ATE242587T1 - Silikon basierte sensor-systeme - Google Patents

Silikon basierte sensor-systeme

Info

Publication number
ATE242587T1
ATE242587T1 AT00958265T AT00958265T ATE242587T1 AT E242587 T1 ATE242587 T1 AT E242587T1 AT 00958265 T AT00958265 T AT 00958265T AT 00958265 T AT00958265 T AT 00958265T AT E242587 T1 ATE242587 T1 AT E242587T1
Authority
AT
Austria
Prior art keywords
microphone
surface mount
different elements
technology
chip
Prior art date
Application number
AT00958265T
Other languages
English (en)
Inventor
Matthias Muellenborn
Jochen F Kuhmann
Peter U Scheel
Original Assignee
Sonionmems As
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/570,434 external-priority patent/US6522762B1/en
Application filed by Sonionmems As filed Critical Sonionmems As
Application granted granted Critical
Publication of ATE242587T1 publication Critical patent/ATE242587T1/de

Links

Classifications

    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/005—Electrostatic transducers using semiconductor materials
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R19/00—Electrostatic transducers
    • H04R19/04—Microphones
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R25/00—Deaf-aid sets, i.e. electro-acoustic or electro-mechanical hearing aids; Electric tinnitus maskers providing an auditory perception
    • H04R25/60—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles
    • H04R25/609—Mounting or interconnection of hearing aid parts, e.g. inside tips, housings or to ossicles of circuitry

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Signal Processing (AREA)
  • Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
  • Pressure Sensors (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Air Bags (AREA)
  • Silicon Polymers (AREA)
AT00958265T 1999-09-06 2000-09-06 Silikon basierte sensor-systeme ATE242587T1 (de)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DKPA199901254 1999-09-06
US39162899A 1999-09-07 1999-09-07
US09/570,434 US6522762B1 (en) 1999-09-07 2000-05-12 Silicon-based sensor system
PCT/DK2000/000491 WO2001019134A2 (en) 1999-09-06 2000-09-06 Silicon-based sensor system

Publications (1)

Publication Number Publication Date
ATE242587T1 true ATE242587T1 (de) 2003-06-15

Family

ID=27221189

Family Applications (1)

Application Number Title Priority Date Filing Date
AT00958265T ATE242587T1 (de) 1999-09-06 2000-09-06 Silikon basierte sensor-systeme

Country Status (10)

