DE69840607D1 - Magnetlagervorrichtung und turbomolekularpumpe - Google Patents

Magnetlagervorrichtung und turbomolekularpumpe

Info

Publication number
DE69840607D1
DE69840607D1 DE69840607T DE69840607T DE69840607D1 DE 69840607 D1 DE69840607 D1 DE 69840607D1 DE 69840607 T DE69840607 T DE 69840607T DE 69840607 T DE69840607 T DE 69840607T DE 69840607 D1 DE69840607 D1 DE 69840607D1
Authority
DE
Germany
Prior art keywords
turbomoolecular
pump
bearing device
magnetic bearing
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69840607T
Other languages
English (en)
Inventor
Akiko Taira
Hiroyuki Chino
Toshiharu Nakazawa
Matsutaro Miyamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP34713197A external-priority patent/JP3544843B2/ja
Priority claimed from JP36182097A external-priority patent/JP3165857B2/ja
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of DE69840607D1 publication Critical patent/DE69840607D1/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0444—Details of devices to control the actuation of the electromagnets
    • F16C32/0446—Determination of the actual position of the moving member, e.g. details of sensors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
DE69840607T 1997-12-02 1998-12-02 Magnetlagervorrichtung und turbomolekularpumpe Expired - Lifetime DE69840607D1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP34713197A JP3544843B2 (ja) 1997-12-02 1997-12-02 磁気軸受制御装置
JP36182097A JP3165857B2 (ja) 1997-12-10 1997-12-10 ターボ分子ポンプ装置
PCT/JP1998/005427 WO1999028640A1 (fr) 1997-12-02 1998-12-02 Organe de commande a palier magnetique et dispositif a pompe turbomoleculaire

Publications (1)

Publication Number Publication Date
DE69840607D1 true DE69840607D1 (de) 2009-04-09

Family

ID=26578437

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69840607T Expired - Lifetime DE69840607D1 (de) 1997-12-02 1998-12-02 Magnetlagervorrichtung und turbomolekularpumpe

Country Status (6)

Country Link
US (1) US6398524B1 (de)
EP (1) EP1036951B1 (de)
KR (1) KR100528263B1 (de)
DE (1) DE69840607D1 (de)
TW (1) TW470821B (de)
WO (1) WO1999028640A1 (de)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3215842B2 (ja) 1999-03-29 2001-10-09 セイコーインスツルメンツ株式会社 磁気軸受保護装置及びターボ分子ポンプ
US6589030B2 (en) * 2000-06-20 2003-07-08 Ntn Corporation Magnetically levitated pump apparatus
JP2002276587A (ja) * 2001-03-19 2002-09-25 Boc Edwards Technologies Ltd ターボ分子ポンプ
JP2002295398A (ja) * 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd ターボ分子ポンプの保護装置、及びターボ分子ポンプの保護方法
JP4017383B2 (ja) * 2001-12-04 2007-12-05 Ｂｏｃエドワーズ株式会社 磁気軸受制御装置
US20050186099A1 (en) * 2004-02-19 2005-08-25 Graeme Huntley Active vibration reduction
KR100604894B1 (ko) * 2004-08-21 2006-07-28 삼성전자주식회사 반도체 제조설비의 회전운동장치
DE102005025588B4 (de) * 2005-06-03 2017-12-07 Lust Antriebstechnik Gmbh Anordnung zur Positionsmessung bei einer magnetisch gelagerten Welle
JP5396949B2 (ja) * 2009-03-18 2014-01-22 株式会社島津製作所 ターボ分子ポンプ
EP2631486B1 (de) 2010-10-19 2015-09-23 Edwards Japan Limited Vakuumpumpe
US8212640B1 (en) * 2011-07-26 2012-07-03 Lockheed Martin Corporation Tool having buffered electromagnet drive for depth control
TWI547653B (zh) * 2014-06-06 2016-09-01 致揚科技股份有限公司 磁浮軸承系統及其控制電路
JP7048210B2 (ja) * 2017-01-20 2022-04-05 エドワーズ株式会社 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ
CN109723719B (zh) * 2019-03-04 2020-09-01 青岛大学 一种差动检测式自传感电磁轴承及其实现方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3536418A (en) * 1969-02-13 1970-10-27 Onezime P Breaux Cryogenic turbo-molecular vacuum pump
JPH01224627A (ja) * 1988-03-04 1989-09-07 Mitsubishi Electric Corp 液面計
JP2573995B2 (ja) * 1988-05-11 1997-01-22 神鋼電機株式会社 磁気軸受用の非接触型変位検出装置
DE4114566C2 (de) * 1991-05-04 1999-07-08 Randolf Paul Rolff Verfahren zur Inbetriebnahme einer mit einem magnetgelagerten Rotor ausgerüsteten Maschine sowie Schaltung zur Durchführung dieses Verfahrens
DE4237971B4 (de) * 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vakuumpumpe mit Wandler
JP3458905B2 (ja) * 1993-09-30 2003-10-20 株式会社島津製作所 磁気軸受装置
DE4410903A1 (de) 1994-03-29 1995-10-05 Leybold Ag System mit Vakuumpumpe, Meßgerät sowie Versorgungs-, Steuer-, Bedienungs- und Anzeigeeinrichtungen
EP0865680A1 (de) * 1994-12-12 1998-09-23 Jorge De Armas Elektromagnetisch gekoppelte und schwebende vorrichtung und verfahren für eine rotierende anlage
JP3572117B2 (ja) 1995-06-12 2004-09-29 光洋精工株式会社 磁気軸受装置を含む真空ポンプ
JP3693384B2 (ja) * 1995-06-14 2005-09-07 Ｎｔｎ株式会社 磁気軸受スピンドル装置
JPH09189326A (ja) * 1996-01-10 1997-07-22 Koyo Seiko Co Ltd 磁気軸受装置
JP3591111B2 (ja) * 1996-02-29 2004-11-17 松下電器産業株式会社 磁気軸受制御装置
JPH09242753A (ja) * 1996-03-08 1997-09-16 Ebara Corp 磁気軸受の制御装置
JPH09257035A (ja) * 1996-03-22 1997-09-30 Ebara Corp 磁気軸受の制御装置
US6348749B1 (en) * 1997-04-14 2002-02-19 Koyo Seiko Co., Ltd. Magnetic bearing device and method of starting the device
US6123522A (en) * 1997-07-22 2000-09-26 Koyo Seiko Co., Ltd. Turbo molecular pump
US6201329B1 (en) * 1997-10-27 2001-03-13 Mohawk Innovative Technology, Inc. Pump having magnetic bearing for pumping blood and the like
US6191513B1 (en) * 1997-10-27 2001-02-20 Mohawk Innovative Technology, Inc. Stator-controlled magnetic bearing
US6078119A (en) * 1997-11-26 2000-06-20 Ebara Corporation Bearingless rotary machine
US5928131A (en) * 1997-11-26 1999-07-27 Vascor, Inc. Magnetically suspended fluid pump and control system
US6020665A (en) * 1998-02-25 2000-02-01 Electric Boat Corporation Permanent magnet synchronous machine with integrated magnetic bearings
US6215218B1 (en) * 1998-04-09 2001-04-10 Koyo Seiko Co., Ltd. Control magnetic bearing

