JP4560308B2 - Iii族窒化物の結晶製造方法 - Google Patents
Iii族窒化物の結晶製造方法 Download PDFInfo
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- JP4560308B2 JP4560308B2 JP2004058466A JP2004058466A JP4560308B2 JP 4560308 B2 JP4560308 B2 JP 4560308B2 JP 2004058466 A JP2004058466 A JP 2004058466A JP 2004058466 A JP2004058466 A JP 2004058466A JP 4560308 B2 JP4560308 B2 JP 4560308B2
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- Prior art keywords
- group iii
- melt
- crystal
- iii nitride
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- 239000013078 crystal Substances 0.000 title claims description 81
- 150000004767 nitrides Chemical class 0.000 title claims description 54
- 238000004519 manufacturing process Methods 0.000 title claims description 27
- 239000000155 melt Substances 0.000 claims description 62
- 229910052751 metal Inorganic materials 0.000 claims description 37
- 239000002184 metal Substances 0.000 claims description 37
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 31
- 229910052783 alkali metal Inorganic materials 0.000 claims description 28
- 150000001340 alkali metals Chemical class 0.000 claims description 28
- 238000003756 stirring Methods 0.000 claims description 21
- 229910052757 nitrogen Inorganic materials 0.000 claims description 6
- 229910001873 dinitrogen Inorganic materials 0.000 description 19
- 230000006911 nucleation Effects 0.000 description 14
- 238000010899 nucleation Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 9
- 239000000758 substrate Substances 0.000 description 8
- 229910052582 BN Inorganic materials 0.000 description 6
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 6
- 238000013019 agitation Methods 0.000 description 5
- 238000009826 distribution Methods 0.000 description 5
- 239000007788 liquid Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 230000005484 gravity Effects 0.000 description 3
- 235000005811 Viola adunca Nutrition 0.000 description 2
- 240000009038 Viola odorata Species 0.000 description 2
- 235000013487 Viola odorata Nutrition 0.000 description 2
- 235000002254 Viola papilionacea Nutrition 0.000 description 2
- 238000007716 flux method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000012803 melt mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Description
本発明の第1の形態は、アルカリ金属を含む融液中でIII族金属と窒素を反応させてIII族窒化物結晶を成長させるIII族窒化物の結晶製造方法において、結晶成長初期にIII族窒化物を核発生させる工程と、前記核の成長途中からアルカリ金属とIII族金属の混合融液を攪拌する工程を有していることを特徴としている。
また、本発明の第2の形態は、融液保持容器内で、アルカリ金属とIII族金属とが混合融液を形成し、該混合融液中でIII族金属と窒素を反応させてIII族窒化物結晶を成長させるIII族窒化物の結晶製造装置であって、前記融液保持容器が垂直方向から傾いて取り付けられ、前期融液保持容器を回転させる機構が設けられていることを特徴としている。
2 融液保持容器
3 混合融液
4 基板
6 導入管
7 核
8 回転子
9 モーター
10,11 フィン
Claims (1)
- アルカリ金属を含む融液中でIII族金属と窒素を反応させてIII族窒化物結晶を成長させるIII族窒化物の結晶製造方法において、結晶成長初期にIII族窒化物を核発生させる工程と、前記核の成長途中からアルカリ金属とIII族金属の混合融液を攪拌する工程を有していることを特徴とするIII族窒化物の結晶製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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JP2004058466A JP4560308B2 (ja) | 2004-03-03 | 2004-03-03 | Iii族窒化物の結晶製造方法 |
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JP2004058466A JP4560308B2 (ja) | 2004-03-03 | 2004-03-03 | Iii族窒化物の結晶製造方法 |
Publications (2)
Publication Number | Publication Date |
