JP3728210B2 - インクジェットヘッドおよびその製造方法、インクジェット記録装置 - Google Patents

インクジェットヘッドおよびその製造方法、インクジェット記録装置 Download PDF

Info

Publication number
JP3728210B2
JP3728210B2 JP2001048665A JP2001048665A JP3728210B2 JP 3728210 B2 JP3728210 B2 JP 3728210B2 JP 2001048665 A JP2001048665 A JP 2001048665A JP 2001048665 A JP2001048665 A JP 2001048665A JP 3728210 B2 JP3728210 B2 JP 3728210B2
Authority
JP
Japan
Prior art keywords
flow path
ink
substrate
adhesion layer
resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2001048665A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002248771A5 (enExample
JP2002248771A (ja
Inventor
賢治 矢部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2001048665A priority Critical patent/JP3728210B2/ja
Priority to CA002372371A priority patent/CA2372371C/en
Priority to US10/077,799 priority patent/US6676241B2/en
Priority to AU16816/02A priority patent/AU784872B2/en
Priority to EP02003895A priority patent/EP1234671B1/en
Priority to DE60207622T priority patent/DE60207622T2/de
Priority to AT02003895T priority patent/ATE311294T1/de
Priority to CNB021233322A priority patent/CN1189323C/zh
Priority to KR10-2002-0009695A priority patent/KR100460244B1/ko
Publication of JP2002248771A publication Critical patent/JP2002248771A/ja
Publication of JP2002248771A5 publication Critical patent/JP2002248771A5/ja
Application granted granted Critical
Publication of JP3728210B2 publication Critical patent/JP3728210B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
JP2001048665A 2001-02-23 2001-02-23 インクジェットヘッドおよびその製造方法、インクジェット記録装置 Expired - Fee Related JP3728210B2 (ja)

Priority Applications (9)

Application Number Priority Date Filing Date Title
JP2001048665A JP3728210B2 (ja) 2001-02-23 2001-02-23 インクジェットヘッドおよびその製造方法、インクジェット記録装置
US10/077,799 US6676241B2 (en) 2001-02-23 2002-02-20 Ink jet head, producing method therefor and ink jet recording apparatus
CA002372371A CA2372371C (en) 2001-02-23 2002-02-20 Ink jet head, producing method therefor and ink jet recording apparatus
EP02003895A EP1234671B1 (en) 2001-02-23 2002-02-21 Ink jet head, producing method therefor and ink jet recording apparatus
DE60207622T DE60207622T2 (de) 2001-02-23 2002-02-21 Tintenstrahlkopf, Herstellungsmethode dafür und Tintenstrahlaufzeichnungsgerät
AT02003895T ATE311294T1 (de) 2001-02-23 2002-02-21 Tintenstrahlkopf, herstellungsmethode dafür und tintenstrahlaufzeichnungsgerät
AU16816/02A AU784872B2 (en) 2001-02-23 2002-02-21 Ink jet head, producing method therefor and ink jet recording apparatus
CNB021233322A CN1189323C (zh) 2001-02-23 2002-02-22 喷墨头,生产方法和喷墨记录设备
KR10-2002-0009695A KR100460244B1 (ko) 2001-02-23 2002-02-23 잉크 제트 헤드, 그 제조 방법 및 잉크 제트 기록 장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001048665A JP3728210B2 (ja) 2001-02-23 2001-02-23 インクジェットヘッドおよびその製造方法、インクジェット記録装置

Publications (3)

Publication Number Publication Date
JP2002248771A JP2002248771A (ja) 2002-09-03
JP2002248771A5 JP2002248771A5 (enExample) 2004-11-04
JP3728210B2 true JP3728210B2 (ja) 2005-12-21

Family

ID=18909896

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001048665A Expired - Fee Related JP3728210B2 (ja) 2001-02-23 2001-02-23 インクジェットヘッドおよびその製造方法、インクジェット記録装置

Country Status (9)

