JP2022111108A - ハイブリッドバルク音響波フィルタ - Google Patents

ハイブリッドバルク音響波フィルタ Download PDF

Info

Publication number
JP2022111108A
JP2022111108A JP2022006133A JP2022006133A JP2022111108A JP 2022111108 A JP2022111108 A JP 2022111108A JP 2022006133 A JP2022006133 A JP 2022006133A JP 2022006133 A JP2022006133 A JP 2022006133A JP 2022111108 A JP2022111108 A JP 2022111108A
Authority
JP
Japan
Prior art keywords
acoustic
resonators
filtering circuit
acoustic resonators
piezoelectric material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022006133A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022111108A5 (https=
Inventor
アルフレッド・ヒメネス
Gimenez Alfred
ウルフギャング・ヘーレン
Heeren Wolfgang
ゲルノット・ファッティンガー
Fattinger Gernot
マダール・アル・ジョウマイリー
Al-Joumayly Mudar
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Qorvo US Inc
Original Assignee
Qorvo US Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Qorvo US Inc filed Critical Qorvo US Inc
Publication of JP2022111108A publication Critical patent/JP2022111108A/ja
Publication of JP2022111108A5 publication Critical patent/JP2022111108A5/ja
Pending legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/0004—Impedance-matching networks
    • H03H9/0014—Impedance-matching networks using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/173—Air-gaps
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • H03H9/174—Membranes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/176—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of ceramic material
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/562—Monolithic crystal filters comprising a ceramic piezoelectric layer
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/58—Multiple crystal filters
    • H03H9/60—Electric coupling means therefor
    • H03H9/605—Electric coupling means therefor consisting of a ladder configuration
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/70—Multiple-port networks for connecting several sources or loads, working on different frequencies or frequency bands, to a common load or source
    • H03H9/703—Networks using bulk acoustic wave devices
    • H03H9/706—Duplexers
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/542—Filters comprising resonators of piezoelectric or electrostrictive material including passive elements

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Filters And Equalizers (AREA)
  • Control Of Motors That Do Not Use Commutators (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
JP2022006133A 2021-01-19 2022-01-19 ハイブリッドバルク音響波フィルタ Pending JP2022111108A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/152,110 2021-01-19
US17/152,110 US11575363B2 (en) 2021-01-19 2021-01-19 Hybrid bulk acoustic wave filter

Publications (2)

Publication Number Publication Date
JP2022111108A true JP2022111108A (ja) 2022-07-29
JP2022111108A5 JP2022111108A5 (https=) 2025-01-17

Family

ID=79231111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022006133A Pending JP2022111108A (ja) 2021-01-19 2022-01-19 ハイブリッドバルク音響波フィルタ

Country Status (5)

Country Link
US (1) US11575363B2 (https=)
EP (1) EP4030620A1 (https=)
JP (1) JP2022111108A (https=)
KR (1) KR20220105131A (https=)
TW (1) TW202243400A (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12445109B2 (en) * 2019-07-31 2025-10-14 QXONIX Inc. Structures, acoustic wave resonators, layers, devices and systems
US12587172B2 (en) 2023-03-15 2026-03-24 Qorvo Us, Inc. Pin reconfigurable baw filters

