JP2019507546A5 - - Google Patents

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JP2019507546A5
JP2019507546A5 JP2018539290A JP2018539290A JP2019507546A5 JP 2019507546 A5 JP2019507546 A5 JP 2019507546A5 JP 2018539290 A JP2018539290 A JP 2018539290A JP 2018539290 A JP2018539290 A JP 2018539290A JP 2019507546 A5 JP2019507546 A5 JP 2019507546A5
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carrier substrate
piezoelectric layer
saw device
quartz carrier
quartz
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JP2018539290A
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JP6877447B2 (ja
JP2019507546A (ja
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Priority claimed from US15/086,895 external-priority patent/US10084427B2/en
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JP2018539290A 2016-01-28 2017-01-25 石英基板上に圧電層を含む弾性表面波デバイス及びその製造方法 Active JP6877447B2 (ja)

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JP2021073990A JP7317068B2 (ja) 2016-01-28 2021-04-26 石英基板上に圧電層を含む弾性表面波デバイス及びその製造方法

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Application Number Priority Date Filing Date Title
US201662288018P 2016-01-28 2016-01-28
US62/288,018 2016-01-28
US15/086,895 US10084427B2 (en) 2016-01-28 2016-03-31 Surface acoustic wave device having a piezoelectric layer on a quartz substrate and methods of manufacturing thereof
US15/086,895 2016-03-31
PCT/US2017/014806 WO2017132183A1 (en) 2016-01-28 2017-01-25 Surface acoustic wave device having a piezoelectric layer on a quartz substrate and methods of manufacturing thereof

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JP2021073990A Division JP7317068B2 (ja) 2016-01-28 2021-04-26 石英基板上に圧電層を含む弾性表面波デバイス及びその製造方法

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JP2019507546A JP2019507546A (ja) 2019-03-14
JP2019507546A5 true JP2019507546A5 (enExample) 2020-01-30
JP6877447B2 JP6877447B2 (ja) 2021-05-26

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JP2021073990A Active JP7317068B2 (ja) 2016-01-28 2021-04-26 石英基板上に圧電層を含む弾性表面波デバイス及びその製造方法

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US (2) US10084427B2 (enExample)
JP (2) JP6877447B2 (enExample)
WO (1) WO2017132183A1 (enExample)

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