JP4277818B2 - 圧電振動片および圧電デバイス - Google Patents

圧電振動片および圧電デバイス Download PDF

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Publication number
JP4277818B2
JP4277818B2 JP2005081501A JP2005081501A JP4277818B2 JP 4277818 B2 JP4277818 B2 JP 4277818B2 JP 2005081501 A JP2005081501 A JP 2005081501A JP 2005081501 A JP2005081501 A JP 2005081501A JP 4277818 B2 JP4277818 B2 JP 4277818B2
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JP
Japan
Prior art keywords
electrode
base
piezoelectric
vibrating arm
vibrating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2005081501A
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English (en)
Japanese (ja)
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JP2006270177A5 (OSRAM
JP2006270177A (ja
Inventor
祥之 山田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2005081501A priority Critical patent/JP4277818B2/ja
Priority to CNB2006100652903A priority patent/CN100508383C/zh
Priority to US11/387,101 priority patent/US7659798B2/en
Publication of JP2006270177A publication Critical patent/JP2006270177A/ja
Publication of JP2006270177A5 publication Critical patent/JP2006270177A5/ja
Application granted granted Critical
Publication of JP4277818B2 publication Critical patent/JP4277818B2/ja
Priority to US12/643,290 priority patent/US7999637B2/en
Priority to US13/178,197 priority patent/US8405474B2/en
Priority to US13/777,359 priority patent/US8633788B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/21—Crystal tuning forks
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/875—Further connection or lead arrangements, e.g. flexible wiring boards, terminal pins

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  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2005081501A 2005-03-22 2005-03-22 圧電振動片および圧電デバイス Expired - Lifetime JP4277818B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2005081501A JP4277818B2 (ja) 2005-03-22 2005-03-22 圧電振動片および圧電デバイス
CNB2006100652903A CN100508383C (zh) 2005-03-22 2006-03-21 压电振动片和压电器件
US11/387,101 US7659798B2 (en) 2005-03-22 2006-03-22 Piezoelectric vibration piece and piezoelectric device
US12/643,290 US7999637B2 (en) 2005-03-22 2009-12-21 Piezoelectric vibration piece and piezoelectric device
US13/178,197 US8405474B2 (en) 2005-03-22 2011-07-07 Piezoelectric vibration piece and piezoelectric device
US13/777,359 US8633788B2 (en) 2005-03-22 2013-02-26 Piezoelectric vibration piece and piezoelectric device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005081501A JP4277818B2 (ja) 2005-03-22 2005-03-22 圧電振動片および圧電デバイス

Publications (3)

Publication Number Publication Date
JP2006270177A JP2006270177A (ja) 2006-10-05
JP2006270177A5 JP2006270177A5 (OSRAM) 2008-12-11
JP4277818B2 true JP4277818B2 (ja) 2009-06-10

Family

ID=37015818

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005081501A Expired - Lifetime JP4277818B2 (ja) 2005-03-22 2005-03-22 圧電振動片および圧電デバイス

Country Status (3)

Country Link
US (4) US7659798B2 (OSRAM)
JP (1) JP4277818B2 (OSRAM)
CN (1) CN100508383C (OSRAM)