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004535738A (ja) * 2001-07-18 2004-11-25 エプコス　アクチエンゲゼルシャフト エッジ急峻度の改善されたリアクタンスフィルタ
JP2015032634A (ja) * 2013-07-31 2015-02-16 太陽誘電株式会社 電子デバイス
JP2016504870A (ja) * 2012-12-21 2016-02-12 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ 積層された２種の異なる圧電材料を備えるｂａｗ部品、当該ｂａｗ部品用の積層体、及び当該ｂａｗ部品の製造方法
JP2016507939A (ja) * 2012-12-21 2016-03-10 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ 窒化アルミニウム及びスカンジウムを有したｍｅｍｓ部品、及びｍｅｍｓ部品の製造方法
US20170310302A1 (en) * 2016-04-25 2017-10-26 Infineon Technologies Ag Tunable Resonator Element, Filter Circuit and Method
WO2018047862A1 (ja) * 2016-09-07 2018-03-15 株式会社村田製作所 弾性波フィルタ装置及び複合フィルタ装置
CN111010120A (zh) * 2019-09-20 2020-04-14 天津大学 具有调节层的体声波谐振器、滤波器和电子设备
JP2020526471A (ja) * 2017-07-07 2020-08-31 スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. 弾性波フィルタ改善のための置換窒化アルミニウム
CN111917392A (zh) * 2020-04-14 2020-11-10 诺思(天津)微系统有限责任公司 压电滤波器及其带外抑制改善方法、多工器、通信设备

