EP1619395B1 - Rotationsvakuumpumpe und ihr Auswuchtverfahren - Google Patents

Rotationsvakuumpumpe und ihr Auswuchtverfahren Download PDF

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Publication number
EP1619395B1
EP1619395B1 EP04103445A EP04103445A EP1619395B1 EP 1619395 B1 EP1619395 B1 EP 1619395B1 EP 04103445 A EP04103445 A EP 04103445A EP 04103445 A EP04103445 A EP 04103445A EP 1619395 B1 EP1619395 B1 EP 1619395B1
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EP
European Patent Office
Prior art keywords
pump
rotor
rotating
rotating shaft
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
EP04103445A
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English (en)
French (fr)
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EP1619395A1 (de
Inventor
Fausto Casaro
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Varian SpA
Original Assignee
Varian SpA
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Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Priority to EP04103445A priority Critical patent/EP1619395B1/de
Priority to DE602004025916T priority patent/DE602004025916D1/de
Priority to US11/184,280 priority patent/US20060018772A1/en
Priority to JP2005208883A priority patent/JP2006029338A/ja
Publication of EP1619395A1 publication Critical patent/EP1619395A1/de
Application granted granted Critical
Publication of EP1619395B1 publication Critical patent/EP1619395B1/de
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors

Definitions

  • the present invention concerns a rotary vacuum pump and a structure and a method for the balancing thereof.
  • the present invention concerns a rotary vacuum pump of the kind equipped with mechanical bearings.
  • rotary pumps and especially turbomolecular rotary pumps, are machines equipped with a rotating portion, including a rotating shaft to which a set of parallel rotor discs are secured, and co-operating with a stationary portion, generally a set of stator discs, in order to obtain gas pumping from an inlet port to an outlet port of the pump.
  • a turbomolecular pump can generate a vacuum of the order of 10 -7 mbar (10 -5 Pa) with a shaft rotation speed in the range 2x10 4 to 9x10 4 rpm.
  • vibrations are sources of disturbances altering the operation of the measuring instrument and therefore they cannot be tolerated.
  • balancing of a rotating mass can be obtained by means of further additional rotating masses, coupled to the main mass so that the centre of gravity of the overall mass is brought again on the rotation axis (static balancing) and the rotation axis coincides with a main axis of inertia (dynamic balancing).
  • static balancing static balancing
  • dynamic balancing dynamic balancing
  • the pump rotor is dynamically balanced through an iterative process in which measuring steps of the vibrations transmitted by the pump to an external structure alternate with adjusting steps of the position of one or more additional masses placed on the rotor, until the optimum conditions are attained.
  • the main problems related to the rotor balancing step are, on the one hand, the definition of the mathematical model used in order to relate the vibrations measured during the balancing step to the rotor unbalance and, consequently, to the arrangement of the correcting masses, and, on the other hand, the choice of the kind of vibration sensors and the arrangement thereof.
  • the sensors generally used during the rotor balancing step are accelerometers, that is sensors capable of transforming the acceleration of a moving body to which they are secured into an electric signal, the intensity of which is just a function of the acceleration the sensor is being submitted to.
  • the dynamic balancing of a vacuum pump rotor is performed by placing the pump, without stator discs, inside a bell-shaped casing onto which at least two accelerometers, for instance piezoelectric accelerometers, are located. Once the rotor is rotated at high speed, the accelerometers located onto the stationary bell allow measuring the vibrations induced by unbalances, if any, of the rotating masses.
  • the iterative balancing process may need several pump stopping and starting phases in order to apply the correcting masses, and this results in a considerable increase of the time required to reach the optimum conditions and hence in a considerable slowing down of the production.
  • EP 1,273,803 relates to a vacuum pump which includes a rotor and a body connected to said rotor through a connecting portion, so that the rotor and the body as a whole are balanced.
  • the connecting portion is weaker than the rotor with respect to corrosive gasses, so that said connecting portion is damaged by corrosion before any corrosive gas influence appears in the rotor.
  • the connecting portion breaks and the aforesaid body falls off, causing an unbalanced state to appear in the rotor.
  • EP 1,273,803 discloses how to detect a corrosion risk and to prevent a corrosion damage starting from a balanced structure and using the unbalanced status caused by the falling of said body as a corrosion detector.
  • the vibration measurement is not affected by the presence of other pump components, which allows a considerable simplification of the mathematical model relating the measured displacements to the rotor unbalance inducing them.
