JP4482212B2 - スピン処理装置及び基板の処理方法 - Google Patents

スピン処理装置及び基板の処理方法 Download PDF

Info

Publication number
JP4482212B2
JP4482212B2 JP2000294862A JP2000294862A JP4482212B2 JP 4482212 B2 JP4482212 B2 JP 4482212B2 JP 2000294862 A JP2000294862 A JP 2000294862A JP 2000294862 A JP2000294862 A JP 2000294862A JP 4482212 B2 JP4482212 B2 JP 4482212B2
Authority
JP
Japan
Prior art keywords
substrate
holding
gear
rotating body
processing apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2000294862A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002110618A5 (enExample
JP2002110618A (ja
Inventor
正明 古矢
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Shibaura Mechatronics Corp
Original Assignee
Toshiba Corp
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Shibaura Mechatronics Corp filed Critical Toshiba Corp
Priority to JP2000294862A priority Critical patent/JP4482212B2/ja
Publication of JP2002110618A publication Critical patent/JP2002110618A/ja
Publication of JP2002110618A5 publication Critical patent/JP2002110618A5/ja
Application granted granted Critical
Publication of JP4482212B2 publication Critical patent/JP4482212B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Images

Landscapes

  • Cleaning Or Drying Semiconductors (AREA)
  • Cleaning By Liquid Or Steam (AREA)
JP2000294862A 2000-09-27 2000-09-27 スピン処理装置及び基板の処理方法 Expired - Lifetime JP4482212B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000294862A JP4482212B2 (ja) 2000-09-27 2000-09-27 スピン処理装置及び基板の処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000294862A JP4482212B2 (ja) 2000-09-27 2000-09-27 スピン処理装置及び基板の処理方法

Publications (3)

Publication Number Publication Date
JP2002110618A JP2002110618A (ja) 2002-04-12
JP2002110618A5 JP2002110618A5 (enExample) 2007-11-08
JP4482212B2 true JP4482212B2 (ja) 2010-06-16

Family

ID=18777384

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000294862A Expired - Lifetime JP4482212B2 (ja) 2000-09-27 2000-09-27 スピン処理装置及び基板の処理方法

Country Status (1)

Country Link
JP (1) JP4482212B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5076602B2 (ja) * 2007-03-30 2012-11-21 日本電気株式会社 基板洗浄装置、スピン洗浄装置、基板洗浄方法及びスピン洗浄方法
CN111438116B (zh) * 2020-05-09 2020-11-27 泉州好节奏科技有限公司 一种光伏板的清灰收集装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02307220A (ja) * 1989-05-22 1990-12-20 Nec Corp 表面処理装置
JP3067955B2 (ja) * 1994-07-01 2000-07-24 柴垣 喜造 回転式ワーク乾燥機におけるワークのクランプ装置
JPH09260340A (ja) * 1996-03-25 1997-10-03 Dainippon Screen Mfg Co Ltd 回転式基板処理装置
JP3604242B2 (ja) * 1996-11-19 2004-12-22 大日本スクリーン製造株式会社 基板保持機構
JPH11204604A (ja) * 1998-01-12 1999-07-30 Shin Etsu Handotai Co Ltd ウエーハ周辺部の金属不純物回収方法とその装置
JP3217323B2 (ja) * 1999-03-03 2001-10-09 保 目崎 半導体材料の遠心処理装置

Also Published As

Publication number Publication date
JP2002110618A (ja) 2002-04-12

Similar Documents

Publication Publication Date Title
JPH07130695A (ja) 回転式基板処理装置の基板回転保持具
CN114093788B (zh) 基板处理装置
JP3909915B2 (ja) スピン処理装置
JP2001044159A (ja) スピン処理装置
KR20080071685A (ko) 지지부재 및 상기 지지부재를 구비하는 기판 처리 장치
JP4482212B2 (ja) スピン処理装置及び基板の処理方法
JPH08274060A (ja) 基板回転装置
KR20090120344A (ko) 매엽식 기판처리장치의 스핀척 장치 및 척핀 작동 방법
JP2004079637A (ja) 板状部材の把持装置、把持方法、及びスピン処理装置
JPH02138737A (ja) 半導体ウエハの枚葉式スピン乾燥装置
JP4579354B2 (ja) スピン処理装置
JP2726809B2 (ja) スピン乾燥処理装置
JP4615742B2 (ja) スピン処理装置
JP4571515B2 (ja) スピン処理装置
JPH11314063A (ja) 回転式塗布装置
JP2004119854A (ja) スピン処理装置
JPH11102883A (ja) スピン処理装置
JP2002329773A (ja) スピン処理装置
JP2635476B2 (ja) 塗布装置及び塗布方法
JPH07183266A (ja) 回転式基板処理装置
JP4659168B2 (ja) スピン処理装置
JP2909346B2 (ja) 回転式塗布装置
JPH11274042A (ja) 基板処理装置
JP3086446B2 (ja) 回転式塗布装置および回転式塗布方法
JP2002192053A (ja) スピン処理装置

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20070926

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20070926

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20090811

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090818

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20091013

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20100316

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20100319

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130326

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130326

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140326

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250