Also Published As

Publication number Publication date
EP1036951B1 (de) 2009-02-25
WO1999028640A1 (fr) 1999-06-10
TW470821B (en) 2002-01-01
US6398524B1 (en) 2002-06-04
KR100528263B1 (ko) 2005-11-15
EP1036951A1 (de) 2000-09-20
KR20010032628A (ko) 2001-04-25
EP1036951A4 (de) 2005-03-30

Similar Documents

Publication Publication Date Title
DE59910725D1 (de) Magnetische Lagervorrichtung
DE59710092D1 (de) Zentrifugalpumpe und Zentrifugalpumpenanordnung
DE59712591D1 (de) Magnetgelagerte Rotationsanordnung
DE60022715D1 (de) Magnetlager und vakuumpumpe
DE69825386D1 (de) Permanentmagnetrotor und Kühlungsvorrichtung
DE69828963D1 (de) Wirstoffabgabe und gentherapiesystem
BR9711781A (pt) Mancal
DE69416885T2 (de) Magnetlagervorrichtung
DE59812245D1 (de) Pump- und dosiervorrichtung
DE59712899D1 (de) Magnetgelagerte Rotationsanordnung
DE69833067D1 (de) Dämpfungsvorrichtung und Turbomolekularpumpe mit Dämpfungsvorrichtung
DE69932782D1 (de) Lagervorrichtung
DE60039547D1 (de) Bestückungsverfahren und Bestückungsvorrichtung
DE59911659D1 (de) Magnetlager und dessen anwendung
DE69836329D1 (de) Schneller und hochverstärkender operationsverstärker
DE69840607D1 (de) Magnetlagervorrichtung und turbomolekularpumpe
DE959898T1 (de) Laktoferrin varianten und verwendungen davon
DE69427171D1 (de) Magnetische Lagervorrichtung
DE69721146D1 (de) Lagervorrichtung
DE69505746T2 (de) Magnetlager
DE69515967D1 (de) Magnetlagervorrichtung
DE29621186U1 (de) Lagergehäuse
DE69919954D1 (de) Rotorbaugruppe und Haltevorrichtung dafür
DE69842206D1 (de) Echounterdrücker und echounterdrückungsverfahren
DE29713978U1 (de) Ortungs- und Auffindungsgerät

Legal Events

Date Code Title Description
8364 No opposition during term of opposition