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JP2005247615A JP2005247615A (ja) | 2005-09-15 |
JP4560308B2 true JP4560308B2 (ja) | 2010-10-13 |
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JP2004058466A Expired - Fee Related JP4560308B2 (ja) | 2004-03-03 | 2004-03-03 | Iii族窒化物の結晶製造方法 |
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JP (1) | JP4560308B2 (ja) |
Families Citing this family (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007102610A1 (ja) | 2006-03-06 | 2007-09-13 | Ngk Insulators, Ltd. | 単結晶の育成方法 |
JP4968707B2 (ja) * | 2006-03-06 | 2012-07-04 | 日本碍子株式会社 | Iii族窒化物単結晶の育成方法 |
JP2007254201A (ja) * | 2006-03-23 | 2007-10-04 | Ngk Insulators Ltd | 単結晶の製造方法 |
JP5182944B2 (ja) | 2006-03-24 | 2013-04-17 | 日本碍子株式会社 | 窒化物単結晶の製造方法および装置 |
JP2007277055A (ja) * | 2006-04-07 | 2007-10-25 | Toyoda Gosei Co Ltd | 半導体結晶の製造方法および半導体基板 |
US8916124B2 (en) | 2007-12-05 | 2014-12-23 | Ricoh Company, Ltd. | Group III nitride crystal, method for growing the group III nitride crystal, and apparatus for growing the same |
JP2010168227A (ja) * | 2009-01-20 | 2010-08-05 | Ngk Insulators Ltd | MnドープGaN結晶の製造方法 |
JP5244628B2 (ja) * | 2009-01-21 | 2013-07-24 | 日本碍子株式会社 | 3b族窒化物結晶板の製法 |
JP5452291B2 (ja) * | 2010-03-08 | 2014-03-26 | 株式会社Ihi | 結晶成長装置 |
JP5464007B2 (ja) * | 2010-03-30 | 2014-04-09 | 豊田合成株式会社 | Iii族窒化物半導体結晶の製造方法 |
JP5742390B2 (ja) * | 2011-03-31 | 2015-07-01 | 株式会社Ihi | 窒化ガリウム結晶の成長方法 |
JP2012214331A (ja) * | 2011-03-31 | 2012-11-08 | Mitsubishi Chemicals Corp | 第13族窒化物結晶の製造方法 |
DE112012003278B4 (de) | 2011-08-10 | 2018-08-23 | Ngk Insulators, Ltd. | Filme von Nitriden von Gruppe-13-Elementen und geschichteter Körper, der dieselben beinhaltet |
EP2743382B1 (en) | 2011-08-10 | 2017-09-06 | NGK Insulators, Ltd. | Method for peeling group 13 element nitride film |
JPWO2013022123A1 (ja) * | 2011-08-10 | 2015-03-05 | 日本碍子株式会社 | 半導体発光素子およびこれを含む積層体 |
JP5802570B2 (ja) * | 2012-02-17 | 2015-10-28 | 株式会社Ihi | 結晶成長方法及び結晶成長装置 |
JP5850098B2 (ja) * | 2014-07-01 | 2016-02-03 | 株式会社リコー | 窒化物結晶製造方法 |
JP2019194132A (ja) * | 2016-08-29 | 2019-11-07 | 東京エレクトロン株式会社 | Iii族窒化物微結晶凝集体の製造方法、窒化ガリウム微結晶凝集体の製造方法、iii族窒化物微結晶凝集体およびスパッタリングターゲット |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0287065U (ja) * | 1988-12-21 | 1990-07-10 | ||
JP2002068897A (ja) * | 2000-08-31 | 2002-03-08 | Ricoh Co Ltd | Iii族窒化物結晶の結晶成長方法および結晶成長装置およびiii族窒化物結晶および半導体素子 |
JP2004083498A (ja) * | 2002-08-28 | 2004-03-18 | Pola Chem Ind Inc | 発泡性を有する化粧料 |
JP2005263622A (ja) * | 2004-02-19 | 2005-09-29 | Matsushita Electric Ind Co Ltd | 化合物単結晶の製造方法、およびそれに用いる製造装置 |
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2004
- 2004-03-03 JP JP2004058466A patent/JP4560308B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0287065U (ja) * | 1988-12-21 | 1990-07-10 | ||
JP2002068897A (ja) * | 2000-08-31 | 2002-03-08 | Ricoh Co Ltd | Iii族窒化物結晶の結晶成長方法および結晶成長装置およびiii族窒化物結晶および半導体素子 |
JP2004083498A (ja) * | 2002-08-28 | 2004-03-18 | Pola Chem Ind Inc | 発泡性を有する化粧料 |
JP2005263622A (ja) * | 2004-02-19 | 2005-09-29 | Matsushita Electric Ind Co Ltd | 化合物単結晶の製造方法、およびそれに用いる製造装置 |
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JP2005247615A (ja) | 2005-09-15 |
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