JP2020202239A - 半導体モジュールの外部接続部、半導体モジュールの外部接続部の製造方法、半導体モジュール、車両、及び外部接続部とバスバーとの接続方法 - Google Patents
半導体モジュールの外部接続部、半導体モジュールの外部接続部の製造方法、半導体モジュール、車両、及び外部接続部とバスバーとの接続方法 Download PDFInfo
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- 238000004649 discoloration prevention Methods 0.000 description 1
- PTEWEFISOFMTTD-UHFFFAOYSA-L disodium;naphthalene-1,2-disulfonate Chemical compound [Na+].[Na+].C1=CC=CC2=C(S([O-])(=O)=O)C(S(=O)(=O)[O-])=CC=C21 PTEWEFISOFMTTD-UHFFFAOYSA-L 0.000 description 1
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Images
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60K—ARRANGEMENT OR MOUNTING OF PROPULSION UNITS OR OF TRANSMISSIONS IN VEHICLES; ARRANGEMENT OR MOUNTING OF PLURAL DIVERSE PRIME-MOVERS IN VEHICLES; AUXILIARY DRIVES FOR VEHICLES; INSTRUMENTATION OR DASHBOARDS FOR VEHICLES; ARRANGEMENTS IN CONNECTION WITH COOLING, AIR INTAKE, GAS EXHAUST OR FUEL SUPPLY OF PROPULSION UNITS IN VEHICLES
- B60K1/00—Arrangement or mounting of electrical propulsion units
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/50—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor for integrated circuit devices, e.g. power bus, number of leads
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/072—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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- H01L25/18—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different subgroups of the same main group of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N
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- H01R4/00—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation
- H01R4/58—Electrically-conductive connections between two or more conductive members in direct contact, i.e. touching one another; Means for effecting or maintaining such contact; Electrically-conductive connections having two or more spaced connecting locations for conductors and using contact members penetrating insulation characterised by the form or material of the contacting members
- H01R4/62—Connections between conductors of different materials; Connections between or with aluminium or steel-core aluminium conductors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
- H02K11/30—Structural association with control circuits or drive circuits
- H02K11/33—Drive circuits, e.g. power electronics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B60—VEHICLES IN GENERAL
- B60R—VEHICLES, VEHICLE FITTINGS, OR VEHICLE PARTS, NOT OTHERWISE PROVIDED FOR
- B60R16/00—Electric or fluid circuits specially adapted for vehicles and not otherwise provided for; Arrangement of elements of electric or fluid circuits specially adapted for vehicles and not otherwise provided for
- B60R16/02—Electric or fluid circuits specially adapted for vehicles and not otherwise provided for; Arrangement of elements of electric or fluid circuits specially adapted for vehicles and not otherwise provided for electric constitutive elements
- B60R16/023—Electric or fluid circuits specially adapted for vehicles and not otherwise provided for; Arrangement of elements of electric or fluid circuits specially adapted for vehicles and not otherwise provided for electric constitutive elements for transmission of signals between vehicle parts or subsystems
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- H—ELECTRICITY
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
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- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H—ELECTRICITY
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
- H01L2224/49113—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting different bonding areas on the semiconductor or solid-state body to a common bonding area outside the body, e.g. converging wires
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- H—ELECTRICITY
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- H01L23/04—Containers; Seals characterised by the shape of the container or parts, e.g. caps, walls
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- Engineering & Computer Science (AREA)
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- Manufacturing & Machinery (AREA)
- Connections By Means Of Piercing Elements, Nuts, Or Screws (AREA)
Abstract
Description
[先行技術文献]
[特許文献]
[特許文献1] 特開2010−098036号公報
本例の光沢ニッケル層は、光沢ニッケルメッキ層であってよい。例えば光沢ニッケルメッキ層は、電解メッキで形成される。電解メッキは、洗浄工程、膜厚0.5μm以下の下地メッキ工程、メッキ工程、及び洗浄工程を順に含む。
本例の無光沢ニッケル層は、無光沢ニッケルメッキ層であってよい。一般的に、無光沢ニッケルメッキ層は、光沢剤を含まないメッキ液で成膜される点で光沢ニッケルメッキ層と相違する。なお、一般的な無光沢ニッケル層に代えて、少量の光沢剤を含むメッキ液で成膜される半光沢ニッケルメッキ層が適用されてもよい。この場合、膜の硬さは光沢剤によってHV(ビッカース硬さ)値200〜300に調整できる。
本例の銅スズ合金層は、積層された銅層及びスズ層の加熱処理により形成されてよい。銅層及びスズ層は、母材側から順に、無光沢ニッケルメッキ層の上に形成されてよい。下地の無光沢ニッケルメッキ層は、上述の通りに形成される。銅メッキ層は、シアン化銅、硫酸銅又はピロリン酸銅のメッキ層である。スズメッキ層は、アルカリ性浴、メタンスルホン酸浴、硫酸浴、中性浴(カルボン酸浴)で形成される。
本例の金層は、金メッキ層であってよい。例えば金メッキ層は、無電解メッキで形成される。メッキ液は、金イオンの供給源としてシアン化金カリウムを主成分としたアルカリ性浴である。あるいは、メッキ液は、クエン酸又はリン酸を主成分とした酸性浴であってもよい。メッキ液には、被膜調整添加剤として微量のコバルトが添加される。金メッキ層の下地として、光沢ニッケルメッキ層が用いられてもよい。
本例の銀層は、銀メッキ層であってよい。例えば銀メッキ層は、無電解メッキで形成される。メッキ液は、シアン化銀カリウムKAg(CN)2を主成分とし、他に遊離シアン化カリウムKCN又はシアン化ナトリウムNaCN、炭酸カリウムK2CO3、水酸化カリウムKOH、光沢剤及び硬化剤を含む。
・光沢ニッケル層及び無光沢ニッケル層
・光沢ニッケル層及び金層
・光沢ニッケル層及び銀層
・光沢ニッケル層及びスズ層(スズ層のHV値=約10)
Claims (14)
- 外部接続端子と、
前記外部接続端子の下面側に設けられたナットと
を備える半導体モジュールの外部接続部であって、
前記外部接続端子は、
導体と、
前記導体の上面上に設けられた第1金属層と、
前記第1金属層上に設けられた第2金属層と、
前記導体の下面上に設けられた下面金属層と
を有する、外部接続部。 - 前記第1金属層は、前記第2金属層より高い硬度を有する、請求項1に記載の外部接続部。
- 前記第1金属層は、前記下面金属層と同じ材料から形成される、請求項1又は2に記載の外部接続部。
- 前記導体は、1.0mm以上7.0mm以下の厚さを有し、
前記第1金属層は、0.1μm以上10μm以下の厚さを有し、
前記第2金属層は、0.1μm以上10μm以下の厚さを有し、
前記下面金属層は、前記第1金属層と同じである又はそれより大きい厚さを有する、請求項1から3のいずれか1項に記載の外部接続部。 - 前記導体は、銅又は銅合金から形成され、
前記第1金属層及び前記下面金属層は、光沢ニッケル層であり、
前記第2金属層は、金層、無光沢ニッケル層、銅スズ合金層又は銀層である、請求項1から4のいずれか1項に記載の外部接続部。 - 前記第2金属層は、前記第1金属層の一部を覆うように設けられる、請求項1から5のいずれか1項に記載の外部接続部。
- 前記ナットの外径は、前記ナットに対応するネジの最大径と同じである又はそれより小さい、請求項1から6のいずれか1項に記載の外部接続部。
- 前記ナットは、前記半導体モジュールの筐体と一体化されている、請求項1から7のいずれか1項に記載の外部接続部。
- 前記ナットは、前記外部接続端子側にフランジを有するフランジ形ナットである、請求項1から8のいずれか1項に記載の外部接続部。
- 外部接続端子を提供する段階と、
前記外部接続端子の下面側にナットを設ける段階と
を備える半導体モジュールの外部接続部の製造方法であって、
前記外部接続端子を提供する段階は、
導体を設ける段階と、
前記導体の上面上に第1金属層を設ける段階と、
前記第1金属層上に第2金属層を設ける段階と、
前記導体の下面上に下面金属層を設ける段階と
を含む、製造方法。 - 前記外部接続端子を提供する段階は、上面側に向かって凸形状を有する外部接続端子を形成する段階を含む、請求項10に記載の製造方法。
- 請求項1から9のいずれか1項に記載の外部接続部を備える半導体モジュール。
- 請求項12に記載の半導体モジュールを備える車両。
- 請求項1に記載の外部接続部とバスバーとの接続方法であって、
前記バスバーを前記外部接続端子の上面側に配置する段階と、
前記バスバーの穴及び前記外部接続端子のネジ穴にネジのネジ部を挿入する段階と、
前記ネジの締め込みにより、前記ナットの端部を前記下面金属層に食い込ませる段階と
を備える接続方法。
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