CN111133558B - 用钴填充基板特征的方法与设备 - Google Patents

用钴填充基板特征的方法与设备 Download PDF

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CN111133558B
CN111133558B CN201880061451.2A CN201880061451A CN111133558B CN 111133558 B CN111133558 B CN 111133558B CN 201880061451 A CN201880061451 A CN 201880061451A CN 111133558 B CN111133558 B CN 111133558B
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cobalt
feature
substrate
layer
chamber
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CN111133558A (zh
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侯文婷
雷建新
李靖珠
陶荣
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Applied Materials Inc
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Applied Materials Inc
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