DE3364522D1 - Cryogenic pump having maximum aperture throttled port - Google Patents

Cryogenic pump having maximum aperture throttled port

Info

Publication number
DE3364522D1
DE3364522D1 DE8383304746T DE3364522T DE3364522D1 DE 3364522 D1 DE3364522 D1 DE 3364522D1 DE 8383304746 T DE8383304746 T DE 8383304746T DE 3364522 T DE3364522 T DE 3364522T DE 3364522 D1 DE3364522 D1 DE 3364522D1
Authority
DE
Germany
Prior art keywords
cryogenic pump
maximum aperture
throttled port
throttled
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
DE8383304746T
Other languages
German (de)
Inventor
Edward J Slabaugh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
COMPTECH Inc
Original Assignee
COMPTECH Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US06/412,251 external-priority patent/US4393896A/en
Application filed by COMPTECH Inc filed Critical COMPTECH Inc
Application granted granted Critical
Publication of DE3364522D1 publication Critical patent/DE3364522D1/en
Expired legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/56—Fluid-guiding means, e.g. diffusers adjustable
    • F04D29/563—Fluid-guiding means, e.g. diffusers adjustable specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
DE8383304746T 1982-08-27 1983-08-16 Cryogenic pump having maximum aperture throttled port Expired DE3364522D1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US06/412,251 US4393896A (en) 1982-08-27 1982-08-27 Radial vane gas throttling valve for vacuum systems
US51451683A 1983-07-15 1983-07-15

Publications (1)

Publication Number Publication Date
DE3364522D1 true DE3364522D1 (en) 1986-08-21

Family

ID=27021689

Family Applications (1)

Application Number Title Priority Date Filing Date
DE8383304746T Expired DE3364522D1 (en) 1982-08-27 1983-08-16 Cryogenic pump having maximum aperture throttled port

Country Status (2)

Country Link
EP (1) EP0102787B1 (en)
DE (1) DE3364522D1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB8526191D0 (en) * 1985-10-23 1985-11-27 Boc Group Plc Cryopumps
DE3773646D1 (en) * 1987-01-28 1991-11-14 Leybold Ag ADJUSTABLE THROTTLE FOR A VACUUM PUMP, IN PARTICULAR CRYOPUMP.
IT1250804B (en) * 1991-07-10 1995-04-21 Varian Spa PUMPING STAGE FOR TURBOMOLECULAR PUMP
CH686384A5 (en) * 1992-07-21 1996-03-15 Marcel Kohler Cryopump.
NL9500225A (en) * 1995-02-07 1996-09-02 Hauzer Techno Coating Europ B Method for regenerating cryocondensation pump panels in a vacuum chamber, vacuum chamber suitable for carrying out the method and an apparatus for coating products provided with such a vacuum chamber.

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2443263A (en) * 1944-09-18 1948-06-15 American Blower Corp Fluid flow control apparatus
BE791888A (en) * 1971-11-26 1973-05-24 Air Liquide CRYOPUMPING DEVICE
BE794140A (en) * 1972-01-26 1973-05-16 Demag Ag TURBOCHARGER DISTRIBUTOR
FR2321609A1 (en) * 1975-08-22 1977-03-18 Air Liquide REGENERATION CRYOPUMP
US4285710A (en) * 1978-09-18 1981-08-25 Varian Associates, Inc. Cryogenic device for restricting the pumping speed of selected gases

Also Published As

Publication number Publication date
EP0102787B1 (en) 1986-07-16
EP0102787A1 (en) 1984-03-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition