JP4477062B2 - フリップチップ実装方法 - Google Patents
フリップチップ実装方法 Download PDFInfo
- Publication number
- JP4477062B2 JP4477062B2 JP2007516219A JP2007516219A JP4477062B2 JP 4477062 B2 JP4477062 B2 JP 4477062B2 JP 2007516219 A JP2007516219 A JP 2007516219A JP 2007516219 A JP2007516219 A JP 2007516219A JP 4477062 B2 JP4477062 B2 JP 4477062B2
- Authority
- JP
- Japan
- Prior art keywords
- resin
- solder
- semiconductor chip
- circuit board
- flip
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- 238000000034 method Methods 0.000 title claims abstract description 103
- 229910000679 solder Inorganic materials 0.000 claims abstract description 242
- 229920005989 resin Polymers 0.000 claims abstract description 180
- 239000011347 resin Substances 0.000 claims abstract description 180
- 239000004065 semiconductor Substances 0.000 claims abstract description 177
- 239000011342 resin composition Substances 0.000 claims abstract description 84
- 239000000843 powder Substances 0.000 claims abstract description 83
- 238000010438 heat treatment Methods 0.000 claims abstract description 29
- 230000009471 action Effects 0.000 claims description 21
- 239000000463 material Substances 0.000 claims description 15
- 238000002844 melting Methods 0.000 claims description 14
- 230000008018 melting Effects 0.000 claims description 14
- 239000011248 coating agent Substances 0.000 claims description 10
- 238000000576 coating method Methods 0.000 claims description 10
- 239000000155 melt Substances 0.000 claims description 10
- 230000008569 process Effects 0.000 description 31
- 239000002245 particle Substances 0.000 description 12
- 229920001187 thermosetting polymer Polymers 0.000 description 12
- 239000000654 additive Substances 0.000 description 9
- 230000000996 additive effect Effects 0.000 description 9
- 238000001816 cooling Methods 0.000 description 8
- 230000007423 decrease Effects 0.000 description 7
- 229920000647 polyepoxide Polymers 0.000 description 7
- 239000003822 epoxy resin Substances 0.000 description 6
- 239000011810 insulating material Substances 0.000 description 6
- 239000000203 mixture Substances 0.000 description 6
- 238000007599 discharging Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 5
- 238000007667 floating Methods 0.000 description 5
- 238000001338 self-assembly Methods 0.000 description 5
- 229920005992 thermoplastic resin Polymers 0.000 description 5
- 229910020836 Sn-Ag Inorganic materials 0.000 description 4
- 229910020988 Sn—Ag Inorganic materials 0.000 description 4
- 238000009835 boiling Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000011256 inorganic filler Substances 0.000 description 4
- 229910003475 inorganic filler Inorganic materials 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 239000003921 oil Substances 0.000 description 3
- 229920001721 polyimide Polymers 0.000 description 3
- 239000009719 polyimide resin Substances 0.000 description 3
- 239000000758 substrate Substances 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 239000004760 aramid Substances 0.000 description 2
- 229920003235 aromatic polyamide Polymers 0.000 description 2
- PXKLMJQFEQBVLD-UHFFFAOYSA-N bisphenol F Chemical compound C1=CC(O)=CC=C1CC1=CC=C(O)C=C1 PXKLMJQFEQBVLD-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- -1 for example Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229920006122 polyamide resin Polymers 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 239000011345 viscous material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- OAYXUHPQHDHDDZ-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethanol Chemical compound CCCCOCCOCCO OAYXUHPQHDHDDZ-UHFFFAOYSA-N 0.000 description 1
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- 241000332371 Abutilon x hybridum Species 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 239000004641 Diallyl-phthalate Substances 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- 229910020830 Sn-Bi Inorganic materials 0.000 description 1
