JP3789017B2 - 位置制御装置 - Google Patents

位置制御装置 Download PDF

Info

Publication number
JP3789017B2
JP3789017B2 JP35152796A JP35152796A JP3789017B2 JP 3789017 B2 JP3789017 B2 JP 3789017B2 JP 35152796 A JP35152796 A JP 35152796A JP 35152796 A JP35152796 A JP 35152796A JP 3789017 B2 JP3789017 B2 JP 3789017B2
Authority
JP
Japan
Prior art keywords
motor
target position
control device
stop
predetermined
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP35152796A
Other languages
English (en)
Japanese (ja)
Other versions
JPH10187245A (ja
JPH10187245A5 (enExample
Inventor
健一 片岡
新治 山本
禎 林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP35152796A priority Critical patent/JP3789017B2/ja
Priority to US08/997,484 priority patent/US5939851A/en
Publication of JPH10187245A publication Critical patent/JPH10187245A/ja
Publication of JPH10187245A5 publication Critical patent/JPH10187245A5/ja
Application granted granted Critical
Publication of JP3789017B2 publication Critical patent/JP3789017B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00—Programme-control systems
    • G05B19/02—Programme-control systems electric
    • G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • G05B19/21—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device
    • G05B19/23—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control
    • G05B19/231—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path using an incremental digital measuring device for point-to-point control the positional error is used to control continuously the servomotor according to its magnitude
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/41—Servomotor, servo controller till figures
    • G05B2219/41423—Noise filter as function of rate of displacement, speed, for stabilisation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/42—Servomotor, servo controller kind till VSS
    • G05B2219/42229—Shut off control, system, power on detection of zero or neutral position

Landscapes

  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Control Of Position Or Direction (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP35152796A 1996-12-27 1996-12-27 位置制御装置 Expired - Fee Related JP3789017B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP35152796A JP3789017B2 (ja) 1996-12-27 1996-12-27 位置制御装置
US08/997,484 US5939851A (en) 1996-12-27 1997-12-23 Position control device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP35152796A JP3789017B2 (ja) 1996-12-27 1996-12-27 位置制御装置

Publications (3)

Publication Number Publication Date
JPH10187245A JPH10187245A (ja) 1998-07-14
JPH10187245A5 JPH10187245A5 (enExample) 2004-12-09
JP3789017B2 true JP3789017B2 (ja) 2006-06-21

Family

ID=18417898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP35152796A Expired - Fee Related JP3789017B2 (ja) 1996-12-27 1996-12-27 位置制御装置

Country Status (2)

Country Link
US (1) US5939851A (enExample)
JP (1) JP3789017B2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000184759A (ja) 1998-12-10 2000-06-30 Canon Inc 振動型アクチュエ―タ駆動装置
JP4428747B2 (ja) 1999-02-22 2010-03-10 キヤノン株式会社 振動型アクチュエータ駆動制御装置、駆動制御方法、及び記憶媒体
JP4756722B2 (ja) * 1999-05-18 2011-08-24 キヤノン株式会社 光学装置
JP4672828B2 (ja) * 2000-03-31 2011-04-20 セイコーインスツル株式会社 超音波モータ、及び超音波モータ付電子機器
US6724607B2 (en) 2000-09-28 2004-04-20 Canon Kabushiki Kaisha Driving apparatus of vibration type actuator
JP2002204585A (ja) 2000-12-28 2002-07-19 Canon Inc 振動型アクチュエータの制御装置
JP2002199758A (ja) * 2000-12-28 2002-07-12 Canon Inc 振動型アクチュエータの制御装置
JP4834243B2 (ja) * 2001-06-01 2011-12-14 キヤノン株式会社 振動型アクチュエータの制御装置
JP2002362250A (ja) * 2001-06-01 2002-12-18 Nippon Pop Rivets & Fasteners Ltd モール取付装置及びモールクリップ
JP4714378B2 (ja) * 2001-07-03 2011-06-29 セイコーインスツル株式会社 超音波モータ、及び超音波モータを備えた電子機器
JP3805242B2 (ja) * 2001-12-07 2006-08-02 キヤノン株式会社 振動波駆動装置
JP2003289681A (ja) * 2002-03-27 2003-10-10 Canon Inc 振動型アクチュエータの制御装置
JP4086536B2 (ja) * 2002-04-18 2008-05-14 キヤノン株式会社 振動波駆動装置及びその駆動回路
US7062141B2 (en) * 2002-12-12 2006-06-13 Applied Materials, Inc. Deposition of thick BPSG layers as upper and lower cladding for optoelectronics applications
US7129618B2 (en) * 2003-03-31 2006-10-31 Canon Kabushiki Kaisha Control apparatus capable of low-speed driving of vibration type driving apparatus, actuating apparatus using the control apparatus, control method capable of low-speed driving of vibration type driving apparatus, and storage medium storing program including program codes capable of realizing the control method
NL1027851C2 (nl) * 2004-12-22 2006-06-27 Assembleon Nv Werkwijze voor het regelen van een dynamisch systeem alsmede een dergelijke inrichting.
US7738198B2 (en) 2005-07-22 2010-06-15 Casio Hitachi Mobile Communications Co., Ltd. Imaging device, lens drive control method and recording medium
JP4814948B2 (ja) 2007-03-16 2011-11-16 パナソニック株式会社 振動型アクチュエータの制御装置
US8381879B2 (en) * 2008-10-31 2013-02-26 Unifab, Inc. Drive systems and cargo lift systems
JP6602044B2 (ja) 2015-05-08 2019-11-06 キヤノン株式会社 振動型駆動装置、制御装置及び医用システム
EP4039420A1 (en) * 2021-02-05 2022-08-10 Ganymed Robotics Brakes piloting system

