JP3511024B2 - 半導体装置のシリコン酸化膜形成方法およびこれを用いた素子分離方法 - Google Patents

半導体装置のシリコン酸化膜形成方法およびこれを用いた素子分離方法

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Publication number
JP3511024B2
JP3511024B2 JP2002005050A JP2002005050A JP3511024B2 JP 3511024 B2 JP3511024 B2 JP 3511024B2 JP 2002005050 A JP2002005050 A JP 2002005050A JP 2002005050 A JP2002005050 A JP 2002005050A JP 3511024 B2 JP3511024 B2 JP 3511024B2
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JP
Japan
Prior art keywords
oxide film
silicon oxide
film
spin
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2002005050A
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English (en)
Japanese (ja)
Other versions
JP2002367980A (ja
Inventor
禎浩 李
東峻 李
大源 姜
成澤 文
基鶴 李
晶植 崔
Original Assignee
三星電子株式会社
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Publication date
Application filed by 三星電子株式会社 filed Critical 三星電子株式会社
Publication of JP2002367980A publication Critical patent/JP2002367980A/ja
Application granted granted Critical
Publication of JP3511024B2 publication Critical patent/JP3511024B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76224—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using trench refilling with dielectric materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Element Separation (AREA)
JP2002005050A 2001-06-07 2002-01-11 半導体装置のシリコン酸化膜形成方法およびこれを用いた素子分離方法 Expired - Fee Related JP3511024B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR10-2001-0031633A KR100436495B1 (ko) 2001-06-07 2001-06-07 스핀온글래스 조성물을 이용한 반도체 장치의 산화실리콘막 형성방법 및 이를 이용한 반도체 장치의 소자분리 방법
KR2001-31633 2001-06-07

Publications (2)

Publication Number Publication Date
JP2002367980A JP2002367980A (ja) 2002-12-20
JP3511024B2 true JP3511024B2 (ja) 2004-03-29

Family

ID=19710473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2002005050A Expired - Fee Related JP3511024B2 (ja) 2001-06-07 2002-01-11 半導体装置のシリコン酸化膜形成方法およびこれを用いた素子分離方法

Country Status (3)

Country Link
JP (1) JP3511024B2 (ko)
KR (1) KR100436495B1 (ko)
TW (1) TW506016B (ko)

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100464859B1 (ko) * 2003-02-26 2005-01-06 삼성전자주식회사 스핀온글래스 조성물을 이용한 캐패시터 형성 방법
TWI326114B (en) 2003-07-18 2010-06-11 Az Electronic Materials Japan A phosphorous-containing silazane composition, a phosphorous-containing siliceous film, a phosphorous-containing siliceous filing material, a production method of a siliceous film and semiconductor device
KR100499171B1 (ko) * 2003-07-21 2005-07-01 삼성전자주식회사 스핀온글래스에 의한 산화실리콘막의 형성방법
JP4342895B2 (ja) * 2003-10-06 2009-10-14 東京エレクトロン株式会社 熱処理方法及び熱処理装置
CN100444331C (zh) * 2003-11-11 2008-12-17 三星电子株式会社 旋涂玻璃组合物和在半导体制造工序中使用该旋涂玻璃形成氧化硅层的方法
JP2005166700A (ja) 2003-11-28 2005-06-23 Toshiba Corp 半導体装置及びその製造方法
JP2005347636A (ja) * 2004-06-04 2005-12-15 Az Electronic Materials Kk トレンチ・アイソレーション構造の形成方法
JP4607613B2 (ja) 2005-02-09 2011-01-05 株式会社東芝 半導体装置の製造方法
US7682927B2 (en) 2005-03-25 2010-03-23 Kabushiki Kaisha Toshiba Method of manufacturing semiconductor device
JP2006303308A (ja) * 2005-04-22 2006-11-02 Toshiba Corp 半導体装置およびその製造方法
KR100781033B1 (ko) * 2005-05-12 2007-11-29 주식회사 하이닉스반도체 반도체 소자의 제조방법
KR100607326B1 (ko) * 2005-06-30 2006-08-01 주식회사 하이닉스반도체 반도체 소자의 제조방법
JP2007088369A (ja) * 2005-09-26 2007-04-05 Fuji Electric Device Technology Co Ltd 半導体装置の製造方法および半導体装置の製造装置
JP4634923B2 (ja) 2005-12-15 2011-02-16 株式会社東芝 絶縁膜の製造方法、トランジスタの製造方法及び電子デバイスの製造方法
KR100866143B1 (ko) 2007-08-03 2008-10-31 주식회사 하이닉스반도체 반도체 소자의 소자분리막 형성방법
JP5329825B2 (ja) 2008-02-25 2013-10-30 株式会社東芝 半導体装置の製造方法
US8080463B2 (en) 2009-01-23 2011-12-20 Kabushiki Kaisha Toshiba Semiconductor device manufacturing method and silicon oxide film forming method
JP4806048B2 (ja) * 2009-03-25 2011-11-02 株式会社東芝 不揮発性記憶装置の製造方法
US8153488B2 (en) 2009-03-24 2012-04-10 Kabushiki Kaisha Toshiba Method for manufacturing nonvolatile storage device
JP5899615B2 (ja) * 2010-03-18 2016-04-06 株式会社リコー 絶縁膜の製造方法及び半導体装置の製造方法
US10020374B2 (en) 2009-12-25 2018-07-10 Ricoh Company, Ltd. Field-effect transistor, semiconductor memory display element, image display device, and system
WO2011138906A1 (ja) * 2010-05-07 2011-11-10 国立大学法人東北大学 半導体装置の製造方法
WO2014157210A1 (ja) * 2013-03-26 2014-10-02 株式会社日立国際電気 半導体装置の製造方法、基板処理装置及び記録媒体
US10373729B2 (en) * 2014-09-03 2019-08-06 Daicel Corporation Composition for forming coat-type insulating film
CN115910924A (zh) * 2021-08-26 2023-04-04 联华电子股份有限公司 一种制作半导体元件的方法
TWI810122B (zh) * 2022-11-30 2023-07-21 南亞科技股份有限公司 半導體結構的製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000012536A (ja) * 1998-06-24 2000-01-14 Tokyo Ohka Kogyo Co Ltd シリカ被膜形成方法
KR100362834B1 (ko) * 2000-05-02 2002-11-29 삼성전자 주식회사 반도체 장치의 산화막 형성 방법 및 이에 의하여 제조된 반도체 장치

Also Published As

Publication number Publication date
TW506016B (en) 2002-10-11
KR100436495B1 (ko) 2004-06-22
KR20020093197A (ko) 2002-12-16
JP2002367980A (ja) 2002-12-20

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