JP7048210B2 - 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ - Google Patents
真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ Download PDFInfo
- Publication number
- JP7048210B2 JP7048210B2 JP2017008275A JP2017008275A JP7048210B2 JP 7048210 B2 JP7048210 B2 JP 7048210B2 JP 2017008275 A JP2017008275 A JP 2017008275A JP 2017008275 A JP2017008275 A JP 2017008275A JP 7048210 B2 JP7048210 B2 JP 7048210B2
- Authority
- JP
- Japan
- Prior art keywords
- control unit
- housing
- spacer
- vacuum pump
- body unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B17/00—Pumps characterised by combination with, or adaptation to, specific driving engines or motors
- F04B17/03—Pumps characterised by combination with, or adaptation to, specific driving engines or motors driven by electric motors
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
- F04B37/16—Means for nullifying unswept space
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B49/00—Control, e.g. of pump delivery, or pump pressure of, or safety measures for, machines, pumps, or pumping installations, not otherwise provided for, or of interest apart from, groups F04B1/00 - F04B47/00
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/068—Mechanical details of the pump control unit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/601—Mounting; Assembling; Disassembling specially adapted for elastic fluid pumps
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K5/00—Casings, cabinets or drawers for electric apparatus
- H05K5/02—Details
- H05K5/0204—Mounting supporting structures on the outside of casings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B2203/00—Motor parameters
- F04B2203/02—Motor parameters of rotating electric motors
- F04B2203/0208—Power
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/60—Mounting; Assembling; Disassembling
- F04D29/64—Mounting; Assembling; Disassembling of axial pumps
- F04D29/644—Mounting; Assembling; Disassembling of axial pumps especially adapted for elastic fluid pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
Description
11 ポンプ本体ユニット
12 制御ユニット
13 スペーサ
13a 下端突出部
13b 取り付けネジ穴
14 筐体(ケーシング)
15 ベース
16 ポンプ本体ユニットの筐体
17 吸気口
18 フランジ部
19 排気口
20 ボルト
21 取付孔
22 筐体
22a 蓋板
22b 位置決め穴
22c ネジ穴
22d 脚部
23 側面部
24 底面部
24a ボス部
25 回路基板
26 空間
27 凹部
27a 底面
27b 位置決め穴
27c ネジ穴
28 スペーサ固定用ボルト
50 真空ポンプ装置
51 ポンプ本体ユニット
52 制御ユニット
53 スペーサ
55 ベース
56 筐体(ケーシング)
62 筐体
63 側面部
64 天面部
65 回路基板
65a、65b 貫通孔
66 空間
68 蓋板
68a 貫通孔
68b ボス部
69 脚部
Claims (7)
- ポンプ本体ユニットと前記ポンプ本体ユニットの駆動を制御する制御ユニットを一体化した真空ポンプ装置において、
前記ポンプ本体ユニットの筐体と、
前記制御ユニットの筐体と、
前記制御ユニットの前記筐体に配設され、前記制御ユニットの前記筐体に加わる荷重を支えるスペーサと、
を備え、
前記制御ユニットの前記筐体は、前記制御ユニットの前記筐体の側面部に、外側から内側に向かって形成された凹部を備え、
前記ポンプ本体ユニットの下面は、前記制御ユニットの上面との間に所定の隙間が形成されるように前記スペーサの上面に載置され、
前記スペーサは、前記制御ユニットの前記筐体の前記凹部の底面で支持されている、ことを特徴とする真空ポンプ装置。 - 前記スペーサは、複数本設けられているとともに、前記制御ユニットの前記筐体に所定間隔をあけて立設してなる、ことを特徴とする請求項1に記載の真空ポンプ装置。
- 前記スペーサは、前記制御ユニットの前記筐体側方に配置される、ことを特徴とする請求項1又は2に記載の真空ポンプ装置。
- 前記制御ユニットの前記筐体の下面に、前記スペーサに対応して床面上に接地可能な脚部を設けている、ことを特徴とする請求項1から3のいずれか1項に記載の真空ポンプ装置。
- 請求項1~4のいずれか1項に記載の真空ポンプ装置に用いられることを特徴とするポンプ本体ユニット。
- 請求項1~4のいずれか1項に記載の真空ポンプ装置に用いられることを特徴とする制御ユニット。
- 請求項1~4のいずれか1項に記載の真空ポンプ装置に用いられることを特徴とするスペーサ。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017008275A JP7048210B2 (ja) | 2017-01-20 | 2017-01-20 | 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ |
CN201880006064.9A CN110139985B (zh) | 2017-01-20 | 2018-01-12 | 真空泵装置、及用于该真空泵装置的泵主体单元、控制单元、以及间隔件 |
US16/477,745 US11408429B2 (en) | 2017-01-20 | 2018-01-12 | Vacuum pump apparatus, and pump main body unit, control unit, and spacer each for use in vacuum pump apparatus |