Family Cites Families (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4152569A (en) * 1977-05-13 1979-05-01 Colt Industries Operating Corp. Servo feed circuit for electrical discharge machining apparatus
JPS569801A (en) * 1979-07-06 1981-01-31 Hitachi Ltd Automatic controller
US4325014A (en) * 1980-01-14 1982-04-13 Jeck Richard K Automatic control unit for a wind-following rotor
US4506203A (en) * 1982-10-13 1985-03-19 Ltv Aerospace And Defense Company Small deadband servocontrol system
US4560263A (en) * 1982-12-03 1985-12-24 Canon Kabushiki Kaisha Drive system for a vibration wave motor for lens control
JPS59204477A (ja) * 1983-05-04 1984-11-19 Nippon Kogaku Kk <Nikon> 超音波モーターの駆動制御回路
US4672191A (en) * 1984-06-19 1987-06-09 Dennis Cofield Shadow solar tracking device and system
US4727276A (en) * 1985-03-26 1988-02-23 Canon Kabushiki Kaisha Driving circuit for vibration wave motor
GB2183371B (en) * 1985-10-09 1989-09-27 Canon Kk Vibration wave motor and drive circuit therefor
US4713571A (en) * 1986-01-23 1987-12-15 Canon Kabushiki Kaisha Driving circuit of a vibration wave motor
JPS6318974A (ja) * 1986-07-11 1988-01-26 Agency Of Ind Science & Technol 表面波モ−タの位置決め制御方式
US4742284A (en) * 1986-12-09 1988-05-03 The Babcock & Wilcox Company Advanced motor controller
US5136215A (en) * 1986-12-15 1992-08-04 Canon Kabushiki Kaisha Driving circuit for vibration wave motor
JPS63167681A (ja) * 1986-12-27 1988-07-11 Canon Inc 振動波モ−タ−の停止位置制御装置
JP2586082B2 (ja) * 1987-02-09 1997-02-26 株式会社ニコン 超音波モータの電源周波数最適化装置
US5159253A (en) * 1987-02-24 1992-10-27 Canon Kabushiki Kaisha Control device for a vibration wave motor
JP2587418B2 (ja) * 1987-02-26 1997-03-05 日立マクセル株式会社 超音波駆動装置の制御方法
JP2589698B2 (ja) * 1987-07-03 1997-03-12 キヤノン株式会社 振動型アクチュエータ装置
JPH01234073A (ja) * 1988-03-14 1989-09-19 Olympus Optical Co Ltd 振動波モータの駆動回路
JPH0710189B2 (ja) * 1988-05-30 1995-02-01 キヤノン株式会社 振動波モーターの駆動回路
JP2537267B2 (ja) * 1988-05-30 1996-09-25 キヤノン株式会社 振動型アクチュエ―タ―装置
US5146143A (en) * 1988-07-26 1992-09-08 Canon Kabushiki Kaisha Vibration wave driven motor
US5023526A (en) * 1988-10-31 1991-06-11 Aisin Seiki Kabushiki Kaisha Vibratory motor
US5013982A (en) * 1989-05-02 1991-05-07 Olympus Optical Co., Ltd. Circuit for driving ultrasonic motor
JP2874765B2 (ja) * 1989-06-19 1999-03-24 キヤノン株式会社 振動型モーター装置
JPH0336969A (ja) * 1989-06-29 1991-02-18 Aisin Seiki Co Ltd 超音波モータ
JP3005865B2 (ja) * 1989-12-11 2000-02-07 セイコーインスツルメンツ株式会社 超音波モータ駆動回路
JP2998967B2 (ja) * 1990-01-10 2000-01-17 キヤノン株式会社 振動型モータを有する装置
US5285134A (en) * 1990-03-09 1994-02-08 Canon Kabushiki Kaisha Control device for vibration type motor
JP2723333B2 (ja) * 1990-04-12 1998-03-09 アルプス電気株式会社 超音波モータの制御装置
US5081405A (en) * 1991-04-01 1992-01-14 Honeywell Inc. Electrical actuator with means for preventing dither at a limit switch
JP3107903B2 (ja) * 1992-04-24 2000-11-13 キヤノン株式会社 振動波モータのための駆動装置
JPH05328757A (ja) * 1992-05-21 1993-12-10 Canon Inc 振動波アクチュエータの駆動装置
JP3245214B2 (ja) * 1992-06-02 2002-01-07 キヤノン株式会社 振動型アクチュエータ制御装置
JP2872862B2 (ja) * 1992-06-12 1999-03-24 キヤノン株式会社 振動型モータの駆動装置
JPH06178560A (ja) * 1992-12-03 1994-06-24 Canon Inc 振動波モータおよびプリンタ装置
US5764018A (en) * 1995-09-29 1998-06-09 Hewlett-Packard Co. Hysteresis removal for positioning systems with variable backlash and stiction

