kryopumpe.
US5520002A (en) * 1995-02-01 1996-05-28 Sony Corporation High speed pump for a processing vacuum chamber
IT1302694B1 (it) * 1998-10-19 2000-09-29 Getters Spa Dispositivo di schermatura mobile in funzione della temperatura trapompa getter e pompa turbomolecolare collegate in linea.
US6122921A (en) * 1999-01-19 2000-09-26 Applied Materials, Inc. Shield to prevent cryopump charcoal array from shedding during cryo-regeneration
CN108105066B (zh) * 2017-12-26 2019-04-12 安徽万瑞冷电科技有限公司 一种可变抽速的低温泵

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3973590A (en) * 1974-02-01 1976-08-10 Aeronca, Inc. Mixing valve for air distributing systems
US4064934A (en) * 1975-11-07 1977-12-27 International Harvester Company Radiator air flow control mechanism
US4285710A (en) * 1978-09-18 1981-08-25 Varian Associates, Inc. Cryogenic device for restricting the pumping speed of selected gases
US4341079A (en) * 1980-04-01 1982-07-27 Cvi Incorporated Cryopump apparatus
JPS58160552A (ja) * 1982-03-18 1983-09-24 Toyota Motor Corp 内燃機関の点火時期制御方法
DE3216591A1 (de) * 1982-05-04 1983-11-10 Leybold-Heraeus GmbH, 5000 Köln Kryopumpe mit jalousieartigem baffle
US4457336A (en) * 1982-07-14 1984-07-03 Flanders Filters, Inc. Air flow control apparatus
US4531372A (en) * 1982-08-27 1985-07-30 Comptech, Incorporated Cryogenic pump having maximum aperture throttled part
US4393896A (en) * 1982-08-27 1983-07-19 Comptech, Incorporated Radial vane gas throttling valve for vacuum systems
DE3364522D1 (en) * 1982-08-27 1986-08-21 Comptech Inc Cryogenic pump having maximum aperture throttled port
US4479361A (en) * 1983-03-02 1984-10-30 The United States Of America As Represented By The United States Department Of Energy Gas pump with movable gas pumping panels
US4493342A (en) * 1983-10-24 1985-01-15 Bachmann Industries, Inc. Double louver damper

Also Published As

Publication number Publication date
EP0276346A1 (de) 1988-08-03
EP0276346B1 (de) 1991-10-09
US4803845A (en) 1989-02-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee