DE602004025916D1 - Rotationsvakuumpumpe und ihr Auswuchtverfahren - Google Patents

Rotationsvakuumpumpe und ihr Auswuchtverfahren

Info

Publication number
DE602004025916D1
DE602004025916D1 DE602004025916T DE602004025916T DE602004025916D1 DE 602004025916 D1 DE602004025916 D1 DE 602004025916D1 DE 602004025916 T DE602004025916 T DE 602004025916T DE 602004025916 T DE602004025916 T DE 602004025916T DE 602004025916 D1 DE602004025916 D1 DE 602004025916D1
Authority
DE
Germany
Prior art keywords
vacuum pump
balancing method
rotary vacuum
balancing
rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
DE602004025916T
Other languages
German (de)
English (en)
Inventor
Fausto Casaro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian SpA
Original Assignee
Varian SpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Varian SpA filed Critical Varian SpA
Publication of DE602004025916D1 publication Critical patent/DE602004025916D1/de
Anticipated expiration legal-status Critical
Active legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/662—Balancing of rotors

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
DE602004025916T 2004-07-20 2004-07-20 Rotationsvakuumpumpe und ihr Auswuchtverfahren Active DE602004025916D1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP04103445A EP1619395B1 (fr) 2004-07-20 2004-07-20 Pompe à vide rotative et son procédé d'équilibrage

Publications (1)

Publication Number Publication Date
DE602004025916D1 true DE602004025916D1 (de) 2010-04-22

Family

ID=34929350

Family Applications (1)

Application Number Title Priority Date Filing Date
DE602004025916T Active DE602004025916D1 (de) 2004-07-20 2004-07-20 Rotationsvakuumpumpe und ihr Auswuchtverfahren

Country Status (4)

Country Link
US (1) US20060018772A1 (fr)
EP (1) EP1619395B1 (fr)
JP (1) JP2006029338A (fr)
DE (1) DE602004025916D1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102008024764A1 (de) * 2008-05-23 2009-11-26 Oerlikon Leybold Vacuum Gmbh Mehrstufige Vakuumpumpe
DE102010021241A1 (de) * 2010-05-21 2011-11-24 Oerlikon Leybold Vacuum Gmbh Vakuumpumpe
DE102011105806A1 (de) * 2011-05-05 2012-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Rotor
JP5919745B2 (ja) * 2011-11-15 2016-05-18 株式会社島津製作所 真空ポンプ
DE102013113400A1 (de) * 2013-12-03 2015-06-03 Pfeiffer Vacuum Gmbh Pumpe und Verfahren zum Wuchten eines Rotors
GB201514001D0 (en) * 2015-08-07 2015-09-23 Edwards Ltd Pumps
EP3135919B1 (fr) * 2015-08-24 2019-02-20 Pfeiffer Vacuum Gmbh Pompe à vide
US10557471B2 (en) 2017-11-16 2020-02-11 L Dean Stansbury Turbomolecular vacuum pump for ionized matter and plasma fields
CN114216680A (zh) * 2021-11-05 2022-03-22 上海航天控制技术研究所 高速转子峭度检测故障诊断装置和方法

