DE60207622T2 - Tintenstrahlkopf, Herstellungsmethode dafür und Tintenstrahlaufzeichnungsgerät - Google Patents
Tintenstrahlkopf, Herstellungsmethode dafür und Tintenstrahlaufzeichnungsgerät Download PDFInfo
- Publication number
- DE60207622T2 DE60207622T2 DE60207622T DE60207622T DE60207622T2 DE 60207622 T2 DE60207622 T2 DE 60207622T2 DE 60207622 T DE60207622 T DE 60207622T DE 60207622 T DE60207622 T DE 60207622T DE 60207622 T2 DE60207622 T2 DE 60207622T2
- Authority
- DE
- Germany
- Prior art keywords
- flow path
- ink
- jet head
- ink jet
- adhesion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 239000000758 substrate Substances 0.000 claims abstract description 80
- 239000007788 liquid Substances 0.000 claims abstract description 54
- 238000007599 discharging Methods 0.000 claims abstract 2
- 239000011347 resin Substances 0.000 claims description 45
- 229920005989 resin Polymers 0.000 claims description 45
- 230000015572 biosynthetic process Effects 0.000 claims description 40
- 239000000463 material Substances 0.000 claims description 20
- 229920002614 Polyether block amide Polymers 0.000 claims description 15
- 239000011248 coating agent Substances 0.000 claims description 14
- 238000000576 coating method Methods 0.000 claims description 14
- 239000003822 epoxy resin Substances 0.000 claims description 6
- 229920000647 polyepoxide Polymers 0.000 claims description 6
- 239000000126 substance Substances 0.000 claims description 6
- 238000004380 ashing Methods 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 238000000059 patterning Methods 0.000 claims description 3
- 239000012260 resinous material Substances 0.000 claims description 3
- 229920001169 thermoplastic Polymers 0.000 claims description 2
- 239000004416 thermosoftening plastic Substances 0.000 claims description 2
- 230000002708 enhancing effect Effects 0.000 claims 5
- 230000001737 promoting effect Effects 0.000 claims 5
- 239000000976 ink Substances 0.000 description 273
- 239000010410 layer Substances 0.000 description 126
- 238000011049 filling Methods 0.000 description 21
- 239000012530 fluid Substances 0.000 description 20
- 238000000034 method Methods 0.000 description 16
- 239000012790 adhesive layer Substances 0.000 description 9
- 239000003086 colorant Substances 0.000 description 5
- 238000003780 insertion Methods 0.000 description 5
- 230000037431 insertion Effects 0.000 description 5
- 230000008961 swelling Effects 0.000 description 5
- 238000012549 training Methods 0.000 description 5
- 230000004888 barrier function Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 3
- 230000005499 meniscus Effects 0.000 description 3
- 230000036961 partial effect Effects 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 238000003860 storage Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 238000009835 boiling Methods 0.000 description 2
- 125000002091 cationic group Chemical group 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 238000001454 recorded image Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 239000004593 Epoxy Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000003118 aryl group Chemical group 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006266 hibernation Effects 0.000 description 1
