JP4584961B2 - ボールを用いた接触式プローブ - Google Patents

ボールを用いた接触式プローブ Download PDF

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Publication number
JP4584961B2
JP4584961B2 JP2007189592A JP2007189592A JP4584961B2 JP 4584961 B2 JP4584961 B2 JP 4584961B2 JP 2007189592 A JP2007189592 A JP 2007189592A JP 2007189592 A JP2007189592 A JP 2007189592A JP 4584961 B2 JP4584961 B2 JP 4584961B2
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JP
Japan
Prior art keywords
ball
steel ball
steel
support member
contact probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2007189592A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008039774A (ja
Inventor
エウン タク
イン パーク ジョン
Original Assignee
マイクロインスペクション，インコーポレイテッド
エルジー イノテック カンパニー，リミテッド
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by マイクロインスペクション，インコーポレイテッド, エルジー イノテック カンパニー，リミテッド filed Critical マイクロインスペクション，インコーポレイテッド
Publication of JP2008039774A publication Critical patent/JP2008039774A/ja
Application granted granted Critical
Publication of JP4584961B2 publication Critical patent/JP4584961B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/06711—Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins
    • G01R1/06733—Geometry aspects
    • G01R1/06738—Geometry aspects related to tip portion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2801—Testing of printed circuits, backplanes, motherboards, hybrid circuits or carriers for multichip packages [MCP]

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Engineering & Computer Science (AREA)
  • Geometry (AREA)
  • Measuring Leads Or Probes (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
JP2007189592A 2006-08-03 2007-07-20 ボールを用いた接触式プローブ Active JP4584961B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020060073520A KR100752938B1 (ko) 2006-08-03 2006-08-03 볼을 이용한 접촉식 프로브

Publications (2)

Publication Number Publication Date
JP2008039774A JP2008039774A (ja) 2008-02-21
JP4584961B2 true JP4584961B2 (ja) 2010-11-24

Family

ID=38615639

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007189592A Active JP4584961B2 (ja) 2006-08-03 2007-07-20 ボールを用いた接触式プローブ

Country Status (4)

Country Link
JP (1) JP4584961B2 (zh)
KR (1) KR100752938B1 (zh)
CN (1) CN101118271B (zh)
TW (1) TW200811452A (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101233070B1 (ko) * 2011-09-30 2013-02-25 마이크로 인스펙션 주식회사 비접촉 프로브
CN109668663B (zh) * 2018-12-14 2021-02-05 河南科技大学 微型轴承摩擦力矩测试装置及测试方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000180504A (ja) * 1998-12-11 2000-06-30 Nec Kyushu Ltd コンタクタ
JP2001033483A (ja) * 1999-07-19 2001-02-09 Toshiba Corp プロービング試験装置
JP2003151710A (ja) * 2001-11-12 2003-05-23 Advantest Corp Ｉｃソケット
JP2004045109A (ja) * 2002-07-10 2004-02-12 Ricoh Co Ltd 薄膜の電気抵抗測定方法と測定装置及び定着ローラの検査装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5814170U (ja) * 1981-07-20 1983-01-28 株式会社ミツトヨ タツチ信号プロ−ブ
JPH02278161A (ja) * 1989-04-19 1990-11-14 Fujitsu Ltd 測定用接触針
NL8902695A (nl) * 1989-11-01 1991-06-03 Philips Nv Interconnectiestructuur.
JP2820233B2 (ja) * 1993-06-11 1998-11-05 シャープ株式会社 表示装置の検査装置および検査方法
KR100350513B1 (ko) * 2000-04-03 2002-08-28 박태욱 피디피 전극 검사 프로브장치
JP2005055343A (ja) * 2003-08-06 2005-03-03 Tokyo Cathode Laboratory Co Ltd フラットパネルディスプレイ検査用プローブ装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000180504A (ja) * 1998-12-11 2000-06-30 Nec Kyushu Ltd コンタクタ
JP2001033483A (ja) * 1999-07-19 2001-02-09 Toshiba Corp プロービング試験装置
JP2003151710A (ja) * 2001-11-12 2003-05-23 Advantest Corp Ｉｃソケット
JP2004045109A (ja) * 2002-07-10 2004-02-12 Ricoh Co Ltd 薄膜の電気抵抗測定方法と測定装置及び定着ローラの検査装置

Also Published As

Publication number Publication date
TW200811452A (en) 2008-03-01
CN101118271A (zh) 2008-02-06
TWI340248B (zh) 2011-04-11
KR100752938B1 (ko) 2007-08-30
CN101118271B (zh) 2010-09-01
JP2008039774A (ja) 2008-02-21

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