Family Cites Families (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2805677A (en) * 1953-04-23 1957-09-10 Curtiss Wright Corp Detector for misalinement of rotating body
US4114960A (en) * 1973-01-18 1978-09-19 Societe Europeenne De Propulsion Radial displacement detector device for a magnetic bearing
CH583856A5 (fr) * 1974-09-27 1977-01-14 Balzers Patent Beteilig Ag
DE2457783C2 (de) * 1974-12-06 1986-10-09 Arthur Pfeiffer Vakuumtechnik Wetzlar Gmbh, 6334 Asslar Magnetische Lagerung
US4312628A (en) * 1979-05-21 1982-01-26 Cambridge Thermionic Corporation Turbomolecular vacuum pump having virtually zero power magnetic bearing assembly with single axis servo control
DE3039196A1 (de) * 1980-10-17 1982-05-13 Leybold-Heraeus GmbH, 5000 Köln Verfahren zur montage einer einflutigen turbomolekular-vakuumpumpe und nach diesem verfahren montierte turbomolekular-vakuumpumpe
US4546433A (en) * 1981-07-04 1985-10-08 Gec Avionics Limited Arrangement for processing data in a two-dimensional array
JPH0646036B2 (ja) * 1982-11-19 1994-06-15 セイコー電子工業株式会社 軸流分子ポンプ
US4806075A (en) * 1983-10-07 1989-02-21 Sargent-Welch Scientific Co. Turbomolecular pump with improved bearing assembly
FR2570488B1 (fr) * 1984-09-19 1987-01-09 Europ Propulsion Dispositif de detection magnetique des deplacements radiaux d'un rotor
DE3818556A1 (de) * 1988-06-01 1989-12-07 Pfeiffer Vakuumtechnik Magnetlager fuer eine schnell rotierende vakuumpumpe
EP0408791B1 (fr) * 1989-07-20 1994-03-16 Leybold Aktiengesellschaft Pompe à effet visqueux à rotor en forme de cloche
JP2538356B2 (ja) * 1989-11-20 1996-09-25 株式会社神崎高級工機製作所 自走式作業車のトランスミツシヨン装置
US5238362A (en) * 1990-03-09 1993-08-24 Varian Associates, Inc. Turbomolecular pump
JP2681725B2 (ja) * 1992-04-15 1997-11-26 株式会社タンケンシールセーコウ メカニカルシールの挙動監視装置
JP2527398B2 (ja) * 1992-06-05 1996-08-21 財団法人真空科学研究所 タ―ボ分子ポンプ
DE4427154A1 (de) * 1994-08-01 1996-02-08 Balzers Pfeiffer Gmbh Reibungspumpe mit Magnetlagerung
FR2728738B1 (fr) * 1994-12-26 1997-01-31 Cit Alcatel Ensemble tournant comportant notamment des moyens de sustentation radiaux et une butee axiale magnetique
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.
DE19627921A1 (de) * 1996-07-11 1998-01-15 Leybold Vakuum Gmbh Verfahren zum Wuchten eines Rotors sowie für die Durchführung dieses Verfahrens geeigneter Rotor
US6213737B1 (en) * 1997-04-18 2001-04-10 Ebara Corporation Damper device and turbomolecular pump with damper device
US6363815B1 (en) * 1998-04-15 2002-04-02 Kanzaki Kokyukoki Mfg. Co., Ltd. Transmission mechanism of vehicle with HST
ITTO980453A1 (it) * 1998-05-27 1999-11-29 Varian Spa Pompa da vuoto compatta
JP3215842B2 (ja) * 1999-03-29 2001-10-09 セイコーインスツルメンツ株式会社 磁気軸受保護装置及びターボ分子ポンプ
FR2808872B1 (fr) * 2000-05-15 2002-08-16 Cit Alcatel Capteurs inductifs en etoile pour la detection de la position radiale d'un rotor dans un stator
DE10043235A1 (de) * 2000-09-02 2002-03-14 Leybold Vakuum Gmbh Vakuumpumpe
JP2002295398A (ja) * 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法
EP1270803A1 (fr) * 2001-06-19 2003-01-02 A M P H O La Chaux-de-Fonds S.A. Procédé de formation d'un embout à l'extrémité d'un câble et pièce en résultant
JP2003021093A (ja) * 2001-07-05 2003-01-24 Boc Edwards Technologies Ltd 真空ポンプ
JP2003083249A (ja) * 2001-09-17 2003-03-19 Boc Edwards Technologies Ltd 真空ポンプ
JP2003129991A (ja) * 2001-10-24 2003-05-08 Boc Edwards Technologies Ltd 分子ポンプ
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ

Also Published As

Publication number Publication date
US20060018772A1 (en) 2006-01-26
EP1619395B1 (fr) 2010-03-10
JP2006029338A (ja) 2006-02-02
EP1619395A1 (fr) 2006-01-25

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Legal Events

Date Code Title Description
8364 No opposition during term of opposition