  • the provision of displacement sensors permanently located inside the pump allows measuring the rotating mass unbalance also during steady state operation of the same pump, that is when the pump has been completed with the stator part, assembled and delivered to the customer.
  • a first turbomolecular rotary pump 101 according to the invention is schematically shown.
  • Said pump 101 comprises a stationary portion and a rotating portion.
  • the stationary portion comprises a basement 103 on which the rotating portion is mounted.
  • the latter comprises a rotating shaft 105 supported by rolling bearings 107, for instance ball bearings.
  • Rotor 109 of electric motor 111 (the stator of which has not been shown for sake of simplicity) used to rotate shaft 105, and pump rotor 113, equipped with smooth or finned discs 115, are mounted on said rotating shaft 105.
  • said pump rotor 113 has a bell-shaped cavity 117 housing rotating shaft 105 of the pump and electric motor 111, in order to make the pump axially more compact.
  • Such an arrangement is generally used for big turbomolecular pumps (rotor diameter of about 250 mm).
  • rotor 113 is not located inside the pump housing, which, as known, is equipped with stator discs, but inside a vacuum-tight stationary bell 119 specifically intended for the balancing of said rotor 113. Vacuum in said bell is made by means of an ancillary pumping system, not shown.
  • a plurality of displacement sensors (four in the disclosed embodiment) 121A - 121D are directly mounted in basement 103 of pump 101, close to rotor 113 and to rotating shaft 105 thereof.
  • Each sensor faces said shaft 105 or said rotor 113 so that changes, if any, in the distance between the rotor and the sensor during rotation of the rotor can be detected.
  • a first pair of sensors 121A, 121B face rotating shaft 105 and are turned towards it, whereas a second pair of sensors 121C, 121D face inner wall 113a of rotor 113 and are turned towards such wall.
  • eddy current displacement sensors are advantageously employed.
  • a generic displacement sensor 51 comprising a coil 53, which is wound on a core 55 and in which a high frequency AC current generating a main magnetic field flows.
  • the variation of distance "a" between coil 53 and an electrically conducting body R, for instance the pump rotor or the shaft thereof, causes a corresponding variation of the magnetic field induced and consequently of impedance Z measured in the coil of sensor 51.
  • a voltage signal U the value of which depends on impedance Z and hence on the distance of the metal body from the sensor, can be obtained at the output from sensor 51.
  • the circuit shown in Fig. 2 comprises a high frequency oscillator 65, an impedance 67 in series and a demodulator 63.
  • Impedance 67 must be sufficiently high to obtain a high sensitivity.
  • Demodulation of voltage signal u outgoing from the sensor allows obtaining a voltage signal U that is a function of distance "a".
  • Eddy current displacement sensors are capable of measuring distance variations of the order of 1 nm and are perfectly suitable for use in balancing turbomolecular pump rotors.
  • cylindrical threaded bores 123 are provided in rotor 113 and are arranged with their axes lying in a plane orthogonal to the rotation axis of the rotor and tangentially relative to the same rotor. Additional masses consisting of threaded dowels can be located and displaced in said bores.
  • balancing methods comprise the insertion of masses consisting of threaded dowels to be screwed into bores with axes radially arranged relative to the rotor.
  • FIG. 3b a second embodiment of the invention is partly depicted.
  • a turbomolecular pump 201 differs from that previously disclosed with reference to Fig. 3a in that rotor 213 has no bell-shaped cavity receiving rotating shaft 205 and electric motor 211.
  • Shaft 205 is instead supported by a pair of rolling bearings 207, for instance ball bearings, and is driven by an electric motor 211, the bearings and the motor being located in a pump region that is axially separated from the pumping region where rotor 213 is located.
  • That arrangement is generally used for small and medium size turbomolecular pumps (rotor diameter smaller than about 160 mm).
  • a pair of displacement sensors 221A, 221B is provided in basement 203 of pump 201, opposite rotating shaft 205 and at opposite sides of rotor 209 of electric motor 211.
  • a second pair of sensors 221C, 221D is provided close to inner wall 213a of rotor 213, whereas a third pair of sensors 221E, 221F is provided close to outer wall 213b of rotor 213. Said sensors are turned towards said rotor so that any variation in the distance between the rotor and the sensor during rotation of the same rotor can be detected.
  • bell 219 is advantageously equipped with a central cylindrical projection 219a penetrating into central bore 213c of rotor 213.
  • a removable vertical support 220 is provided adjacent to one of the walls of external bell 219 for the cantilevering of the third pair of displacement sensors 221E, 221F.
  • pump 201 has multiple threaded bores 223 with axes lying in planes orthogonal to the rotation axis of rotor 223 to allow locating and displacing additional masses.
  • threaded dowels located in radial bores instead of tangentially oriented bores can be used.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (15)

