JP2019534538A5 - - Google Patents
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- Publication number
- JP2019534538A5 JP2019534538A5 JP2019523015A JP2019523015A JP2019534538A5 JP 2019534538 A5 JP2019534538 A5 JP 2019534538A5 JP 2019523015 A JP2019523015 A JP 2019523015A JP 2019523015 A JP2019523015 A JP 2019523015A JP 2019534538 A5 JP2019534538 A5 JP 2019534538A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- inorganic
- mask
- forming
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims 108
- 238000000034 method Methods 0.000 claims 27
- 239000000758 substrate Substances 0.000 claims 23
- 239000011248 coating agent Substances 0.000 claims 15
- 238000000576 coating method Methods 0.000 claims 15
- 239000012044 organic layer Substances 0.000 claims 15
- UHUUYVZLXJHWDV-UHFFFAOYSA-N trimethyl(methylsilyloxy)silane Chemical compound C[SiH2]O[Si](C)(C)C UHUUYVZLXJHWDV-UHFFFAOYSA-N 0.000 claims 11
- 239000007789 gas Substances 0.000 claims 7
- UQEAIHBTYFGYIE-UHFFFAOYSA-N hexamethyldisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)C UQEAIHBTYFGYIE-UHFFFAOYSA-N 0.000 claims 4
- 230000002093 peripheral effect Effects 0.000 claims 4
- 230000015572 biosynthetic process Effects 0.000 claims 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 229920001296 polysiloxane Polymers 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
- 238000004140 cleaning Methods 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021137341A JP7209058B2 (ja) | 2016-11-06 | 2021-08-25 | 有機発光ダイオードの封止方法 |
| JP2022126204A JP2022145802A (ja) | 2016-11-06 | 2022-08-08 | 有機発光ダイオードの封止方法 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201662418175P | 2016-11-06 | 2016-11-06 | |
| US62/418,175 | 2016-11-06 | ||
| PCT/US2017/060037 WO2018085715A2 (en) | 2016-11-06 | 2017-11-03 | Method and apparatus for encapsulation of an organic light emitting diode |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021137341A Division JP7209058B2 (ja) | 2016-11-06 | 2021-08-25 | 有機発光ダイオードの封止方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2019534538A JP2019534538A (ja) | 2019-11-28 |
| JP2019534538A5 true JP2019534538A5 (https=) | 2021-01-14 |
Family
ID=62064075
Family Applications (3)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019523015A Pending JP2019534538A (ja) | 2016-11-06 | 2017-11-03 | 有機発光ダイオードの封止方法及び装置 |
| JP2021137341A Active JP7209058B2 (ja) | 2016-11-06 | 2021-08-25 | 有機発光ダイオードの封止方法 |
| JP2022126204A Pending JP2022145802A (ja) | 2016-11-06 | 2022-08-08 | 有機発光ダイオードの封止方法 |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2021137341A Active JP7209058B2 (ja) | 2016-11-06 | 2021-08-25 | 有機発光ダイオードの封止方法 |
| JP2022126204A Pending JP2022145802A (ja) | 2016-11-06 | 2022-08-08 | 有機発光ダイオードの封止方法 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US10333104B2 (https=) |
| JP (3) | JP2019534538A (https=) |
| KR (1) | KR102454027B1 (https=) |
| CN (1) | CN110268504A (https=) |
| WO (1) | WO2018085715A2 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20210013034A (ko) * | 2018-05-18 | 2021-02-03 | 니폰 제온 가부시키가이샤 | 인쇄용 수지 용액 및 디바이스 구조체의 제조 방법 |
| KR102801661B1 (ko) * | 2019-04-09 | 2025-04-30 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조 방법 |
| WO2020251696A1 (en) * | 2019-06-10 | 2020-12-17 | Applied Materials, Inc. | Processing system for forming layers |
| WO2020250748A1 (ja) | 2019-06-14 | 2020-12-17 | 日本ゼオン株式会社 | 印刷用樹脂溶液 |
| EP3965185A1 (en) * | 2020-09-02 | 2022-03-09 | Evonik Operations GmbH | High performance silicon-based materials for lithium ion battery anodes |
| KR102876890B1 (ko) * | 2021-04-23 | 2025-10-28 | 주성엔지니어링(주) | 반도체 패키징 장치 |
Family Cites Families (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000328229A (ja) * | 1999-05-19 | 2000-11-28 | Canon Inc | 真空蒸着装置 |
| JP4096353B2 (ja) * | 2002-05-09 | 2008-06-04 | ソニー株式会社 | 有機電界発光表示素子の製造装置および製造方法 |
| JP4954434B2 (ja) * | 2002-05-17 | 2012-06-13 | 株式会社半導体エネルギー研究所 | 製造装置 |
| JP2004095330A (ja) * | 2002-08-30 | 2004-03-25 | Tohoku Pioneer Corp | 電子部品を覆う保護膜の形成方法および保護膜を備えた電子機器 |
