EP1619395B1 - Pompe à vide rotative et son procédé d'équilibrage - Google Patents

Pompe à vide rotative et son procédé d'équilibrage Download PDF

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Publication number
EP1619395B1
EP1619395B1 EP04103445A EP04103445A EP1619395B1 EP 1619395 B1 EP1619395 B1 EP 1619395B1 EP 04103445 A EP04103445 A EP 04103445A EP 04103445 A EP04103445 A EP 04103445A EP 1619395 B1 EP1619395 B1 EP 1619395B1
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EP
European Patent Office
Prior art keywords
pump
rotor
rotating
rotating shaft
sensors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
EP04103445A
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German (de)
English (en)
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EP1619395A1 (fr
Inventor
Fausto Casaro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Priority to EP04103445A priority Critical patent/EP1619395B1/fr
Priority to DE602004025916T priority patent/DE602004025916D1/de
Priority to US11/184,280 priority patent/US20060018772A1/en
Priority to JP2005208883A priority patent/JP2006029338A/ja
Publication of EP1619395A1 publication Critical patent/EP1619395A1/fr
Application granted granted Critical
Publication of EP1619395B1 publication Critical patent/EP1619395B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors

Definitions

  • the present invention concerns a rotary vacuum pump and a structure and a method for the balancing thereof.
  • the present invention concerns a rotary vacuum pump of the kind equipped with mechanical bearings.
  • rotary pumps and especially turbomolecular rotary pumps, are machines equipped with a rotating portion, including a rotating shaft to which a set of parallel rotor discs are secured, and co-operating with a stationary portion, generally a set of stator discs, in order to obtain gas pumping from an inlet port to an outlet port of the pump.
  • a turbomolecular pump can generate a vacuum of the order of 10 -7 mbar (10 -5 Pa) with a shaft rotation speed in the range 2x10 4 to 9x10 4 rpm.
  • vibrations are sources of disturbances altering the operation of the measuring instrument and therefore they cannot be tolerated.
  • balancing of a rotating mass can be obtained by means of further additional rotating masses, coupled to the main mass so that the centre of gravity of the overall mass is brought again on the rotation axis (static balancing) and the rotation axis coincides with a main axis of inertia (dynamic balancing).
  • static balancing static balancing
  • dynamic balancing dynamic balancing
  • the pump rotor is dynamically balanced through an iterative process in which measuring steps of the vibrations transmitted by the pump to an external structure alternate with adjusting steps of the position of one or more additional masses placed on the rotor, until the optimum conditions are attained.
  • the main problems related to the rotor balancing step are, on the one hand, the definition of the mathematical model used in order to relate the vibrations measured during the balancing step to the rotor unbalance and, consequently, to the arrangement of the correcting masses, and, on the other hand, the choice of the kind of vibration sensors and the arrangement thereof.
  • the sensors generally used during the rotor balancing step are accelerometers, that is sensors capable of transforming the acceleration of a moving body to which they are secured into an electric signal, the intensity of which is just a function of the acceleration the sensor is being submitted to.
  • the dynamic balancing of a vacuum pump rotor is performed by placing the pump, without stator discs, inside a bell-shaped casing onto which at least two accelerometers, for instance piezoelectric accelerometers, are located. Once the rotor is rotated at high speed, the accelerometers located onto the stationary bell allow measuring the vibrations induced by unbalances, if any, of the rotating masses.
  • the iterative balancing process may need several pump stopping and starting phases in order to apply the correcting masses, and this results in a considerable increase of the time required to reach the optimum conditions and hence in a considerable slowing down of the production.
  • EP 1,273,803 relates to a vacuum pump which includes a rotor and a body connected to said rotor through a connecting portion, so that the rotor and the body as a whole are balanced.
  • the connecting portion is weaker than the rotor with respect to corrosive gasses, so that said connecting portion is damaged by corrosion before any corrosive gas influence appears in the rotor.
  • the connecting portion breaks and the aforesaid body falls off, causing an unbalanced state to appear in the rotor.
  • EP 1,273,803 discloses how to detect a corrosion risk and to prevent a corrosion damage starting from a balanced structure and using the unbalanced status caused by the falling of said body as a corrosion detector.
  • the vibration measurement is not affected by the presence of other pump components, which allows a considerable simplification of the mathematical model relating the measured displacements to the rotor unbalance inducing them.
