JP4077141B2 - デザインルール作成方法、デザインルール作成システム及び記録媒体 - Google Patents

デザインルール作成方法、デザインルール作成システム及び記録媒体 Download PDF

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JP4077141B2
JP4077141B2 JP2000199839A JP2000199839A JP4077141B2 JP 4077141 B2 JP4077141 B2 JP 4077141B2 JP 2000199839 A JP2000199839 A JP 2000199839A JP 2000199839 A JP2000199839 A JP 2000199839A JP 4077141 B2 JP4077141 B2 JP 4077141B2
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design rule
design
layout
integrated circuit
semiconductor integrated
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Japanese (ja)
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JP2002026126A5 (https=
JP2002026126A (ja
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敏也 小谷
聡 田中
壮一 井上
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Toshiba Corp
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Toshiba Corp
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Priority to JP2000199839A priority Critical patent/JP4077141B2/ja
Priority to US09/892,572 priority patent/US6507931B2/en
Priority to TW090115957A priority patent/TW516077B/zh
Priority to KR10-2001-0038245A priority patent/KR100437980B1/ko
Publication of JP2002026126A publication Critical patent/JP2002026126A/ja
Priority to US10/819,338 priority patent/USRE42294E1/en
Publication of JP2002026126A5 publication Critical patent/JP2002026126A5/ja
Priority to US11/905,862 priority patent/USRE42302E1/en
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Publication of JP4077141B2 publication Critical patent/JP4077141B2/ja
Priority to US12/945,672 priority patent/USRE43659E1/en
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    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/30—Circuit design
    • G06F30/39—Circuit design at the physical level
    • G06F30/398—Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM]

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  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Evolutionary Computation (AREA)
  • Geometry (AREA)
  • General Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Design And Manufacture Of Integrated Circuits (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP2000199839A 2000-06-30 2000-06-30 デザインルール作成方法、デザインルール作成システム及び記録媒体 Expired - Lifetime JP4077141B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2000199839A JP4077141B2 (ja) 2000-06-30 2000-06-30 デザインルール作成方法、デザインルール作成システム及び記録媒体
US09/892,572 US6507931B2 (en) 2000-06-30 2001-06-28 Semiconductor integrated circuit designing method and system
KR10-2001-0038245A KR100437980B1 (ko) 2000-06-30 2001-06-29 디자인 룰 작성 방법, 디자인 룰 작성 시스템 및 기록 매체
TW090115957A TW516077B (en) 2000-06-30 2001-06-29 Method of creating design rule, design rule creating system, and recording medium
US10/819,338 USRE42294E1 (en) 2000-06-30 2004-04-07 Semiconductor integrated circuit designing method and system using a design rule modification
US11/905,862 USRE42302E1 (en) 2000-06-30 2007-10-04 Method for making a design layout and mask
US12/945,672 USRE43659E1 (en) 2000-06-30 2010-11-12 Method for making a design layout of a semiconductor integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000199839A JP4077141B2 (ja) 2000-06-30 2000-06-30 デザインルール作成方法、デザインルール作成システム及び記録媒体

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JP2002026126A JP2002026126A (ja) 2002-01-25
JP2002026126A5 JP2002026126A5 (https=) 2005-07-07
JP4077141B2 true JP4077141B2 (ja) 2008-04-16

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US (4) US6507931B2 (https=)
JP (1) JP4077141B2 (https=)
KR (1) KR100437980B1 (https=)
TW (1) TW516077B (https=)

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TWI252516B (en) 2002-03-12 2006-04-01 Toshiba Corp Determination method of process parameter and method for determining at least one of process parameter and design rule
JP2003345854A (ja) * 2002-05-23 2003-12-05 Mitsubishi Electric Corp デザインルール作成システム
US7117456B2 (en) * 2003-12-03 2006-10-03 International Business Machines Corporation Circuit area minimization using scaling
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JP4357287B2 (ja) 2003-12-18 2009-11-04 株式会社東芝 修正指針の発生方法、パターン作成方法、マスクの製造方法、半導体装置の製造方法及びプログラム
WO2005098686A2 (en) * 2004-04-02 2005-10-20 Clear Shape Technologies, Inc. Modeling resolution enhancement processes in integrated circuit fabrication
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JP2006053248A (ja) * 2004-08-10 2006-02-23 Toshiba Corp 設計パターンデータ作成方法、マスクパターンデータ作成方法、マスク製造方法、半導体装置の方法およびプログラム
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JP4817746B2 (ja) * 2005-07-27 2011-11-16 株式会社東芝 半導体装置の設計データ処理方法、そのプログラム、及び半導体装置の製造方法
US20070074142A1 (en) * 2005-09-27 2007-03-29 Applied Materials, Inc. Integrated circuit layout methods
US7934184B2 (en) * 2005-11-14 2011-04-26 Takumi Technology Corporation Integrated circuit design using modified cells
US7568179B1 (en) 2006-09-21 2009-07-28 Armen Kroyan Layout printability optimization method and system
JP4745256B2 (ja) 2007-01-26 2011-08-10 株式会社東芝 パターン作成方法、パターン作成・検証プログラム、および半導体装置の製造方法
US8010912B2 (en) * 2007-03-09 2011-08-30 Broadcom Corporation Method of shrinking semiconductor mask features for process improvement
JP4891817B2 (ja) * 2007-03-16 2012-03-07 株式会社日立製作所 設計ルール管理方法、設計ルール管理プログラム、ルール構築装置およびルールチェック装置
KR100898232B1 (ko) * 2007-09-03 2009-05-18 주식회사 동부하이텍 축소과정에서의 패턴 설계 방법
JP5194770B2 (ja) * 2007-12-20 2013-05-08 富士通セミコンダクター株式会社 半導体装置の製造方法及びそのプログラム
JP2009290150A (ja) * 2008-06-02 2009-12-10 Renesas Technology Corp 半導体装置の製造システムおよび製造方法
US8214771B2 (en) * 2009-01-08 2012-07-03 Kla-Tencor Corporation Scatterometry metrology target design optimization
KR101044295B1 (ko) * 2010-01-07 2011-06-28 주식회사 엔타시스 자동화된 칩 면적 최적화를 위한 블록 패킹방법 및 표준 셀 패킹 방법
US20150067621A1 (en) * 2012-09-05 2015-03-05 Mentor Graphics Corporation Logic-Driven Layout Pattern Analysis
KR102227127B1 (ko) 2014-02-12 2021-03-12 삼성전자주식회사 리소그래피 시뮬레이션을 이용한 디자인룰 생성 장치 및 방법
US10628544B2 (en) 2017-09-25 2020-04-21 International Business Machines Corporation Optimizing integrated circuit designs based on interactions between multiple integration design rules
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KR102755274B1 (ko) 2024-07-05 2025-01-22 최병렬 압축기와 반응기와 촉매제 기반 에틸렌과 프로판과 고분자 재료 혼합 복합 생산 시스템 및 그 운용방법

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Also Published As

Publication number Publication date
USRE43659E1 (en) 2012-09-11
USRE42302E1 (en) 2011-04-19
KR100437980B1 (ko) 2004-07-02
US20020002697A1 (en) 2002-01-03
TW516077B (en) 2003-01-01
USRE42294E1 (en) 2011-04-12
US6507931B2 (en) 2003-01-14
JP2002026126A (ja) 2002-01-25
KR20020002323A (ko) 2002-01-09

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