Family Cites Families (126)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3731230A (en) 1971-12-17 1973-05-01 Motorola Inc Broadband circuit for minimizing the effects of crystal shunt capacitance
US3875533A (en) 1973-10-15 1975-04-01 Motorola Inc Crystal controlled overtone oscillator having a rejection circuit for preventing oscillation at undesired overtones
DK147560C (da) 1980-03-13 1985-07-22 Bang & Olufsen As Modtagerantenne for magnetiske signaler, f.eks. ferritantenne
US4577168A (en) 1984-12-03 1986-03-18 R. F. Monolithics, Inc. Notch filter
US5291159A (en) 1992-07-20 1994-03-01 Westinghouse Electric Corp. Acoustic resonator filter with electrically variable center frequency and bandwidth
US5821833A (en) 1995-12-26 1998-10-13 Tfr Technologies, Inc. Stacked crystal filter device and method of making
US6246153B1 (en) 1998-07-16 2001-06-12 Face International Corp. Positive feedback resonant transducer circuit
US6067391A (en) 1998-09-02 2000-05-23 The United States Of America As Represented By The Secretary Of The Air Force Multiply periodic refractive index modulated optical filters
KR100301854B1 (ko) 1999-06-02 2001-09-29 구본준, 론 위라하디락사 투과 및 반사형 겸용 액정표시장치
US6496085B2 (en) 2001-01-02 2002-12-17 Nokia Mobile Phones Ltd Solidly mounted multi-resonator bulk acoustic wave filter with a patterned acoustic mirror
TW488044B (en) 2001-02-09 2002-05-21 Asia Pacific Microsystems Inc Bulk acoustic filter and its package
JP3973915B2 (ja) 2001-03-30 2007-09-12 株式会社日立メディアエレクトロニクス 高周波フィルタ、高周波回路、アンテナ共用器及び無線端末
WO2002087081A1 (en) 2001-04-25 2002-10-31 Koninklijke Philips Electronics N.V. Arrangement with two piezoelectric layers, and method of operating a filter device
DE10149542A1 (de) 2001-10-08 2003-04-17 Infineon Technologies Ag BAW-Resonator
US6720844B1 (en) 2001-11-16 2004-04-13 Tfr Technologies, Inc. Coupled resonator bulk acoustic wave filter
US6670866B2 (en) 2002-01-09 2003-12-30 Nokia Corporation Bulk acoustic wave resonator with two piezoelectric layers as balun in filters and duplexers
DE20221966U1 (de) 2002-06-06 2010-02-25 Epcos Ag Mit akustischen Wellen arbeitendes Bauelement mit einem Anpaßnetzwerk
JP3963824B2 (ja) 2002-11-22 2007-08-22 富士通メディアデバイス株式会社 フィルタ素子、それを有するフィルタ装置、分波器及び高周波回路
JP2004304490A (ja) 2003-03-31 2004-10-28 Tdk Corp 薄膜圧電共振子の製造方法、薄膜圧電共振子の製造装置、薄膜圧電共振子および電子部品
DE10319554B4 (de) 2003-04-30 2018-05-09 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitendes Bauelement mit gekoppelten Resonatoren
US6927651B2 (en) 2003-05-12 2005-08-09 Agilent Technologies, Inc. Acoustic resonator devices having multiple resonant frequencies and methods of making the same
WO2004105237A1 (ja) 2003-05-26 2004-12-02 Murata Manufacturing Co., Ltd. 圧電電子部品、およびその製造方法、通信機
JP2005117641A (ja) 2003-09-17 2005-04-28 Matsushita Electric Ind Co Ltd 圧電体共振器、それを用いたフィルタ及び共用器
US6946928B2 (en) 2003-10-30 2005-09-20 Agilent Technologies, Inc. Thin-film acoustically-coupled transformer
DE602004000851T2 (de) 2003-10-30 2007-05-16 Avago Technologies General Ip (Singapore) Pte. Ltd. Akustisch gekoppelter Dünnschicht-Transformator mit zwei piezoelektrischen Elementen, welche entgegengesetzte C-Axen Orientierung besitzten
US7362198B2 (en) 2003-10-30 2008-04-22 Avago Technologies Wireless Ip (Singapore) Pte. Ltd Pass bandwidth control in decoupled stacked bulk acoustic resonator devices
JP3950445B2 (ja) 2003-11-05 2007-08-01 Ｔｄｋ株式会社 デュプレクサ
JP3944161B2 (ja) 2003-12-25 2007-07-11 株式会社東芝 薄膜バルク波音響共振器及び薄膜バルク波音響共振器の製造方法
US6963257B2 (en) 2004-03-19 2005-11-08 Nokia Corporation Coupled BAW resonator based duplexers
DE102004032930A1 (de) 2004-07-07 2006-02-02 Epcos Ag Beidseitig symmetrisch betreibbares Filter mit Volumenwellenresonatoren
DE102004049499B4 (de) 2004-10-11 2017-12-21 Snaptrack, Inc. Mit akustischen Volumenwellen arbeitende Schaltung und Bauelement mit der Schaltung
US7098758B2 (en) 2004-11-03 2006-08-29 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled thin-film resonators having an electrode with a tapered edge
US7333831B2 (en) 2005-02-07 2008-02-19 Nxp B.V. Interchangeable receive inputs for band and system swappability in communication systems and related methods
US7436269B2 (en) 2005-04-18 2008-10-14 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustically coupled resonators and method of making the same
US7535323B2 (en) 2006-07-10 2009-05-19 Skyworks Solutions, Inc. Bulk acoustic wave filter with reduced nonlinear signal distortion
US7515018B2 (en) 2006-08-31 2009-04-07 Martin Handtmann Acoustic resonator
JP5036435B2 (ja) 2006-09-01 2012-09-26 太陽誘電株式会社 弾性波デバイス、フィルタおよび分波器
JP2008172711A (ja) 2007-01-15 2008-07-24 Hitachi Media Electoronics Co Ltd 薄膜バルク弾性波共振器およびフィルタおよびそれを用いた高周波モジュール
US7804374B1 (en) 2007-02-15 2010-09-28 Discera, Inc. Feedthrough capacitance compensation for resonant devices