KR1020197019441A KR102440090B1 (ko) | 2017-01-20 | 2018-01-12 | 진공 펌프 장치, 및 그 진공 펌프 장치에 이용되는 펌프 본체 유닛, 제어 유닛, 및 스페이서 |
EP18741548.4A EP3572667B1 (en) | 2017-01-20 | 2018-01-12 | Vacuum pump device, and pump main body unit, control unit and spacer used in vacuum pump device |
PCT/JP2018/000698 WO2018135412A1 (ja) | 2017-01-20 | 2018-01-12 | 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017008275A JP7048210B2 (ja) | 2017-01-20 | 2017-01-20 | 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018115631A JP2018115631A (ja) | 2018-07-26 |
JP7048210B2 true JP7048210B2 (ja) | 2022-04-05 |
Family
ID=62908403
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017008275A Active JP7048210B2 (ja) | 2017-01-20 | 2017-01-20 | 真空ポンプ装置、及び該真空ポンプ装置に用いられるポンプ本体ユニット、制御ユニット、並びにスペーサ |
Country Status (6)
Country | Link |
---|---|
US (1) | US11408429B2 (ja) |
EP (1) | EP3572667B1 (ja) |
JP (1) | JP7048210B2 (ja) |
KR (1) | KR102440090B1 (ja) |
CN (1) | CN110139985B (ja) |
WO (1) | WO2018135412A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111486080A (zh) * | 2019-01-28 | 2020-08-04 | 安徽美芝制冷设备有限公司 | 支撑底板、压缩机承载组件与制冷设备 |
JP7244328B2 (ja) | 2019-03-28 | 2023-03-22 | エドワーズ株式会社 | 真空ポンプ及び該真空ポンプの制御装置 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000183552A (ja) | 1998-12-11 | 2000-06-30 | Canon Inc | 筐体とその製造方法及び筐体を用いた機器 |
JP3165857B2 (ja) | 1997-12-10 | 2001-05-14 | 株式会社荏原製作所 | ターボ分子ポンプ装置 |
JP5952191B2 (ja) | 2010-10-07 | 2016-07-13 | エドワーズ株式会社 | 真空ポンプ制御装置及び真空ポンプ |
JP6246898B2 (ja) | 2013-04-11 | 2017-12-13 | フェデラル−モーグル・フリートベルク・ゲーエムベーハー | 属性を周期的に変化させたピストンリング |
Family Cites Families (9)
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JPS6246898A (ja) | 1985-08-20 | 1987-02-28 | 株式会社神戸製鋼所 | ホイ−ル式クレ−ンにおける補助ジブの格納装置 |
JPS6246898U (ja) * | 1985-09-12 | 1987-03-23 | ||
TW470821B (en) | 1997-12-02 | 2002-01-01 | Ebara Corp | Magnetic bearing controlling device and turbo pump |
JP4126212B2 (ja) * | 2001-11-19 | 2008-07-30 | エドワーズ株式会社 | 真空ポンプ |
WO2008096622A1 (ja) * | 2007-02-06 | 2008-08-14 | Edwards Japan Limited | 真空ポンプ |
JP6261246B2 (ja) * | 2013-09-18 | 2018-01-17 | 日本電産サンキョー株式会社 | ダンパー装置 |
JP6449551B2 (ja) * | 2014-03-12 | 2019-01-09 | エドワーズ株式会社 | 真空ポンプの制御装置とこれを備えた真空ポンプ |
CN204554276U (zh) | 2015-01-16 | 2015-08-12 | 河北天正新能源科技股份有限公司 | 一种能源塔用固定支架 |
JP6884553B2 (ja) * | 2016-11-04 | 2021-06-09 | エドワーズ株式会社 | 真空ポンプ制御装置及び真空ポンプ、並びに真空ポンプ制御装置の組立方法 |
-
2017
- 2017-01-20 JP JP2017008275A patent/JP7048210B2/ja active Active
-
2018
- 2018-01-12 CN CN201880006064.9A patent/CN110139985B/zh active Active
- 2018-01-12 KR KR1020197019441A patent/KR102440090B1/ko active IP Right Grant
- 2018-01-12 WO PCT/JP2018/000698 patent/WO2018135412A1/ja unknown
- 2018-01-12 US US16/477,745 patent/US11408429B2/en active Active
- 2018-01-12 EP EP18741548.4A patent/EP3572667B1/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3165857B2 (ja) | 1997-12-10 | 2001-05-14 | 株式会社荏原製作所 | ターボ分子ポンプ装置 |
JP2000183552A (ja) | 1998-12-11 | 2000-06-30 | Canon Inc | 筐体とその製造方法及び筐体を用いた機器 |
JP5952191B2 (ja) | 2010-10-07 | 2016-07-13 | エドワーズ株式会社 | 真空ポンプ制御装置及び真空ポンプ |
JP6246898B2 (ja) | 2013-04-11 | 2017-12-13 | フェデラル−モーグル・フリートベルク・ゲーエムベーハー | 属性を周期的に変化させたピストンリング |
Also Published As
Publication number | Publication date |
---|---|
US11408429B2 (en) | 2022-08-09 |
WO2018135412A1 (ja) | 2018-07-26 |
KR102440090B1 (ko) | 2022-09-05 |
JP2018115631A (ja) | 2018-07-26 |
EP3572667A1 (en) | 2019-11-27 |
EP3572667A4 (en) | 2020-07-08 |
US20200124043A1 (en) | 2020-04-23 |
EP3572667B1 (en) | 2024-03-13 |
CN110139985B (zh) | 2021-10-29 |
KR20190105579A (ko) | 2019-09-17 |
CN110139985A (zh) | 2019-08-16 |
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