Country Link
US (1) US6676241B2 (enExample)
EP (1) EP1234671B1 (enExample)
JP (1) JP3728210B2 (enExample)
KR (1) KR100460244B1 (enExample)
CN (1) CN1189323C (enExample)
AT (1) ATE311294T1 (enExample)
AU (1) AU784872B2 (enExample)
CA (1) CA2372371C (enExample)
DE (1) DE60207622T2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004001490A (ja) 2002-04-23 2004-01-08 Canon Inc インクジェットヘッド
JP3891561B2 (ja) * 2002-07-24 2007-03-14 キヤノン株式会社 インクジェット記録ヘッド
ITTO20020876A1 (it) * 2002-10-10 2004-04-11 Olivetti I Jet Spa Dispositivo di stampa a getto di inchiostro in parallelo
US7699449B2 (en) * 2003-06-20 2010-04-20 Seiko Epson Corporation Liquid injection apparatus and method for driving the same
KR100765315B1 (ko) * 2004-07-23 2007-10-09 삼성전자주식회사 기판과 일체로 이루어진 필터링 부재를 구비하는 잉크젯헤드 및 그 제조방법.
JP4241605B2 (ja) * 2004-12-21 2009-03-18 ソニー株式会社 液体吐出ヘッドの製造方法
JP2006297683A (ja) * 2005-04-19 2006-11-02 Sony Corp 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP4656641B2 (ja) * 2005-06-02 2011-03-23 キヤノン株式会社 記録ヘッドおよび記録装置
US7983150B2 (en) * 2006-01-18 2011-07-19 Corrigent Systems Ltd. VPLS failure protection in ring networks
JP4856982B2 (ja) * 2006-03-02 2012-01-18 キヤノン株式会社 インクジェット記録ヘッド
JP5006663B2 (ja) * 2006-03-08 2012-08-22 キヤノン株式会社 液体吐出ヘッド
US7695111B2 (en) 2006-03-08 2010-04-13 Canon Kabushiki Kaisha Liquid discharge head and manufacturing method therefor
US7585052B2 (en) * 2006-07-28 2009-09-08 Hewlett-Packard Development Company, L.P. Topography layer
US7699441B2 (en) * 2006-12-12 2010-04-20 Eastman Kodak Company Liquid drop ejector having improved liquid chamber
KR20090062012A (ko) * 2007-12-12 2009-06-17 삼성전자주식회사 잉크젯 헤드 및 그 제조방법
US8435805B2 (en) * 2010-09-06 2013-05-07 Canon Kabushiki Kaisha Method of manufacturing a substrate for liquid ejection head
JP6083986B2 (ja) 2012-04-27 2017-02-22 キヤノン株式会社 液体吐出ヘッド
EP2828081B1 (en) * 2012-07-24 2019-10-09 Hewlett-Packard Company, L.P. Fluid ejection device with particle tolerant thin-film extension
JP6478763B2 (ja) 2015-03-30 2019-03-06 キヤノン株式会社 液体吐出ヘッド
EP3468801B1 (en) * 2016-10-14 2023-07-26 Hewlett-Packard Development Company, L.P. Fluid ejection device
JP7091169B2 (ja) * 2018-07-03 2022-06-27 キヤノン株式会社 液体吐出ヘッドとその製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645242B2 (ja) 1984-12-28 1994-06-15 キヤノン株式会社 液体噴射記録ヘツドの製造方法
EP0317171A3 (en) * 1987-11-13 1990-07-18 Hewlett-Packard Company Integral thin film injection system for thermal ink jet heads and methods of operation
DE68924256T2 (de) * 1988-10-31 1996-03-14 Canon Kk Flüssigkeitsstrahlaufzeichnungsvorrichtung.
JP2683435B2 (ja) * 1989-12-14 1997-11-26 キヤノン株式会社 インクジェットノズル製造用接着剤
JP2697937B2 (ja) 1989-12-15 1998-01-19 キヤノン株式会社 活性エネルギー線硬化性樹脂組成物
US5187500A (en) * 1990-09-05 1993-02-16 Hewlett-Packard Company Control of energy to thermal inkjet heating elements
US6183067B1 (en) 1997-01-21 2001-02-06 Agilent Technologies Inkjet printhead and fabrication method for integrating an actuator and firing chamber
US6155674A (en) 1997-03-04 2000-12-05 Hewlett-Packard Company Structure to effect adhesion between substrate and ink barrier in ink jet printhead
US6045214A (en) * 1997-03-28 2000-04-04 Lexmark International, Inc. Ink jet printer nozzle plate having improved flow feature design and method of making nozzle plates
JP3184868B2 (ja) 1997-06-05 2001-07-09 株式会社日立製作所 Ｗｅｂページの真正性確認システム
US6286939B1 (en) * 1997-09-26 2001-09-11 Hewlett-Packard Company Method of treating a metal surface to increase polymer adhesion
ES2232047T3 (es) * 1998-06-03 2005-05-16 Canon Kabushiki Kaisha Cabezal para chorros de tinta, sustrato para cabezal para chorros de tinta y metodo para la fabricacion del cabezal.