US7825749B2 (en) 2007-05-31 2010-11-02 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Integrated coupled resonator filter and bulk acoustic wave devices
US7786825B2 (en) 2007-05-31 2010-08-31 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave device with coupled resonators
US7898493B1 (en) 2007-06-13 2011-03-01 The Ohio State University Implementation of ultra wide band (UWB) electrically small antennas by means of distributed non foster loading
US8018303B2 (en) 2007-10-12 2011-09-13 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic wave device
US7786826B2 (en) 2007-10-12 2010-08-31 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Apparatus with acoustically coupled BAW resonators and a method for matching impedances
FR2926417B1 (fr) 2008-01-15 2010-01-08 Commissariat Energie Atomique Filtre d'amplification de puissance de signaux radiofrequence
JP5441095B2 (ja) 2008-01-31 2014-03-12 太陽誘電株式会社 弾性波デバイス、デュープレクサ、通信モジュール、および通信装置
US7855618B2 (en) 2008-04-30 2010-12-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Bulk acoustic resonator electrical impedance transformers
US7889024B2 (en) 2008-08-29 2011-02-15 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Single cavity acoustic resonators and electrical filters comprising single cavity acoustic resonators
WO2010079803A1 (ja) 2009-01-07 2010-07-15 株式会社大真空 圧電振動デバイスの製造方法
US8373519B2 (en) 2009-01-26 2013-02-12 Resonance Semiconductor Corporation Switchable power combiner
US8248185B2 (en) 2009-06-24 2012-08-21 Avago Technologies Wireless Ip (Singapore) Pte. Ltd. Acoustic resonator structure comprising a bridge
JP5419617B2 (ja) 2009-09-28 2014-02-19 太陽誘電株式会社 フィルタ、通信モジュール、および通信装置
CN102668375B (zh) 2009-10-19 2014-10-29 株式会社村田制作所 弹性表面波装置
JP2011109306A (ja) 2009-11-16 2011-06-02 Murata Mfg Co Ltd 弾性表面波素子
US9847768B2 (en) 2009-11-23 2017-12-19 Avago Technologies General Ip (Singapore) Pte. Ltd. Polarity determining seed layer and method of fabricating piezoelectric materials with specific C-axis
US9450561B2 (en) 2009-11-25 2016-09-20 Avago Technologies General Ip (Singapore) Pte. Ltd. Bulk acoustic wave (BAW) resonator structure having an electrode with a cantilevered portion and a piezoelectric layer with varying amounts of dopant
US9679765B2 (en) 2010-01-22 2017-06-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating rare-earth doped piezoelectric material with various amounts of dopants and a selected C-axis orientation
US9243316B2 (en) 2010-01-22 2016-01-26 Avago Technologies General Ip (Singapore) Pte. Ltd. Method of fabricating piezoelectric material with selected c-axis orientation
US8768267B2 (en) 2010-02-03 2014-07-01 Hollinworth Fund, L.L.C. Switchless band separation for transceivers
US8576024B2 (en) 2010-02-11 2013-11-05 Hollinworth Fund, L.L.C. Electro-acoustic filter
US8508315B2 (en) 2010-02-23 2013-08-13 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustically coupled resonator filter with impedance transformation ratio controlled by resonant frequency difference between two coupled resonators
JP5519326B2 (ja) 2010-02-25 2014-06-11 太陽誘電株式会社 フィルタ、デュープレクサ、通信モジュール、通信装置
AT12768U1 (de) 2010-03-29 2012-11-15 Ctr Carinthian Tech Res Ag Hochtemperaturbeständige, elektrisch leitfähige dünnschichten
JP5187597B2 (ja) 2010-07-05 2013-04-24 株式会社村田製作所 弾性波素子
US8674789B2 (en) 2010-07-07 2014-03-18 Wei Pang Serially connected first and second coupled resonator filters configured to provide at least one feedback capacitor
US8575820B2 (en) 2011-03-29 2013-11-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Stacked bulk acoustic resonator
JP2012257050A (ja) 2011-06-08 2012-12-27 Nippon Dempa Kogyo Co Ltd ハイパス型のノッチフィルタ及びこのフィルタを備えた電子機器
US9319023B2 (en) 2011-06-28 2016-04-19 Kyocera Corporation Acoustic wave element and acoustic wave device using same
WO2013031617A1 (ja) 2011-08-26 2013-03-07 株式会社村田製作所 圧電デバイス、および、圧電デバイスの製造方法
US8923794B2 (en) 2011-11-02 2014-12-30 Triquint Semiconductor, Inc. Temperature compensation of acoustic resonators in the electrical domain
JP6017868B2 (ja) 2011-11-04 2016-11-02 太陽誘電株式会社 分波器、フィルタ及び通信モジュール
US9054671B2 (en) 2011-11-09 2015-06-09 International Business Machines Corporation Tunable filter structures and design structures
JP6116120B2 (ja) 2012-01-24 2017-04-19 太陽誘電株式会社 弾性波デバイス及び弾性波デバイスの製造方法
US9065421B2 (en) 2012-01-31 2015-06-23 Avago Technologies General Ip (Singapore) Pte. Ltd. Film bulk acoustic resonator with multi-layers of different piezoelectric materials and method of making
US8981627B2 (en) 2012-06-04 2015-03-17 Tdk Corporation Piezoelectric device with electrode films and electroconductive oxide film
FR2996061B1 (fr) 2012-09-27 2015-12-25 Commissariat Energie Atomique Structure acoustique comportant au moins un resonateur et au moins une capacite cointegree dans une meme couche piezoelectrique ou ferroelectrique
