JP4542492B2 - 電気光学装置及びその製造方法、電子機器、並びに半導体装置 - Google Patents
電気光学装置及びその製造方法、電子機器、並びに半導体装置 Download PDFInfo
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
- H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
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- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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Description
<第1実施形態>
第1実施形態に係る液晶装置について、図1から図7を参照して説明する。
次に、上述した電気光学装置である液晶装置を各種の電子機器に適用する場合について説明する。
Claims (3)
- 基板上に、
表示領域に配列された複数の画素部と、
前記表示領域の周辺に位置する周辺領域に配置されており、前記複数の画素部を駆動するための、第1単結晶シリコン膜からなるSOI(Silicon On Insulator)構造をなす第1半導体層、及び該第1半導体層上に積層したアモルファスシリコン膜をエピタキシャル成長させて形成された第2単結晶シリコン膜からなる第2半導体層を有する半導体素子を含む駆動回路と、
を備え、
前記画素部には、前記駆動回路に電気的に接続されるとともに、前記アモルファスシリコン膜をポリシリコン化して形成されたポリシリコン膜からなる第3半導体層を有する半導体素子を含むこと
を特徴とする電気光学装置。 - 請求項1に記載の電気光学装置を具備してなることを特徴とする電子機器。
- 基板上に、表示領域に配列された複数の画素部と、前記表示領域の周辺に位置する周辺領域に配置されており、前記複数の画素部を駆動するための駆動回路と、を備える電気光学装置を製造する電気光学装置の製造方法であって、
前記周辺領域に、第1単結晶シリコン膜からなるSOI(Silicon On Insulator)構造をなす第1半導体層を形成する工程と、
前記第1半導体層上、及び前記表示領域にアモルファスシリコン膜を積層する工程と、
前記第1半導体層上の前記アモルファスシリコン膜をエピタキシャル成長させて第2単結晶シリコン膜からなる第2半導体層を形成するとともに、前記表示領域の前記アモルファスシリコン膜をポリシリコン化してポリシリコン膜からなる第3半導体層を形成する工程と、
前記第1及び第2半導体層を有する半導体素子、及び前記第3半導体層を有する半導体素子を形成する素子形成工程と、
を備えたことを特徴とする電気光学装置の製造方法。
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JP2005294429A JP4542492B2 (ja) | 2005-10-07 | 2005-10-07 | 電気光学装置及びその製造方法、電子機器、並びに半導体装置 |
US11/539,466 US7662704B2 (en) | 2005-10-07 | 2006-10-06 | Electro-optical device, method of manufacturing the same, electronic apparatus, and semiconductor device |
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JP2005294429A JP4542492B2 (ja) | 2005-10-07 | 2005-10-07 | 電気光学装置及びその製造方法、電子機器、並びに半導体装置 |
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JP2007102054A JP2007102054A (ja) | 2007-04-19 |
JP4542492B2 true JP4542492B2 (ja) | 2010-09-15 |
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JP (1) | JP4542492B2 (ja) |
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US7486287B2 (en) * | 2005-08-23 | 2009-02-03 | Sysview Technology, Inc. | Nano-liquid crystal on silicon (LCOS) chip having reduced noise |
TWI330276B (en) * | 2006-04-25 | 2010-09-11 | Au Optronics Corp | Active device array substrate and fabricating method thereof |
US7790563B2 (en) * | 2007-07-13 | 2010-09-07 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device, electronic device and method for manufacturing semiconductor device |
KR100840090B1 (ko) * | 2007-08-17 | 2008-06-20 | 삼성에스디아이 주식회사 | 유기전계발광 표시장치 및 그의 모기판 |
US20090141004A1 (en) | 2007-12-03 | 2009-06-04 | Semiconductor Energy Laboratory Co., Ltd. | Display device and method for manufacturing the same |
CA2745610C (en) | 2008-12-04 | 2017-10-31 | Sekisui Medical Co., Ltd. | Method for measuring cystatin c in human body fluid |
JP2010245484A (ja) * | 2009-03-17 | 2010-10-28 | Ricoh Co Ltd | Mosトランジスタおよび該mosトランジスタを内蔵した半導体装置ならびに該半導体装置を用いた電子機器 |
JP5593107B2 (ja) * | 2009-04-02 | 2014-09-17 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
WO2011024629A1 (en) * | 2009-08-25 | 2011-03-03 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
WO2011122352A1 (ja) * | 2010-03-29 | 2011-10-06 | シャープ株式会社 | 表示装置、圧力検出装置および表示装置の製造方法 |
JP5786600B2 (ja) | 2011-09-28 | 2015-09-30 | セイコーエプソン株式会社 | 電気光学装置およびその製造方法、並びに電子機器 |
KR20150019904A (ko) * | 2013-08-16 | 2015-02-25 | 삼성디스플레이 주식회사 | 평판 표시 장치 및 그 제조 방법 |
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US4902642A (en) * | 1987-08-07 | 1990-02-20 | Texas Instruments, Incorporated | Epitaxial process for silicon on insulator structure |
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US7176109B2 (en) * | 2001-03-23 | 2007-02-13 | Micron Technology, Inc. | Method for forming raised structures by controlled selective epitaxial growth of facet using spacer |
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US7186630B2 (en) * | 2002-08-14 | 2007-03-06 | Asm America, Inc. | Deposition of amorphous silicon-containing films |
TWI279852B (en) * | 2004-03-16 | 2007-04-21 | Imec Inter Uni Micro Electr | Method of manufacturing a semiconductor on a silicon on insulator (SOI) substrate using solid epitaxial regrowth (SPER) and semiconductor device made thereby |
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