JP4360736B2 - 不揮発性半導体記憶装置および不揮発性半導体記憶装置のデータ消去方法 - Google Patents
不揮発性半導体記憶装置および不揮発性半導体記憶装置のデータ消去方法 Download PDFInfo
- Publication number
- JP4360736B2 JP4360736B2 JP2000097705A JP2000097705A JP4360736B2 JP 4360736 B2 JP4360736 B2 JP 4360736B2 JP 2000097705 A JP2000097705 A JP 2000097705A JP 2000097705 A JP2000097705 A JP 2000097705A JP 4360736 B2 JP4360736 B2 JP 4360736B2
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- Japan
- Prior art keywords
- memory
- erase
- pulse
- threshold voltage
- memory transistor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title claims description 57
- 238000000034 method Methods 0.000 title claims description 47
- 230000015654 memory Effects 0.000 claims description 479
- 239000000758 substrate Substances 0.000 claims description 28
- 239000011159 matrix material Substances 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 89
- 238000009826 distribution Methods 0.000 description 48
- 238000012795 verification Methods 0.000 description 25
- 230000008569 process Effects 0.000 description 24
- 238000011084 recovery Methods 0.000 description 24
- 230000008859 change Effects 0.000 description 19
- 230000004048 modification Effects 0.000 description 14
- 238000012986 modification Methods 0.000 description 14
- 230000000694 effects Effects 0.000 description 7
- 239000002784 hot electron Substances 0.000 description 6
- 238000012545 processing Methods 0.000 description 5
- 230000006870 function Effects 0.000 description 4
- LZIAMMQBHJIZAG-UHFFFAOYSA-N 2-[di(propan-2-yl)amino]ethyl carbamimidothioate Chemical compound CC(C)N(C(C)C)CCSC(N)=N LZIAMMQBHJIZAG-UHFFFAOYSA-N 0.000 description 3
- 230000004913 activation Effects 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 230000007257 malfunction Effects 0.000 description 3
- 238000004904 shortening Methods 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
- G11C16/14—Circuits for erasing electrically, e.g. erase voltage switching circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/3404—Convergence or correction of memory cell threshold voltages; Repair or recovery of overerased or overprogrammed cells
- G11C16/3409—Circuits or methods to recover overerased nonvolatile memory cells detected during erase verification, usually by means of a "soft" programming step
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/34—Determination of programming status, e.g. threshold voltage, overprogramming or underprogramming, retention
- G11C16/3404—Convergence or correction of memory cell threshold voltages; Repair or recovery of overerased or overprogrammed cells
Landscapes
- Read Only Memory (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000097705A JP4360736B2 (ja) | 2000-01-27 | 2000-03-31 | 不揮発性半導体記憶装置および不揮発性半導体記憶装置のデータ消去方法 |
| US09/676,758 US6330192B1 (en) | 2000-01-27 | 2000-10-02 | Nonvolatile semiconductor memory device and method of erasing data of nonvolatile semiconductor memory device |
| KR10-2000-0073248A KR100381804B1 (ko) | 2000-01-27 | 2000-12-05 | 비휘발성 반도체 기억 장치 및 비휘발성 반도체 기억장치의 데이터 소거 방법 |
| US09/985,013 US6567316B1 (en) | 2000-01-27 | 2001-11-01 | Nonvolatile semiconductor memory device and method of erasing data of nonvolatile semiconductor memory device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000018508 | 2000-01-27 | ||
| JP2000-18508 | 2000-01-27 | ||
| JP2000097705A JP4360736B2 (ja) | 2000-01-27 | 2000-03-31 | 不揮発性半導体記憶装置および不揮発性半導体記憶装置のデータ消去方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001283595A JP2001283595A (ja) | 2001-10-12 |
| JP2001283595A5 JP2001283595A5 (enExample) | 2006-09-28 |
| JP4360736B2 true JP4360736B2 (ja) | 2009-11-11 |
