JP4011345B2 - 多軸力センサチップ - Google Patents

多軸力センサチップ Download PDF

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Publication number
JP4011345B2
JP4011345B2 JP2002005334A JP2002005334A JP4011345B2 JP 4011345 B2 JP4011345 B2 JP 4011345B2 JP 2002005334 A JP2002005334 A JP 2002005334A JP 2002005334 A JP2002005334 A JP 2002005334A JP 4011345 B2 JP4011345 B2 JP 4011345B2
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JP
Japan
Prior art keywords
force sensor
sensor chip
axis
semiconductor substrate
axis force
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002005334A
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English (en)
Japanese (ja)
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JP2003207405A (ja
JP2003207405A5 (enrdf_load_stackoverflow
Inventor
毅 大里
祐輔 平林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Honda Motor Co Ltd
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Honda Motor Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honda Motor Co Ltd filed Critical Honda Motor Co Ltd
Priority to JP2002005334A priority Critical patent/JP4011345B2/ja
Priority to EP03000457.6A priority patent/EP1327870B1/en
Priority to US10/339,496 priority patent/US6823744B2/en
Publication of JP2003207405A publication Critical patent/JP2003207405A/ja
Priority to US10/972,354 priority patent/US6951142B2/en
Publication of JP2003207405A5 publication Critical patent/JP2003207405A5/ja
Application granted granted Critical
Publication of JP4011345B2 publication Critical patent/JP4011345B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Force Measurement Appropriate To Specific Purposes (AREA)
JP2002005334A 2002-01-11 2002-01-11 多軸力センサチップ Expired - Fee Related JP4011345B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2002005334A JP4011345B2 (ja) 2002-01-11 2002-01-11 多軸力センサチップ
EP03000457.6A EP1327870B1 (en) 2002-01-11 2003-01-10 Six-axis force sensor
US10/339,496 US6823744B2 (en) 2002-01-11 2003-01-10 Six-axis force sensor
US10/972,354 US6951142B2 (en) 2002-01-11 2004-10-26 Six-axis force sensor chip and six-axis force sensor using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002005334A JP4011345B2 (ja) 2002-01-11 2002-01-11 多軸力センサチップ

Publications (3)

Publication Number Publication Date
JP2003207405A JP2003207405A (ja) 2003-07-25
JP2003207405A5 JP2003207405A5 (enrdf_load_stackoverflow) 2007-03-22
JP4011345B2 true JP4011345B2 (ja) 2007-11-21

Family

ID=27644409

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002005334A Expired - Fee Related JP4011345B2 (ja) 2002-01-11 2002-01-11 多軸力センサチップ

Country Status (1)

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JP (1) JP4011345B2 (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018066557A1 (ja) 2016-10-07 2018-04-12 ミツミ電機株式会社 センサチップ、起歪体、力覚センサ装置
EP3404390A2 (en) 2017-04-26 2018-11-21 Mitsumi Electric Co., Ltd. Force sensor
EP3457103A1 (en) 2017-09-19 2019-03-20 Mitsumi Electric Co., Ltd. Force sensor device
EP3816597A1 (en) 2019-10-29 2021-05-05 Minebea Mitsumi Inc. Force torque sensor device
US11079427B2 (en) 2018-01-18 2021-08-03 Kabushiki Kaisha Toshiba Inspection device, inspection system, intelligent power module, inspection method, and computer program product
US11320324B2 (en) 2019-01-30 2022-05-03 Minebea Mitsumi Inc. Sensor device
US11473987B2 (en) 2018-01-29 2022-10-18 Minebea Mitsumi Inc. Sensor chip and force sensor device

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4680566B2 (ja) 2004-10-26 2011-05-11 本田技研工業株式会社 多軸力センサチップとこれを用いた多軸力センサ
JP5303101B2 (ja) * 2006-05-02 2013-10-02 本田技研工業株式会社 力覚センサ用チップ
JP5007083B2 (ja) 2006-08-08 2012-08-22 本田技研工業株式会社 力覚センサ用チップ
JP5243704B2 (ja) 2006-08-24 2013-07-24 本田技研工業株式会社 力覚センサ
JP4210296B2 (ja) 2006-08-24 2009-01-14 本田技研工業株式会社 力覚センサの製造方法
JP2008058110A (ja) 2006-08-30 2008-03-13 Honda Motor Co Ltd 力覚センサ用チップおよび力覚センサ
JP4958501B2 (ja) 2006-08-30 2012-06-20 本田技研工業株式会社 力覚センサ用チップ及び外力伝達機構
KR100760123B1 (ko) * 2006-11-01 2007-09-18 경상대학교산학협력단 인간형 로봇의 발목 6축 힘/모멘트 센서
US9381647B2 (en) 2013-02-19 2016-07-05 Seiko Epson Corporation Force detection device, robot, and moving object
JP6760575B2 (ja) 2016-10-07 2020-09-23 ミネベアミツミ株式会社 センサチップ、起歪体、力覚センサ装置
JP6940037B2 (ja) * 2017-04-26 2021-09-22 ミネベアミツミ株式会社 力覚センサ装置
CN111928981A (zh) * 2020-09-10 2020-11-13 苏州纳芯微电子股份有限公司 Mems压力传感器
JP2022142118A (ja) 2021-03-16 2022-09-30 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
JP2022142117A (ja) 2021-03-16 2022-09-30 ミネベアミツミ株式会社 センサチップ、力覚センサ装置
KR102825195B1 (ko) * 2022-12-29 2025-06-25 한국공학대학교산학협력단 다축 힘 및 토크 센서

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57169643A (en) * 1981-04-13 1982-10-19 Yamato Scale Co Ltd Load cell for multiple components of force
JPS59151032A (ja) * 1983-02-18 1984-08-29 Hitachi Ltd 力センサの評価、校正用治具
JPH0640039B2 (ja) * 1985-09-10 1994-05-25 オムロン株式会社 力検出装置
JPH02205077A (ja) * 1989-02-02 1990-08-14 Ricoh Co Ltd 力覚センサ
JP2767766B2 (ja) * 1991-11-26 1998-06-18 川崎重工業株式会社 ６軸力覚センサ
JPH09257612A (ja) * 1996-03-22 1997-10-03 Olympus Optical Co Ltd 力覚センサー
JP2001264198A (ja) * 2000-03-16 2001-09-26 Olympus Optical Co Ltd 多軸力覚センサ及び力覚センサの製造方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018066557A1 (ja) 2016-10-07 2018-04-12 ミツミ電機株式会社 センサチップ、起歪体、力覚センサ装置
EP3404390A2 (en) 2017-04-26 2018-11-21 Mitsumi Electric Co., Ltd. Force sensor
EP3457103A1 (en) 2017-09-19 2019-03-20 Mitsumi Electric Co., Ltd. Force sensor device
US11079427B2 (en) 2018-01-18 2021-08-03 Kabushiki Kaisha Toshiba Inspection device, inspection system, intelligent power module, inspection method, and computer program product
US11473987B2 (en) 2018-01-29 2022-10-18 Minebea Mitsumi Inc. Sensor chip and force sensor device
US11320324B2 (en) 2019-01-30 2022-05-03 Minebea Mitsumi Inc. Sensor device
EP3816597A1 (en) 2019-10-29 2021-05-05 Minebea Mitsumi Inc. Force torque sensor device
US11879796B2 (en) 2019-10-29 2024-01-23 Minebea Mitsumi Inc. Force torque sensor device including sensor chip bonded to strain body by adhesive

Also Published As

Publication number Publication date
JP2003207405A (ja) 2003-07-25

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