DE69011391T2 - Magnetische Lagervorrichtung. - Google Patents

Magnetische Lagervorrichtung.

Info

Publication number
DE69011391T2
DE69011391T2 DE69011391T DE69011391T DE69011391T2 DE 69011391 T2 DE69011391 T2 DE 69011391T2 DE 69011391 T DE69011391 T DE 69011391T DE 69011391 T DE69011391 T DE 69011391T DE 69011391 T2 DE69011391 T2 DE 69011391T2
Authority
DE
Germany
Prior art keywords
bearing device
magnetic bearing
magnetic
bearing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
DE69011391T
Other languages
English (en)
Other versions
DE69011391D1 (de
Inventor
Akira Yamamura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NIPPON FERROFLUIDICS KK
Original Assignee
NIPPON FERROFLUIDICS KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP1114800A external-priority patent/JPH02125106A/ja
Application filed by NIPPON FERROFLUIDICS KK filed Critical NIPPON FERROFLUIDICS KK
Application granted granted Critical
Publication of DE69011391D1 publication Critical patent/DE69011391D1/de
Publication of DE69011391T2 publication Critical patent/DE69011391T2/de
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C27/00—Elastic or yielding bearings or bearing supports, for exclusively rotary movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/668—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps damping or preventing mechanical vibrations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/0408—Passive magnetic bearings
    • F16C32/0423—Passive magnetic bearings with permanent magnets on both parts repelling each other
    • F16C32/0425—Passive magnetic bearings with permanent magnets on both parts repelling each other for radial load mainly
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
DE69011391T 1989-05-08 1990-01-05 Magnetische Lagervorrichtung. Expired - Fee Related DE69011391T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP1114800A JPH02125106A (ja) 1988-07-04 1989-05-08 磁気軸受装置
US08/119,528 US5394044A (en) 1989-05-08 1993-09-13 Magnetic bearing device

Publications (2)

Publication Number Publication Date
DE69011391D1 DE69011391D1 (de) 1994-09-15
DE69011391T2 true DE69011391T2 (de) 1995-01-26

Family

ID=26453468

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69011391T Expired - Fee Related DE69011391T2 (de) 1989-05-08 1990-01-05 Magnetische Lagervorrichtung.

Country Status (3)

Country Link
US (1) US5394044A (de)
EP (1) EP0396849B1 (de)
DE (1) DE69011391T2 (de)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5521448A (en) * 1994-08-01 1996-05-28 Mechanical Technology Incorporated Damping for passive magnetic bearings
US5682069A (en) * 1994-08-30 1997-10-28 Harris Corporation Concentrically mounted vibration attenuator and method
FR2732734B1 (fr) * 1995-04-07 1997-06-27 Aerospatiale Palier magnetique miniature a au moins un axe actif
JP3046533B2 (ja) * 1995-10-11 2000-05-29 株式会社荏原製作所 軸受ユニット
DE19543745C2 (de) * 1995-11-24 1998-05-28 Forschungszentrum Juelich Gmbh Magnetisches Lager
CZ410497A3 (cs) * 1996-12-20 1998-07-15 W. Schlafhorst Ag Und Co. Axiální uložení pro otevřený dopřádací rotor
DE19712711A1 (de) * 1997-03-26 1998-10-01 Pfeiffer Vacuum Gmbh Dämpfungssystem für magnetisch gelagerte Rotoren
US6213737B1 (en) * 1997-04-18 2001-04-10 Ebara Corporation Damper device and turbomolecular pump with damper device
US20040222708A1 (en) * 1998-11-13 2004-11-11 Barry Reginald Hobson Electric oscillatory machine
US6717298B2 (en) * 1998-12-10 2004-04-06 Canon Kabushiki Kaisha Motor apparatus
DE19943682A1 (de) * 1999-09-13 2001-03-15 Pfeiffer Vacuum Gmbh Rotor mit Magnetlagerung
DE10022062A1 (de) * 2000-05-06 2001-11-08 Leybold Vakuum Gmbh Maschine, vorzugsweise Vakuumpumpe, mit Magnetlagern
US6448679B1 (en) * 2000-12-14 2002-09-10 Joseph Imlach Passive magnetic support and damping system
FR2825680B1 (fr) * 2001-06-07 2003-09-26 Sagem Actionneur de commande de vol primaire a moteur a vibration
DE102009035332A1 (de) * 2009-07-30 2011-02-03 Pfeiffer Vacuum Gmbh Vakuumpumpe
WO2011059708A2 (en) * 2009-10-29 2011-05-19 Oceana Energy Company Energy conversion systems and methods
US9255495B2 (en) * 2011-08-24 2016-02-09 Dresser-Rand Company Magnetically-coupled damper for turbomachinery
US9321466B2 (en) * 2013-04-01 2016-04-26 Massachusetts Institute Of Technology Controllable normal force mechanism with minimum energy consumption
DE102013113986A1 (de) * 2013-12-13 2015-06-18 Pfeiffer Vacuum Gmbh Rotierendes System
JP6553460B2 (ja) * 2015-09-14 2019-07-31 日本電産サンキョー株式会社 リニアアクチュエータ
DE102017002542A1 (de) * 2017-03-16 2018-09-20 Applied Materials, Inc. (N.D.Ges.D. Staates Delaware) Vorrichtung zum Halten, Positionieren und/oder Bewegen eines Objekts

