JP4655332B2 - 露光装置、露光装置の調整方法、およびマイクロデバイスの製造方法 - Google Patents

露光装置、露光装置の調整方法、およびマイクロデバイスの製造方法 Download PDF

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Publication number
JP4655332B2
JP4655332B2 JP2000157038A JP2000157038A JP4655332B2 JP 4655332 B2 JP4655332 B2 JP 4655332B2 JP 2000157038 A JP2000157038 A JP 2000157038A JP 2000157038 A JP2000157038 A JP 2000157038A JP 4655332 B2 JP4655332 B2 JP 4655332B2
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Japan
Prior art keywords
projection optical
exposure apparatus
information
image plane
optical module
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Expired - Lifetime
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JP2000157038A
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Japanese (ja)
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JP2001337463A (ja
JP2001337463A5 (enExample
Inventor
仁志 畑田
正紀 加藤
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Nikon Corp
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Nikon Corp
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Priority to JP2000157038A priority Critical patent/JP4655332B2/ja
Priority to TW090112212A priority patent/TW520526B/zh
Priority to KR1020010028014A priority patent/KR100827874B1/ko
Priority to US09/861,698 priority patent/US6811953B2/en
Publication of JP2001337463A publication Critical patent/JP2001337463A/ja
Publication of JP2001337463A5 publication Critical patent/JP2001337463A5/ja
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  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2000157038A 2000-05-22 2000-05-26 露光装置、露光装置の調整方法、およびマイクロデバイスの製造方法 Expired - Lifetime JP4655332B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000157038A JP4655332B2 (ja) 2000-05-26 2000-05-26 露光装置、露光装置の調整方法、およびマイクロデバイスの製造方法
TW090112212A TW520526B (en) 2000-05-22 2001-05-22 Exposure apparatus, method for manufacturing thereof, method for exposing and method for manufacturing micro-device
KR1020010028014A KR100827874B1 (ko) 2000-05-22 2001-05-22 노광 장치, 노광 장치의 제조 방법, 노광 방법, 마이크로 장치의 제조 방법, 및 디바이스의 제조 방법
US09/861,698 US6811953B2 (en) 2000-05-22 2001-05-22 Exposure apparatus, method for manufacturing therof, method for exposing and method for manufacturing microdevice

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000157038A JP4655332B2 (ja) 2000-05-26 2000-05-26 露光装置、露光装置の調整方法、およびマイクロデバイスの製造方法

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JP2001337463A JP2001337463A (ja) 2001-12-07
JP2001337463A5 JP2001337463A5 (enExample) 2008-02-28
JP4655332B2 true JP4655332B2 (ja) 2011-03-23

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Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4548969B2 (ja) * 2001-04-20 2010-09-22 パナソニック株式会社 露光装置、及び露光方法
JP4051278B2 (ja) * 2001-12-26 2008-02-20 株式会社オーク製作所 投影露光装置
JP4051204B2 (ja) * 2002-01-11 2008-02-20 株式会社オーク製作所 投影露光装置
JP4496711B2 (ja) * 2003-03-31 2010-07-07 株式会社ニコン 露光装置及び露光方法
JP5143331B2 (ja) * 2003-05-28 2013-02-13 株式会社ニコン 露光方法及び露光装置、並びにデバイス製造方法
EP2453465A3 (en) 2003-05-28 2018-01-03 Nikon Corporation Exposure method, exposure apparatus, and method for producing a device
JP2004354909A (ja) * 2003-05-30 2004-12-16 Orc Mfg Co Ltd 投影露光装置および投影露光方法
JP2005345582A (ja) * 2004-06-01 2005-12-15 Dainippon Screen Mfg Co Ltd 投影光学系およびパターン描画装置
JP4583827B2 (ja) * 2004-07-21 2010-11-17 富士フイルム株式会社 画像形成装置および画像形成方法
JPWO2007055199A1 (ja) * 2005-11-09 2009-04-30 株式会社ニコン 露光装置及び方法、並びにデバイス製造方法
JP2008166650A (ja) * 2007-01-05 2008-07-17 Nikon Corp 走査型露光装置、デバイスの製造方法及びマスク
JP2008185908A (ja) * 2007-01-31 2008-08-14 Nikon Corp マスクの製造方法、露光方法、露光装置、および電子デバイスの製造方法
KR20160084539A (ko) 2015-01-05 2016-07-14 (주)그린광학 Ghi라인 차단용 반사 필터

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06302494A (ja) * 1993-04-14 1994-10-28 Canon Inc 投影露光装置及びそれを用いた半導体素子の製造方法
JP3526042B2 (ja) * 1995-08-09 2004-05-10 株式会社ニコン 投影露光装置
JP3521416B2 (ja) * 1995-10-06 2004-04-19 株式会社ニコン 投影露光装置
JP3991241B2 (ja) * 1997-04-07 2007-10-17 株式会社ニコン 面位置調整装置及びその方法並びに露光装置及びその方法
JP4029130B2 (ja) * 1997-06-03 2008-01-09 株式会社ニコン 露光装置及び露光方法

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