Country Link
EP (1) EP1214864B1 (de)
JP (2) JP4459498B2 (de)
CN (1) CN1203726C (de)
AT (1) ATE242587T1 (de)
AU (1) AU6984100A (de)
CA (1) CA2383740C (de)
DE (1) DE60003199T2 (de)
DK (1) DK1214864T3 (de)
PL (1) PL209935B1 (de)
WO (1) WO2001019134A2 (de)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6859542B2 (en) 2001-05-31 2005-02-22 Sonion Lyngby A/S Method of providing a hydrophobic layer and a condenser microphone having such a layer
US6696645B2 (en) * 2002-05-08 2004-02-24 The Regents Of The University Of Michigan On-wafer packaging for RF-MEMS
US7142682B2 (en) 2002-12-20 2006-11-28 Sonion Mems A/S Silicon-based transducer for use in hearing instruments and listening devices
US7466835B2 (en) 2003-03-18 2008-12-16 Sonion A/S Miniature microphone with balanced termination
JP2004356708A (ja) * 2003-05-27 2004-12-16 Hosiden Corp 音響検出機構及びその製造方法
CN100515119C (zh) * 2003-08-12 2009-07-15 中国科学院声学研究所 一种用于硅微电容传声器中的芯片及其制备方法
CN100499877C (zh) * 2003-12-17 2009-06-10 中国科学院声学研究所 具有高灵敏度的用于硅微电容传声器的芯片及其制备方法
DE102004011203B4 (de) * 2004-03-04 2010-09-16 Robert Bosch Gmbh Verfahren zum Montieren von Halbleiterchips und entsprechende Halbleiterchipanordnung
JP4553611B2 (ja) 2004-03-15 2010-09-29 三洋電機株式会社 回路装置
DE102004051468A1 (de) * 2004-10-22 2006-04-27 Robert Bosch Gmbh Verfahren zum Montieren von Halbleiterchips und entsprechende Halbleiterchipanordnung
JP4539450B2 (ja) * 2004-11-04 2010-09-08 オムロン株式会社 容量型振動センサ及びその製造方法
DE102005008512B4 (de) 2005-02-24 2016-06-23 Epcos Ag Elektrisches Modul mit einem MEMS-Mikrofon
DE102005008511B4 (de) 2005-02-24 2019-09-12 Tdk Corporation MEMS-Mikrofon
DE102005053767B4 (de) 2005-11-10 2014-10-30 Epcos Ag MEMS-Mikrofon, Verfahren zur Herstellung und Verfahren zum Einbau
DE102005053765B4 (de) 2005-11-10 2016-04-14 Epcos Ag MEMS-Package und Verfahren zur Herstellung
DE102005056759A1 (de) * 2005-11-29 2007-05-31 Robert Bosch Gmbh Mikromechanische Struktur zum Empfang und/oder zur Erzeugung von akustischen Signalen, Verfahren zur Herstellung einer mikromechanischen Struktur und Verwendung einer mikromechanischen Struktur
CN101005718B (zh) * 2006-01-16 2011-04-20 财团法人工业技术研究院 微型声学传感器及其制造方法
JP4771290B2 (ja) * 2006-07-19 2011-09-14 ヤマハ株式会社 圧力センサの製造方法
DE112007003083B4 (de) * 2006-12-22 2019-05-09 Tdk Corp. Mikrofonbaugruppe mit Unterfüllmittel mit niedrigem Wärmeausdehnungskoeffizienten
JP4893380B2 (ja) * 2007-03-09 2012-03-07 ヤマハ株式会社 コンデンサマイク装置
DE102007008518A1 (de) * 2007-02-21 2008-08-28 Infineon Technologies Ag Modul mit einem ein bewegliches Element umfassenden Halbleiterchip
US7557417B2 (en) 2007-02-21 2009-07-07 Infineon Technologies Ag Module comprising a semiconductor chip comprising a movable element
US8767983B2 (en) 2007-06-01 2014-07-01 Infineon Technologies Ag Module including a micro-electro-mechanical microphone
JP2009081624A (ja) * 2007-09-26 2009-04-16 Rohm Co Ltd 半導体センサ装置
TWI336770B (en) * 2007-11-05 2011-02-01 Ind Tech Res Inst Sensor
TWI365525B (en) * 2007-12-24 2012-06-01 Ind Tech Res Inst An ultra thin package for a sensor chip of a micro electro mechanical system
EP2094028B8 (de) * 2008-02-22 2017-03-29 TDK Corporation Miniaturmikrofonanordnung mit Lötdichtungsring
WO2010045107A2 (en) * 2008-10-14 2010-04-22 Knowles Electronics, Llc Microphone having multiple transducer elements
JP2012527835A (ja) * 2009-05-18 2012-11-08 ノールズ エレクトロニクス，リミテッド ライアビリティ カンパニー 低振動感度を有するマイクロホン
KR101609270B1 (ko) 2009-08-12 2016-04-06 삼성전자주식회사 압전형 마이크로 스피커 및 그 제조 방법
DE102009047592B4 (de) * 2009-12-07 2019-06-19 Robert Bosch Gmbh Verfahren zur Herstellung eines Siliziumzwischenträgers
IT1397976B1 (it) * 2009-12-23 2013-02-04 St Microelectronics Rousset Trasduttore di tipo microelettromeccanico e relativo procedimento di assemblaggio.
JP2013093637A (ja) * 2010-02-24 2013-05-16 Panasonic Corp 半導体装置及びその製造方法
TWI491009B (zh) 2010-10-08 2015-07-01 環旭電子股份有限公司 晶片級電磁干擾屏蔽結構及製造方法
CN102456669B (zh) * 2010-10-25 2015-07-22 环旭电子股份有限公司 芯片级电磁干扰屏蔽结构及制造方法
WO2012088688A1 (en) * 2010-12-30 2012-07-05 Goertek Inc. A mems microphone and method for packaging the same
JP5721452B2 (ja) * 2011-01-27 2015-05-20 ローム株式会社 静電容量型ｍｅｍｓセンサ
JP5799619B2 (ja) 2011-06-24 2015-10-28 船井電機株式会社 マイクロホンユニット
DE102011086722A1 (de) * 2011-11-21 2013-05-23 Robert Bosch Gmbh Mikromechanische Funktionsvorrichtung, insbesondere Lautsprechervorrichtung, und entsprechendes Herstellungsverfahren
US20130147040A1 (en) * 2011-12-09 2013-06-13 Robert Bosch Gmbh Mems chip scale package
DE102012203373A1 (de) * 2012-03-05 2013-09-05 Robert Bosch Gmbh Mikromechanische Schallwandleranordnung und ein entsprechendes Herstellungsverfahren
US20140090485A1 (en) * 2012-10-02 2014-04-03 Robert Bosch Gmbh MEMS Pressure Sensor Assembly
WO2014094831A1 (en) 2012-12-18 2014-06-26 Epcos Ag Top-port mems microphone and method of manufacturing the same
US20140312439A1 (en) * 2013-04-19 2014-10-23 Infineon Technologies Ag Microphone Module and Method of Manufacturing Thereof
ITTO20130350A1 (it) 2013-04-30 2014-10-31 St Microelectronics Srl Assemblaggio a livello di fetta di un dispositivo sensore mems e relativo dispositivo sensore mems
US9264832B2 (en) * 2013-10-30 2016-02-16 Solid State System Co., Ltd. Microelectromechanical system (MEMS) microphone with protection film and MEMS microphonechips at wafer level
GB2543443B (en) * 2014-06-10 2017-09-13 Cirrus Logic Int Semiconductor Ltd Packaging for MEMS transducers
CN106716636B (zh) * 2014-09-17 2021-05-28 英特尔公司 具有使用穿硅过孔(tsv)的集成麦克风器件的管芯
CN104780490A (zh) * 2015-04-20 2015-07-15 歌尔声学股份有限公司 一种mems麦克风的封装结构及其制造方法
TWI660466B (zh) * 2017-04-26 2019-05-21 Siliconware Precision Industries Co., Ltd. 封裝結構及其製法
CN111711903B (zh) * 2020-06-24 2021-10-01 歌尔微电子有限公司 微型麦克风防尘装置及mems麦克风