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2123654B2 (de) * 1971-05-13 1973-11-22 Maschinenfabrik Augsburg-Nuernberg Ag, 8000 Muenchen Dampfungsvorrichtung fur einen schnell umlaufenden Rotationskörper
DE2420825C3 (de) * 1974-04-30 1980-04-17 Padana Ag, Zug (Schweiz) Magnetische Lagerung eines Rotors
DE2457783C2 (de) * 1974-12-06 1986-10-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
NL7514748A (nl) * 1975-12-18 1977-06-21 Stichting Reactor Centrum Vliegwiel-aggregaat voor het accumuleren van kine- tische rotatie-energie.
DE2632586C2 (de) * 1976-07-20 1983-05-19 Gesellschaft für Kernverfahrenstechnik mbH, 5170 Jülich Verfahren und Vorrichtung zum Durchlaufen kritischer Drehzahlen langgestreckter Rotoren
FR2379732A1 (fr) * 1977-02-04 1978-09-01 Europ Propulsion Dispositif de stabilisation horizontale d'une masse a support inertiel vertical
DE2711065C3 (de) * 1977-03-14 1982-05-19 Gesellschaft für Kernverfahrenstechnik mbH, 5170 Jülich Radial gedämpftes Fanglager für überkritisch laufende Rotoren
DE2825551C3 (de) * 1978-06-10 1982-06-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
US4268095A (en) * 1978-12-01 1981-05-19 Massachusetts Institute Of Technology Magnetic bearing
US4312628A (en) * 1979-05-21 1982-01-26 Cambridge Thermionic Corporation Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control
WO1982003086A1 (en) * 1981-03-03 1982-09-16 Lochner Kaspar Pasty damping agent,method for preparing and using same
DE3142819A1 (de) * 1981-10-26 1983-05-05 H. Berthold Ag, 1000 Berlin Schwingungsdaempfung fuer einen schrittmotor
SU1190113A1 (ru) * 1982-05-06 1985-11-07 Николаевский Ордена Трудового Красного Знамени Кораблестроительный Институт Им.Адм.С.О.Макарова Управл емый динамический виброгаситель
US4440271A (en) * 1982-06-10 1984-04-03 Sangamo Weston, Inc. Viscous dampening arrangement for taut-band suspension
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
US4563605A (en) * 1984-07-10 1986-01-07 Gerber Scientific Inc. Damping device for rotary stepping motor
US4710656A (en) * 1986-12-03 1987-12-01 Studer Philip A Spring neutralized magnetic vibration isolator
US5023497A (en) * 1987-12-07 1991-06-11 Pereny Franklin C Magnetic force generating system
JPH01200320A (ja) * 1988-02-05 1989-08-11 Hitachi Ltd 回転鏡光偏向器
DE3808331A1 (de) * 1988-03-12 1989-09-28 Kernforschungsanlage Juelich Magnetische lagerung mit permanentmagneten zur aufnahme der radialen lagerkraefte
DE3818556A1 (de) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik Magnetlager fuer eine schnell rotierende vakuumpumpe

Also Published As

Publication number Publication date
EP0396849B1 (de) 1994-08-10
US5394044A (en) 1995-02-28
DE69011391D1 (de) 1994-09-15
EP0396849A1 (de) 1990-11-14

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition
8339 Ceased/non-payment of the annual fee