  • the provision of displacement sensors permanently located inside the pump allows measuring the rotating mass unbalance also during steady state operation of the same pump, that is when the pump has been completed with the stator part, assembled and delivered to the customer.
  • a first turbomolecular rotary pump 101 according to the invention is schematically shown.
  • Said pump 101 comprises a stationary portion and a rotating portion.
  • the stationary portion comprises a basement 103 on which the rotating portion is mounted.
  • the latter comprises a rotating shaft 105 supported by rolling bearings 107, for instance ball bearings.
  • Rotor 109 of electric motor 111 (the stator of which has not been shown for sake of simplicity) used to rotate shaft 105, and pump rotor 113, equipped with smooth or finned discs 115, are mounted on said rotating shaft 105.
  • said pump rotor 113 has a bell-shaped cavity 117 housing rotating shaft 105 of the pump and electric motor 111, in order to make the pump axially more compact.
  • Such an arrangement is generally used for big turbomolecular pumps (rotor diameter of about 250 mm).
  • rotor 113 is not located inside the pump housing, which, as known, is equipped with stator discs, but inside a vacuum-tight stationary bell 119 specifically intended for the balancing of said rotor 113. Vacuum in said bell is made by means of an ancillary pumping system, not shown.
  • a plurality of displacement sensors (four in the disclosed embodiment) 121A - 121D are directly mounted in basement 103 of pump 101, close to rotor 113 and to rotating shaft 105 thereof.
  • Each sensor faces said shaft 105 or said rotor 113 so that changes, if any, in the distance between the rotor and the sensor during rotation of the rotor can be detected.
  • a first pair of sensors 121A, 121B face rotating shaft 105 and are turned towards it, whereas a second pair of sensors 121C, 121D face inner wall 113a of rotor 113 and are turned towards such wall.
  • eddy current displacement sensors are advantageously employed.
  • a generic displacement sensor 51 comprising a coil 53, which is wound on a core 55 and in which a high frequency AC current generating a main magnetic field flows.
  • the variation of distance "a" between coil 53 and an electrically conducting body R, for instance the pump rotor or the shaft thereof, causes a corresponding variation of the magnetic field induced and consequently of impedance Z measured in the coil of sensor 51.
  • a voltage signal U the value of which depends on impedance Z and hence on the distance of the metal body from the sensor, can be obtained at the output from sensor 51.
  • the circuit shown in Fig. 2 comprises a high frequency oscillator 65, an impedance 67 in series and a demodulator 63.
  • Impedance 67 must be sufficiently high to obtain a high sensitivity.
  • Demodulation of voltage signal u outgoing from the sensor allows obtaining a voltage signal U that is a function of distance "a".
  • Eddy current displacement sensors are capable of measuring distance variations of the order of 1 nm and are perfectly suitable for use in balancing turbomolecular pump rotors.
  • cylindrical threaded bores 123 are provided in rotor 113 and are arranged with their axes lying in a plane orthogonal to the rotation axis of the rotor and tangentially relative to the same rotor. Additional masses consisting of threaded dowels can be located and displaced in said bores.
  • balancing methods comprise the insertion of masses consisting of threaded dowels to be screwed into bores with axes radially arranged relative to the rotor.
  • FIG. 3b a second embodiment of the invention is partly depicted.
  • a turbomolecular pump 201 differs from that previously disclosed with reference to Fig. 3a in that rotor 213 has no bell-shaped cavity receiving rotating shaft 205 and electric motor 211.
  • Shaft 205 is instead supported by a pair of rolling bearings 207, for instance ball bearings, and is driven by an electric motor 211, the bearings and the motor being located in a pump region that is axially separated from the pumping region where rotor 213 is located.
  • That arrangement is generally used for small and medium size turbomolecular pumps (rotor diameter smaller than about 160 mm).
  • a pair of displacement sensors 221A, 221B is provided in basement 203 of pump 201, opposite rotating shaft 205 and at opposite sides of rotor 209 of electric motor 211.
  • a second pair of sensors 221C, 221D is provided close to inner wall 213a of rotor 213, whereas a third pair of sensors 221E, 221F is provided close to outer wall 213b of rotor 213. Said sensors are turned towards said rotor so that any variation in the distance between the rotor and the sensor during rotation of the same rotor can be detected.
  • bell 219 is advantageously equipped with a central cylindrical projection 219a penetrating into central bore 213c of rotor 213.
  • a removable vertical support 220 is provided adjacent to one of the walls of external bell 219 for the cantilevering of the third pair of displacement sensors 221E, 221F.
  • pump 201 has multiple threaded bores 223 with axes lying in planes orthogonal to the rotation axis of rotor 223 to allow locating and displacing additional masses.
  • threaded dowels located in radial bores instead of tangentially oriented bores can be used.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)