Family
ID=26584280
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000097705A Expired - Lifetime JP4360736B2 (ja) | 2000-01-27 | 2000-03-31 | 不揮発性半導体記憶装置および不揮発性半導体記憶装置のデータ消去方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US6330192B1 (enExample) |
| JP (1) | JP4360736B2 (enExample) |
| KR (1) | KR100381804B1 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2731959C1 (ru) * | 2019-10-02 | 2020-09-09 | Акционерное общество "Центральный научно-исследовательский радиотехнический институт имени академика А.И. Берга" | Устройство и способ стирания информации с системы адресации микросхемы |
Families Citing this family (63)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6768165B1 (en) | 1997-08-01 | 2004-07-27 | Saifun Semiconductors Ltd. | Two bit non-volatile electrically erasable and programmable semiconductor memory cell utilizing asymmetrical charge trapping |
| TW439293B (en) * | 1999-03-18 | 2001-06-07 | Toshiba Corp | Nonvolatile semiconductor memory |
| US6914827B2 (en) * | 1999-07-28 | 2005-07-05 | Samsung Electronics Co., Ltd. | Flash memory device capable of preventing an over-erase of flash memory cells and erase method thereof |
| US7366020B2 (en) * | 1999-07-28 | 2008-04-29 | Samsung Electronics Co., Ltd. | Flash memory device capable of preventing an overerase of flash memory cells and erase method thereof |
| KR100308192B1 (ko) * | 1999-07-28 | 2001-11-01 | 윤종용 | 플래시 메모리 셀들의 과소거를 방지할 수 있는 플래시 메모리장치 및 그것의 소거 방법 |
| JP4360736B2 (ja) * | 2000-01-27 | 2009-11-11 | 株式会社ルネサステクノロジ | 不揮発性半導体記憶装置および不揮発性半導体記憶装置のデータ消去方法 |
| US6928001B2 (en) | 2000-12-07 | 2005-08-09 | Saifun Semiconductors Ltd. | Programming and erasing methods for a non-volatile memory cell |
| US6501681B1 (en) * | 2000-08-15 | 2002-12-31 | Advanced Micro Devices, Inc. | Using a low drain bias during erase verify to ensure complete removal of residual charge in the nitride in sonos non-volatile memories |
| KR100519534B1 (ko) * | 2000-11-09 | 2005-10-05 | 주식회사 하이닉스반도체 | 플래쉬 메모리 소자의 소거 방법 |
| DE60140039D1 (de) * | 2001-02-05 | 2009-11-12 | St Microelectronics Srl | Löschverfahren für einen Flash-Speicher |
| US6556481B1 (en) * | 2001-02-21 | 2003-04-29 | Aplus Flash Technology, Inc. | 3-step write operation nonvolatile semiconductor one-transistor, nor-type flash EEPROM memory cell |
| US6584017B2 (en) | 2001-04-05 | 2003-06-24 | Saifun Semiconductors Ltd. | Method for programming a reference cell |
| TWI292914B (enExample) * | 2002-01-17 | 2008-01-21 | Macronix Int Co Ltd | |
| US7190620B2 (en) | 2002-01-31 | 2007-03-13 | Saifun Semiconductors Ltd. | Method for operating a memory device |
| US6975536B2 (en) * | 2002-01-31 | 2005-12-13 | Saifun Semiconductors Ltd. | Mass storage array and methods for operation thereof |
| US6700818B2 (en) | 2002-01-31 | 2004-03-02 | Saifun Semiconductors Ltd. | Method for operating a memory device |
| US6862223B1 (en) | 2002-07-05 | 2005-03-01 | Aplus Flash Technology, Inc. | Monolithic, combo nonvolatile memory allowing byte, page and block write with no disturb and divided-well in the cell array using a unified cell structure and technology with a new scheme of decoder and layout |
| US6917544B2 (en) | 2002-07-10 | 2005-07-12 | Saifun Semiconductors Ltd. | Multiple use memory chip |
| US7136304B2 (en) | 2002-10-29 | 2006-11-14 | Saifun Semiconductor Ltd | Method, system and circuit for programming a non-volatile memory array |
| JP4007909B2 (ja) * | 2002-12-26 | 2007-11-14 | 株式会社ルネサステクノロジ | 不揮発性半導体記憶装置のデータ消去方法 |
| US7178004B2 (en) | 2003-01-31 | 2007-02-13 | Yan Polansky | Memory array programming circuit and a method for using the circuit |
| US7142464B2 (en) | 2003-04-29 | 2006-11-28 | Saifun Semiconductors Ltd. | Apparatus and methods for multi-level sensing in a memory array |
| US7085170B2 (en) | 2003-08-07 | 2006-08-01 | Micron Technology, Ind. | Method for erasing an NROM cell |
| JP4424952B2 (ja) * | 2003-09-16 | 2010-03-03 | 株式会社ルネサステクノロジ | 不揮発性半導体記憶装置 |
| US7123532B2 (en) | 2003-09-16 | 2006-10-17 | Saifun Semiconductors Ltd. | Operating array cells with matched reference cells |
| TWI247311B (en) * | 2004-03-25 | 2006-01-11 | Elite Semiconductor Esmt | Circuit and method for preventing nonvolatile memory from over erasure |
| US7652930B2 (en) | 2004-04-01 | 2010-01-26 | Saifun Semiconductors Ltd. | Method, circuit and system for erasing one or more non-volatile memory cells |
| US7317633B2 (en) | 2004-07-06 | 2008-01-08 | Saifun Semiconductors Ltd | Protection of NROM devices from charge damage |
| US7540167B2 (en) | 2004-07-08 | 2009-06-02 | Dean Murphy | Condensed water production system |
| KR100672938B1 (ko) | 2004-07-21 | 2007-01-24 | 삼성전자주식회사 | 플래시 메모리를 위한 선택적 소거 방법 |
| US7095655B2 (en) | 2004-08-12 | 2006-08-22 | Saifun Semiconductors Ltd. | Dynamic matching of signal path and reference path for sensing |
| US7638850B2 (en) | 2004-10-14 | 2009-12-29 | Saifun Semiconductors Ltd. | Non-volatile memory structure and method of fabrication |
| US7535765B2 (en) | 2004-12-09 | 2009-05-19 | Saifun Semiconductors Ltd. | Non-volatile memory device and method for reading cells |
| EP1686592A3 (en) | 2005-01-19 | 2007-04-25 | Saifun Semiconductors Ltd. | Partial erase verify |
| US8053812B2 (en) | 2005-03-17 | 2011-11-08 | Spansion Israel Ltd | Contact in planar NROM technology |
| EP1729306A1 (en) * | 2005-06-01 | 2006-12-06 | STMicroelectronics S.r.l. | NAND flash memory device with compacted cell threshold voltage distribution |
| US8400841B2 (en) | 2005-06-15 | 2013-03-19 | Spansion Israel Ltd. | Device to program adjacent storage cells of different NROM cells |
| US7184313B2 (en) | 2005-06-17 | 2007-02-27 | Saifun Semiconductors Ltd. | Method circuit and system for compensating for temperature induced margin loss in non-volatile memory cells |
| EP1746645A3 (en) | 2005-07-18 | 2009-01-21 | Saifun Semiconductors Ltd. | Memory array with sub-minimum feature size word line spacing and method of fabrication |
| JP2007035214A (ja) * | 2005-07-29 | 2007-02-08 | Renesas Technology Corp | 不揮発性半導体記憶装置 |
| US7668017B2 (en) | 2005-08-17 | 2010-02-23 | Saifun Semiconductors Ltd. | Method of erasing non-volatile memory cells |
| US8116142B2 (en) * | 2005-09-06 | 2012-02-14 | Infineon Technologies Ag | Method and circuit for erasing a non-volatile memory cell |
| US7221138B2 (en) | 2005-09-27 | 2007-05-22 | Saifun Semiconductors Ltd | Method and apparatus for measuring charge pump output current |
| US7352627B2 (en) | 2006-01-03 | 2008-04-01 | Saifon Semiconductors Ltd. | Method, system, and circuit for operating a non-volatile memory array |
| US7808818B2 (en) | 2006-01-12 | 2010-10-05 | Saifun Semiconductors Ltd. | Secondary injection for NROM |
| US7760554B2 (en) | 2006-02-21 | 2010-07-20 | Saifun Semiconductors Ltd. | NROM non-volatile memory and mode of operation |
| US8253452B2 (en) | 2006-02-21 | 2012-08-28 | Spansion Israel Ltd | Circuit and method for powering up an integrated circuit and an integrated circuit utilizing same |
| US7692961B2 (en) | 2006-02-21 | 2010-04-06 | Saifun Semiconductors Ltd. | Method, circuit and device for disturb-control of programming nonvolatile memory cells by hot-hole injection (HHI) and by channel hot-electron (CHE) injection |
| US7638835B2 (en) | 2006-02-28 | 2009-12-29 | Saifun Semiconductors Ltd. | Double density NROM with nitride strips (DDNS) |
| US7701779B2 (en) | 2006-04-27 | 2010-04-20 | Sajfun Semiconductors Ltd. | Method for programming a reference cell |
| US7319615B1 (en) * | 2006-08-02 | 2008-01-15 | Spansion Llc | Ramp gate erase for dual bit flash memory |
| US7605579B2 (en) | 2006-09-18 | 2009-10-20 | Saifun Semiconductors Ltd. | Measuring and controlling current consumption and output current of charge pumps |
| KR101348173B1 (ko) * | 2007-05-25 | 2014-01-08 | 삼성전자주식회사 | 플래시 메모리 장치, 그것의 소거 및 프로그램 방법들,그리고 그것을 포함한 메모리 시스템 |
| JP2009163782A (ja) * | 2007-12-13 | 2009-07-23 | Toshiba Corp | 半導体記憶装置 |
| US7995392B2 (en) | 2007-12-13 | 2011-08-09 | Kabushiki Kaisha Toshiba | Semiconductor memory device capable of shortening erase time |
| KR101506336B1 (ko) * | 2008-10-10 | 2015-03-27 | 삼성전자주식회사 | 산화막 복구 기능을 갖는 비휘발성 메모리 장치 그리고 그것의 블록 관리 방법 |
| JP5450013B2 (ja) | 2009-07-15 | 2014-03-26 | 株式会社東芝 | 不揮発性半導体記憶装置 |
| KR20110014923A (ko) * | 2009-08-06 | 2011-02-14 | 삼성전자주식회사 | 불휘발성 메모리 장치, 그것의 동작 방법, 그리고 그것을 포함하는 메모리 시스템 |
| JP5385220B2 (ja) * | 2010-06-30 | 2014-01-08 | ルネサスエレクトロニクス株式会社 | 不揮発性メモリ、データ処理装置、及びマイクロコンピュータ応用システム |
| KR20120030818A (ko) | 2010-09-20 | 2012-03-29 | 삼성전자주식회사 | 불휘발성 메모리 장치 및 그것의 소거 방법 |
| US9001578B2 (en) * | 2012-09-11 | 2015-04-07 | Seagate Technology Llc | Soft erasure of memory cells |
| KR102337044B1 (ko) * | 2015-07-27 | 2021-12-09 | 에스케이하이닉스 주식회사 | 반도체장치 및 반도체시스템 |
| CN113409862A (zh) * | 2021-06-28 | 2021-09-17 | 芯天下技术股份有限公司 | 一种存储器擦除方法、装置、电子设备及存储介质 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05283708A (ja) * | 1992-04-02 | 1993-10-29 | Mitsubishi Electric Corp | 不揮発性半導体記憶装置,その製造方法および試験方法 |
| JPH0628875A (ja) | 1992-07-10 | 1994-02-04 | Sony Corp | フラッシュ型e2 promの消去方法 |
| JPH06251593A (ja) * | 1993-02-24 | 1994-09-09 | Matsushita Electron Corp | フラッシュメモリの消去あるいは書き込み制御方法 |
| US5400286A (en) * | 1993-08-17 | 1995-03-21 | Catalyst Semiconductor Corp. | Self-recovering erase scheme to enhance flash memory endurance |
| US5661685A (en) * | 1995-09-25 | 1997-08-26 | Xilinx, Inc. | Programmable logic device with configurable power supply |
| JPH09320282A (ja) * | 1996-05-27 | 1997-12-12 | Sharp Corp | 不揮発性半導体記憶装置の消去制御方法 |
| KR100257854B1 (ko) * | 1997-12-10 | 2000-06-01 | 김영환 | 플래쉬 메모리의 소거 방법 |
| DE69824386D1 (de) * | 1998-01-22 | 2004-07-15 | St Microelectronics Srl | Verfahren für kontrolliertes Löschen von Speicheranordnungen, insbesondere Analog- oder Mehrwert-Flash-EEPROM Anordnungen |
| JP4360736B2 (ja) * | 2000-01-27 | 2009-11-11 | 株式会社ルネサステクノロジ | 不揮発性半導体記憶装置および不揮発性半導体記憶装置のデータ消去方法 |
| US6252803B1 (en) * | 2000-10-23 | 2001-06-26 | Advanced Micro Devices, Inc. | Automatic program disturb with intelligent soft programming for flash cells |
-
2000
- 2000-03-31 JP JP2000097705A patent/JP4360736B2/ja not_active Expired - Lifetime
- 2000-10-02 US US09/676,758 patent/US6330192B1/en not_active Expired - Lifetime
- 2000-12-05 KR KR10-2000-0073248A patent/KR100381804B1/ko not_active Expired - Lifetime
-
2001
- 2001-11-01 US US09/985,013 patent/US6567316B1/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2731959C1 (ru) * | 2019-10-02 | 2020-09-09 | Акционерное общество "Центральный научно-исследовательский радиотехнический институт имени академика А.И. Берга" | Устройство и способ стирания информации с системы адресации микросхемы |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2001283595A (ja) | 2001-10-12 |
| US6567316B1 (en) | 2003-05-20 |
| KR20010077936A (ko) | 2001-08-20 |
| KR100381804B1 (ko) | 2003-05-01 |
| US6330192B1 (en) | 2001-12-11 |
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