DE69833067D1 - Dämpfungsvorrichtung und Turbomolekularpumpe mit Dämpfungsvorrichtung - Google Patents

Dämpfungsvorrichtung und Turbomolekularpumpe mit Dämpfungsvorrichtung

Info

Publication number
DE69833067D1
DE69833067D1 DE69833067T DE69833067T DE69833067D1 DE 69833067 D1 DE69833067 D1 DE 69833067D1 DE 69833067 T DE69833067 T DE 69833067T DE 69833067 T DE69833067 T DE 69833067T DE 69833067 D1 DE69833067 D1 DE 69833067D1
Authority
DE
Germany
Prior art keywords
damping device
turbomolecular pump
turbomolecular
damping
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69833067T
Other languages
English (en)
Other versions
DE69833067T2 (de
Inventor
Chikara Murakami
Ichiju Satoh
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP9246045A external-priority patent/JPH1162878A/ja
Priority claimed from JP34713097A external-priority patent/JP3979452B2/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69833067D1 publication Critical patent/DE69833067D1/de
Publication of DE69833067T2 publication Critical patent/DE69833067T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • F16F15/03—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means
    • F16F15/035—Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems using magnetic or electromagnetic means by use of eddy or induced-current damping
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Vibration Prevention Devices (AREA)
DE69833067T 1997-04-18 1998-04-17 Dämpfungsvorrichtung und Turbomolekularpumpe mit Dämpfungsvorrichtung Expired - Fee Related DE69833067T2 (de)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP11629197 1997-04-18
JP11629197 1997-04-18
JP24604597 1997-08-27
JP9246045A JPH1162878A (ja) 1997-08-27 1997-08-27 ターボ分子ポンプ
JP34713097A JP3979452B2 (ja) 1997-04-18 1997-12-02 ダンパ装置
JP34713097 1997-12-02

Publications (2)

Publication Number Publication Date
DE69833067D1 true DE69833067D1 (de) 2006-03-30
DE69833067T2 DE69833067T2 (de) 2006-09-14

Family

ID=27313126

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69833067T Expired - Fee Related DE69833067T2 (de) 1997-04-18 1998-04-17 Dämpfungsvorrichtung und Turbomolekularpumpe mit Dämpfungsvorrichtung

Country Status (3)

Country Link
US (1) US6213737B1 (de)
EP (1) EP0875694B9 (de)
DE (1) DE69833067T2 (de)

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US6717298B2 (en) * 1998-12-10 2004-04-06 Canon Kabushiki Kaisha Motor apparatus
JP4426049B2 (ja) * 1999-03-31 2010-03-03 エドワーズ株式会社 磁気軸受装置及び真空ポンプ
US6448679B1 (en) * 2000-12-14 2002-09-10 Joseph Imlach Passive magnetic support and damping system
US6388352B1 (en) * 2001-02-22 2002-05-14 Yung-Chi Huang Magnetically actuated rotary apparatus
JP4250353B2 (ja) 2001-06-22 2009-04-08 エドワーズ株式会社 真空ポンプ
JP3949916B2 (ja) * 2001-09-26 2007-07-25 日本電産サンキョー株式会社 磁気浮上モータ、及び磁気軸受装置
US6703735B1 (en) * 2001-11-02 2004-03-09 Indigo Energy, Inc. Active magnetic thrust bearing
US7235909B2 (en) * 2003-03-21 2007-06-26 James Alfred Moe Electromagnetic motor/generator
DE60304870T2 (de) * 2003-11-18 2006-11-30 Varian S.P.A., Leini Vakuumpumpe mit Schwingungsdämpfer
US20050186099A1 (en) * 2004-02-19 2005-08-25 Graeme Huntley Active vibration reduction
GB0410778D0 (en) * 2004-05-13 2004-06-16 Rolls Royce Plc Blade arrangement
DE102004027529B4 (de) * 2004-06-02 2006-09-28 Universität Rostock Verfahren und Vorrichtung zur Tilgung von Drehschwingungen und Drehungleichförmigkeiten für Antriebsstränge
US7795773B1 (en) * 2004-07-02 2010-09-14 Michael Wittig Electric actuator
EP1619395B1 (de) * 2004-07-20 2010-03-10 VARIAN S.p.A. Rotationsvakuumpumpe und ihr Auswuchtverfahren
US20080127453A1 (en) * 2005-03-04 2008-06-05 Wen-Lin Zhang Auto-door device
JP5719592B2 (ja) * 2008-07-14 2015-05-20 エドワーズ株式会社 真空ポンプ
DE102008048210A1 (de) * 2008-09-20 2010-05-12 Oerlikon Leybold Vacuum Gmbh Dämpfungsvorrichtung
US8994237B2 (en) 2010-12-30 2015-03-31 Dresser-Rand Company Method for on-line detection of liquid and potential for the occurrence of resistance to ground faults in active magnetic bearing systems
US9024493B2 (en) 2010-12-30 2015-05-05 Dresser-Rand Company Method for on-line detection of resistance-to-ground faults in active magnetic bearing systems
US9551349B2 (en) 2011-04-08 2017-01-24 Dresser-Rand Company Circulating dielectric oil cooling system for canned bearings and canned electronics
WO2012166236A1 (en) 2011-05-27 2012-12-06 Dresser-Rand Company Segmented coast-down bearing for magnetic bearing systems
US8851756B2 (en) 2011-06-29 2014-10-07 Dresser-Rand Company Whirl inhibiting coast-down bearing for magnetic bearing systems
US9255495B2 (en) 2011-08-24 2016-02-09 Dresser-Rand Company Magnetically-coupled damper for turbomachinery
US9916171B2 (en) * 2014-07-10 2018-03-13 International Business Machines Corporation Application discovery in virtual machines using temporal clustering of installation files
US10073058B2 (en) * 2015-02-11 2018-09-11 Structural Integrity Associates Dynamic pulsed eddy current probe
US10895555B2 (en) 2015-03-30 2021-01-19 Structural Integrity Associates, Inc. System for in-line inspection using a dynamic pulsed eddy current probe and method thereof
DE102016207063A1 (de) 2016-04-26 2017-10-26 Wacker Chemie Ag Zusammensetzungen enthaltend Carbamato-funktionalisierte Organopolysiloxane und kationische Tenside
AT520991B1 (de) * 2018-03-01 2023-05-15 Anton Paar Gmbh Rheometer

