JP4256260B2 - 電子デバイス製造中の接着方法 - Google Patents
電子デバイス製造中の接着方法 Download PDFInfo
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- JP4256260B2 JP4256260B2 JP2003543075A JP2003543075A JP4256260B2 JP 4256260 B2 JP4256260 B2 JP 4256260B2 JP 2003543075 A JP2003543075 A JP 2003543075A JP 2003543075 A JP2003543075 A JP 2003543075A JP 4256260 B2 JP4256260 B2 JP 4256260B2
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- plasma
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- plasma treatment
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Classifications
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- H—ELECTRICITY
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- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/83—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a layer connector
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J5/00—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers
- C09J5/02—Adhesive processes in general; Adhesive processes not provided for elsewhere, e.g. relating to primers involving pretreatment of the surfaces to be joined
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- H—ELECTRICITY
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4803—Insulating or insulated parts, e.g. mountings, containers, diamond heatsinks
- H01L21/481—Insulating layers on insulating parts, with or without metallisation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L24/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L24/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2400/00—Presence of inorganic and organic materials
- C09J2400/20—Presence of organic materials
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
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- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/28—Structure, shape, material or disposition of the layer connectors prior to the connecting process
- H01L2224/29—Structure, shape, material or disposition of the layer connectors prior to the connecting process of an individual layer connector
- H01L2224/29001—Core members of the layer connector
- H01L2224/29099—Material
- H01L2224/291—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/29101—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of less than 400°C
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
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Description
W.Lynch、Handbook of Silicone Rubber Fabrication、Van Nostrand Reinhold Company、New York、1978
a)ポリマー材料のプラズマ処理と、
b)被接着物のプラズマ処理と、
c)その後前記ポリマー材料を前記被接着物に接触させ、それによって前記ポリマー材料と前記被接着物との接着を形成することを含む。
「1つ(one)」および「1つ(an)」は1つまたはそれ以上を意味する。
この方法は、ポリマー材料と基板とを接着する方法に関する。本方法は電子デバイスおよび電子デバイスパッケージを製造する間に使用することができる。本発明の一実施形態において、本方法は、
a)ポリマー材料のプラズマ処理、
b)基板のプラズマ処理、
c)半導体のプラズマ処理、
d)前記ポリマー材料と前記基板との接触、
e)前記半導体と前記ポリマー材料との接触を含む。
A)ポリマー材料のプラズマ処理、
B)被接着物のプラズマ処理、
C)その後前記ポリマー材料と前記被接着物を接触させることを含み、それによってポリマー材料と被接着物とを接着する。この実施形態では、被接着物は半導体または基板のいずれかであることができる。この実施形態では、方法は、工程A)の後、および工程C)の前にポリマー材料を保存すること、または工程B)の後および工程C)の前に被接着物を保存すること、またはその両方を任意にさらに含んでよい。
本発明に使用されるポリマー材料は、例えばプラズマ処理の直前にこの方法で使用するときは非接着性である。ポリマー材料は比較的低いモジュラス(例えば、基板または半導体よりも低いモジュラス)を有する。モジュラスは、選択したポリマー材料そのもの、ポリマー材料を接着する被接着物等を含んで種々の要因によって変動するであろう。しかし、モジュラスは少なくとも0.1メガパスカル、若しくは少なくとも1メガパスカルとすることができる。モジュラスは300メガパスカルまで、若しくは400メガパスカル、若しくは1ギガパスカルまで、若しくは5ギガパスカルまでとすることができる。
この方法に使用される基板は特に制限されない。基板の選択は、上述の方法に使用することに限らず、例えば、製造すべき電子デバイスまたは電子デバイスパッケージの種類など種々の要因に依存する。基板は電子デバイスまたは電子デバイスパッケージの製造に使用される任意の材料とすることができる。基板は、例えば、セラミック基板、可撓性基板、または電子デバイスパッケージに通常使用される硬質基板とすることができる。適切な基板の例は、セラミック、金属、金属被覆表面、ポリマー(すなわち上記のポリマー材料以外の)、その組合せ等である。
半導体は当技術分野に知られており、市場で入手可能であり、例えば、J.Kroshwitz等編、「Electronic Materials」、Kirk-Othmer Encyclopedia of Chemical Technology、第4編、第9巻、219〜229頁、John Wiley & Sons、New York、1994を参照されたい。一般的な半導体はケイ素、ケイ素合金、およびヒ化ガリウムを含む。半導体は無被覆ダイ、ICチップなどのチップ、またはウェハなど任意の都合のよい形状を有することができる。
非接着性材料をプラズマ処理することによって、非接着性材料の表面特性は非接着性から接着性に変換される。コロナ放電処理、誘電体バリア放電処理、グロー放電処理を含んで、種々の種類のプラズマ処理を本発明の方法に使用することができる。グロー放電処理は、低圧グロー放電または大気圧グロー放電から選択されるプラズマを使用して実施することができる。
上述の方法は、蒸気または液体状態の水の有無にかかわらず、熱処理または機械的な応力いずれにも抵抗性のある接着結合を作り出すことに使用することができる。接着特性は非類似部品を互いに保持するために使用することができ、さもなければ複数の工程で接着技術を用いることが必要である。
低圧グロー放電プラズマ(LPGD)
Branson/IPCプラズマユニットは低圧(0.05〜3.0トル)の高周波(RF)冷プラズマを発生する。このユニットは、容量結合プラズマ処理プロセス中に反応器にガス流を連続または不連続のいずれかで流して運転される。システムは制御ユニットと、石英格子棚を備えるプラズマチャンバ(24,500立方センチメートル)と、RF発生装置(連続制御で13.5メガヘルツを0〜500ワットの範囲で出力)と、真空ポンプを有する。チャンバの直径は25センチメートルである。チャンバの長さは50センチメートルである。システムはモデルIPC54005-11020STを有し、PM119RF発生装置と、PM11020反応センターと、PM4000C制御装置を含む。このユニットは31172 Huntwood Avenue、P.O.Box 4136、Hayward、CA 94544のBranson International Plasma Corporationから市場で入手可能である。
低圧グロー放電プラズマ(LPGD)
Harrick PDC-32Gプラズマ洗浄装置は低圧の高周波冷プラズマを発生する。この洗浄装置は、誘導結合プラズマ処理プロセス中に反応器にガス流を連続または不連続のいずれかで流して運転される。システムは円筒形プラズマチャンバ(800立方センチメートル)と、高周波(RF)発生装置(8〜12メガヘルツを40ワット、60ワット、100ワットの3段階で出力)と、真空ポンプを有する。チャンバの直径は7.5センチメートルである。チャンバの長さは18センチメートルである。
大気圧グロー放電(APGD)プラズマ
大気圧グロー放電(APGD)プラズマユニットは大気圧または大気圧に近い圧力で運転され、表面の処理に使用される。プラズマはHeとHe/O2(99%/1%)およびHe/N2(99%/1%)のガスから、基本圧力1020ミリバールで発生する。処理は1秒から8分間の種々の処理時間で実施される。相互電極間隔は基板の厚さによって6〜10ミリメートルに選択される。