| JP2004351832A (ja) * | 2003-05-30 | 2004-12-16 | Toppan Printing Co Ltd | 透明ガスバリア積層フィルム |
| JP2005034831A (ja) * | 2003-07-01 | 2005-02-10 | Sumitomo Heavy Ind Ltd | バリア多層膜及びその製造方法 |
| JP2005044613A (ja) * | 2003-07-28 | 2005-02-17 | Seiko Epson Corp | 発光装置の製造方法および発光装置 |
| JP2005353398A (ja) * | 2004-06-10 | 2005-12-22 | Toshiba Matsushita Display Technology Co Ltd | 表示素子、光学デバイス、及び光学デバイスの製造方法 |
| US8405193B2 (en) * | 2004-04-02 | 2013-03-26 | General Electric Company | Organic electronic packages having hermetically sealed edges and methods of manufacturing such packages |
| JP2005317476A (ja) * | 2004-04-30 | 2005-11-10 | Toshiba Matsushita Display Technology Co Ltd | 表示装置 |
| JP2006339049A (ja) * | 2005-06-02 | 2006-12-14 | Tokki Corp | 封止膜形成装置 |
| JP4801382B2 (ja) * | 2005-06-15 | 2011-10-26 | 東北パイオニア株式会社 | 自発光パネル及びその製造方法 |
| JP2007273274A (ja) * | 2006-03-31 | 2007-10-18 | Canon Inc | 有機el素子及びその製造方法 |
| US7968146B2 (en) * | 2006-11-01 | 2011-06-28 | The Trustees Of Princeton University | Hybrid layers for use in coatings on electronic devices or other articles |
| US20080102223A1 (en) * | 2006-11-01 | 2008-05-01 | Sigurd Wagner | Hybrid layers for use in coatings on electronic devices or other articles |
| US8241713B2 (en) * | 2007-02-21 | 2012-08-14 | 3M Innovative Properties Company | Moisture barrier coatings for organic light emitting diode devices |
| US20100167002A1 (en) * | 2008-12-30 | 2010-07-01 | Vitex Systems, Inc. | Method for encapsulating environmentally sensitive devices |
| JP2010160906A (ja) * | 2009-01-06 | 2010-07-22 | Seiko Epson Corp | 有機エレクトロルミネッセンス装置、有機エレクトロルミネッセンス装置の製造方法、および電子機器 |
| DE102009019623A1 (de) * | 2009-04-30 | 2010-12-02 | Saint-Gobain Sekurit Deutschland Gmbh & Co. Kg | Scheibenanordnung |
| KR20110101771A (ko) * | 2010-03-09 | 2011-09-16 | 삼성모바일디스플레이주식회사 | 유기 발광 표시장치 |
| TWI577066B (zh) * | 2011-02-08 | 2017-04-01 | 應用材料股份有限公司 | 有機發光二極體的混合式封裝方法 |
| JP2012216452A (ja) * | 2011-04-01 | 2012-11-08 | Hitachi High-Technologies Corp | 光半導体装置およびその製造方法 |
| TWI542727B (zh) * | 2011-06-17 | 2016-07-21 | 應用材料股份有限公司 | 處理腔室 |
| JP5803822B2 (ja) * | 2012-06-18 | 2015-11-04 | 株式会社デンソー | 積層膜の製造方法および製造装置 |
| JP5928197B2 (ja) * | 2012-06-29 | 2016-06-01 | 富士通株式会社 | ストレージシステム管理プログラム及びストレージシステム管理装置 |
| US9449809B2 (en) * | 2012-07-20 | 2016-09-20 | Applied Materials, Inc. | Interface adhesion improvement method |
| US9397318B2 (en) * | 2012-09-04 | 2016-07-19 | Applied Materials, Inc. | Method for hybrid encapsulation of an organic light emitting diode |
| KR101473310B1 (ko) * | 2012-12-06 | 2014-12-16 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조방법 |
| US9331311B2 (en) * | 2013-03-04 | 2016-05-03 | Applied Materials, Inc. | Fluorine-containing plasma polymerized HMDSO for OLED thin film encapsulation |
| KR101780019B1 (ko) * | 2013-03-11 | 2017-09-19 | 어플라이드 머티어리얼스, 인코포레이티드 | Oled 애플리케이션들을 위한 pecvd hmdso 막의 플라즈마 경화 |
| US9502686B2 (en) * | 2014-07-03 | 2016-11-22 | Applied Materials, Inc. | Fluorine-containing polymerized HMDSO applications for OLED thin film encapsulation |
| WO2016147639A1 (ja) * | 2015-03-17 | 2016-09-22 | シャープ株式会社 | 有機el表示装置およびその製造方法 |
| US20170117503A1 (en) * | 2015-10-22 | 2017-04-27 | Universal Display Corporation | Buffer layer for organic light emitting devices and method of making the same |
| KR102485707B1 (ko) * | 2016-01-29 | 2023-01-09 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 |
| KR102478472B1 (ko) * | 2016-03-02 | 2022-12-19 | 삼성디스플레이 주식회사 | 표시 장치의 제조 방법 |
-
2017
- 2017-11-03 JP JP2019523015A patent/JP2019534538A/ja active Pending
- 2017-11-03 US US15/803,558 patent/US10333104B2/en active Active
- 2017-11-03 CN CN201780068134.9A patent/CN110268504A/zh active Pending
- 2017-11-03 WO PCT/US2017/060037 patent/WO2018085715A2/en not_active Ceased
- 2017-11-03 KR KR1020197015971A patent/KR102454027B1/ko active Active
-
2021
- 2021-08-25 JP JP2021137341A patent/JP7209058B2/ja active Active
-
2022
- 2022-08-08 JP JP2022126204A patent/JP2022145802A/ja active Pending
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