Families Citing this family (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4409979B2 (ja) * 2004-02-10 2010-02-03 シチズンホールディングス株式会社 振動子
TW200633377A (en) * 2005-02-02 2006-09-16 Nihon Dempa Kogyo Co Piezo-electric vibrator
JP4277818B2 (ja) 2005-03-22 2009-06-10 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP4694380B2 (ja) * 2006-02-06 2011-06-08 株式会社日立製作所 薄膜音叉型屈曲振動子及び電気信号処理素子
JP2010060361A (ja) * 2008-09-02 2010-03-18 Murata Mfg Co Ltd 音叉型振動子、音叉型振動子の製造方法および角速度センサ
JP4879963B2 (ja) * 2008-12-25 2012-02-22 日本電波工業株式会社 圧電振動片、圧電振動子及び圧電発振器
JP5369741B2 (ja) * 2009-02-12 2013-12-18 セイコーエプソン株式会社 振動片および振動子
JP2010252302A (ja) * 2009-03-25 2010-11-04 Seiko Epson Corp 屈曲振動片およびそれを用いた発振器
JP2010233339A (ja) * 2009-03-26 2010-10-14 Seiko Epson Corp 圧電モーター、液体噴射装置及び時計
JP5385037B2 (ja) * 2009-07-21 2014-01-08 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、圧電振動子、発振器、電子機器及び電波時計並びに圧電振動片の製造方法
JP5482541B2 (ja) * 2009-10-01 2014-05-07 セイコーエプソン株式会社 振動片、振動子、発振器、及び電子機器
USD646236S1 (en) * 2009-11-05 2011-10-04 Seiko Instruments Inc. Quartz crystal
USD643383S1 (en) * 2009-11-06 2011-08-16 Seiko Instruments Inc. Quartz crystal
USD653631S1 (en) * 2009-11-06 2012-02-07 Seiko Instruments Inc. Quartz crystal
USD643382S1 (en) * 2009-11-06 2011-08-16 Seiko Instruments Inc. Quartz crystal
USD634287S1 (en) * 2009-11-06 2011-03-15 Seiko Instruments Inc. Quartz crystal
USD643385S1 (en) * 2009-11-06 2011-08-16 Seiko Instruments Inc. Quartz crystal
US8299863B2 (en) * 2009-12-25 2012-10-30 Seiko Epson Corporation Flexural mode resonator element, resonating device, and electronic apparatus
US20110227458A1 (en) * 2010-03-17 2011-09-22 Seiko Epson Corporation Piezoelectric resonator element, piezoelectric device, and electronic apparatus
US8304968B2 (en) * 2010-03-17 2012-11-06 Seiko Epson Corporation Vibrator element, vibrator, oscillator, and electronic apparatus
USD646237S1 (en) * 2010-03-29 2011-10-04 Seiko Instruments Inc. Quartz crystal
USD643386S1 (en) * 2010-03-29 2011-08-16 Seiko Instruments Inc. Quartz crystal
USD643384S1 (en) * 2010-03-29 2011-08-16 Seiko Instruments Inc. Quartz crystal
USD634288S1 (en) * 2010-03-29 2011-03-15 Seiko Instruments Inc. Quartz crystal
USD643387S1 (en) * 2010-03-29 2011-08-16 Seiko Instruments Inc. Quartz crystal
USD653632S1 (en) * 2010-03-29 2012-02-07 Seiko Instruments Inc. Quartz crystal
JP5499852B2 (ja) 2010-04-08 2014-05-21 セイコーエプソン株式会社 振動片、振動子
USD646655S1 (en) * 2010-06-16 2011-10-11 Seiko Instruments Inc. Quartz crystal
USD646649S1 (en) * 2010-06-16 2011-10-11 Seiko Instruments Inc. Quartz crystal
USD646656S1 (en) * 2010-06-16 2011-10-11 Seiko Instruments Inc. Quartz crystal
USD646654S1 (en) * 2010-06-16 2011-10-11 Seiko Instruments Inc. Quartz crystal
USD647071S1 (en) * 2010-06-16 2011-10-18 Seiko Instruments Inc. Quartz crystal
USD646648S1 (en) * 2010-06-16 2011-10-11 Seiko Instruments Inc. Quartz crystal
USD646652S1 (en) * 2010-06-16 2011-10-11 Seiko Instruments Inc. Quartz crystal
USD646651S1 (en) * 2010-06-16 2011-10-11 Seiko Instruments Inc. Quartz crystal
USD637982S1 (en) * 2010-06-16 2011-05-17 Seiko Instruments Inc. Quartz crystal
USD648288S1 (en) * 2010-06-16 2011-11-08 Seiko Instruments Inc. Quartz crystal
USD646653S1 (en) * 2010-06-16 2011-10-11 Seiko Instruments Inc. Quartz crystal
USD646650S1 (en) * 2010-06-16 2011-10-11 Seiko Instruments Inc. Quartz crystal
JP2012039509A (ja) * 2010-08-10 2012-02-23 Seiko Instruments Inc 圧電振動片、圧電振動子、発振器、電子機器および電波時計
US8963402B2 (en) * 2010-11-30 2015-02-24 Seiko Epson Corporation Piezoelectric vibrator element, piezoelectric module, and electronic device
JP5685962B2 (ja) * 2011-02-02 2015-03-18 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP5838749B2 (ja) * 2011-11-16 2016-01-06 セイコーエプソン株式会社 振動子、振動デバイスおよび電子機器
JP2013197994A (ja) * 2012-03-21 2013-09-30 Seiko Instruments Inc 圧電振動片、圧電振動子、発振器、電子機器及び電波時計
JP5696751B2 (ja) * 2013-08-29 2015-04-08 セイコーエプソン株式会社 振動片および振動子
JP6676403B2 (ja) 2016-02-23 2020-04-08 エスアイアイ・クリスタルテクノロジー株式会社 圧電振動片、及び圧電振動子
WO2017203757A1 (ja) * 2016-05-25 2017-11-30 株式会社村田製作所 共振子及び共振装置
JP6927768B2 (ja) * 2017-06-30 2021-09-01 京セラ株式会社 水晶デバイス
US10924866B2 (en) * 2019-02-27 2021-02-16 Nokia Technologies Oy Piezoelectric speaker
CN115596797B (zh) * 2022-10-17 2025-05-02 南京航空航天大学 一种贴片式压电抑振结构及其控制方法

