JP4459498B2 - シリコンベースのセンサーシステム - Google Patents

シリコンベースのセンサーシステム Download PDF

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Publication number
JP4459498B2
JP4459498B2 JP2001522196A JP2001522196A JP4459498B2 JP 4459498 B2 JP4459498 B2 JP 4459498B2 JP 2001522196 A JP2001522196 A JP 2001522196A JP 2001522196 A JP2001522196 A JP 2001522196A JP 4459498 B2 JP4459498 B2 JP 4459498B2
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JP
Japan
Prior art keywords
sensor system
contact
transducer
transducer element
active
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Expired - Fee Related
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JP2001522196A
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English (en)
Japanese (ja)
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JP2003508998A5 (enExample
JP2003508998A (ja
Inventor
マティアス・ミューレンボルン
ヨッヘン・エフ・クーマン
ペーター・ウ・シェール
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Pulse Mems ApS
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Pulse Mems ApS
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Publication date
Priority claimed from US09/570,434 external-priority patent/US6522762B1/en
Application filed by Pulse Mems ApS filed Critical Pulse Mems ApS
Publication of JP2003508998A publication Critical patent/JP2003508998A/ja
Publication of JP2003508998A5 publication Critical patent/JP2003508998A5/ja
Application granted granted Critical
Publication of JP4459498B2 publication Critical patent/JP4459498B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
    • H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
    • H04R25/609—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of circuitry

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Air Bags (AREA)
  • Silicon Polymers (AREA)
JP2001522196A 1999-09-06 2000-09-06 シリコンベースのセンサーシステム Expired - Fee Related JP4459498B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
DKPA199901254 1999-09-06
DK1999/01254 1999-09-06
US39162899A 1999-09-07 1999-09-07
US09/391,628 1999-09-07
US09/570,434 2000-05-12
US09/570,434 US6522762B1 (en) 1999-09-07 2000-05-12 Silicon-based sensor system
PCT/DK2000/000491 WO2001019134A2 (en) 1999-09-06 2000-09-06 Silicon-based sensor system

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006273173A Division JP4303742B2 (ja) 1999-09-06 2006-10-04 シリコンコンデンサーマイクロフォン

Publications (3)

Publication Number Publication Date
JP2003508998A JP2003508998A (ja) 2003-03-04
JP2003508998A5 JP2003508998A5 (enExample) 2006-12-07
JP4459498B2 true JP4459498B2 (ja) 2010-04-28

Family

ID=27221189

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2001522196A Expired - Fee Related JP4459498B2 (ja) 1999-09-06 2000-09-06 シリコンベースのセンサーシステム
JP2006273173A Expired - Fee Related JP4303742B2 (ja) 1999-09-06 2006-10-04 シリコンコンデンサーマイクロフォン

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2006273173A Expired - Fee Related JP4303742B2 (ja) 1999-09-06 2006-10-04 シリコンコンデンサーマイクロフォン

Country Status (10)

Country Link
EP (1) EP1214864B1 (enExample)
JP (2) JP4459498B2 (enExample)
CN (1) CN1203726C (enExample)
AT (1) ATE242587T1 (enExample)
AU (1) AU6984100A (enExample)
CA (1) CA2383740C (enExample)
DE (1) DE60003199T2 (enExample)
DK (1) DK1214864T3 (enExample)
PL (1) PL209935B1 (enExample)
WO (1) WO2001019134A2 (enExample)