スタッドダイ引っ張り試験
スタッド(ダイ)引っ張り試験は、平頭ネジ(#1032-1 1/4ネジ)をダイの頂部表面に接着し、ネジを試験装置に取り付けたスタッドにねじ込み、破壊が起きるまでスタッドを引っ張ることによって行われる。サンプルを調製するとき、接着剤がダイの頂端部に「流れ」ていないか注意する。ネジが基板に直接接着してサンプルが試験に使用できなくなる。平頭ネジはトルエン/アセトンで洗い、ネジのダイへの接着を妨害する油を除去する。この目的のために、家庭用スーパー糊Bondini(登録商標)(*)(すべてゲル)を使用する。
ダイせん断強度試験
ダイせん断試験はせん断冶具(Royce 552(登録商標))をダイの端部に対向して配置し、ダイを被接着物からせん断するのに必要な力を記録することによって行われる。サンプルのサイズ(ダイが接着されるポリイミド(PI)シート)を調節(切断)して、サンプル支持枠(10ミリメートル×10ミリメートル)が適切に固定されるように全域を覆うことに注意する。ROYCE 552(登録商標)ダイせん断試験装置は、マイクロエレクトロニクス構造を評価するための精密な汎用強度試験システムであり、ダイの上でせん断試験を行うことによってダイの接合強度を測定する。
修正JKR試験
Johnson Kendall Roberts(JKR)の研究に基づく半球状シリコーンレンズおよび平坦な被接着物システムを使用する概念を、プラズマ処理によって付与された接着性の接着強度を測定するために用いる。高弾性モジュラスのシリコーンレンズ(Midland、MIのDow Corning Corporationから市場で入手可能なSYLGARD(登録商標)184)および被接着物を選択したガス雰囲気中でプラズマ処理する。処理したレンズと被接着物を負荷をかけて互いに密接に接触させる。レンズはその元の形状に復元する傾向があり、円形の接合境界に応力が働く。平衡状態ではレンズと被接着物間に一定の円形接触領域が得られ、破壊エネルギーは平方メートル当たりのジュールで表される。
保存材料
材料Aは硬化後に0.30メガパスカルのモジュラスを有する硬化性シリコーンエラストマー組成物である。モジュラスは、ダンベル形状の試験片を用いる100%歪みのセカントモジュラスであり、ASTM D638の記載に従って、交差ヘッド速度毎分20インチでInstronの汎用試験装置によって測定される。
不動態層のない簡略化した試験体(TV-46)ICチップの寸法は7.4ミリメートル×5.3ミリメートルである。
材料AをUpilex 25Sポリイミド(PI)シート上に5ミリインチの厚さに引き、150℃で30分間硬化する。空気をプラズマガスに使用し、処理時間は70秒間、圧力は0.78トル、RF出力は187.5ワット、RF周波数は大Branson/IPCプラズマを使用して13.56メガヘルツである。接着剤パッドおよびTV-46の両方をプラズマで処理する。
材料Aの10ミリのフィルムをポリイミドUpilex 25Sの上に印刷し、150℃で30分間硬化してシリコーンパッドを形成する。Bransonプラズマチャンバを使用して、0.05トル、100ワット、処理時間30秒の空気プラズマ条件で、TV-46シリコンダイとシリコーンパッドの表面を処理する。処理したダイとパッドを接着接合のために密接に接触させる。得られる製品は表2に示されており、参照例4の方法によって評価する。結果を表2に示す。
材料Aを1ミリインチのUpilex 25Sポリイミドシート上に5ミリインチの厚さに引っ張り、150℃で30分間硬化してシリコーンパッドを形成する。TV-46シリコンダイおよびシリコーンパッドの表面をプラズマ処理する。実施例3〜36は、Bransonプラズマチャンバを使用し、空気または酸素を使用して、種々のプラズマプロセス条件、すなわち、処理圧力、処理時間、RF出力を変化させて行う。サンプルを参照例5に従って試験する。条件は表3に示す。
無被覆のシリコンウェハ、および、ポリイミドコーティング(HD Micro Systems製のPIX 3400-8)で被覆したシリコンウェハを5ミリメートル×5ミリメートルのダイに単体化する。ダイシング後、単体化したダイを800ポンド毎平方インチ(psi)の脱イオン水で洗浄する。
四角い6ミリメートル×13ミリメートル開口で、2個の開口間の間隔が1.19ミリメートルの多くの対パターンを形成した、厚さ4ミリインチのステンシルを使用して、3ミリインチのKAPTONポリイミドシート上に材料Bを印刷する。開口対のピッチは5ミリメートルである。印刷されたパッドは150℃で30分間硬化する。参照例8で調製したシリコーンパッドおよび無被覆ダイもしくはPI被覆ダイを、Harrick PDC-32Gを使用してプラズマ処理する。プラズマ条件は、ガスとして空気、60ワット、処理時間5秒間、圧力0.3トルである。プラズマ処理を220℃で1.25キログラム下、5秒間処理した後、各ダイをパッドに取り付ける。プラズマ処理によってシリコーンパッドに接合したダイを、1週、2週、3週後の湿度に対する接着を見るために、85℃/85%相対湿度(RH)のチャンバ内に置く。サンプルは参照例5の方法によって試験する。条件および結果は表4に示す。
実施例37のパッドに接合した同じダイを150℃の対流炉中に保存し、高温保存の接着性に及ぼす影響を見る。サンプルは参照例5の方法で試験する。条件および結果は表5に示す。
実施例37で使用した同じパッドおよびダイを使用する。プラズマ活性化した表面がどのくらい長く接着性に効果があるかを見るために、表面のプラズマ処理の、1時間、4時間、8時間、24時間後にダイの取り付け(アタッチ)を行う。プラズマ条件およびダイアタッチプロセスは実施例37と同じである。結果を表6に示す。