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4533795A (en) * 1983-07-07 1985-08-06 American Telephone And Telegraph Integrated electroacoustic transducer
US5490220A (en) * 1992-03-18 1996-02-06 Knowles Electronics, Inc. Solid state condenser and microphone devices
US5889872A (en) * 1996-07-02 1999-03-30 Motorola, Inc. Capacitive microphone and method therefor
US5856914A (en) * 1996-07-29 1999-01-05 National Semiconductor Corporation Micro-electronic assembly including a flip-chip mounted micro-device and method
US5870482A (en) * 1997-02-25 1999-02-09 Knowles Electronics, Inc. Miniature silicon condenser microphone

Also Published As

Publication number Publication date
WO2001019134A2 (en) 2001-03-15
DK1214864T3 (da) 2003-08-25
CA2383740C (en) 2005-04-05
CN1387741A (zh) 2002-12-25
EP1214864B1 (de) 2003-06-04
EP1214864A2 (de) 2002-06-19
DE60003199T2 (de) 2004-07-01
CN1203726C (zh) 2005-05-25
PL209935B1 (pl) 2011-11-30
CA2383740A1 (en) 2001-03-15
JP2003508998A (ja) 2003-03-04
JP4303742B2 (ja) 2009-07-29
DE60003199D1 (de) 2003-07-10
JP2007028671A (ja) 2007-02-01
PL354095A1 (en) 2003-12-29
WO2001019134A3 (en) 2001-09-07
AU6984100A (en) 2001-04-10
JP4459498B2 (ja) 2010-04-28

Similar Documents

Publication Publication Date Title
ATE242587T1 (de) Silikon basierte sensor-systeme
US6522762B1 (en) Silicon-based sensor system
WO2002016897A3 (en) High temperature circuit structures
ATE243406T1 (de) Druckwandler
TW200707606A (en) Method of manufacturing an assembly and assembly
EP1187204A3 (de) Schaltungsanordnung und Verfahren zum Herstellen derselben
TW200705590A (en) Semiconductor device
SG170618A1 (en) Polymeric oligonucleotide prodrugs
WO2003067646A3 (de) Halbleitersubstrat mit einem elektrisch isolierten bereich, insbesondere zur vertikalintegration
EP2112488A3 (de) Drucksensormodul und elektronische Komponente
EP1434268A3 (de) Elektronisches Substrat, Leistungsmodul und Motorantrieb
EP1458024A3 (de) Zwischenstück und Halbleiteranordnung
US10362406B2 (en) MEMS microphone package
WO2006094025A3 (en) Fabricated adhesive microstructures for making an electrical connection
US20090141913A1 (en) Microelectromechanical system
TW200802647A (en) Semiconductor device, manufacturing method for semiconductor device, electronic component, circuit board, and electronic device
WO2002063687A3 (de) Abschirmvorrichtung für integrierte schaltungen
US10299046B2 (en) MEMS microphone package
ATE322743T1 (de) Elektronikmodul
EP1367643A3 (de) Elektronikmodul
WO2003012930A3 (en) Electric contact and contact element of silicone for fixing an antenna to a circuit card
ATE299295T1 (de) Verfahren zur herstellung elektrisch leitender verbindungen
US20250102391A1 (en) Pressure sensor with flange
WO2003059029A3 (de) Integriertes sensormodul und verfahren zu seiner herstellung
TW200511523A (en) Process for fabricating narrow thickness electronic components

Legal Events

Date Code Title Description
UEP Publication of translation of european patent specification

Ref document number: 1214864

Country of ref document: EP