- 229910020994 Sn-Zn Inorganic materials 0.000 description 1
- 229910018728 Sn—Bi Inorganic materials 0.000 description 1
- 229910009069 Sn—Zn Inorganic materials 0.000 description 1
- 229920010524 Syndiotactic polystyrene Polymers 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- QUDWYFHPNIMBFC-UHFFFAOYSA-N bis(prop-2-enyl) benzene-1,2-dicarboxylate Chemical compound C=CCOC(=O)C1=CC=CC=C1C(=O)OCC=C QUDWYFHPNIMBFC-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 239000000806 elastomer Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- HDNHWROHHSBKJG-UHFFFAOYSA-N formaldehyde;furan-2-ylmethanol Chemical compound O=C.OCC1=CC=CO1 HDNHWROHHSBKJG-UHFFFAOYSA-N 0.000 description 1
- 239000007849 furan resin Substances 0.000 description 1
- 239000003365 glass fiber Substances 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012948 isocyanate Substances 0.000 description 1
- 150000002513 isocyanates Chemical class 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000008239 natural water Substances 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229920001955 polyphenylene ether Polymers 0.000 description 1
- 229920006380 polyphenylene oxide Polymers 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004062 sedimentation Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/563—Encapsulation of active face of flip-chip device, e.g. underfilling or underencapsulation of flip-chip, encapsulation preform on chip or mounting substrate
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3135—Double encapsulation or coating and encapsulation
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
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- H01L24/10—Bump connectors ; Manufacturing methods related thereto
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- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/27—Manufacturing methods
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- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- H01L24/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L24/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
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- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/741—Apparatus for manufacturing means for bonding, e.g. connectors
- H01L24/743—Apparatus for manufacturing layer connectors
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- H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
- H01L24/75—Apparatus for connecting with bump connectors or layer connectors
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- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/341—Surface mounted components
- H05K3/3431—Leadless components
- H05K3/3436—Leadless components having an array of bottom contacts, e.g. pad grid array or ball grid array components
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- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/30—Assembling printed circuits with electric components, e.g. with resistor
- H05K3/32—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
- H05K3/34—Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
- H05K3/3457—Solder materials or compositions; Methods of application thereof
- H05K3/3485—Applying solder paste, slurry or powder
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05568—Disposition the whole external layer protruding from the surface
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05573—Single external layer
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
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- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
- H01L2224/29111—Tin [Sn] as principal constituent