JP5896039B2 (ja) 2012-10-24 2016-03-30 株式会社村田製作所 フィルタ装置
EP2955346B8 (en) 2013-02-08 2018-10-17 Toyota Jidosha Kabushiki Kaisha Exhaust purification apparatus for internal combustion engine
WO2014168162A1 (ja) 2013-04-11 2014-10-16 株式会社村田製作所 高周波モジュール
WO2014185331A1 (ja) 2013-05-14 2014-11-20 株式会社村田製作所 弾性波装置およびその製造方法
US9437802B2 (en) 2013-08-21 2016-09-06 Fujifilm Dimatix, Inc. Multi-layered thin film piezoelectric devices and methods of making the same
WO2015119176A1 (ja) 2014-02-10 2015-08-13 株式会社村田製作所 フィルタ回路および無線通信装置
CN106031034B (zh) 2014-03-31 2018-09-14 株式会社村田制作所 弹性波装置
US9548438B2 (en) 2014-03-31 2017-01-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic resonator comprising acoustic redistribution layers
DE102014111912B4 (de) 2014-08-20 2024-06-13 Snaptrack, Inc. HF-Filter
JP6508920B2 (ja) 2014-11-13 2019-05-08 太陽誘電株式会社 弾性波デバイスおよび送受信デバイス
US9837984B2 (en) 2014-12-24 2017-12-05 Qorvo Us, Inc. RF ladder filter with simplified acoustic RF resonator parallel capacitance compensation
US10333494B2 (en) 2014-12-24 2019-06-25 Qorvo Us, Inc. Simplified acoustic RF resonator parallel capacitance compensation
KR102117471B1 (ko) 2015-01-12 2020-06-01 삼성전기주식회사 음향 공진기 및 그 제조 방법
US9584076B2 (en) 2015-03-06 2017-02-28 Qorvo Us, Inc. Output matching network for differential power amplifier
US9837983B2 (en) 2015-03-13 2017-12-05 Avago Technologies General Ip (Singapore) Pte. Ltd. Acoustic filter device with combined passband
JP6390787B2 (ja) 2015-03-30 2018-09-19 株式会社村田製作所 高周波フィルタ、フロントエンド回路、および通信機器
US9929761B2 (en) 2015-04-17 2018-03-27 Qorvo Us, Inc. High band TDD antenna swapping method with improved receiver sensitivity
US9524881B2 (en) 2015-04-30 2016-12-20 Texas Instruments Incorporated Method for fabricating specific termination angles in titanium tungsten layers
JP6589983B2 (ja) 2015-07-02 2019-10-16 株式会社村田製作所 弾性波装置
US9847769B2 (en) 2015-09-25 2017-12-19 Qorvo Us, Inc. Tunable compensation circuit for filter circuitry using acoustic resonators
US10097161B2 (en) 2015-09-25 2018-10-09 Qorvo Us, Inc. Compensation circuit for acoustic resonators
JP6415419B2 (ja) 2015-12-02 2018-10-31 太陽誘電株式会社 弾性波フィルタ、デュプレクサ、及びモジュール
US10243537B2 (en) 2016-01-12 2019-03-26 Qorvo Us, Inc. Compensation circuit for use with acoustic resonators to provide a bandstop
US10141644B2 (en) 2016-04-18 2018-11-27 Qorvo Us, Inc. Acoustic filter for antennas
US10581156B2 (en) 2016-05-04 2020-03-03 Qorvo Us, Inc. Compensation circuit to mitigate antenna-to-antenna coupling
JP2017208629A (ja) 2016-05-17 2017-11-24 株式会社村田製作所 弾性波装置
US10581403B2 (en) 2016-07-11 2020-03-03 Qorvo Us, Inc. Device having a titanium-alloyed surface
KR102776288B1 (ko) 2016-08-08 2025-03-07 삼성전기주식회사 표면 탄성파 필터 장치 및 이의 제조방법
US11050412B2 (en) 2016-09-09 2021-06-29 Qorvo Us, Inc. Acoustic filter using acoustic coupling
US10284174B2 (en) 2016-09-15 2019-05-07 Qorvo Us, Inc. Acoustic filter employing inductive coupling
US10367470B2 (en) 2016-10-19 2019-07-30 Qorvo Us, Inc. Wafer-level-packaged BAW devices with surface mount connection structures
KR101953219B1 (ko) 2016-11-24 2019-02-28 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치, 고주파 프론트 엔드 회로 및 통신 장치
JP6661521B2 (ja) 2016-12-05 2020-03-11 太陽誘電株式会社 フィルタおよびマルチプレクサ
US11165413B2 (en) 2017-01-30 2021-11-02 Qorvo Us, Inc. Coupled resonator structure
US11165412B2 (en) 2017-01-30 2021-11-02 Qorvo Us, Inc. Zero-output coupled resonator filter and related radio frequency filter circuit
JP6790907B2 (ja) 2017-02-23 2020-11-25 株式会社村田製作所 マルチプレクサ、送信装置および受信装置
US10873318B2 (en) 2017-06-08 2020-12-22 Qorvo Us, Inc. Filter circuits having acoustic wave resonators in a transversal configuration
US10361676B2 (en) 2017-09-29 2019-07-23 Qorvo Us, Inc. Baw filter structure with internal electrostatic shielding
JP6959819B2 (ja) 2017-10-02 2021-11-05 株式会社村田製作所 マルチプレクサ
EP3506500B1 (en) 2017-12-07 2021-06-09 Infineon Technologies AG Notch filters based on coupled acoustic resonators
JP2019114986A (ja) 2017-12-25 2019-07-11 株式会社村田製作所 弾性波装置
US10700662B2 (en) 2017-12-28 2020-06-30 Taiyo Yuden Co., Ltd. Acoustic wave device, filter, and multiplexer
JP6812998B2 (ja) 2018-03-19 2021-01-13 株式会社村田製作所 弾性波装置
US11152913B2 (en) 2018-03-28 2021-10-19 Qorvo Us, Inc. Bulk acoustic wave (BAW) resonator
US10985731B2 (en) 2018-09-20 2021-04-20 Qorvo Us, Inc. Acoustic resonator structure
US11431316B2 (en) 2018-09-20 2022-08-30 Qorvo Us, Inc. Acoustic resonator structure
US11563421B2 (en) 2018-09-21 2023-01-24 Qorvo Us, Inc. Acoustic structure having tunable parallel resonance frequency
US10958244B2 (en) 2018-10-26 2021-03-23 Qorvo Us, Inc. Acoustic filter apparatus having configurable parallel resonance frequencies
US11146247B2 (en) 2019-07-25 2021-10-12 Qorvo Us, Inc. Stacked crystal filter structures
KR20220028297A (ko) * 2020-08-28 2022-03-08 삼성전기주식회사 음향 공진기 필터

