JP4598421B2 - Ono構造上に酸化物を形成するための方法 - Google Patents
Ono構造上に酸化物を形成するための方法 Download PDFInfo
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- JP4598421B2 JP4598421B2 JP2004079012A JP2004079012A JP4598421B2 JP 4598421 B2 JP4598421 B2 JP 4598421B2 JP 2004079012 A JP2004079012 A JP 2004079012A JP 2004079012 A JP2004079012 A JP 2004079012A JP 4598421 B2 JP4598421 B2 JP 4598421B2
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- 238000000034 method Methods 0.000 title claims description 94
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 73
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 73
- 230000008569 process Effects 0.000 claims description 65
- 239000000758 substrate Substances 0.000 claims description 65
- 239000001301 oxygen Substances 0.000 claims description 32
- 229910052760 oxygen Inorganic materials 0.000 claims description 32
- 230000003647 oxidation Effects 0.000 claims description 23
- 238000007254 oxidation reaction Methods 0.000 claims description 23
- 239000007789 gas Substances 0.000 claims description 15
- 239000000203 mixture Substances 0.000 claims description 15
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 14
- 239000001257 hydrogen Substances 0.000 claims description 14
- 229910052739 hydrogen Inorganic materials 0.000 claims description 14
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 13
- 239000012159 carrier gas Substances 0.000 claims description 8
- 239000007800 oxidant agent Substances 0.000 claims description 5
- 238000000059 patterning Methods 0.000 claims description 5
- 230000001590 oxidative effect Effects 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 14
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 40
- 229910052814 silicon oxide Inorganic materials 0.000 description 31
- 239000010408 film Substances 0.000 description 30
- 230000015572 biosynthetic process Effects 0.000 description 23
- 235000012431 wafers Nutrition 0.000 description 20
- 238000010586 diagram Methods 0.000 description 17
- 150000004767 nitrides Chemical class 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 11
- 229910052710 silicon Inorganic materials 0.000 description 11
- 239000010703 silicon Substances 0.000 description 11
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 10
- 229920005591 polysilicon Polymers 0.000 description 10
- 238000009792 diffusion process Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 238000009279 wet oxidation reaction Methods 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 6
- 238000002955 isolation Methods 0.000 description 6
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 description 4
- 238000000137 annealing Methods 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 4
- 238000002513 implantation Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 238000004151 rapid thermal annealing Methods 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000003776 cleavage reaction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 229910001882 dioxygen Inorganic materials 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 238000011065 in-situ storage Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000007017 scission Effects 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 238000004774 atomic orbital Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000004776 molecular orbital Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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Description