  1. Eine Rotationsvakuumpumpe (101; 201) mit einem stationären Teil (103; 203) und einem Teil, der sich in Bezug auf den stationären Teil dreht, wobei der drehbare Teil eine Drehwelle (105; 205) aufweist, die mit einer Rotorbaueinheit (113; 213) ausgestattet ist, die zum Pumpen von Gas mit einer Statorbaueinheit zusammenwirkt, wobei die Drehwelle durch einen Elektromotor (111; 211) angetrieben wird und durch zumindest ein mechanisches Wälzlager (107; 207) in Bezug auf den stationären Teil gestützt wird,
    dadurch gekennzeichnet, dass
    zwischen dem stationären Teil und dem drehbaren Teil zumindest zwei Auslenkungssensoren (121A-121D; 221A-221B) vorgesehen sind, die geeignet sind, ein elektrisches Signal zu erzeugen, das sich während der Drehung der Welle und der Rotorbaueinheit mit dem Abstand zwischen dem stationären Teil und dem drehbaren Teil ändert.
  2. Eine Pumpe wie in Anspruch 1 beansprucht, wobei die Pumpe (101) eine Basis (103) aufweist, auf der die durch ein Wälzlagerpaar (107) gestützte Drehwelle (105) montiert ist, wobei der Rotor (109) des Pumpenelektromotors (111) verwendet wird, um die Welle (105) und den auf der Drehwelle (105) montierten Pumpenrotor (113) zu drehen.
  3. Die Pumpe wie in Anspruch 2 beansprucht, wobei der Pumpenrotor (113) einen glockenförmigen Hohlraum (117) hat, der die Pumpendrehwelle (105) und den Elektromotor (111) aufnimmt.
  4. Die Pumpe wie in Anspruch 3 beansprucht, wobei die Pumpe zumindest ein Auslenkungssensorpaar (121A-121D) aufweist, das in der Basis (103) der Pumpe (101) nahe beim Rotor (113) und/oder dessen Drehwelle (105) montiert ist, wobei jeder Sensor der Welle (105) oder dem Rotor (113) gegenüberliegt, so dass während der Drehung des Rotors die Änderung, falls vorhanden, des Abstandes zwischen dem Rotor und dem Sensor gemessen werden kann.
  5. Die Pumpe wie in Anspruch 4 beansprucht, wobei die Pumpe ein erstes Sensorpaar (121A, 121B), das der Drehwelle gegenüberliegt und dieser zugewandt ist, und ein zweites Sensorpaar (121C, 121D) aufweist, das der Innenwand (113a) des Rotors (113) gegenüberliegt und dieser Wand zugewandt ist.
  6. Die Pumpe wie in Anspruch 1 beansprucht, wobei der Rotor (113) zumindest ein zylindrisches Gewindeloch (123) aufweist, das so angeordnet ist, dass seine Achse in einer Ebene senkrecht zur Drehachse des Rotors (113) und relativ zum Rotor tangential liegt, wobei in dem Loch zusätzliche Massen bestehend aus Gewindezylinderstiften angeordnet sein können und verstellt werden können, um die Unwucht des drehbaren Teils zu vermindern.
  7. Die Pumpe wie in Anspruch 1 beansprucht, wobei der Rotor (113) zumindest ein zylindrisches Gewindeloch (123) aufweist, das so angeordnet ist, dass seine Achse in einer Ebene senkrecht zur Drehachse des Rotors (113) und relativ zum Rotor radial liegt, wobei in dem Loch zusätzliche Massen bestehend aus Gewindezylinderstiften angeordnet sein können und verstellt werden können, um die Unwucht des drehbaren Teils zu vermindern.
  8. Die Pumpe wie in Anspruch 1 beansprucht, wobei die Drehwelle (205) durch ein Wälzlagerpaar (207) gestützt ist und durch einen Elektromotor (211) angetrieben wird, wobei die Lager und der Motor in einem Pumpenbereich gelegen sind, der axial getrennt vom Pumpenbereich liegt, wo der Rotor (213) aufgenommen ist.
  9. Die Pumpe wie in Anspruch 8 beansprucht, wobei ein Auslenkungssensorpaar (221A, 221B) in der Basis (203) der Pumpe (201) vorgesehen ist, gegenüberliegend zu deren Drehwelle (205) und an gegenüberliegenden Seiten des Rotors (209) des Elektromotors (211).
  10. Die Pumpe wie in Anspruch 1 beansprucht, wobei die Auslenkungssensoren Wirbelstrom-Auslenkungssensoren sind.
  11. Die Pumpe wie in Anspruch 10 beansprucht, wobei die Sensoren eine Spule (53) aufweisen, in der ein Hochfrequenz-Wechselstrom fließt, der ein veränderliches Magnetfeld erzeugt.
  12. Die Pumpe wie in Anspruch 11 beansprucht, wobei die Sensoren einen Impedanz-Spannungs-Wandler (61) aufweisen, so dass eine Änderung beim Spannungspegel eines Ausgangssignals des Konverters (61) einer Impedanzänderung in der Spule des Sensors entspricht.
  13. Die Pumpe wie in Anspruch 12 beansprucht, wobei während des Pumpenbetriebs die Sensoren (121A-121D; 221A-221B) ein Signal liefern, das einer Auslenkung des drehbaren Teils gegenüber den stationären Teilen entspricht.
  14. Die Pumpe wie in Anspruch 1 beansprucht, wobei die Pumpe eine Turbomolekularpumpe ist.
  15. Ein Verfahren des Auswuchtens einer Rotationsvakuumpumpe einer Art, die einen stationären Teil (103; 203) und einen drehbaren Teil aufweist, der eine Drehwelle (105; 205) aufweist, die mit einer Rotorbaueinheit (113; 213) zum Pumpen von Gas ausgestattet ist, wenn sie mit einer Statorbaueinheit zusammenwirkt, wobei die Drehwelle durch einen Elektromotor (111; 211) angetrieben wird und durch zumindest ein mechanisches Wälzlager (107; 207) in Bezug auf den stationären Teil gestützt wird,
    wobei das Verfahren die Schritte aufweist:
    a) Vorsehen einer vakuumdichten Glocke (119; 219), in der die Pumpe während des Auswuchtens aufgenommen sein kann;
    b) Koppeln der Pumpe ohne die Statorbaueinheit an die Glocke;
    c) Erzeugung von Vakuum in der Glocke;
    d) Antreiben des Rotationspumpenteils zur Rotation;
    e) bei Drehzahl, Messen der Auslenkung des drehbaren Teils gegenüber dem stationären Teil;
    f) Anhalten des drehbaren Teils;
    g) Auswuchten des drehbaren Teils mittels zusätzlicher Massen;
    h) Wiederholen der Schritte b) bis g), falls erforderlich;
    und dadurch gekennzeichnet ist, dass die Auslenkungsmessung erhalten wird mittels zumindest zweier Auslenkungssensoren (121A-121D; 221A-221B), die geeignet sind, ein elektrisches Signal zu erzeugen, das sich während der Drehung der Welle (105; 205) und der Rotorbaueinheit (113; 213) mit dem Abstand zwischen dem stationären Teil und dem drehbaren Teil ändert.
EP04103445A 2004-07-20 2004-07-20 Rotationsvakuumpumpe und ihr Auswuchtverfahren Expired - Fee Related EP1619395B1 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP04103445A EP1619395B1 (de) 2004-07-20 2004-07-20 Rotationsvakuumpumpe und ihr Auswuchtverfahren
DE602004025916T DE602004025916D1 (de) 2004-07-20 2004-07-20 Rotationsvakuumpumpe und ihr Auswuchtverfahren
US11/184,280 US20060018772A1 (en) 2004-07-20 2005-07-19 Rotary vacuum pump, structure and method for the balancing thereof
JP2005208883A JP2006029338A (ja) 2004-07-20 2005-07-19 回転真空ポンプ、そのバランス調整構造体およびそのバランス調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04103445A EP1619395B1 (de) 2004-07-20 2004-07-20 Rotationsvakuumpumpe und ihr Auswuchtverfahren