Also Published As

Publication number Publication date
ATE311294T1 (de) 2005-12-15
AU1681602A (en) 2002-08-29
KR20020069172A (ko) 2002-08-29
CN1383985A (zh) 2002-12-11
EP1234671A1 (en) 2002-08-28
JP2002248771A (ja) 2002-09-03
US6676241B2 (en) 2004-01-13
US20020122101A1 (en) 2002-09-05
DE60207622T2 (de) 2006-07-20
DE60207622D1 (de) 2006-01-05
AU784872B2 (en) 2006-07-13
KR100460244B1 (ko) 2004-12-08
CA2372371A1 (en) 2002-08-23
CA2372371C (en) 2006-01-03
CN1189323C (zh) 2005-02-16
EP1234671B1 (en) 2005-11-30

Similar Documents

Publication Publication Date Title
JP3728210B2 (ja) インクジェットヘッドおよびその製造方法、インクジェット記録装置
US6505915B2 (en) Liquid ejection head, apparatus and recovery method for them
JP2008179039A (ja) 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP3473668B2 (ja) インクジェット式記録ヘッド
JP2012061689A (ja) 液滴吐出ヘッド、液滴吐出ヘッドの製造方法、液体カートリッジ及び画像形成装置
JP2016159441A (ja) 液体噴射ヘッド、液体噴射装置および液体噴射ヘッドの製造方法
US8998380B2 (en) Liquid ejecting head, liquid ejecting apparatus
JP2010194801A (ja) インクジェットヘッド
CN107020821B (zh) 流道部件的制造方法、流道部件以及液体喷射头
US9132647B2 (en) Liquid ejection head and fabricating method therefor
JP2013063557A (ja) 液体吐出ヘッド及び画像形成装置
JP7047587B2 (ja) インクジェットヘッドおよびインクジェット画像形成装置
JPH05338168A (ja) インクジェット記録ヘッド
JP4408582B2 (ja) インクジェットヘッド及びインクジェット記録装置
JP2002103632A (ja) 液滴吐出ヘッド及びその製造方法並びにインクジェット記録装置
JP4292841B2 (ja) インクジェット記録ヘッド及びインクジェット記録装置
JPH05124208A (ja) 液体噴射記録ヘツドの製造方法および液体噴射記録ヘツド
JP4211449B2 (ja) インクジェット記録ヘッド及びインクジェット記録装置
JP2008062463A (ja) 液体吐出ヘッドおよび記録装置
JP2002240279A (ja) インクジェットヘッド及びインクジェット記録装置
JP2006076170A (ja) 液滴吐出ヘッド
JP2006082448A (ja) 液滴吐出ヘッドとインクカートリッジと画像記録装置及び液滴吐出ヘッドの製造方法
JP2006088570A (ja) インクジェット記録ヘッド及びインクジェット記録装置
JP2002254642A (ja) インクジェットヘッド
JP2001018392A (ja) 液体吐出ヘッドおよびその製造方法

Legal Events

Date Code Title Description
A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20050602

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20050608

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20050804

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20050907

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20050930

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091007

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20091007

Year of fee payment: 4

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101007

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20101007

Year of fee payment: 5

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111007

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20111007

Year of fee payment: 6

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20121007

Year of fee payment: 7

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20131007

Year of fee payment: 8

LAPS Cancellation because of no payment of annual fees