Claims (15)

  1. Pompe à vide rotative (101, 201) comprenant une partie stationnaire (103, 203) et une partie rotative par rapport à ladite partie stationnaire, ladite partie rotative comprenant un arbre rotatif (105, 205) équipé d'un ensemble de rotor (113, 213) coopérant avec un ensemble de stator pour pomper du gaz, ledit arbre rotatif étant entraîné par un moteur électrique (111, 211) et étant supporté par au moins un palier mécanique à roulement (107, 207) par rapport à ladite partie stationnaire, caractérisée en ce qu'au moins deux capteurs de déplacement (121A-121D, 221A-221B), capables de générer un signal électrique variant avec la distance entre ladite partie stationnaire et ladite partie rotative durant la rotation dudit arbre et dudit ensemble de rotor, sont montés entre ladite partie stationnaire et ledit ensemble de rotor.
  2. Pompe selon la revendication 1, dans laquelle ladite pompe (101) comprend une structure de base (103) sur laquelle est monté l'arbre rotatif (105) supporté par une paire de paliers à roulement (107), le rotor (109) du moteur de la pompe électrique (111) utilisé pour faire tourner l'arbre (105) et le rotor de la pompe (113) étant monté sur ledit arbre rotatif (105).
  3. Pompe selon la revendication 2, dans laquelle ledit rotor de pompe (113) a une cavité en forme de cloche (117) logeant l'arbre rotatif de la pompe (105) et le moteur électrique (111).
  4. Pompe selon la revendication 3, dans laquelle ladite pompe comprend au moins une paire de capteurs de déplacement (121A - 121D) montés dans la structure de base (103) de la pompe (101), à proximité du rotor (113) et/ou de l'arbre rotatif de celle-ci, chaque capteur faisant face audit arbre (105) ou audit rotor (113) de manière que la variation, si il y en a, de la distance entre le rotor et le capteur durant la rotation du rotor peut être mesurée.
  5. Pompe selon la revendication 4, dans laquelle ladite pompe comprend une première paire de capteurs (121A, 121B) faisant face à l'arbre rotatif (105) et tourné vers celui-ci, et une seconde paire de capteur (121C, 121D) faisant face à la paroi intérieure (113a) du rotor (113) et tourné vers la paroi.
  6. Pompe selon la revendication 1, dans laquelle ledit rotor (113) comprend au moins un alésage cylindrique fileté (123) agencé avec son axe s'étendant dans un plan orthogonal à l'axe de rotation du rotor (113) et tangentiellement par rapport audit rotor, dans lequel alésage des masses additionnelles consistant en des chevilles filetées peuvent être logées et déplacées de manière à réduire le balourd de ladite partie rotative.
  7. Pompe selon la revendication 1, dans laquelle ledit rotor (113) comprend au moins un alésage cylindrique fileté (123) agencé avec son axe s'étendant dans un plan orthogonal à l'axe de rotation du rotor (113) et radialement par rapport audit rotor, dans lequel alésage des masses additionnelles consistant en des chevilles filetées peuvent être logées et déplacées de manière à réduire le balourd de ladite partie rotative.
  8. Pompe selon la revendication 1, dans laquelle ledit arbre rotatif (205) est supporté par une paire de paliers de roulement (207) et est entraîné par un moteur électrique (211), les paliers et le moteur étant logés dans une région de pompe qui est séparée axialement de la région de pompage dans laquelle le rotor (213) est logé.
  9. Pompe selon la revendication 8, dans laquelle une paire de capteurs de déplacement (221A, 221B) est monté dans la structure de base (203) de la pompe (201), à l'opposé de l'arbre rotatif (205) de celle-ci et sur des côtés opposés du rotor (209) du moteur électrique (211).
  10. Pompe selon la revendication 1, dans laquelle lesdits capteurs de déplacement sont des capteurs de déplacement à courants de Foucault.
  11. Pompe selon la revendication 10, dans laquelle lesdits capteurs comprennent une bobine (53) dans laquelle circule un courant AC (alternatif) haute fréquence générant un champ magnétique variable.
  12. Pompe selon la revendication 11, dans laquelle lesdits capteurs comprennent un convertisseur d'impédance en tension (61), de manière que la variation du niveau de tension d'un signal de sortie dudit convertisseur (61) corresponde à une variation d'impédance dans la bobine dudit capteur.
  13. Pompe selon la revendication 12, dans laquelle lesdits capteurs (121A-121D, 221A-221B) fournissent, durant le fonctionnement de la pompe, un signal représentatif du déplacement de la partie rotative par rapport aux parties stationnaires.
  14. Pompe selon la revendication 12, dans laquelle ladite pompe est une pompe turbomoléculaire.
  15. Procédé d'équilibrage d'une pompe à vide rotative du type comprenant une partie stationnaire (103, 203) et une partie rotative comprenant un arbre rotatif (105, 205) équipé d'un ensemble de rotor (113, 213) pour pomper du gaz lorsqu'il coopère avec un ensemble de stator, ledit arbre rotatif étant entraîné par un moteur électrique (111, 211) et étant supporté par au moins un palier mécanique à roulement (107, 207) par rapport à ladite partie stationnaire, ledit procédé comprenant les étapes consistant à :
    a) fournir une cloche étanche au vide (119, 219) dans laquelle la pompe peut être logée durant l'équilibrage ;
    b) coupler ladite pompe, sans ledit ensemble de stator, à ladite cloche ;
    c) faire le vide dans ladite cloche ;
    d) entraîner en rotation ladite partie de pompe rotative ;
    e) mesurer le déplacement, à la fréquence de rotation, de ladite partie rotative par rapport à ladite partie stationnaire ;
    f) stopper ladite partie rotative ;
    g) équilibrer ladite partie rotative au moyen de masses additionnelles ;
    h) répéter, si nécessaire, les étapes b) à g) ;
    et étant caractérisé en ce que ladite mesure de déplacement est obtenue au moyen d'au moins deux capteurs de déplacement (121A - 121F ; 221A - 221F), capables de générer un signal électrique variant avec la distance entre ladite partie stationnaire et ladite partie rotative durant la rotation dudit arbre (105, 205) et ledit ensemble de rotor (113, 213).
EP04103445A 2004-07-20 2004-07-20 Pompe à vide rotative et son procédé d'équilibrage Expired - Fee Related EP1619395B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
EP04103445A EP1619395B1 (fr) 2004-07-20 2004-07-20 Pompe à vide rotative et son procédé d'équilibrage
DE602004025916T DE602004025916D1 (de) 2004-07-20 2004-07-20 Rotationsvakuumpumpe und ihr Auswuchtverfahren
US11/184,280 US20060018772A1 (en) 2004-07-20 2005-07-19 Rotary vacuum pump, structure and method for the balancing thereof
JP2005208883A JP2006029338A (ja) 2004-07-20 2005-07-19 回転真空ポンプ、そのバランス調整構造体およびそのバランス調整方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04103445A EP1619395B1 (fr) 2004-07-20 2004-07-20 Pompe à vide rotative et son procédé d'équilibrage