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3858575B2 (ja) 2000-09-01 2006-12-13 セイコーエプソン株式会社 振動片、振動子、発振器及び携帯電話装置
EP1788702A3 (en) * 2000-12-25 2008-01-16 Seiko Epson Corporation Vibrating piece, vibrator, oscillator, and electronic equipment
JP3812724B2 (ja) * 2001-09-13 2006-08-23 セイコーエプソン株式会社 振動片、振動子、発振器及び電子機器
JP4026074B2 (ja) * 2003-06-30 2007-12-26 有限会社ピエデック技術研究所 水晶振動子と水晶ユニットと水晶発振器
JP4329492B2 (ja) * 2003-10-28 2009-09-09 セイコーエプソン株式会社 圧電振動片と圧電デバイスおよびこれらの製造方法、ならびに圧電デバイスを利用した携帯電話装置および圧電デバイスを利用した電子機器
JP4409979B2 (ja) * 2004-02-10 2010-02-03 シチズンホールディングス株式会社 振動子
DE602004027033D1 (de) * 2004-09-03 2010-06-17 Eta Sa Mft Horlogere Suisse Quartzresonator mit sehr kleinen Abmessungen
EP1641118B1 (en) * 2004-09-24 2010-04-21 Seiko Epson Corporation Piezoelectric resonator element and piezoelectric device
JP4301200B2 (ja) * 2004-10-20 2009-07-22 セイコーエプソン株式会社 圧電振動片および圧電デバイス
JP4277818B2 (ja) * 2005-03-22 2009-06-10 セイコーエプソン株式会社 圧電振動片および圧電デバイス

Also Published As

Publication number Publication date
US7659798B2 (en) 2010-02-09
US20100096955A1 (en) 2010-04-22
US20060214749A1 (en) 2006-09-28
US20110260587A1 (en) 2011-10-27
US20130169115A1 (en) 2013-07-04
US7999637B2 (en) 2011-08-16
CN1838533A (zh) 2006-09-27
CN100508383C (zh) 2009-07-01
US8633788B2 (en) 2014-01-21
JP2006270177A (ja) 2006-10-05
US8405474B2 (en) 2013-03-26

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