JP5396949B2 - ターボ分子ポンプ - Google Patents
ターボ分子ポンプ Download PDFInfo
- Publication number
- JP5396949B2 JP5396949B2 JP2009065807A JP2009065807A JP5396949B2 JP 5396949 B2 JP5396949 B2 JP 5396949B2 JP 2009065807 A JP2009065807 A JP 2009065807A JP 2009065807 A JP2009065807 A JP 2009065807A JP 5396949 B2 JP5396949 B2 JP 5396949B2
- Authority
- JP
- Japan
- Prior art keywords
- molecular pump
- turbo molecular
- control device
- main body
- cooling mechanism
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001816 cooling Methods 0.000 claims description 84
- 230000007246 mechanism Effects 0.000 claims description 59
- 239000002184 metal Substances 0.000 claims description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000005284 excitation Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 1
- 238000005266 casting Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005339 levitation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
- F04D29/584—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps cooling or heating the machine
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D25/00—Pumping installations or systems
- F04D25/02—Units comprising pumps and their driving means
- F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
- F04D25/068—Mechanical details of the pump control unit
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/5813—Cooling the control unit
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
2 金属板
3 水冷管
21 ターボ分子ポンプ本体
22 制御装置
23 冷却必要部品
24 冷却機構
26 制御装置のケースの上面板
27 冷却機構の下面板
28 締結構造
31 ロータ
32 磁気軸受
33 モータ
34 モータ制御部
35 軸受制御部
36 ステータ
37 回転軸
38 ラジアル軸受電磁石
39 スラスト軸受電磁石
40 ラジアル位置センサ
41 スラスト位置センサ
42 ロータディスク
43 排気口
Claims (3)
- ターボ分子ポンプ本体と前記ターボ分子ポンプ本体を制御する制御装置が一体となったターボ分子ポンプ装置において、
前記制御装置のケースの一面である前記ターボ分子ポンプ本体との接触面が、前記ターボ分子ポンプ本体及び前記制御装置を冷却する冷却機構であり、
前記冷却機構が、金属板の中に水冷管が埋め込まれた水冷板、又は、金属板の中に油冷管が埋め込まれた油冷板であることを特徴とするターボ分子ポンプ装置。 - 前記制御装置における冷却必要部品を、前記冷却機構の制御装置側の面上に設置したことを特徴とする請求項1に記載されたターボ分子ポンプ装置。
- 前記制御装置と前記冷却機構をボルトで締結したことを特徴とする、請求項1または2に記載のターボ分子ポンプ装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009065807A JP5396949B2 (ja) | 2009-03-18 | 2009-03-18 | ターボ分子ポンプ |
US12/726,430 US8613604B2 (en) | 2009-03-18 | 2010-03-18 | Turbomolecular pump |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009065807A JP5396949B2 (ja) | 2009-03-18 | 2009-03-18 | ターボ分子ポンプ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2010216413A JP2010216413A (ja) | 2010-09-30 |
JP5396949B2 true JP5396949B2 (ja) | 2014-01-22 |
Family
ID=42784478
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009065807A Active JP5396949B2 (ja) | 2009-03-18 | 2009-03-18 | ターボ分子ポンプ |
Country Status (2)
Country | Link |
---|---|
US (1) | US8613604B2 (ja) |
JP (1) | JP5396949B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5104334B2 (ja) * | 2008-01-22 | 2012-12-19 | 株式会社島津製作所 | 真空ポンプ |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
RU2166132C2 (ru) | 1995-12-28 | 2001-04-27 | Эбара Корпорейшн | Насосный агрегат |
JPH10238491A (ja) * | 1997-02-26 | 1998-09-08 | Nikkiso Co Ltd | キャンドモータポンプ |
US6286451B1 (en) * | 1997-05-29 | 2001-09-11 | Applied Materials, Inc. | Dome: shape and temperature controlled surfaces |
TW470821B (en) * | 1997-12-02 | 2002-01-01 | Ebara Corp | Magnetic bearing controlling device and turbo pump |
JP3165857B2 (ja) * | 1997-12-10 | 2001-05-14 | 株式会社荏原製作所 | ターボ分子ポンプ装置 |
US20010045262A1 (en) * | 2000-02-28 | 2001-11-29 | Applied Materials, Inc. | Chemical vapor deposition chamber |
US6800173B2 (en) * | 2000-12-15 | 2004-10-05 | Novellus Systems, Inc. | Variable gas conductance control for a process chamber |
-
2009
- 2009-03-18 JP JP2009065807A patent/JP5396949B2/ja active Active
-
2010
- 2010-03-18 US US12/726,430 patent/US8613604B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20100247336A1 (en) | 2010-09-30 |
JP2010216413A (ja) | 2010-09-30 |
US8613604B2 (en) | 2013-12-24 |
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