JP3909888B2 - トレイ搬送式インライン成膜装置 - Google Patents

トレイ搬送式インライン成膜装置 Download PDF

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Publication number
JP3909888B2
JP3909888B2 JP11974996A JP11974996A JP3909888B2 JP 3909888 B2 JP3909888 B2 JP 3909888B2 JP 11974996 A JP11974996 A JP 11974996A JP 11974996 A JP11974996 A JP 11974996A JP 3909888 B2 JP3909888 B2 JP 3909888B2
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Japan
Prior art keywords
substrate
tray
chamber
film forming
line
Prior art date
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Expired - Lifetime
Application number
JP11974996A
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English (en)
Japanese (ja)
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JPH09279341A5 (enExample
JPH09279341A (ja
Inventor
宏治 下川
雅彦 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
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Canon Anelva Corp
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Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP11974996A priority Critical patent/JP3909888B2/ja
Publication of JPH09279341A publication Critical patent/JPH09279341A/ja
Publication of JPH09279341A5 publication Critical patent/JPH09279341A5/ja
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Publication of JP3909888B2 publication Critical patent/JP3909888B2/ja
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JP11974996A 1996-04-17 1996-04-17 トレイ搬送式インライン成膜装置 Expired - Lifetime JP3909888B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11974996A JP3909888B2 (ja) 1996-04-17 1996-04-17 トレイ搬送式インライン成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11974996A JP3909888B2 (ja) 1996-04-17 1996-04-17 トレイ搬送式インライン成膜装置

Publications (3)

Publication Number Publication Date
JPH09279341A JPH09279341A (ja) 1997-10-28
JPH09279341A5 JPH09279341A5 (enExample) 2006-01-05
JP3909888B2 true JP3909888B2 (ja) 2007-04-25

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ID=14769206

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Application Number Title Priority Date Filing Date
JP11974996A Expired - Lifetime JP3909888B2 (ja) 1996-04-17 1996-04-17 トレイ搬送式インライン成膜装置

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JP (1) JP3909888B2 (enExample)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
UA70336C2 (uk) * 1999-08-04 2004-10-15 Дженерал Електрік Компані Електронно-променевий пристрій для нанесення покриття конденсацією із парової фази (варіанти)
KR101068769B1 (ko) * 2003-10-01 2011-09-30 주성엔지니어링(주) 컨베이어를 이용하여 기판을 교환하는 대면적 엘씨디제조장치 및 이를 이용한 기판의 운송방법
KR100971511B1 (ko) * 2003-10-29 2010-07-21 주성엔지니어링(주) 기판트레이와, 이를 이용하는 엘씨디 제조장치 및 이를이용하여 기판을 이송하는 방법
KR100971369B1 (ko) * 2003-10-31 2010-07-20 주성엔지니어링(주) 기판트레이를 포함하는 엘씨디 제조장치 및 이를 이용한기판의 로딩 또는 언로딩 방법
US7918940B2 (en) * 2005-02-07 2011-04-05 Semes Co., Ltd. Apparatus for processing substrate
JP4582450B2 (ja) * 2005-02-23 2010-11-17 株式会社アルバック 真空成膜装置の搬送機構
JP5014603B2 (ja) 2005-07-29 2012-08-29 株式会社アルバック 真空処理装置
TW200806805A (en) * 2006-02-28 2008-02-01 Ulvac Inc Evaporation method of organic film and organic film evaporation apparatus
JP5116525B2 (ja) * 2008-03-25 2013-01-09 株式会社アルバック スパッタ装置
JP5114288B2 (ja) * 2008-05-16 2013-01-09 株式会社アルバック 成膜装置、有機薄膜形成方法
KR101465766B1 (ko) * 2008-07-02 2014-12-01 주성엔지니어링(주) 기판지지프레임을 가지는 기판처리장치
JP2010118157A (ja) * 2008-11-11 2010-05-27 Ulvac Japan Ltd フロントパネル製造方法
KR101097737B1 (ko) * 2009-03-31 2011-12-22 에스엔유 프리시젼 주식회사 박막 증착 장치와 박막 증착 방법 및 박막 증착 시스템
KR101202348B1 (ko) * 2010-04-06 2012-11-16 삼성디스플레이 주식회사 박막 증착 장치 및 이를 이용한 유기 발광 표시 장치의 제조 방법
KR101036123B1 (ko) * 2010-06-10 2011-05-23 에스엔유 프리시젼 주식회사 박막 증착 장치
JP5730322B2 (ja) * 2010-10-19 2015-06-10 株式会社アルバック 蒸着装置及び蒸着方法
KR101271176B1 (ko) * 2010-11-16 2013-06-04 주식회사 엠엠테크 기판 로딩 및 언로딩 장치
JP6075611B2 (ja) * 2012-10-16 2017-02-08 株式会社アルバック 成膜装置
KR101608341B1 (ko) * 2014-07-25 2016-04-01 (주)나인테크 인라인 화학기상증착시스템
KR101695388B1 (ko) * 2015-06-30 2017-01-12 (주) 나인테크 인라인 화학기상증착시스템
US20190106789A1 (en) 2016-04-26 2019-04-11 Toshiba Mitsubishi-Electric Industrial Systems Corporation Film deposition apparatus
JP2018150611A (ja) * 2017-03-15 2018-09-27 日新電機株式会社 真空処理装置
CN108588669A (zh) * 2018-05-15 2018-09-28 佛山市南海区晶鼎泰机械设备有限公司 一种连体镀膜机生产线
CN112962078B (zh) * 2021-02-01 2023-07-18 肇庆宏旺金属实业有限公司 一种镀膜生产线及镀膜工艺
CN112962081B (zh) * 2021-02-01 2023-07-18 肇庆宏旺金属实业有限公司 一种钢板连续镀膜生产线及镀膜工艺

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Publication number Publication date
JPH09279341A (ja) 1997-10-28

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