CN1189323C - 喷墨头,生产方法和喷墨记录设备 - Google Patents

喷墨头,生产方法和喷墨记录设备 Download PDF

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Publication number
CN1189323C
CN1189323C CNB021233322A CN02123332A CN1189323C CN 1189323 C CN1189323 C CN 1189323C CN B021233322 A CNB021233322 A CN B021233322A CN 02123332 A CN02123332 A CN 02123332A CN 1189323 C CN1189323 C CN 1189323C
Authority
CN
China
Prior art keywords
flow channel
ink
adhesion layer
substrate
ink gun
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CNB021233322A
Other languages
English (en)
Chinese (zh)
Other versions
CN1383985A (zh
Inventor
矢部贤治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN1383985A publication Critical patent/CN1383985A/zh
Application granted granted Critical
Publication of CN1189323C publication Critical patent/CN1189323C/zh
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14403—Structure thereof only for on-demand ink jet heads including a filter

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
CNB021233322A 2001-02-23 2002-02-22 喷墨头,生产方法和喷墨记录设备 Expired - Fee Related CN1189323C (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP048665/2001 2001-02-23
JP2001048665A JP3728210B2 (ja) 2001-02-23 2001-02-23 インクジェットヘッドおよびその製造方法、インクジェット記録装置

Publications (2)

Publication Number Publication Date
CN1383985A CN1383985A (zh) 2002-12-11
CN1189323C true CN1189323C (zh) 2005-02-16

Family

ID=18909896

Family Applications (1)

Application Number Title Priority Date Filing Date
CNB021233322A Expired - Fee Related CN1189323C (zh) 2001-02-23 2002-02-22 喷墨头,生产方法和喷墨记录设备

Country Status (9)

