JP4424555B2 - Dlc被覆工具 - Google Patents

Dlc被覆工具 Download PDF

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Publication number
JP4424555B2
JP4424555B2 JP2008137452A JP2008137452A JP4424555B2 JP 4424555 B2 JP4424555 B2 JP 4424555B2 JP 2008137452 A JP2008137452 A JP 2008137452A JP 2008137452 A JP2008137452 A JP 2008137452A JP 4424555 B2 JP4424555 B2 JP 4424555B2
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JP
Japan
Prior art keywords
film
dlc
coated tool
cutting
dlc film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2008137452A
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English (en)
Japanese (ja)
Other versions
JP2009006470A (ja
JP2009006470A5 (enExample
Inventor
浩史 滝川
祐史 長谷川
真 瀧
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyohashi University of Technology NUC
Onward Giken Co Ltd
Original Assignee
Toyohashi University of Technology NUC
Onward Giken Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyohashi University of Technology NUC, Onward Giken Co Ltd filed Critical Toyohashi University of Technology NUC
Priority to JP2008137452A priority Critical patent/JP4424555B2/ja
Publication of JP2009006470A publication Critical patent/JP2009006470A/ja
Publication of JP2009006470A5 publication Critical patent/JP2009006470A5/ja
Application granted granted Critical
Publication of JP4424555B2 publication Critical patent/JP4424555B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26Deposition of carbon only
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605Carbon

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  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Drilling Tools (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP2008137452A 2007-06-01 2008-05-27 Dlc被覆工具 Active JP4424555B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2008137452A JP4424555B2 (ja) 2007-06-01 2008-05-27 Dlc被覆工具

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007146542 2007-06-01
JP2008137452A JP4424555B2 (ja) 2007-06-01 2008-05-27 Dlc被覆工具

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2009137109A Division JP4780734B2 (ja) 2007-06-01 2009-06-08 Dlc被覆工具

Publications (3)

Publication Number Publication Date
JP2009006470A JP2009006470A (ja) 2009-01-15
JP2009006470A5 JP2009006470A5 (enExample) 2009-03-05
JP4424555B2 true JP4424555B2 (ja) 2010-03-03

Family

ID=40093642

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2008137452A Active JP4424555B2 (ja) 2007-06-01 2008-05-27 Dlc被覆工具
JP2009137109A Active JP4780734B2 (ja) 2007-06-01 2009-06-08 Dlc被覆工具

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2009137109A Active JP4780734B2 (ja) 2007-06-01 2009-06-08 Dlc被覆工具

Country Status (2)

Country Link
JP (2) JP4424555B2 (enExample)
WO (1) WO2008149824A1 (enExample)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5568268B2 (ja) 2009-09-15 2014-08-06 株式会社神戸製鋼所 半導体検査装置用コンタクトプローブピン
CA2788142C (en) * 2010-02-04 2019-02-19 Oerlikon Trading Ag, Trubbach Cutting tools with al-cr-b-n / ti-al-n multilayer coatings
JP5840835B2 (ja) * 2010-11-12 2016-01-06 京セラ株式会社 表面被覆部材および表面被覆切削工具
DE102011105645A1 (de) * 2011-06-07 2012-12-13 Oerlikon Trading Ag, Trübbach Entschichtungsverfahren für harte Kohlenstoffschichten
EP2628817B1 (en) * 2012-02-15 2016-11-02 IHI Hauzer Techno Coating B.V. A coated article of martensitic steel and a method of forming a coated article of steel
EP2916749A1 (en) * 2012-11-12 2015-09-16 Smith & Nephew, Inc. Surgical instrument
CN104797356B (zh) * 2012-11-19 2017-10-03 株式会社Uacj 扩管插塞及金属管的扩管方法
JP2015058692A (ja) * 2013-09-20 2015-03-30 三星ダイヤモンド工業株式会社 スクライビングホイール用ピン、ホルダユニット及びスクライブ装置
JP5852619B2 (ja) 2013-09-24 2016-02-03 ユニオンツール株式会社 非晶質炭素含有皮膜
JP2015157338A (ja) * 2014-02-25 2015-09-03 神奈川県 切削工具及び切削加工方法
JP5950419B2 (ja) * 2014-03-04 2016-07-13 有限会社クローバーテック 複合材料用チップソー
JP6257105B2 (ja) * 2016-02-12 2018-01-10 有限会社クローバーテック 複合材料用チップソー
JP6583921B2 (ja) * 2016-06-30 2019-10-02 株式会社谷テック コンポジット材用チップソー
JP2018168397A (ja) * 2017-03-29 2018-11-01 アイシン精機株式会社 非晶質カーボン被膜の製造方法、非晶質カーボン被膜及び切削工具
JP6935642B2 (ja) * 2017-11-28 2021-09-15 住友電工ハードメタル株式会社 水溶性ミスト加工用ドリル
JP2019112693A (ja) * 2017-12-25 2019-07-11 株式会社デンソー 摺動部材およびその製造方法
WO2021112064A1 (ja) * 2019-12-06 2021-06-10 富士電機株式会社 蒸気タービン部材
JP6962998B2 (ja) * 2019-12-17 2021-11-05 株式会社リケン シリンダとピストンリングとの組み合わせ
JP7023388B1 (ja) * 2020-04-24 2022-02-21 住友電工ハードメタル株式会社 切削工具
EP4091745B1 (en) * 2020-04-24 2024-07-10 Sumitomo Electric Hardmetal Corp. Cutting tool
JP7032579B1 (ja) * 2020-04-24 2022-03-08 住友電工ハードメタル株式会社 切削工具
JP7268901B2 (ja) * 2020-12-22 2023-05-08 日本アイ・ティ・エフ株式会社 摺動部材および摺動部材の製造方法
WO2022254611A1 (ja) * 2021-06-02 2022-12-08 住友電工ハードメタル株式会社 切削工具
CN116324233B (zh) * 2021-09-30 2023-09-19 帝伯爱尔株式会社 滑动构件

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5401543A (en) * 1993-11-09 1995-03-28 Minnesota Mining And Manufacturing Company Method for forming macroparticle-free DLC films by cathodic arc discharge
JPH10324971A (ja) * 1997-05-27 1998-12-08 Kyocera Corp 装飾部材
JP4251738B2 (ja) * 1998-12-25 2009-04-08 住友電気工業株式会社 硬質被膜及び被覆部材
JP3719708B2 (ja) * 2001-06-13 2005-11-24 住友電気工業株式会社 非晶質カーボン被覆工具およびその製造方法
JP2003251503A (ja) * 2001-12-26 2003-09-09 Sumitomo Electric Ind Ltd 表面被覆切削工具
JP2007083382A (ja) * 2005-08-26 2007-04-05 Sumitomo Electric Hardmetal Corp 硬質炭素被覆工具

Also Published As

Publication number Publication date
JP2009006470A (ja) 2009-01-15
JP2009241252A (ja) 2009-10-22
WO2008149824A1 (ja) 2008-12-11
JP4780734B2 (ja) 2011-09-28

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