本実施例において、パターン化されたSi表面及びSiN表面をウエア基板上に形成し、ウエハをISSG(in situ steam generation)炉内に置いた。ウエハをISSGチャンバ中で約950℃まで加熱し、キャリアガスとしてのN2中で、2slmのH2及び8slmのO2に約300秒間暴露し、Si上に約158Åの厚さの酸化物を形成し、SiN上に約128Åの厚さの酸化物を形成した。
本実施例において、ISSGプロセスを用いて、窒化ケイ素上の酸化物成長速度の実測値を、反応式から誘導される理論速度と比較する。
本実施例において、ISSGプロセスを用いて、850℃、900℃及び950℃の3種類の温度で、(DCS)窒化ケイ素上での酸化物成長速度を、シリコン基板上での酸化物成長速度と比較した。各温度でのウエハを、(H2/H2+O2)約33%(6slmのH2及び12slmのO2)の比率で流される水素及び酸素に暴露した。そして、酸化物の厚みを約30秒、60秒、90秒、及び120秒の時間間隔で測定した。
本実施例において、ISSGプロセスを用いて、(DCS)窒化ケイ素上の酸化物成長速度を、約25%及び約33%の2種類の異なる水素及び酸素比率(H2/H2+O2)、850℃、900℃、及び950℃の3種類の温度で比較し、酸化物の厚みを約30秒、60秒、90秒、及び120秒の時間間隔で測定した。窒化ケイ素膜を、XT(ランプ型)シングルウエハチャンバを用いて調製した。一般的に、高い加工温度で成長して得られた酸化物は、各時間間隔でさらに厚く、すなわち、酸化物形成速度は、温度が高いほど大きかった。明らかに、酸素ラジカルの運動エネルギーが増加することにより、活性化障壁をさらに容易に超えることが可能である。また、各々の加工温度で、酸化物形成速度は、H2/H2+O2比が大きいほど大きかった。すなわち、所与の加工温度について、特定の酸化物の厚みに到達するための加工時間は、水素濃度が高いほど短い。明らかに、水素濃度が高くなるほど、分子状酸素の反応性酸素ラジカルへの開裂が促進され、反応に利用可能な酸素ラジカルが多くなる。
本実施例において、酸化物を、種々の方法によって形成した窒化物上に、850℃及び950℃でISSGによって成長させた。上記の窒化物は、DCSベースの窒化物(XTランプ型チャンバ)、(XTランプ型)シングルウエハチャンバによって成長させたシランベースの窒化物、及びSiNGenシングルウエハチャンバシステムによって成長させたシランベースの窒化物を含む。予想されるように、トップ酸化物の成長速度は、温度が高いほど大きかった。2種類の温度それぞれについて、成長速度は、3種類の膜タイプ全てで実質的に同じであった。
Claims (22)
- ONO構造を形成するための方法であって、
酸窒化物膜を基板表面上に提供する工程であって、前記酸窒化物膜が前記基板上の第1酸化被膜及び前記第1酸化被膜上の窒化ケイ素層を含む、工程と、
前記基板上のONOスタックの前記第1酸化被膜と窒化ケイ素層をパターン化してボトム酸化物及び窒化ケイ素部分を規定するために前記酸窒化物膜をパターン化する工程であって、前記ボトム酸化物部分の側壁が露出し、かつ前記窒化ケイ素部分の側壁と表面が露出する、工程と、
前記露出した側壁及び前記露出した表面を、ラジカル酸化剤を含む雰囲気中で急速熱酸化に暴露し、前記露出した表面上及び前記パターン化された窒化ケイ素部分の側壁上及び前記パターン化されたボトム酸化物部分の側壁上に、酸化被膜を形成する工程とを含む方法。 - 前記ラジカル酸化剤は、酸素ラジカルを含む、請求項1に記載の方法。
- 前記ラジカル酸化剤はO・を含む、請求項1に記載の方法。
- 前記暴露する工程は、前記基板を選択された温度まで加熱する工程と、前記露出した側壁及び前記露出した表面を、選択された圧力で選択された時間、酸素を含有するガス及び水素を含有するガスの混合物に選択された比率で暴露する工程とを含み、ここで、前記酸素を含有するガス及び前記水素を含有するガスの成分が反応して、前記加熱された基板の近くで前記ラジカル酸化剤を生成する、請求項1に記載の方法。
- 前記基板を加熱する工程は、前記基板を700℃〜1300℃の範囲の温度まで加熱する工程を含む、請求項4に記載の方法。
- 前記基板を加熱する工程は、前記基板を900℃〜1150℃の範囲の温度まで加熱する工程を含む、請求項4に記載の方法。
- 前記基板を加熱する工程は、前記基板を850℃〜1000℃の範囲の温度まで加熱する工程を含む、請求項4に記載の方法。
- 前記暴露する工程は、前記基板を選択された温度まで加熱する工程と、前記露出した側壁及び前記露出した表面を、選択された圧力で選択された時間、O2及びH2の混合物に選択された比率で暴露する工程を含み、ここで、前記O2及びH2の成分が反応して、前記加熱された基板の近くでO・を生成する、請求項1に記載の方法。
- 前記暴露する工程は前記基板を700℃〜1300℃の範囲の温度まで加熱する工程、前記露出した側壁及び前記露出した表面を、1torr〜20torrの範囲の圧力で、1〜1000秒の範囲の時間、O2及びH2の混合物に0.1%〜40%(H2/H2+O2)の範囲の比率で暴露する工程を含む、請求項8に記載の方法。
- 前記加熱する工程は、前記基板を900℃〜1150℃の範囲の温度まで加熱する工程を含む、請求項9に記載の方法。
- 前記基板を加熱する工程は、前記基板を850℃〜1000℃の範囲の温度まで加熱する工程を含む、請求項9に記載の方法。
- 前記暴露する工程は、前記加熱された基板の上を、O2及びH2の混合物を5%〜33%(H2/H2+O2)の比率で流す工程を含む、請求項9に記載の方法。
- 前記暴露する工程は、前記加熱された基板の上を、O2及びH2の混合物を1:19〜1:2(H2:O2)の範囲の比率で流す工程を含む、請求項9に記載の方法。
- 前記暴露する工程は、O2及びH2の前記混合物を、前記加熱された基板の上を10秒〜500秒の範囲の時間流す工程を含む、請求項9に記載の方法。
- 前記暴露する工程は、O2及びH2の前記混合物を、前記加熱された基板の上を30秒〜300秒の範囲の時間流す工程を含む、請求項9に記載の方法。
- 前記暴露する工程は、前記基板を炉中で加熱する工程と、前記炉内にO2及びH2の混合物を、選択された圧力及び選択された時間で、選択された比率で流す工程とを含み、ここで、前記O2及びH2の成分が反応して、前記加熱された基板の近くでO・を生成する、請求項1に記載の方法。
- O2及びH2の前記混合物を流す工程は、キャリアガスを流す工程をさらに含む、請求項16に記載の方法。
- O2及びH2の前記混合物を流す工程は、キャリアガスとしてN2を流す工程をさらに含
む、請求項17に記載の方法。 - O2及びH2の前記混合物を選択された比率で流す工程は、選択された比率の流速で前記O2及びH2を流す工程を含む、請求項16に記載の方法。
- O2及びH2の前記混合物を流す工程は、選択された流速でキャリアガスとしてN2を流
す工程をさらに含む、請求項19に記載の方法。 - O2及びH2を流す工程は、1〜40slmの範囲の混合された流速でO2及びH2を
流す工程を含む、請求項19に記載の方法。 - 前記O2及びH2を流す工程は、1〜40slmの範囲の混合された流速でO2及び
H2を流す工程を含み、N2を流す工程は、50slmまでの流速でN2を流す工程を含
む、請求項20に記載の方法。
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US20070117353A1 (en) | 2007-05-24 |
US20050110102A1 (en) | 2005-05-26 |
JP2005159266A (ja) | 2005-06-16 |
US7183166B2 (en) | 2007-02-27 |
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