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US6859542B2 (en) 2001-05-31 2005-02-22 Sonion Lyngby A/S Method of providing a hydrophobic layer and a condenser microphone having such a layer
US6696645B2 (en) * 2002-05-08 2004-02-24 The Regents Of The University Of Michigan On-wafer packaging for RF-MEMS
US7142682B2 (en) 2002-12-20 2006-11-28 Sonion Mems A/S Silicon-based transducer for use in hearing instruments and listening devices
US7466835B2 (en) 2003-03-18 2008-12-16 Sonion A/S Miniature microphone with balanced termination
JP2004356708A (ja) * 2003-05-27 2004-12-16 Hosiden Corp 音響検出機構及びその製造方法
CN100515119C (zh) * 2003-08-12 2009-07-15 中国科学院声学研究所 一种用于硅微电容传声器中的芯片及其制备方法
CN100499877C (zh) * 2003-12-17 2009-06-10 中国科学院声学研究所 具有高灵敏度的用于硅微电容传声器的芯片及其制备方法
DE102004011203B4 (de) * 2004-03-04 2010-09-16 Robert Bosch Gmbh Verfahren zum Montieren von Halbleiterchips und entsprechende Halbleiterchipanordnung
JP4553611B2 (ja) 2004-03-15 2010-09-29 三洋電機株式会社 回路装置
DE102004051468A1 (de) * 2004-10-22 2006-04-27 Robert Bosch Gmbh Verfahren zum Montieren von Halbleiterchips und entsprechende Halbleiterchipanordnung
JP4539450B2 (ja) * 2004-11-04 2010-09-08 オムロン株式会社 容量型振動センサ及びその製造方法
DE102005008512B4 (de) * 2005-02-24 2016-06-23 Epcos Ag Elektrisches Modul mit einem MEMS-Mikrofon
DE102005008511B4 (de) 2005-02-24 2019-09-12 Tdk Corporation MEMS-Mikrofon
DE102005053767B4 (de) 2005-11-10 2014-10-30 Epcos Ag MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau
DE102005053765B4 (de) 2005-11-10 2016-04-14 Epcos Ag MEMS-Package und Verfahren zur Herstellung
DE102005056759A1 (de) * 2005-11-29 2007-05-31 Robert Bosch Gmbh Mikromechanische Struktur zum Empfang und/oder zur Erzeugung von akustischen Signalen, Verfahren zur Herstellung einer mikromechanischen Struktur und Verwendung einer mikromechanischen Struktur
CN101005718B (zh) * 2006-01-16 2011-04-20 财团法人工业技术研究院 微型声学传感器及其制造方法
JP4771290B2 (ja) * 2006-07-19 2011-09-14 ヤマハ株式会社 圧力センサの製造方法
WO2008077517A1 (en) * 2006-12-22 2008-07-03 Sonion Mems A/S Microphone assembly with underfill agent having a low coefficient of thermal expansion
JP4893380B2 (ja) * 2007-03-09 2012-03-07 ヤマハ株式会社 コンデンサマイク装置
DE102007008518A1 (de) * 2007-02-21 2008-08-28 Infineon Technologies Ag Modul mit einem ein bewegliches Element umfassenden Halbleiterchip
US7557417B2 (en) 2007-02-21 2009-07-07 Infineon Technologies Ag Module comprising a semiconductor chip comprising a movable element
US8767983B2 (en) 2007-06-01 2014-07-01 Infineon Technologies Ag Module including a micro-electro-mechanical microphone
JP2009081624A (ja) * 2007-09-26 2009-04-16 Rohm Co Ltd 半導体センサ装置
TWI336770B (en) * 2007-11-05 2011-02-01 Ind Tech Res Inst Sensor
TWI365525B (en) * 2007-12-24 2012-06-01 Ind Tech Res Inst An ultra thin package for a sensor chip of a micro electro mechanical system
EP2094028B8 (en) * 2008-02-22 2017-03-29 TDK Corporation Miniature microphone assembly with solder sealing ring
JP5844155B2 (ja) * 2008-10-14 2016-01-13 ノールズ エレクトロニクス，リミテッド ライアビリティ カンパニー 複数の変換器素子を含むマイクロフォン
WO2010135280A2 (en) * 2009-05-18 2010-11-25 Knowles Electronics, Llc Microphone having reduced vibration sensitivity
KR101609270B1 (ko) 2009-08-12 2016-04-06 삼성전자주식회사 압전형 마이크로 스피커 및 그 제조 방법
DE102009047592B4 (de) * 2009-12-07 2019-06-19 Robert Bosch Gmbh Verfahren zur Herstellung eines Siliziumzwischenträgers
IT1397976B1 (it) * 2009-12-23 2013-02-04 St Microelectronics Rousset Trasduttore di tipo microelettromeccanico e relativo procedimento di assemblaggio.
JP2013093637A (ja) * 2010-02-24 2013-05-16 Panasonic Corp 半導体装置及びその製造方法
TWI491009B (zh) 2010-10-08 2015-07-01 環旭電子股份有限公司 晶片級電磁干擾屏蔽結構及製造方法
CN102456669B (zh) * 2010-10-25 2015-07-22 环旭电子股份有限公司 芯片级电磁干扰屏蔽结构及制造方法
CN102726065B (zh) * 2010-12-30 2014-06-04 歌尔声学股份有限公司 Mems麦克风及其封装方法
JP5721452B2 (ja) * 2011-01-27 2015-05-20 ローム株式会社 静電容量型ｍｅｍｓセンサ
JP5799619B2 (ja) 2011-06-24 2015-10-28 船井電機株式会社 マイクロホンユニット
DE102011086722A1 (de) * 2011-11-21 2013-05-23 Robert Bosch Gmbh Mikromechanische Funktionsvorrichtung, insbesondere Lautsprechervorrichtung, und entsprechendes Herstellungsverfahren
US20130147040A1 (en) * 2011-12-09 2013-06-13 Robert Bosch Gmbh Mems chip scale package
DE102012203373A1 (de) * 2012-03-05 2013-09-05 Robert Bosch Gmbh Mikromechanische Schallwandleranordnung und ein entsprechendes Herstellungsverfahren
US20140090485A1 (en) * 2012-10-02 2014-04-03 Robert Bosch Gmbh MEMS Pressure Sensor Assembly
JP6426620B2 (ja) * 2012-12-18 2018-11-21 Tdk株式会社 トップポートｍｅｍｓマイクロフォン及びその製造方法
US20140312439A1 (en) * 2013-04-19 2014-10-23 Infineon Technologies Ag Microphone Module and Method of Manufacturing Thereof
ITTO20130350A1 (it) 2013-04-30 2014-10-31 St Microelectronics Srl Assemblaggio a livello di fetta di un dispositivo sensore mems e relativo dispositivo sensore mems
US9264832B2 (en) * 2013-10-30 2016-02-16 Solid State System Co., Ltd. Microelectromechanical system (MEMS) microphone with protection film and MEMS microphonechips at wafer level
GB2542979B (en) * 2014-06-10 2017-09-13 Cirrus Logic Int Semiconductor Ltd Packaging for MEMS transducers
US10455308B2 (en) * 2014-09-17 2019-10-22 Intel Corporation Die with integrated microphone device using through-silicon vias (TSVs)
CN104780490A (zh) * 2015-04-20 2015-07-15 歌尔声学股份有限公司 一种mems麦克风的封装结构及其制造方法
TWI660466B (zh) * 2017-04-26 2019-05-21 Siliconware Precision Industries Co., Ltd. 封裝結構及其製法
CN111711903B (zh) * 2020-06-24 2021-10-01 歌尔微电子有限公司 微型麦克风防尘装置及mems麦克风

