DE3364522D1 - Cryogenic pump having maximum aperture throttled port - Google Patents
Cryogenic pump having maximum aperture throttled portInfo
- Publication number
- DE3364522D1 DE3364522D1 DE8383304746T DE3364522T DE3364522D1 DE 3364522 D1 DE3364522 D1 DE 3364522D1 DE 8383304746 T DE8383304746 T DE 8383304746T DE 3364522 T DE3364522 T DE 3364522T DE 3364522 D1 DE3364522 D1 DE 3364522D1
- Authority
- DE
- Germany
- Prior art keywords
- cryogenic pump
- maximum aperture
- throttled port
- throttled
- port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/56—Fluid-guiding means, e.g. diffusers adjustable
- F04D29/563—Fluid-guiding means, e.g. diffusers adjustable specially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
- F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/412,251 US4393896A (en) | 1982-08-27 | 1982-08-27 | Radial vane gas throttling valve for vacuum systems |
US51451683A | 1983-07-15 | 1983-07-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
DE3364522D1 true DE3364522D1 (en) | 1986-08-21 |
Family
ID=27021689
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE8383304746T Expired DE3364522D1 (en) | 1982-08-27 | 1983-08-16 | Cryogenic pump having maximum aperture throttled port |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP0102787B1 (en) |
DE (1) | DE3364522D1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB8526191D0 (en) * | 1985-10-23 | 1985-11-27 | Boc Group Plc | Cryopumps |
EP0276346B1 (en) * | 1987-01-28 | 1991-10-09 | Leybold Aktiengesellschaft | Control throttle for a vacuum pump, especially a cryogenic pump |
IT1250804B (en) * | 1991-07-10 | 1995-04-21 | Varian Spa | PUMPING STAGE FOR TURBOMOLECULAR PUMP |
CH686384A5 (en) * | 1992-07-21 | 1996-03-15 | Marcel Kohler | Cryopump. |
NL9500225A (en) * | 1995-02-07 | 1996-09-02 | Hauzer Techno Coating Europ B | Method for regenerating cryocondensation pump panels in a vacuum chamber, vacuum chamber suitable for carrying out the method and an apparatus for coating products provided with such a vacuum chamber. |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2443263A (en) * | 1944-09-18 | 1948-06-15 | American Blower Corp | Fluid flow control apparatus |
BE791888A (en) * | 1971-11-26 | 1973-05-24 | Air Liquide | CRYOPUMPING DEVICE |
BE794140A (en) * | 1972-01-26 | 1973-05-16 | Demag Ag | TURBOCHARGER DISTRIBUTOR |
FR2321609A1 (en) * | 1975-08-22 | 1977-03-18 | Air Liquide | REGENERATION CRYOPUMP |
US4285710A (en) * | 1978-09-18 | 1981-08-25 | Varian Associates, Inc. | Cryogenic device for restricting the pumping speed of selected gases |
-
1983
- 1983-08-16 EP EP19830304746 patent/EP0102787B1/en not_active Expired
- 1983-08-16 DE DE8383304746T patent/DE3364522D1/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
EP0102787A1 (en) | 1984-03-14 |
EP0102787B1 (en) | 1986-07-16 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |