JP2019532500A - Iii族窒化物構造の成長のための核生成層 - Google Patents
Iii族窒化物構造の成長のための核生成層 Download PDFInfo
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- JP2019532500A JP2019532500A JP2019512274A JP2019512274A JP2019532500A JP 2019532500 A JP2019532500 A JP 2019532500A JP 2019512274 A JP2019512274 A JP 2019512274A JP 2019512274 A JP2019512274 A JP 2019512274A JP 2019532500 A JP2019532500 A JP 2019532500A
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- 239000002800 charge carrier Substances 0.000 description 1
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- YXQWGVLNDXNSJJ-UHFFFAOYSA-N cyclopenta-1,3-diene;vanadium(2+) Chemical compound [V+2].C=1C=C[CH-]C=1.C=1C=C[CH-]C=1 YXQWGVLNDXNSJJ-UHFFFAOYSA-N 0.000 description 1
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- JGZUJELGSMSOID-UHFFFAOYSA-N dialuminum;dimethylazanide Chemical compound CN(C)[Al](N(C)C)N(C)C.CN(C)[Al](N(C)C)N(C)C JGZUJELGSMSOID-UHFFFAOYSA-N 0.000 description 1
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- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- UIUXUFNYAYAMOE-UHFFFAOYSA-N methylsilane Chemical compound [SiH3]C UIUXUFNYAYAMOE-UHFFFAOYSA-N 0.000 description 1
- DAZXVJBJRMWXJP-UHFFFAOYSA-N n,n-dimethylethylamine Chemical compound CCN(C)C DAZXVJBJRMWXJP-UHFFFAOYSA-N 0.000 description 1
- JOUSPCDMLWUHSO-UHFFFAOYSA-N oxovanadium;propan-2-ol Chemical compound [V]=O.CC(C)O.CC(C)O.CC(C)O JOUSPCDMLWUHSO-UHFFFAOYSA-N 0.000 description 1
- HKOOXMFOFWEVGF-UHFFFAOYSA-N phenylhydrazine Chemical compound NNC1=CC=CC=C1 HKOOXMFOFWEVGF-UHFFFAOYSA-N 0.000 description 1
- 229940067157 phenylhydrazine Drugs 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
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- 229910000077 silane Inorganic materials 0.000 description 1
- 150000004756 silanes Chemical class 0.000 description 1
- AIFMYMZGQVTROK-UHFFFAOYSA-N silicon tetrabromide Chemical compound Br[Si](Br)(Br)Br AIFMYMZGQVTROK-UHFFFAOYSA-N 0.000 description 1
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- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 1
- 239000005052 trichlorosilane Substances 0.000 description 1
- VOITXYVAKOUIBA-UHFFFAOYSA-N triethylaluminium Chemical compound CC[Al](CC)CC VOITXYVAKOUIBA-UHFFFAOYSA-N 0.000 description 1
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 1
- OTRPZROOJRIMKW-UHFFFAOYSA-N triethylindigane Chemical compound CC[In](CC)CC OTRPZROOJRIMKW-UHFFFAOYSA-N 0.000 description 1
- MCULRUJILOGHCJ-UHFFFAOYSA-N triisobutylaluminium Chemical compound CC(C)C[Al](CC(C)C)CC(C)C MCULRUJILOGHCJ-UHFFFAOYSA-N 0.000 description 1
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 1
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 1
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 1
- JHUXFIPODALNAN-UHFFFAOYSA-N tris(2-methylpropyl)gallane Chemical compound CC(C)C[Ga](CC(C)C)CC(C)C JHUXFIPODALNAN-UHFFFAOYSA-N 0.000 description 1
- VEDJZFSRVVQBIL-UHFFFAOYSA-N trisilane Chemical compound [SiH3][SiH2][SiH3] VEDJZFSRVVQBIL-UHFFFAOYSA-N 0.000 description 1
- 230000005533 two-dimensional electron gas Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/20—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only AIIIBV compounds
- H01L29/2003—Nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02455—Group 13/15 materials
- H01L21/02458—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02367—Substrates
- H01L21/0237—Materials
- H01L21/02373—Group 14 semiconducting materials
- H01L21/02381—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02439—Materials
- H01L21/02441—Group 14 semiconducting materials
- H01L21/0245—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02436—Intermediate layers between substrates and deposited layers
- H01L21/02494—Structure
- H01L21/02496—Layer structure
- H01L21/02505—Layer structure consisting of more than two layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
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Abstract
Description
本願は、米国特許出願第15/256,170号(2016年9月2日出願)に対する優先権を主張し、上記出願の全内容は、参照により本明細書に引用される。
Claims (40)
- 半導体であって、前記半導体は、
基板と、
前記基板を覆っている核生成層であって、前記核生成層は、深準位ドーパントを有する、核生成層と、
前記核生成層を覆って形成されるIII−V層と
を備え、
前記基板および前記核生成層のうちの少なくとも1つは、イオン化された汚染物質を含み、
前記深準位ドーパントの濃度は、少なくとも前記イオン化された汚染物質の濃度と同程度に高い、半導体。 - 前記基板は、基板材料を備え、
前記深準位ドーパントは、前記基板材料の伝導帯および価電子帯から0.3eV〜0.6eV分離されている深準位状態を有する深準位ドーパント種を備えている、請求項1に記載の半導体。 - 前記基板と前記核生成層との間にヘテロ構造をさらに備える、請求項1に記載の半導体。
- 前記深準位ドーパントは、バナジウムを備えている、請求項1に記載の半導体。
- 前記深準位ドーパントは、鉄を備えている、請求項1に記載の半導体。
- 前記深準位ドーパントは、硫黄を備えている、請求項1に記載の半導体。
- 前記イオン化された汚染物質は、第III族種を備えている、請求項1に記載の半導体。
- 前記イオン化された汚染物質は、イオン化アクセプタ汚染物質を備えている、請求項1に記載の半導体。
- 前記深準位ドーパントの濃度は、1015cm−3〜1019cm−3である、請求項1に記載の半導体。
- 前記深準位ドーパントの濃度は、1016cm−3〜1018cm−3である、請求項1に記載の半導体。
- 前記基板内および前記核生成層内の自由正孔の濃度は、1016cm−3未満である、請求項1に記載の半導体。
- 前記基板内および前記核生成層内の自由正孔の濃度は、1015cm−3未満である、請求項1に記載の半導体。
- 前記核生成層の厚さは、1nm〜100nmである、請求項1に記載の半導体。
- 前記核生成層の厚さは、10nm〜1μmである、請求項1に記載の半導体。
- 前記核生成層の厚さは、100nm〜10μmである、請求項1に記載の半導体。
- 前記基板に最も近い前記核生成層の表面における前記深準位ドーパントの第1の濃度は、前記III−V層に最も近い表面における前記深準位ドーパントの第2の濃度より高い、請求項1に記載の半導体。
- 前記基板材料は、シリコンである、請求項1に記載の半導体。
- 前記III−V層は、III族窒化物層である、請求項1に記載の半導体。
- 半導体を成長させる方法であって、前記方法は、
基板を覆って核生成層を成長させることであって、前記核生成層は、深準位ドーパントを有する、ことと、
前記核生成層を覆ってIII−V層を成長させることと
を含み、
前記基板および前記核生成層のうちの少なくとも1つは、イオン化された汚染物質を含み、
前記深準位ドーパントの濃度は、少なくとも前記イオン化された汚染物質の濃度と同程度に高い、方法。 - 前記基板は、基板材料を備え、
前記深準位ドーパントは、前記基板材料の伝導帯および価電子帯から0.3eV〜0.6eV分離されている深準位状態を有する深準位ドーパント種を備えている、請求項19に記載の方法。 - 前記基板と前記核生成層との間にヘテロ構造を成長させることをさらに含む、請求項19に記載の方法。
- 前記深準位ドーパントは、バナジウムを備えている、請求項19に記載の方法。
- 前記深準位ドーパントは、鉄を備えている、請求項19に記載の方法。
- 前記深準位ドーパントは、硫黄を備えている、請求項19に記載の方法。
- 前記イオン化された汚染物質は、第III族種を備えている、請求項19に記載の方法。
- 前記イオン化された汚染物質は、イオン化アクセプタ汚染物質を備えている、請求項19に記載の方法。
- 前記深準位ドーパントの濃度は、1015cm−3〜1019cm−3である、請求項19に記載の方法。
- 前記深準位ドーパントの濃度は、1016cm−3〜1018cm−3である、請求項19に記載の方法。
- 前記基板内および前記核生成層内の自由正孔の濃度は、1016cm−3未満である、請求項19に記載の方法。
- 前記基板内および前記核生成層内の自由正孔の濃度は、1015cm−3未満である、請求項19に記載の方法。
- 前記核生成層の厚さは、1nm〜100nmである、請求項19に記載の方法。
- 前記核生成層の厚さは、10nm〜1μmである、請求項19に記載の方法。
- 前記核生成層の厚さは、100nm〜10μmである、請求項19に記載の方法。
- 前記基板に最も近い前記核生成層の表面における前記深準位ドーパントの第1の濃度は、前記III−V層に最も近い表面における前記深準位ドーパントの第2の濃度より高い、請求項19に記載の方法。
- 前記基板材料は、シリコンである、請求項19に記載の方法。
- 前記III−V層は、III族窒化物層である、請求項19に記載の方法。
- 前記核生成層およびIII−V層を有機金属気相成長法によって成長させることを含む、請求項19に記載の方法。
- 前記核生成層および前記III−V層を分子ビームエピタキシによって成長させることを含む、請求項19に記載の方法。
- 前記核生成層および前記III−V層をハライド気相エピタキシによって成長させることを含む、請求項19に記載の方法。
- 前記核生成層および前記III−V層を物理蒸着によって成長させることを含む、請求項19に記載の方法。
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CN109964305A (zh) | 2019-07-02 |
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