Publications (2)

Publication Number Publication Date
EP1619395A1 EP1619395A1 (de) 2006-01-25
EP1619395B1 true EP1619395B1 (de) 2010-03-10

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US (1) US20060018772A1 (de)
EP (1) EP1619395B1 (de)
JP (1) JP2006029338A (de)
DE (1) DE602004025916D1 (de)

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DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102010021241A1 (de) * 2010-05-21 2011-11-24 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102011105806A1 (de) * 2011-05-05 2012-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Rotor
JP5919745B2 (ja) * 2011-11-15 2016-05-18 株式会社島津製作所 真空ポンプ
DE102013113400A1 (de) * 2013-12-03 2015-06-03 Pfeiffer Vacuum Gmbh Pumpe und Verfahren zum Wuchten eines Rotors
GB201514001D0 (en) 2015-08-07 2015-09-23 Edwards Ltd Pumps
EP3135919B1 (de) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Vakuumpumpe
US10557471B2 (en) 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
CN114216680A (zh) * 2021-11-05 2022-03-22 上海航天控制技术研究所 高速转子峭度检测故障诊断装置和方法

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EP1619395A1 (de) 2006-01-25
DE602004025916D1 (de) 2010-04-22
JP2006029338A (ja) 2006-02-02
US20060018772A1 (en) 2006-01-26

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