実施例37のPI被覆ダイおよび印刷した材料Bを使用する。種々のプラズマ条件およびダイアタッチ温度を使用する以外は実施例37と同じである。強い接着性に対するプラズマの効果を見るために未処理の組立て体も試験する。条件および結果は表7に示す。
実施例37の無被覆シリコンダイおよび印刷した材料Bを使用する。種々のプラズマ条件およびダイ取り付け温度を使用する以外は実施例37と同じである。強い接着性に対するプラズマの効果を見るために未処理の組立て体も試験する。条件および結果は表8に示す。
APGD 1%酸素/ヘリウム:接着
シリコーンレンズおよびガラス板の両方を大気圧点火のO2/He(1%/99%)のプラズマで30秒間処理する。シリコーンレンズとガラス板を2キログラムの力で60秒間室温で密接に接触させる。接触直径は6〜8ミリメートルに達する。負荷を取り去ると、エラストマーのシリコーンレンズの弾性モジュラスによって破断が生じ、平衡に達する。破断はシリコーン相に集まっている。シリコーンエラストマーとガラスの間の接触面積の直径は約4〜6ミリメートルである。破断エネルギーは修正JKRモデルに従って計算される。結果を表9に示す。
3種の異なるヤング率を有する3種の硬化性シリコーン材料をウェハ上に塗工し硬化する。ヤング率はそれぞれ10メガパスカル、300メガパスカル、1.1ギガパスカルである。ヤング率はTA Instruments製のDynamic Mechanical Analyzer(DMA)を使用してASTM D4065-95の引っ張りモードで測定する。プラズマ条件は、Harrick PDC-32Gを使用し、空気、60ワットのRF出力、5秒間の処理時間である。硬化したシリコーン上にダイ(5mm×5mm)を1.25Kgfで5秒間、190℃で取り付ける。結果を表10に示す。
実施例99〜104をプラズマ処理を行わずに繰り返す。プラズマ処理がないと接着が見られなかった。
実施例37の硬化材料Aおよび種々の基板を、実施例99と同じ条件、但し様々なプラズマ条件で処理する。ダイアタッチ条件は実施例99と同じである。基板、プラズマ処理条件、および結果を表11に示す。
実施例105〜109をプラズマ処理を行わずに繰り返す。プラズマ処理がないと接着が見られなかった。
モジュラスが1メガパスカル未満のシリコーンエラストマー、およびモジュラスが0.5〜1.5ギガパスカルのシリコーン樹脂を、Harrick PDC-002プラズマ洗浄装置中で、プラズマガスとして高純度の圧縮空気を用い、29.6ワットで30秒間処理する。接触時間は2Kgfの力で1分間である。破断エネルギーは参照例6の修正JKRモデルに従って計算される。結果を表12に示す。
接触時間が12時間である以外は比較例16を繰り返す。ダイのせん断強度は参照例5の方法に従って測定する。結果を表12に示す。
Claims (10)
- A)硬化シリコーン樹脂、硬化シリコーンエラストマー、硬化シリコーンゴム又はこれらの組み合わせからなるシリコーンを含むポリマー材料をプラズマ処理し、
B)被接着物をプラズマ処理し、
C)その後、前記ポリマー材料と前記被接着物とを接触させ、
それにより前記ポリマー材料と前記被接着物とを接着する方法であって、電子デバイス、電子デバイスパッケージ、光デバイス又は光電子デバイスの製造中に実施することを特徴とする方法。 - 工程A)後、且つ、工程C)前に前記ポリマー材料を保存すること、
工程B)後、且つ、工程C)前に前記被接着物を保存すること、または
その両方
を更に特徴とする請求項1に記載の方法。 - 工程A)、B)及びC)を1回以上繰り返すことを更に特徴とする請求項1または2に記載の方法。
- 工程A)、B)及びC)を1回繰り返して前記被接着物とは異なる第2の被接着物を前記ポリマー材料に接着する請求項3に記載の方法。
- 前記ポリマー材料がダイアタッチ接着剤を含み、前記被接着物が半導体ダイまたは半導体基板を含み、前記第2の被接着物が半導体ダイまたは半導体基板を含む請求項4に記載の方法。
- 前記ポリマー材料が、0.1メガパスカルから5ギガパスカルまでのモジュラスを有する請求項1から5のいずれか一項に記載の方法。
- 工程A)及びB)が、コロナ放電処理、誘電体バリア放電処理、およびグロー放電処理から選択されるプラズマ処理を用いて各々独立に実施される請求項1から6のいずれか一項に記載の方法。
- 工程A)及びB)が、1ミリ秒間から30分間まで各々独立に実施される請求項1から7のいずれか一項に記載の方法。
- 工程C)が、15℃から400℃までの温度で実施される請求項1から8のいずれか一項に記載の方法。
- 工程C)が、0.1秒間から12時間まで実施される請求項1から9のいずれか一項に記載の方法。
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US20050031795A1 (en) | 2005-02-10 |
TW569300B (en) | 2004-01-01 |
KR20050029114A (ko) | 2005-03-24 |
KR100895779B1 (ko) | 2009-05-08 |
EP1435109A2 (en) | 2004-07-07 |
US6793759B2 (en) | 2004-09-21 |
WO2003041130A2 (en) | 2003-05-15 |
AU2002339981A1 (en) | 2003-05-19 |
WO2003041130A3 (en) | 2003-11-27 |
US20030145940A1 (en) | 2003-08-07 |
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