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004535738A (ja) * 2001-07-18 2004-11-25 エプコス　アクチエンゲゼルシャフト エッジ急峻度の改善されたリアクタンスフィルタ
JP2016504870A (ja) * 2012-12-21 2016-02-12 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ 積層された２種の異なる圧電材料を備えるｂａｗ部品、当該ｂａｗ部品用の積層体、及び当該ｂａｗ部品の製造方法
JP2016507939A (ja) * 2012-12-21 2016-03-10 エプコス アクチエンゲゼルシャフトＥｐｃｏｓ Ａｇ 窒化アルミニウム及びスカンジウムを有したｍｅｍｓ部品、及びｍｅｍｓ部品の製造方法
JP2015032634A (ja) * 2013-07-31 2015-02-16 太陽誘電株式会社 電子デバイス
US20170310302A1 (en) * 2016-04-25 2017-10-26 Infineon Technologies Ag Tunable Resonator Element, Filter Circuit and Method
WO2018047862A1 (ja) * 2016-09-07 2018-03-15 株式会社村田製作所 弾性波フィルタ装置及び複合フィルタ装置
JP2020526471A (ja) * 2017-07-07 2020-08-31 スカイワークス ソリューションズ, インコーポレイテッドSkyworks Solutions, Inc. 弾性波フィルタ改善のための置換窒化アルミニウム
CN111010120A (zh) * 2019-09-20 2020-04-14 天津大学 具有调节层的体声波谐振器、滤波器和电子设备
CN111917392A (zh) * 2020-04-14 2020-11-10 诺思(天津)微系统有限责任公司 压电滤波器及其带外抑制改善方法、多工器、通信设备