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US3637169A (en) * 1969-08-08 1972-01-25 Us Navy Variable parameter nutation damper
DE2213465C3 (de) * 1972-03-20 1986-02-13 Padana AG, Zug Elektromagnetisches Lagerelement
US4198863A (en) * 1975-05-13 1980-04-22 Gerhard Bartek Electromagnetic torsional stiffness element
US4100576A (en) * 1976-04-28 1978-07-11 Zenith Radio Corporation Electromagnetic optical beam controller having an eddy current damper for arresting mechanical resonance
JPS5854284B2 (ja) * 1981-11-12 1983-12-03 航空宇宙技術研究所長 磁気軸受
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
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JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
US4517505A (en) * 1983-02-03 1985-05-14 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Varible force, eddy-current or magnetic damper
JPS59217030A (ja) * 1983-05-24 1984-12-07 Toshiba Corp 回転体用制振装置
DE3409047A1 (de) 1984-03-13 1985-09-19 Kernforschungsanlage Jülich GmbH, 5170 Jülich Magnetlager zur dreiachsigen lagerstabilisierung von koerpern
US4845450A (en) * 1986-06-02 1989-07-04 Raytheon Company Self-biased modular magnetostrictive driver and transducer
JPH0772556B2 (ja) * 1988-03-18 1995-08-02 株式会社荏原製作所 ターボ分子ポンプ
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DE69011391T2 (de) * 1989-05-08 1995-01-26 Nippon Ferrofluidics Kk Magnetische Lagervorrichtung.
DE3931661A1 (de) * 1989-08-25 1991-04-04 Leybold Ag Magnetgelagerte vakuumpumpe
US5231336A (en) * 1992-01-03 1993-07-27 Harman International Industries, Inc. Actuator for active vibration control
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JPH06249290A (ja) 1993-02-22 1994-09-06 Ebara Corp 渦電流ダンパ
GB9409989D0 (en) * 1994-05-18 1994-07-06 Huntleigh Technology Plc Magnetic actuator
FR2728738B1 (fr) * 1994-12-26 1997-01-31 Cit Alcatel Ensemble tournant comportant notamment des moyens de sustentation radiaux et une butee axiale magnetique
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US5896076A (en) * 1997-12-29 1999-04-20 Motran Ind Inc Force actuator with dual magnetic operation
US6006875A (en) * 1998-03-31 1999-12-28 Motran Industries Inc Electrically-tunable vibration absorbers

Also Published As

Publication number Publication date
DE69833067T2 (de) 2006-09-14
EP0875694A3 (de) 2000-06-28
EP0875694B9 (de) 2006-06-14
EP0875694A2 (de) 1998-11-04
EP0875694B1 (de) 2006-01-04
US6213737B1 (en) 2001-04-10

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee