JP4359535B2 - 弾性表面波素子 - Google Patents

弾性表面波素子 Download PDF

Info

Publication number
JP4359535B2
JP4359535B2 JP2004147241A JP2004147241A JP4359535B2 JP 4359535 B2 JP4359535 B2 JP 4359535B2 JP 2004147241 A JP2004147241 A JP 2004147241A JP 2004147241 A JP2004147241 A JP 2004147241A JP 4359535 B2 JP4359535 B2 JP 4359535B2
Authority
JP
Japan
Prior art keywords
acoustic wave
surface acoustic
crystal
main electrode
comb
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2004147241A
Other languages
English (en)
Japanese (ja)
Other versions
JP2005253034A5 (enExample
JP2005253034A (ja
Inventor
真 佐々木
晴彦 藤本
恭輔 尾崎
聡 和賀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alps Alpine Co Ltd
Original Assignee
Alps Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co Ltd filed Critical Alps Electric Co Ltd
Priority to JP2004147241A priority Critical patent/JP4359535B2/ja
Priority to US11/050,064 priority patent/US7180223B2/en
Priority to EP05002360A priority patent/EP1562288A3/en
Publication of JP2005253034A publication Critical patent/JP2005253034A/ja
Publication of JP2005253034A5 publication Critical patent/JP2005253034A5/ja
Application granted granted Critical
Publication of JP4359535B2 publication Critical patent/JP4359535B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02818—Means for compensation or elimination of undesirable effects
    • H03H9/02929—Means for compensation or elimination of undesirable effects of ageing changes of characteristics, e.g. electro-acousto-migration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/08—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of resonators or networks using surface acoustic waves
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14538—Formation
    • H03H9/14541—Multilayer finger or busbar electrode

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2004147241A 2004-02-06 2004-05-18 弾性表面波素子 Expired - Fee Related JP4359535B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2004147241A JP4359535B2 (ja) 2004-02-06 2004-05-18 弾性表面波素子
US11/050,064 US7180223B2 (en) 2004-02-06 2005-02-03 Surface acoustic wave device
EP05002360A EP1562288A3 (en) 2004-02-06 2005-02-04 Surface acoustic wave device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2004030211 2004-02-06
JP2004147241A JP4359535B2 (ja) 2004-02-06 2004-05-18 弾性表面波素子

Publications (3)

Publication Number Publication Date
JP2005253034A JP2005253034A (ja) 2005-09-15
JP2005253034A5 JP2005253034A5 (enExample) 2008-10-16
JP4359535B2 true JP4359535B2 (ja) 2009-11-04

Family

ID=34680686

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2004147241A Expired - Fee Related JP4359535B2 (ja) 2004-02-06 2004-05-18 弾性表面波素子

Country Status (3)

Country Link
US (1) US7180223B2 (enExample)
EP (1) EP1562288A3 (enExample)
JP (1) JP4359535B2 (enExample)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7795788B2 (en) * 2004-10-26 2010-09-14 Kyocera Corporation Surface acoustic wave element and communication device
JP4279271B2 (ja) * 2005-06-01 2009-06-17 アルプス電気株式会社 弾性表面波素子及びその製造方法
JP4809042B2 (ja) * 2005-11-10 2011-11-02 日本電波工業株式会社 弾性表面波素子及びその製造方法
TWI325687B (en) * 2006-02-23 2010-06-01 Murata Manufacturing Co Boundary acoustic wave device and method for producing the same
US7880278B2 (en) 2006-05-16 2011-02-01 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated circuit having stress tuning layer
DE102009056663B4 (de) * 2009-12-02 2022-08-11 Tdk Electronics Ag Metallisierung mit hoher Leistungsverträglichkeit und hoher elektrischer Leitfähigkeit und Verfahren zur Herstellung
JP2015159470A (ja) * 2014-02-25 2015-09-03 京セラクリスタルデバイス株式会社 弾性表面波素子
DE102015117203A1 (de) * 2015-10-08 2017-04-13 Epcos Ag Drucksensor
JP6904719B2 (ja) * 2017-02-13 2021-07-21 京セラ株式会社 弾性波素子、フィルタ素子および通信装置
JP6986376B2 (ja) * 2017-06-27 2021-12-22 ＮＤＫ ＳＡＷ ｄｅｖｉｃｅｓ株式会社 弾性表面波素子およびその製造方法
JP6991763B2 (ja) * 2017-07-18 2022-01-13 太陽誘電株式会社 弾性波デバイスおよびその製造方法
JP7068974B2 (ja) * 2018-09-06 2022-05-17 太陽誘電株式会社 ラダー型フィルタ及びマルチプレクサ
JP6681380B2 (ja) * 2017-12-28 2020-04-15 太陽誘電株式会社 弾性波デバイス、フィルタおよびマルチプレクサ
US10700662B2 (en) 2017-12-28 2020-06-30 Taiyo Yuden Co., Ltd. Acoustic wave device, filter, and multiplexer
CN108055017A (zh) * 2018-02-11 2018-05-18 海宁市瑞宏科技有限公司 一种用于超带宽声表面波滤波器设计的谐振器结构
JP2020092321A (ja) * 2018-12-05 2020-06-11 太陽誘電株式会社 弾性波デバイスおよびその製造方法、フィルタ並びにマルチプレクサ
JP2020145567A (ja) * 2019-03-06 2020-09-10 株式会社村田製作所 弾性波装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2799645B2 (ja) * 1992-05-15 1998-09-21 富士写真フイルム株式会社 画像形成方法
US6297580B1 (en) * 1998-04-21 2001-10-02 Matsushita Electric Industrial Co., Ltd. Surface acoustic wave device and production method thereof and mobile communication equipment using it
ATE333162T1 (de) * 1998-10-16 2006-08-15 Seiko Epson Corp Akustische oberflächenwellenvorrichtung
US6542285B1 (en) * 1998-12-14 2003-04-01 The Board Of Trustees Of The Leland Stanford Junior University Backswitch poling method for domain patterning of ferroelectric materials
JP3846221B2 (ja) * 2000-07-14 2006-11-15 株式会社村田製作所 弾性表面波素子
JP3735550B2 (ja) * 2001-09-21 2006-01-18 Ｔｄｋ株式会社 弾性表面波装置およびその製造方法
JP4019693B2 (ja) * 2001-11-09 2007-12-12 株式会社村田製作所 弾性表面波素子

Also Published As

Publication number Publication date
US20050174012A1 (en) 2005-08-11
US7180223B2 (en) 2007-02-20
JP2005253034A (ja) 2005-09-15
EP1562288A2 (en) 2005-08-10
EP1562288A3 (en) 2010-04-28

Similar Documents

Publication Publication Date Title
JP4359535B2 (ja) 弾性表面波素子
US11621688B2 (en) Acoustic wave device
US7602099B2 (en) Surface acoustic wave device and method of manufacturing the same
US7535152B2 (en) Lamb wave device
KR100200179B1 (ko) 표면파 장치
US20020057036A1 (en) Surface acoustic wave device
JP3735550B2 (ja) 弾性表面波装置およびその製造方法
JP3414371B2 (ja) 弾性表面波装置及びその製造方法
EP2068442A1 (en) Boundary acoustic wave device
JP4064208B2 (ja) 弾性表面波素子及びその製造方法
JPH0314305A (ja) 弾性表面波装置の製造方法
JP2545983B2 (ja) 弾性表面波装置
JP3971128B2 (ja) 弾性表面波素子
CN119030491B (zh) 一种声波谐振器、声波滤波器及通信设备
JP2936228B2 (ja) 弾性表面波フィルタ
JPH08148966A (ja) 弾性表面波素子電極
JP2010283807A (ja) 弾性表面波装置
JP2006238211A (ja) 弾性表面波素子及びその製造方法
JP2001094382A (ja) 弾性表面波装置およびその製造方法
WO2020261978A1 (ja) 弾性表面波装置及びフィルタ装置
JPH1093368A (ja) 弾性表面波装置の製造方法
JP2002353767A (ja) 弾性表面波装置
CN114584098A (zh) 声表面波谐振器及其制造方法、以及声表面波滤波器
JP2002151998A (ja) 弾性表面波素子

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20060904

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20080902

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20080902

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20080919

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20081104

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20081219

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20090303

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20090421

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20090728

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20090810

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20120814

Year of fee payment: 3

R150 Certificate of patent or registration of utility model

Ref document number: 4359535

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130814

Year of fee payment: 4

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130814

Year of fee payment: 4

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130814

Year of fee payment: 4

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130814

Year of fee payment: 4

R370 Written measure of declining of transfer procedure

Free format text: JAPANESE INTERMEDIATE CODE: R370

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130814

Year of fee payment: 4

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130814

Year of fee payment: 4

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

LAPS Cancellation because of no payment of annual fees