Country Link
US (1) US6676241B2 (enExample)
EP (1) EP1234671B1 (enExample)
JP (1) JP3728210B2 (enExample)
KR (1) KR100460244B1 (enExample)
CN (1) CN1189323C (enExample)
AT (1) ATE311294T1 (enExample)
AU (1) AU784872B2 (enExample)
CA (1) CA2372371C (enExample)
DE (1) DE60207622T2 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004001490A (ja) 2002-04-23 2004-01-08 Canon Inc インクジェットヘッド
JP3891561B2 (ja) * 2002-07-24 2007-03-14 キヤノン株式会社 インクジェット記録ヘッド
ITTO20020876A1 (it) * 2002-10-10 2004-04-11 Olivetti I Jet Spa Dispositivo di stampa a getto di inchiostro in parallelo
US7699449B2 (en) * 2003-06-20 2010-04-20 Seiko Epson Corporation Liquid injection apparatus and method for driving the same
KR100765315B1 (ko) * 2004-07-23 2007-10-09 삼성전자주식회사 기판과 일체로 이루어진 필터링 부재를 구비하는 잉크젯헤드 및 그 제조방법.
JP4241605B2 (ja) * 2004-12-21 2009-03-18 ソニー株式会社 液体吐出ヘッドの製造方法
JP2006297683A (ja) * 2005-04-19 2006-11-02 Sony Corp 液体吐出ヘッド及び液体吐出ヘッドの製造方法
JP4656641B2 (ja) * 2005-06-02 2011-03-23 キヤノン株式会社 記録ヘッドおよび記録装置
US7983150B2 (en) * 2006-01-18 2011-07-19 Corrigent Systems Ltd. VPLS failure protection in ring networks
JP4856982B2 (ja) * 2006-03-02 2012-01-18 キヤノン株式会社 インクジェット記録ヘッド
JP5006663B2 (ja) * 2006-03-08 2012-08-22 キヤノン株式会社 液体吐出ヘッド
US7695111B2 (en) 2006-03-08 2010-04-13 Canon Kabushiki Kaisha Liquid discharge head and manufacturing method therefor
US7585052B2 (en) * 2006-07-28 2009-09-08 Hewlett-Packard Development Company, L.P. Topography layer
US7699441B2 (en) * 2006-12-12 2010-04-20 Eastman Kodak Company Liquid drop ejector having improved liquid chamber
KR20090062012A (ko) * 2007-12-12 2009-06-17 삼성전자주식회사 잉크젯 헤드 및 그 제조방법
US8435805B2 (en) * 2010-09-06 2013-05-07 Canon Kabushiki Kaisha Method of manufacturing a substrate for liquid ejection head
JP6083986B2 (ja) 2012-04-27 2017-02-22 キヤノン株式会社 液体吐出ヘッド
EP2828081B1 (en) * 2012-07-24 2019-10-09 Hewlett-Packard Company, L.P. Fluid ejection device with particle tolerant thin-film extension
JP6478763B2 (ja) 2015-03-30 2019-03-06 キヤノン株式会社 液体吐出ヘッド
EP3468801B1 (en) * 2016-10-14 2023-07-26 Hewlett-Packard Development Company, L.P. Fluid ejection device
JP7091169B2 (ja) * 2018-07-03 2022-06-27 キヤノン株式会社 液体吐出ヘッドとその製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0645242B2 (ja) 1984-12-28 1994-06-15 キヤノン株式会社 液体噴射記録ヘツドの製造方法
EP0317171A3 (en) * 1987-11-13 1990-07-18 Hewlett-Packard Company Integral thin film injection system for thermal ink jet heads and methods of operation
DE68924256T2 (de) * 1988-10-31 1996-03-14 Canon Kk Flüssigkeitsstrahlaufzeichnungsvorrichtung.
JP2683435B2 (ja) * 1989-12-14 1997-11-26 キヤノン株式会社 インクジェットノズル製造用接着剤
JP2697937B2 (ja) 1989-12-15 1998-01-19 キヤノン株式会社 活性エネルギー線硬化性樹脂組成物
US5187500A (en) * 1990-09-05 1993-02-16 Hewlett-Packard Company Control of energy to thermal inkjet heating elements
US6183067B1 (en) 1997-01-21 2001-02-06 Agilent Technologies Inkjet printhead and fabrication method for integrating an actuator and firing chamber
US6155674A (en) 1997-03-04 2000-12-05 Hewlett-Packard Company Structure to effect adhesion between substrate and ink barrier in ink jet printhead
US6045214A (en) * 1997-03-28 2000-04-04 Lexmark International, Inc. Ink jet printer nozzle plate having improved flow feature design and method of making nozzle plates
JP3184868B2 (ja) 1997-06-05 2001-07-09 株式会社日立製作所 Ｗｅｂページの真正性確認システム
US6286939B1 (en) * 1997-09-26 2001-09-11 Hewlett-Packard Company Method of treating a metal surface to increase polymer adhesion
ES2232047T3 (es) * 1998-06-03 2005-05-16 Canon Kabushiki Kaisha Cabezal para chorros de tinta, sustrato para cabezal para chorros de tinta y metodo para la fabricacion del cabezal.

Also Published As

Publication number Publication date
ATE311294T1 (de) 2005-12-15
AU1681602A (en) 2002-08-29
KR20020069172A (ko) 2002-08-29
CN1383985A (zh) 2002-12-11
EP1234671A1 (en) 2002-08-28
JP2002248771A (ja) 2002-09-03
JP3728210B2 (ja) 2005-12-21
US6676241B2 (en) 2004-01-13
US20020122101A1 (en) 2002-09-05
DE60207622T2 (de) 2006-07-20
DE60207622D1 (de) 2006-01-05
AU784872B2 (en) 2006-07-13
KR100460244B1 (ko) 2004-12-08
CA2372371A1 (en) 2002-08-23
CA2372371C (en) 2006-01-03
EP1234671B1 (en) 2005-11-30

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C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20050216

Termination date: 20180222

CF01 Termination of patent right due to non-payment of annual fee