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- H01L2224/2919—Material with a principal constituent of the material being a polymer, e.g. polyester, phenolic based polymer, epoxy
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- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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Landscapes
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Wire Bonding (AREA)
- Electric Connection Of Electric Components To Printed Circuits (AREA)
Description
め、安定した導通状態の実現が難しい。第2に、半導体チップの電極端子と回路基板の接続端子の間に存在する導電粒子の量によって間隔が一定しないため、電気的接合が不安定になる。第3に、安定した電気接続を実現するには、高い圧力(荷重)で加圧し圧着する必要があり、それにより半導体チップの破壊を生じ易いなどの課題があった。
せて、複数の電極端子を有する半導体チップを配置し、回路基板の接続端子と半導体チップの電極端子とを電気的に接続するフリップチップ実装方法であって、回路基板と半導体チップを保持する保持工程と、回路基板の接続端子と半導体チップの電極端子を接触状態で保持して位置合せするか、もしくは所定の間隔に保持して位置合わせする配置工程と、少なくとも回路基板又は半導体チップを、はんだ粉と第1の樹脂からなるはんだ樹脂組成物が溶融する温度に加熱する第1の加熱工程と、回路基板と半導体チップを保持した所定の間隔に、毛細管現象ではんだ樹脂組成物を半導体チップの少なくとも1つの端面方向から供給する第1の供給工程と、回路基板と半導体チップを保持した所定の間隔を、脂組成物中の溶融したはんだ粉を移動させ、はんだ粉を自己集合及び成長させることによりはんだ層を形成し、接続端子と電極端子とを電気的に接続する接続工程と、はんだ層以外の樹脂組成物を排出する排出工程と、少なくとも回路基板又は半導体チップを、はんだ層は溶融せず、第2の樹脂が溶融する温度に加熱する第2の加熱工程と、回路基板と半導体チップを保持した所定の間隔に、毛細管現象で第2の樹脂を半導体チップの少なくとも1つの端面方向から供給する第2の供給工程と、第2の樹脂を硬化させる硬化工程とを含む。
端子21との間に自己集合することによって、接続端子11と電極端子21との間に、均一で微細なはんだ接合体22を介して電気的に接続する。
以下に、図2A−Eを用いて、本発明の実施形態1におけるフリップチップ実装方法を説明する。図2A−Eは、本発明の実施形態1におけるフリップチップ実装方法を説明する概略工程断面図である。まず、図2Aに示すように、複数の電極端子207を有する半導体チップ206を、ピックアップ冶具201で保持する。そして、半導体チップ206は、ピックアップ冶具201に設けられた、例えば小さな孔からなる吸気通路203と吸気管202を介して真空吸着などにより吸引されて保持される。
粉としては、例えばSn−Ag系のはんだ粉が用いられる。
きた。
以下に、図5A−Eを用いて、本発明の実施形態2におけるフリップチップ実装方法を説明する。図5A−Eは、本発明の実施形態2におけるフリップチップ実装方法を説明する概略工程断面図である。本発明の実施形態2と実施形態1とは、半導体チップがインターポーザに搭載された状態で、回路基板にフリップチップ実装する点で異なる。なお、図5A−Eにおいて、図2A−Eと同じ構成要素には同じ符号を付して説明する。
以下に、図6A−Eと図7A−Eを用いて、本発明の実施形態3におけるフリップチップ実装方法を説明する。図6A−Eと図7A−Eは、本発明の実施形態3におけるフリップチップ実装方法を説明する概略工程断面図である。なお、図6A−Eと図7A−Eにおいて、図2A−Eと同じ構成要素には同じ符号を付して説明する。
01に設けられた、例えば小さな孔からなる吸気通路203と吸気管202を介して真空吸着されて保持される。
スなどを注入するとともに、減圧した吸気管404により、第1の樹脂401を吸引して排出してもよい。これらは同時に行ってもよい。なお、第1の樹脂401を排出するときには、ガスの押圧又は減圧による吸引ではんだ層219の形状などが崩れないようにするために、ピックアップ冶具201や保持台204の温度を、はんだ層219の硬化温度以下で、第1の樹脂401の溶融温度以上に設定して、はんだ層219を固化させておくことが好ましい。これにより、図7Bに示すように、半導体チップ206と回路基板213がはんだ層219のみで結合した状態になる。
以下に、図9A−Eと図10A−Bを用いて、本発明の実施形態4におけるフリップチップ実装方法及びフリップチップ実装体を説明する。なお、実施形態4は、実施形態3で説明した図7Bまでの工程は同様で、それ以降の工程が異なる。
子211との接着性を確保する。
Claims (11)
- 複数の接続端子を有する回路基板と対向させて、複数の電極端子を有する半導体チップを配置し、前記回路基板の前記接続端子と前記半導体チップの前記電極端子とを電気的に接続するフリップチップ実装方法であって、
前記回路基板と前記半導体チップを保持する保持工程と、
前記回路基板の前記接続端子と前記半導体チップの前記電極端子を所定の間隔に保持して位置合わせする配置工程と、
少なくとも前記回路基板又は前記半導体チップを、はんだ粉と樹脂からなるはんだ樹脂組成物が溶融する温度に加熱する加熱工程と、
前記回路基板と前記半導体チップを保持した前記所定の間隔に、毛細管現象で前記はんだ樹脂組成物を前記半導体チップの少なくとも1つの端面方向から供給する供給工程と、
前記はんだ樹脂組成物中の前記樹脂を硬化させる硬化工程とを含み、
前記供給工程において、前記回路基板と前記半導体チップを保持した前記所定の間隔の間を、前記はんだ樹脂組成物中の溶融した前記はんだ粉を移動させ、前記はんだ粉を自己集合及び成長させることにより前記接続端子と前記電極端子とを電気的に接続することを特徴とするフリップチップ実装方法。 - 前記供給工程において、少なくとも1方向から供給される前記はんだ樹脂組成物の樹脂成分は、前記1方向以外の方向から排出される請求項1に記載のフリップチップ実装方法。
- 前記供給工程において、前記半導体チップの少なくとも1つの端面方向から供給される前記はんだ樹脂組成物は、前記端面に沿って移動しながら供給される請求項1又は2に記載のフリップチップ実装方法。
- 前記保持工程において、前記回路基板及び前記半導体チップは吸引により保持される請求項1に記載のフリップチップ実装方法。
- 複数個の前記半導体チップを有し、前記保持工程において、複数個の前記半導体チップが同時に保持される請求項1に記載のフリップチップ実装方法。
- 前記はんだ樹脂組成物により前記接続端子と前記電極端子とを電気的に接続した後、
さらに前記接続端子と前記電極端子との間に形成されたはんだ樹脂組成物中のはんだ粉が自己集合して形成されたはんだ層以外の樹脂成分を排出し、
少なくとも前記回路基板又は前記半導体チップを、前記はんだ層は溶融せず第2の樹脂が溶融する温度に加熱し、
前記回路基板と前記半導体チップを保持した前記所定の間隔に、毛細管現象で前記第2の樹脂を前記半導体チップの少なくとも1つの端面方向から供給し、
前記第2の樹脂を硬化させる請求項1〜5のいずれかに記載のフリップチップ実装方法。 - 前記はんだ樹脂組成物の樹脂成分は、前記1つの端面方向以外の方向から排出される請求項6に記載のフリップチップ実装方法。
- 前記第2の樹脂を供給するに際し、
少なくとも前記はんだ層の側面を被覆する第1の絶縁性樹脂を供給する第1の工程と、
前記第1の絶縁性樹脂は被覆し、前記回路基板と前記半導体チップの所定の間隔の間を充填する第2の絶縁性樹脂を供給する第2の工程とを含み、
前記第2の樹脂が、前記第1の絶縁性樹脂と前記第2の絶縁性樹脂とからなる請求項7に記載のフリップチップ実装方法。 - 前記第1の工程の後、前記第1の絶縁性樹脂を仮硬化させる工程をさらに含む請求項8に記載のフリップチップ実装方法。
- 前記第1の絶縁性樹脂は、表面張力により、少なくとも前記はんだ層の側面に被覆される請求項8に記載のフリップチップ実装方法。
- 前記第1の絶縁性樹脂は、前記第2の絶縁性樹脂よりも弾性率の低い材料からなる請求項8に記載のフリップチップ実装方法。
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