Also Published As

Publication number Publication date
EP4030620A1 (en) 2022-07-20
TW202243400A (zh) 2022-11-01
US11575363B2 (en) 2023-02-07
KR20220105131A (ko) 2022-07-26
US20220231664A1 (en) 2022-07-21

Similar Documents

Publication Publication Date Title
US8902020B2 (en) Resonator filter with multiple cross-couplings
JP5401549B2 (ja) デュプレクサおよび２つのフィルタの間の分離を増大させるための方法
US8063717B2 (en) Duplexer having resonator filters
US6995631B2 (en) Ladder filter, branching filter, and communication apparatus
US10211799B2 (en) High-frequency filter
JP4468185B2 (ja) 等しい共振周波数を有する共振器フィルタ構造体
CN109787581A (zh) 具有带通和高通双重功能的基于体声波谐振器的滤波器
US9762208B2 (en) Very wide bandwidth composite bandpass filter with steep roll-off
JP6250702B2 (ja) 分岐技術を用いた広帯域フィルタ
US10193527B2 (en) Branching filter
US20150054597A1 (en) Elastic wave filter device and duplexer
JP2006513662A5 (https=)
CN112073018A (zh) 滤波器、双工器、多工器以及通信设备
KR20020029922A (ko) 사다리형 필터, 무선 주파수 대역 통과 필터, 무선 주파수수신기 및/또는 송신기 장치
US11082030B2 (en) High-pass filter and multiplexer
JP4259576B2 (ja) 分波器及び弾性表面波フィルタ
JP2022111108A (ja) ハイブリッドバルク音響波フィルタ
WO2021203761A1 (zh) 滤波器和多工器以及通信设备
WO2021159881A1 (zh) 调整fbar寄生分量的方法和滤波器、多工器、通信设备
CN109831178B (zh) 一种双工器
CN208623639U (zh) 弹性波器件、射频前端电路和通信器件
JP2014033377A (ja) アンテナ共用器
JP2004112277A (ja) 圧電薄膜フィルタ、分波器、通信機
CN116667813A (zh) 混合体声波滤波器
CN214101324U (zh) 一种基于高频声波谐振器的多工器

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250108

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20250108

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20251210

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20251212

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20260309