- 239000012761 high-performance material Substances 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000002441 reversible effect Effects 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 230000002463 transducing effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14016—Structure of bubble jet print heads
- B41J2/14088—Structure of heating means
- B41J2/14112—Resistive element
- B41J2/14129—Layer structure
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1601—Production of bubble jet print heads
- B41J2/1603—Production of bubble jet print heads of the front shooter type
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001048665A JP3728210B2 (ja) | 2001-02-23 | 2001-02-23 | インクジェットヘッドおよびその製造方法、インクジェット記録装置 |
| JP2001048665 | 2001-02-23 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| DE60207622D1 DE60207622D1 (de) | 2006-01-05 |
| DE60207622T2 true DE60207622T2 (de) | 2006-07-20 |
Family
ID=18909896
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| DE60207622T Expired - Lifetime DE60207622T2 (de) | 2001-02-23 | 2002-02-21 | Tintenstrahlkopf, Herstellungsmethode dafür und Tintenstrahlaufzeichnungsgerät |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US6676241B2 (enExample) |
| EP (1) | EP1234671B1 (enExample) |
| JP (1) | JP3728210B2 (enExample) |
| KR (1) | KR100460244B1 (enExample) |
| CN (1) | CN1189323C (enExample) |
| AT (1) | ATE311294T1 (enExample) |
| AU (1) | AU784872B2 (enExample) |
| CA (1) | CA2372371C (enExample) |
| DE (1) | DE60207622T2 (enExample) |
Families Citing this family (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004001490A (ja) | 2002-04-23 | 2004-01-08 | Canon Inc | インクジェットヘッド |
| JP3891561B2 (ja) * | 2002-07-24 | 2007-03-14 | キヤノン株式会社 | インクジェット記録ヘッド |
| ITTO20020876A1 (it) * | 2002-10-10 | 2004-04-11 | Olivetti I Jet Spa | Dispositivo di stampa a getto di inchiostro in parallelo |
| US7699449B2 (en) * | 2003-06-20 | 2010-04-20 | Seiko Epson Corporation | Liquid injection apparatus and method for driving the same |
| KR100765315B1 (ko) * | 2004-07-23 | 2007-10-09 | 삼성전자주식회사 | 기판과 일체로 이루어진 필터링 부재를 구비하는 잉크젯헤드 및 그 제조방법. |
| JP4241605B2 (ja) * | 2004-12-21 | 2009-03-18 | ソニー株式会社 | 液体吐出ヘッドの製造方法 |
| JP2006297683A (ja) * | 2005-04-19 | 2006-11-02 | Sony Corp | 液体吐出ヘッド及び液体吐出ヘッドの製造方法 |
| JP4656641B2 (ja) * | 2005-06-02 | 2011-03-23 | キヤノン株式会社 | 記録ヘッドおよび記録装置 |
| US7983150B2 (en) * | 2006-01-18 | 2011-07-19 | Corrigent Systems Ltd. | VPLS failure protection in ring networks |
| JP4856982B2 (ja) * | 2006-03-02 | 2012-01-18 | キヤノン株式会社 | インクジェット記録ヘッド |
| JP5006663B2 (ja) * | 2006-03-08 | 2012-08-22 | キヤノン株式会社 | 液体吐出ヘッド |
| US7695111B2 (en) | 2006-03-08 | 2010-04-13 | Canon Kabushiki Kaisha | Liquid discharge head and manufacturing method therefor |
| US7585052B2 (en) * | 2006-07-28 | 2009-09-08 | Hewlett-Packard Development Company, L.P. | Topography layer |
| US7699441B2 (en) * | 2006-12-12 | 2010-04-20 | Eastman Kodak Company | Liquid drop ejector having improved liquid chamber |
| KR20090062012A (ko) * | 2007-12-12 | 2009-06-17 | 삼성전자주식회사 | 잉크젯 헤드 및 그 제조방법 |
| US8435805B2 (en) * | 2010-09-06 | 2013-05-07 | Canon Kabushiki Kaisha | Method of manufacturing a substrate for liquid ejection head |
| JP6083986B2 (ja) | 2012-04-27 | 2017-02-22 | キヤノン株式会社 | 液体吐出ヘッド |
| EP2828081B1 (en) * | 2012-07-24 | 2019-10-09 | Hewlett-Packard Company, L.P. | Fluid ejection device with particle tolerant thin-film extension |
