JP4482212B2 - スピン処理装置及び基板の処理方法 - Google Patents

スピン処理装置及び基板の処理方法 Download PDF

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Publication number
JP4482212B2
JP4482212B2 JP2000294862A JP2000294862A JP4482212B2 JP 4482212 B2 JP4482212 B2 JP 4482212B2 JP 2000294862 A JP2000294862 A JP 2000294862A JP 2000294862 A JP2000294862 A JP 2000294862A JP 4482212 B2 JP4482212 B2 JP 4482212B2
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Japan
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substrate
holding
gear
rotating body
processing apparatus
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Expired - Lifetime
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JP2000294862A
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English (en)
Japanese (ja)
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JP2002110618A (ja
JP2002110618A5 (enrdf_load_stackoverflow
Inventor
正明 古矢
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Toshiba Corp
Shibaura Mechatronics Corp
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Toshiba Corp
Shibaura Mechatronics Corp
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Priority to JP2000294862A priority Critical patent/JP4482212B2/ja
Publication of JP2002110618A publication Critical patent/JP2002110618A/ja
Publication of JP2002110618A5 publication Critical patent/JP2002110618A5/ja
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Publication of JP4482212B2 publication Critical patent/JP4482212B2/ja
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JP2000294862A 2000-09-27 2000-09-27 スピン処理装置及び基板の処理方法 Expired - Lifetime JP4482212B2 (ja)

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JP2000294862A JP4482212B2 (ja) 2000-09-27 2000-09-27 スピン処理装置及び基板の処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000294862A JP4482212B2 (ja) 2000-09-27 2000-09-27 スピン処理装置及び基板の処理方法

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JP2002110618A JP2002110618A (ja) 2002-04-12
JP2002110618A5 JP2002110618A5 (enrdf_load_stackoverflow) 2007-11-08
JP4482212B2 true JP4482212B2 (ja) 2010-06-16

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JP2000294862A Expired - Lifetime JP4482212B2 (ja) 2000-09-27 2000-09-27 スピン処理装置及び基板の処理方法

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JP (1) JP4482212B2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5076602B2 (ja) * 2007-03-30 2012-11-21 日本電気株式会社 基板洗浄装置、スピン洗浄装置、基板洗浄方法及びスピン洗浄方法
CN111438116B (zh) * 2020-05-09 2020-11-27 泉州好节奏科技有限公司 一种光伏板的清灰收集装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02307220A (ja) * 1989-05-22 1990-12-20 Nec Corp 表面処理装置
JP3067955B2 (ja) * 1994-07-01 2000-07-24 柴垣 喜造 回転式ワーク乾燥機におけるワークのクランプ装置
JPH09260340A (ja) * 1996-03-25 1997-10-03 Dainippon Screen Mfg Co Ltd 回転式基板処理装置
JP3604242B2 (ja) * 1996-11-19 2004-12-22 大日本スクリーン製造株式会社 基板保持機構
JPH11204604A (ja) * 1998-01-12 1999-07-30 Shin Etsu Handotai Co Ltd ウエーハ周辺部の金属不純物回収方法とその装置
JP3217323B2 (ja) * 1999-03-03 2001-10-09 保 目崎 半導体材料の遠心処理装置

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