Also Published As

Publication number Publication date
US5939851A (en) 1999-08-17
JPH10187245A (ja) 1998-07-14

Similar Documents

Publication Publication Date Title
JP3789017B2 (ja) 位置制御装置
JP2637467B2 (ja) 振動型アクチュエーター装置
JP6112835B2 (ja) 振動型アクチュエータの駆動装置及び駆動制御方法
JPH10187245A5 (enExample)
JPH01303073A (ja) 振動波モーターの駆動回路
US7839050B2 (en) Drive apparatus for ultrasonic motor
JP4834243B2 (ja) 振動型アクチュエータの制御装置
JP4482986B2 (ja) 振動モータ及びその駆動方法
JP5553565B2 (ja) 振動型モータ制御装置
JP6526262B2 (ja) 振動型アクチュエータの駆動装置及び駆動制御方法
US11527970B2 (en) Control method of piezoelectric driving device and piezoelectric driving device
JP5885380B2 (ja) 振動波駆動装置の駆動制御装置及び駆動制御方法
JPH09294384A (ja) 振動波駆動装置の駆動制御装置
JP3044752B2 (ja) 波動ステップモータの駆動制御装置
JP3044751B2 (ja) 波動ステップモータの駆動制御装置
JP2008079395A (ja) 振動アクチュエータの駆動制御装置、レンズ鏡筒及びカメラ
JPH07264879A (ja) 超音波モータの駆動回路
JPH10248276A (ja) 振動型アクチュエータの駆動装置
JP2008079396A (ja) 振動アクチュエータの駆動制御装置、レンズ鏡筒及びカメラ
JP2010141949A (ja) 振動波駆動装置
JPH0515175A (ja) 超音波モータの駆動システム
JP4677103B2 (ja) 振動波モータの駆動回路
JP2005168244A (ja) 振動型駆動装置の制御装置、制御装置を用いた装置、制御装置を用いた光学機器、振動型駆動装置の制御方法及び制御プログラム
JP2019075989A (ja) 駆動装置
JP5403947B2 (ja) 駆動装置及び駆動装置の制御方法

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20050907

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20050913

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20051114

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20060131

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20060215

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20060221

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20060322

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20060327

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090407

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20100407

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20110407

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130407

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20130407

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20140407

Year of fee payment: 8

LAPS Cancellation because of no payment of annual fees