JP2002110618A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2002110618A5 JP2002110618A5 JP2000294862A JP2000294862A JP2002110618A5 JP 2002110618 A5 JP2002110618 A5 JP 2002110618A5 JP 2000294862 A JP2000294862 A JP 2000294862A JP 2000294862 A JP2000294862 A JP 2000294862A JP 2002110618 A5 JP2002110618 A5 JP 2002110618A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000294862A JP4482212B2 (ja) | 2000-09-27 | 2000-09-27 | スピン処理装置及び基板の処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000294862A JP4482212B2 (ja) | 2000-09-27 | 2000-09-27 | スピン処理装置及び基板の処理方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002110618A JP2002110618A (ja) | 2002-04-12 |
| JP2002110618A5 true JP2002110618A5 (enExample) | 2007-11-08 |
| JP4482212B2 JP4482212B2 (ja) | 2010-06-16 |
Family
ID=18777384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000294862A Expired - Lifetime JP4482212B2 (ja) | 2000-09-27 | 2000-09-27 | スピン処理装置及び基板の処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4482212B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5076602B2 (ja) * | 2007-03-30 | 2012-11-21 | 日本電気株式会社 | 基板洗浄装置、スピン洗浄装置、基板洗浄方法及びスピン洗浄方法 |
| CN111438116B (zh) * | 2020-05-09 | 2020-11-27 | 泉州好节奏科技有限公司 | 一种光伏板的清灰收集装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02307220A (ja) * | 1989-05-22 | 1990-12-20 | Nec Corp | 表面処理装置 |
| JP3067955B2 (ja) * | 1994-07-01 | 2000-07-24 | 柴垣 喜造 | 回転式ワーク乾燥機におけるワークのクランプ装置 |
| JPH09260340A (ja) * | 1996-03-25 | 1997-10-03 | Dainippon Screen Mfg Co Ltd | 回転式基板処理装置 |
| JP3604242B2 (ja) * | 1996-11-19 | 2004-12-22 | 大日本スクリーン製造株式会社 | 基板保持機構 |
| JPH11204604A (ja) * | 1998-01-12 | 1999-07-30 | Shin Etsu Handotai Co Ltd | ウエーハ周辺部の金属不純物回収方法とその装置 |
| JP3217323B2 (ja) * | 1999-03-03 | 2001-10-09 | 保 目崎 | 半導体材料の遠心処理装置 |
-
2000
- 2000-09-27 JP JP2000294862A patent/JP4482212B2/ja not_active Expired - Lifetime