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4533795A (en) * 1983-07-07 1985-08-06 American Telephone And Telegraph Integrated electroacoustic transducer
US5490220A (en) * 1992-03-18 1996-02-06 Knowles Electronics, Inc. Solid state condenser and microphone devices
US5889872A (en) * 1996-07-02 1999-03-30 Motorola, Inc. Capacitive microphone and method therefor
US5856914A (en) * 1996-07-29 1999-01-05 National Semiconductor Corporation Micro-electronic assembly including a flip-chip mounted micro-device and method
US5870482A (en) * 1997-02-25 1999-02-09 Knowles Electronics, Inc. Miniature silicon condenser microphone

Also Published As

Publication number Publication date
EP1214864B1 (en) 2003-06-04
WO2001019134A2 (en) 2001-03-15
PL354095A1 (en) 2003-12-29
CN1387741A (zh) 2002-12-25
JP4303742B2 (ja) 2009-07-29
JP2007028671A (ja) 2007-02-01
DE60003199T2 (de) 2004-07-01
PL209935B1 (pl) 2011-11-30
WO2001019134A3 (en) 2001-09-07
AU6984100A (en) 2001-04-10
CA2383740A1 (en) 2001-03-15
DE60003199D1 (de) 2003-07-10
CA2383740C (en) 2005-04-05
ATE242587T1 (de) 2003-06-15
EP1214864A2 (en) 2002-06-19
DK1214864T3 (da) 2003-08-25
CN1203726C (zh) 2005-05-25
JP2003508998A (ja) 2003-03-04

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