JP2019536715A5 - - Google Patents

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Publication number
JP2019536715A5
JP2019536715A5 JP2019546975A JP2019546975A JP2019536715A5 JP 2019536715 A5 JP2019536715 A5 JP 2019536715A5 JP 2019546975 A JP2019546975 A JP 2019546975A JP 2019546975 A JP2019546975 A JP 2019546975A JP 2019536715 A5 JP2019536715 A5 JP 2019536715A5
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JP
Japan
Prior art keywords
roller
contact
transfer
transfer roller
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2019546975A
Other languages
English (en)
Japanese (ja)
Other versions
JP2019536715A (ja
JP7308752B2 (ja
Filing date
Publication date
Priority claimed from EP16199129.4A external-priority patent/EP3324426B1/en
Application filed filed Critical
Publication of JP2019536715A publication Critical patent/JP2019536715A/ja
Publication of JP2019536715A5 publication Critical patent/JP2019536715A5/ja
Application granted granted Critical
Publication of JP7308752B2 publication Critical patent/JP7308752B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2019546975A 2016-11-16 2017-09-21 搬送ローラー Active JP7308752B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP16199129.4A EP3324426B1 (en) 2016-11-16 2016-11-16 Transport roller
EP16199129.4 2016-11-16
PCT/EP2017/073933 WO2018091174A1 (en) 2016-11-16 2017-09-21 Transport roller

Publications (3)

Publication Number Publication Date
JP2019536715A JP2019536715A (ja) 2019-12-19
JP2019536715A5 true JP2019536715A5 (enExample) 2020-10-15
JP7308752B2 JP7308752B2 (ja) 2023-07-14

Family

ID=57348489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2019546975A Active JP7308752B2 (ja) 2016-11-16 2017-09-21 搬送ローラー

Country Status (9)

Country Link
US (1) US11097913B2 (enExample)
EP (1) EP3324426B1 (enExample)
JP (1) JP7308752B2 (enExample)
KR (1) KR102413016B1 (enExample)
CN (1) CN109937472B (enExample)
MY (1) MY193744A (enExample)
PH (1) PH12019501083A1 (enExample)
TW (1) TWI661988B (enExample)
WO (1) WO2018091174A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2022037791A1 (en) * 2020-08-21 2022-02-24 Applied Materials, Inc. Vacuum deposition system, substrate transport system, and method of transporting a substrate through a vacuum chamber
CN113003223B (zh) * 2021-04-23 2023-06-30 成都京东方显示科技有限公司 传送装置
WO2025038243A1 (en) * 2023-08-15 2025-02-20 Parata Systems, Llc Roller used in device for pharmaceutical pouch packaging

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3708605A1 (de) * 1987-03-17 1988-09-29 Boettcher Gmbh & Co Felix Presswalze fuer die entwaesserung von stoffbahnen
JPH04129218A (ja) * 1990-09-19 1992-04-30 Mitsubishi Electric Corp 水切り装置
JPH08102582A (ja) * 1994-09-30 1996-04-16 Mitsubishi Paper Mills Ltd プリント配線基板処理装置
JPH10314684A (ja) * 1997-05-21 1998-12-02 Speedfam Co Ltd ディスク形ワークの洗浄方法及び装置
EP0993023A1 (en) * 1998-10-05 2000-04-12 Agfa-Gevaert N.V. Method for transferring a web-or sheet-like material into a clean room
AU5296600A (en) * 1999-05-27 2000-12-18 Lam Research Corporation Wafer cascade scrubber
JP2004299984A (ja) * 2003-03-31 2004-10-28 Nichias Corp ディスクロール及びその製造方法
DE102005062528A1 (de) * 2005-12-16 2007-06-21 Gebr. Schmid Gmbh & Co. Vorrichtung und Verfahren zur Oberflächenbehandlung von Substraten
EP2177191B1 (en) * 2007-08-06 2014-01-22 Kao Corporation Liquid applicator
US7896641B2 (en) * 2007-11-19 2011-03-01 The Procter & Gamble Company Apparatus for activating a web
DE102007061581A1 (de) * 2007-12-18 2009-06-25 Felix Kunze-Concewitz Vorrichtung und Verfahren zum Reinigen von Substraten für mikroelektronische Anwendungen durch rotierende Walzen
JP5431863B2 (ja) * 2009-10-19 2014-03-05 大日本スクリーン製造株式会社 基板処理装置
US8684169B2 (en) * 2010-08-31 2014-04-01 Itoh Denki Co., Ltd. Transfer device
JP5712589B2 (ja) * 2010-12-07 2015-05-07 セイコーエプソン株式会社 印刷装置
KR20130006987A (ko) * 2011-06-28 2013-01-18 삼성전기주식회사 기판 이송용 롤러
CN202606424U (zh) * 2012-03-30 2012-12-19 明基材料有限公司 清洁装置
EP2886685A1 (en) * 2013-12-20 2015-06-24 ATOTECH Deutschland GmbH Device for accumulating a treatment liquid inside of a treatment area of a horizontal processing apparatus for a galvanic or wet-chemical metal deposition
TW201531584A (zh) * 2013-12-20 2015-08-16 Atotech Deutschland Gmbh 在用於電流或溼式化學金屬沉積之水平處理裝置之處理區域內積聚處理液之裝置
GB201509080D0 (en) 2015-05-27 2015-07-08 Landa Labs 2012 Ltd Coating apparatus
DE102016210883A1 (de) 2016-06-17 2017-12-21 Singulus Technologies Ag Vorrichtung und Verfahren zur Behandlung von Substraten unter Verwendung einer Auflagerolle mit porösem Material

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