| JP6478763B2 (ja) | 2015-03-30 | 2019-03-06 | キヤノン株式会社 | 液体吐出ヘッド |
| EP3468801B1 (en) * | 2016-10-14 | 2023-07-26 | Hewlett-Packard Development Company, L.P. | Fluid ejection device |
| JP7091169B2 (ja) * | 2018-07-03 | 2022-06-27 | キヤノン株式会社 | 液体吐出ヘッドとその製造方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0645242B2 (ja) | 1984-12-28 | 1994-06-15 | キヤノン株式会社 | 液体噴射記録ヘツドの製造方法 |
| EP0317171A3 (en) * | 1987-11-13 | 1990-07-18 | Hewlett-Packard Company | Integral thin film injection system for thermal ink jet heads and methods of operation |
| DE68924256T2 (de) * | 1988-10-31 | 1996-03-14 | Canon Kk | Flüssigkeitsstrahlaufzeichnungsvorrichtung. |
| JP2683435B2 (ja) * | 1989-12-14 | 1997-11-26 | キヤノン株式会社 | インクジェットノズル製造用接着剤 |
| JP2697937B2 (ja) | 1989-12-15 | 1998-01-19 | キヤノン株式会社 | 活性エネルギー線硬化性樹脂組成物 |
| US5187500A (en) * | 1990-09-05 | 1993-02-16 | Hewlett-Packard Company | Control of energy to thermal inkjet heating elements |
| US6183067B1 (en) | 1997-01-21 | 2001-02-06 | Agilent Technologies | Inkjet printhead and fabrication method for integrating an actuator and firing chamber |
| US6155674A (en) | 1997-03-04 | 2000-12-05 | Hewlett-Packard Company | Structure to effect adhesion between substrate and ink barrier in ink jet printhead |
| US6045214A (en) * | 1997-03-28 | 2000-04-04 | Lexmark International, Inc. | Ink jet printer nozzle plate having improved flow feature design and method of making nozzle plates |
| JP3184868B2 (ja) | 1997-06-05 | 2001-07-09 | 株式会社日立製作所 | Ｗｅｂページの真正性確認システム |
| US6286939B1 (en) * | 1997-09-26 | 2001-09-11 | Hewlett-Packard Company | Method of treating a metal surface to increase polymer adhesion |
| ES2232047T3 (es) * | 1998-06-03 | 2005-05-16 | Canon Kabushiki Kaisha | Cabezal para chorros de tinta, sustrato para cabezal para chorros de tinta y metodo para la fabricacion del cabezal. |
-
2001
- 2001-02-23 JP JP2001048665A patent/JP3728210B2/ja not_active Expired - Fee Related
-
2002
- 2002-02-20 US US10/077,799 patent/US6676241B2/en not_active Expired - Lifetime
- 2002-02-20 CA CA002372371A patent/CA2372371C/en not_active Expired - Fee Related
- 2002-02-21 AT AT02003895T patent/ATE311294T1/de not_active IP Right Cessation
- 2002-02-21 AU AU16816/02A patent/AU784872B2/en not_active Ceased
- 2002-02-21 DE DE60207622T patent/DE60207622T2/de not_active Expired - Lifetime
- 2002-02-21 EP EP02003895A patent/EP1234671B1/en not_active Expired - Lifetime
- 2002-02-22 CN CNB021233322A patent/CN1189323C/zh not_active Expired - Fee Related
- 2002-02-23 KR KR10-2002-0009695A patent/KR100460244B1/ko not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| ATE311294T1 (de) | 2005-12-15 |
| AU1681602A (en) | 2002-08-29 |
| KR20020069172A (ko) | 2002-08-29 |
| CN1383985A (zh) | 2002-12-11 |
| EP1234671A1 (en) | 2002-08-28 |
| JP2002248771A (ja) | 2002-09-03 |
| JP3728210B2 (ja) | 2005-12-21 |
| US6676241B2 (en) | 2004-01-13 |
| US20020122101A1 (en) | 2002-09-05 |
| DE60207622D1 (de) | 2006-01-05 |
| AU784872B2 (en) | 2006-07-13 |
| KR100460244B1 (ko) | 2004-12-08 |
| CA2372371A1 (en) | 2002-08-23 |
| CA2372371C (en) | 2006-01-03 |
| CN1189323C (zh) | 2005-02-16 |
| EP1234671B1 (en) | 2005-11-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| 8364 | No opposition during term of opposition |