JP2020534702A5 - - Google Patents
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- Publication number
- JP2020534702A5 JP2020534702A5 JP2020516638A JP2020516638A JP2020534702A5 JP 2020534702 A5 JP2020534702 A5 JP 2020534702A5 JP 2020516638 A JP2020516638 A JP 2020516638A JP 2020516638 A JP2020516638 A JP 2020516638A JP 2020534702 A5 JP2020534702 A5 JP 2020534702A5
- Authority
- JP
- Japan
- Prior art keywords
- cobalt
- feature
- layer
- vapor deposition
- plasma process
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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- 238000000034 method Methods 0.000 claims 25
- 239000010941 cobalt Substances 0.000 claims 12
- 229910017052 cobalt Inorganic materials 0.000 claims 12
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims 12
- 238000005229 chemical vapour deposition Methods 0.000 claims 7
- 238000005240 physical vapour deposition Methods 0.000 claims 5
- 238000000151 deposition Methods 0.000 claims 4
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 3
- 239000000758 substrate Substances 0.000 claims 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- 238000000137 annealing Methods 0.000 claims 2
- 238000000231 atomic layer deposition Methods 0.000 claims 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 239000011261 inert gas Substances 0.000 claims 1
- 229910052743 krypton Inorganic materials 0.000 claims 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 claims 1
- 229910052754 neon Inorganic materials 0.000 claims 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/711,169 US10304732B2 (en) | 2017-09-21 | 2017-09-21 | Methods and apparatus for filling substrate features with cobalt |
| US15/711,169 | 2017-09-21 | ||
| PCT/US2018/051509 WO2019060296A1 (en) | 2017-09-21 | 2018-09-18 | METHODS AND APPARATUS USED TO FILL SUBSTRATE CHARACTERISTICS WITH COBALT |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2020534702A JP2020534702A (ja) | 2020-11-26 |
| JP2020534702A5 true JP2020534702A5 (enExample) | 2021-10-28 |
| JP7309697B2 JP7309697B2 (ja) | 2023-07-18 |
Family
ID=65720533
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020516638A Active JP7309697B2 (ja) | 2017-09-21 | 2018-09-18 | 基板のフィーチャをコバルトで充填する方法および装置 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10304732B2 (enExample) |
| JP (1) | JP7309697B2 (enExample) |
| KR (1) | KR102572732B1 (enExample) |
| CN (1) | CN111133558B (enExample) |
| TW (1) | TWI782094B (enExample) |
| WO (1) | WO2019060296A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11410891B2 (en) | 2019-08-26 | 2022-08-09 | International Business Machines Corporation | Anomaly detection and remedial recommendation |
| US11164815B2 (en) | 2019-09-28 | 2021-11-02 | International Business Machines Corporation | Bottom barrier free interconnects without voids |
| US11776980B2 (en) * | 2020-03-13 | 2023-10-03 | Applied Materials, Inc. | Methods for reflector film growth |
| CN211879343U (zh) * | 2020-04-10 | 2020-11-06 | 北京北方华创微电子装备有限公司 | 一种半导体加工设备 |
| US11527437B2 (en) | 2020-09-15 | 2022-12-13 | Applied Materials, Inc. | Methods and apparatus for intermixing layer for enhanced metal reflow |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR960015719A (ko) * | 1994-10-12 | 1996-05-22 | 이온 충돌을 이용하여 반도체 기판상에 평탄한 층을 형성하기 위한 방법 및 장치 | |
| US9051641B2 (en) * | 2001-07-25 | 2015-06-09 | Applied Materials, Inc. | Cobalt deposition on barrier surfaces |
| US8110489B2 (en) | 2001-07-25 | 2012-02-07 | Applied Materials, Inc. | Process for forming cobalt-containing materials |
| US20030029715A1 (en) * | 2001-07-25 | 2003-02-13 | Applied Materials, Inc. | An Apparatus For Annealing Substrates In Physical Vapor Deposition Systems |
| WO2003030224A2 (en) * | 2001-07-25 | 2003-04-10 | Applied Materials, Inc. | Barrier formation using novel sputter-deposition method |
| US20070184652A1 (en) | 2006-02-07 | 2007-08-09 | Texas Instruments, Incorporated | Method for preparing a metal feature surface prior to electroless metal deposition |
| TW200746268A (en) * | 2006-04-11 | 2007-12-16 | Applied Materials Inc | Process for forming cobalt-containing materials |
| JP2008141050A (ja) | 2006-12-04 | 2008-06-19 | Ulvac Japan Ltd | 半導体装置の製造方法及び半導体装置の製造装置 |
| US20080132050A1 (en) * | 2006-12-05 | 2008-06-05 | Lavoie Adrien R | Deposition process for graded cobalt barrier layers |
| KR20090103058A (ko) | 2008-03-27 | 2009-10-01 | 주식회사 하이닉스반도체 | 반도체 소자 및 이의 제조 방법 |
| US20090246952A1 (en) | 2008-03-28 | 2009-10-01 | Tokyo Electron Limited | Method of forming a cobalt metal nitride barrier film |
| US20090269507A1 (en) * | 2008-04-29 | 2009-10-29 | Sang-Ho Yu | Selective cobalt deposition on copper surfaces |
| US8795487B2 (en) | 2010-03-31 | 2014-08-05 | Applied Materials, Inc. | Physical vapor deposition chamber with rotating magnet assembly and centrally fed RF power |
| US8524600B2 (en) * | 2011-03-31 | 2013-09-03 | Applied Materials, Inc. | Post deposition treatments for CVD cobalt films |
| US9499901B2 (en) | 2012-01-27 | 2016-11-22 | Applied Materials, Inc. | High density TiN RF/DC PVD deposition with stress tuning |
| US9330939B2 (en) | 2012-03-28 | 2016-05-03 | Applied Materials, Inc. | Method of enabling seamless cobalt gap-fill |
| US9218980B2 (en) * | 2013-09-13 | 2015-12-22 | Applied Materials, Inc. | Surface treatment to improve CCTBA based CVD co nucleation on dielectric substrate |
| TWI633604B (zh) | 2013-09-27 | 2018-08-21 | 美商應用材料股份有限公司 | 實現無縫鈷間隙塡充之方法 |
| US9349637B2 (en) * | 2014-08-21 | 2016-05-24 | Lam Research Corporation | Method for void-free cobalt gap fill |
| US9741577B2 (en) * | 2015-12-02 | 2017-08-22 | International Business Machines Corporation | Metal reflow for middle of line contacts |
| US10128151B2 (en) * | 2016-12-16 | 2018-11-13 | Globalfoundries Inc. | Devices and methods of cobalt fill metallization |
| TWI809712B (zh) * | 2017-01-24 | 2023-07-21 | 美商應用材料股份有限公司 | 用於在基板上形成鈷層的方法 |
-
2017
- 2017-09-21 US US15/711,169 patent/US10304732B2/en active Active
-
2018
- 2018-09-18 WO PCT/US2018/051509 patent/WO2019060296A1/en not_active Ceased
- 2018-09-18 JP JP2020516638A patent/JP7309697B2/ja active Active
- 2018-09-18 KR KR1020207010834A patent/KR102572732B1/ko active Active
- 2018-09-18 CN CN201880061451.2A patent/CN111133558B/zh active Active
- 2018-09-21 TW TW107133304A patent/TWI782094B/zh active
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