Publications (2)

Publication Number Publication Date
EP1619395A1 EP1619395A1 (fr) 2006-01-25
EP1619395B1 true EP1619395B1 (fr) 2010-03-10

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EP04103445A Expired - Fee Related EP1619395B1 (fr) 2004-07-20 2004-07-20 Pompe à vide rotative et son procédé d'équilibrage

Country Status (4)

Country Link
US (1) US20060018772A1 (fr)
EP (1) EP1619395B1 (fr)
JP (1) JP2006029338A (fr)
DE (1) DE602004025916D1 (fr)

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DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102010021241A1 (de) * 2010-05-21 2011-11-24 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102011105806A1 (de) * 2011-05-05 2012-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Rotor
JP5919745B2 (ja) * 2011-11-15 2016-05-18 株式会社島津製作所 真空ポンプ
DE102013113400A1 (de) * 2013-12-03 2015-06-03 Pfeiffer Vacuum Gmbh Pumpe und Verfahren zum Wuchten eines Rotors
GB201514001D0 (en) * 2015-08-07 2015-09-23 Edwards Ltd Pumps
EP3135919B1 (fr) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Pompe à vide
US10557471B2 (en) 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
CN114216680A (zh) * 2021-11-05 2022-03-22 上海航天控制技术研究所 高速转子峭度检测故障诊断装置和方法

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Publication number Publication date
US20060018772A1 (en) 2006-01-26
DE602004025916D1 (de) 2010-04-22
JP2006029338A (ja) 2006-02-02
EP1619395A1 (fr) 2006-01-25

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