FR3079667B1 - Dispositif d'onde acoustique de surface sur substrat composite - Google Patents
Dispositif d'onde acoustique de surface sur substrat composite Download PDFInfo
- Publication number
- FR3079667B1 FR3079667B1 FR1852687A FR1852687A FR3079667B1 FR 3079667 B1 FR3079667 B1 FR 3079667B1 FR 1852687 A FR1852687 A FR 1852687A FR 1852687 A FR1852687 A FR 1852687A FR 3079667 B1 FR3079667 B1 FR 3079667B1
- Authority
- FR
- France
- Prior art keywords
- surface acoustic
- acoustic wave
- wave device
- composite substrate
- piezoelectric layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000758 substrate Substances 0.000 title abstract 5
- 238000010897 surface acoustic wave method Methods 0.000 title abstract 3
- 239000002131 composite material Substances 0.000 title abstract 2
- 239000013078 crystal Substances 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02236—Details of surface skimming bulk wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02559—Characteristics of substrate, e.g. cutting angles of lithium niobate or lithium-tantalate substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02818—Means for compensation or elimination of undesirable effects
- H03H9/02834—Means for compensation or elimination of undesirable effects of temperature influence
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/25—Constructional features of resonators using surface acoustic waves
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6406—Filters characterised by a particular frequency characteristic
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02228—Guided bulk acoustic wave devices or Lamb wave devices having interdigital transducers situated in parallel planes on either side of a piezoelectric layer
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02566—Characteristics of substrate, e.g. cutting angles of semiconductor substrates
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02582—Characteristics of substrate, e.g. cutting angles of diamond substrates
Abstract
L'invention concerne un dispositif à ondes acoustiques de surface utilisant une onde guidée polarisée longitudinalement comprenant un substrat composite (7) comprenant une couche piézoélectrique(11) formée au-dessus un substrat de base (9), dans lequel l'orientation cristalline de la couche piézoélectrique (11) par rapport au substrat de base (9) est telle que la vitesse de phase de l'onde polarisée longitudinalement est inférieure à la vitesse de phase critique du substrat de base (9) à laquelle le guidage d'onde à l'intérieur de la couche piézoélectrique (11) disparaît. L'invention concerne également un procédé de fabrication d'un tel dispositif à ondes acoustiques de surface.
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1852687A FR3079667B1 (fr) | 2018-03-28 | 2018-03-28 | Dispositif d'onde acoustique de surface sur substrat composite |
CN201980022462.4A CN111937302A (zh) | 2018-03-28 | 2019-03-20 | 复合基板上的表面声波设备 |
PCT/EP2019/056933 WO2019185415A1 (fr) | 2018-03-28 | 2019-03-20 | Dispositif à ondes acoustiques de surface sur substrat composite |
US17/042,768 US11437973B2 (en) | 2018-03-28 | 2019-03-20 | Surface acoustic wave device on composite substrate |
EP19711372.3A EP3776855B1 (fr) | 2018-03-28 | 2019-03-20 | Dispositif à ondes acoustiques de surface sur substrat composite |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1852687 | 2018-03-28 | ||
FR1852687A FR3079667B1 (fr) | 2018-03-28 | 2018-03-28 | Dispositif d'onde acoustique de surface sur substrat composite |
Publications (2)
Publication Number | Publication Date |
---|---|
FR3079667A1 FR3079667A1 (fr) | 2019-10-04 |
FR3079667B1 true FR3079667B1 (fr) | 2020-03-27 |
Family
ID=62873465
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR1852687A Active FR3079667B1 (fr) | 2018-03-28 | 2018-03-28 | Dispositif d'onde acoustique de surface sur substrat composite |
Country Status (5)
Country | Link |
---|---|
US (1) | US11437973B2 (fr) |
EP (1) | EP3776855B1 (fr) |
CN (1) | CN111937302A (fr) |
FR (1) | FR3079667B1 (fr) |
WO (1) | WO2019185415A1 (fr) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11626856B2 (en) * | 2019-10-30 | 2023-04-11 | X-Celeprint Limited | Non-linear tethers for suspended devices |
KR20230146636A (ko) * | 2021-02-20 | 2023-10-19 | 스펙트론 (선전) 테크놀로지스 씨오., 엘티디 | 공진 장치 및 음향 필터 |
WO2023087211A1 (fr) * | 2021-11-18 | 2023-05-25 | 华为技术有限公司 | Résonateur saw et filtre saw |
WO2023250159A1 (fr) * | 2022-06-24 | 2023-12-28 | Massachusetts Institute Of Technology | Dispositifs électroniques minces flexibles et systèmes et procédés associés |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW241397B (fr) * | 1993-01-14 | 1995-02-21 | Murata Manufacturing Co | |
EP1696562A4 (fr) * | 2003-12-16 | 2010-07-07 | Murata Manufacturing Co | Dispositif a onde limite acoustique |
JP5194416B2 (ja) * | 2006-09-29 | 2013-05-08 | 住友大阪セメント株式会社 | 極細炭素含有塗料と極細炭素膜の製造方法及び極細炭素膜並びに電界電子放出素子 |
JP4316632B2 (ja) * | 2007-04-16 | 2009-08-19 | 富士通メディアデバイス株式会社 | 弾性表面波装置及び分波器 |
DE112012007215B4 (de) * | 2012-12-12 | 2018-10-31 | Epcos Ag | Elektroakustische Komponente |
FR3033462B1 (fr) * | 2015-03-04 | 2018-03-30 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Dispositif a ondes elastiques de surface comprenant un film piezoelectrique monocristallin et un substrat cristallin, a faibles coefficients viscoelastiques |
WO2017043394A1 (fr) * | 2015-09-10 | 2017-03-16 | 株式会社村田製作所 | Dispositif à ondes élastiques, circuit frontal haute fréquence et dispositif de communication |
US10084427B2 (en) * | 2016-01-28 | 2018-09-25 | Qorvo Us, Inc. | Surface acoustic wave device having a piezoelectric layer on a quartz substrate and methods of manufacturing thereof |
US10128814B2 (en) * | 2016-01-28 | 2018-11-13 | Qorvo Us, Inc. | Guided surface acoustic wave device providing spurious mode rejection |
JP6998650B2 (ja) * | 2016-08-10 | 2022-01-18 | 株式会社日本製鋼所 | 接合基板、弾性表面波素子、弾性表面波デバイスおよび接合基板の製造方法 |
-
2018
- 2018-03-28 FR FR1852687A patent/FR3079667B1/fr active Active
-
2019
- 2019-03-20 CN CN201980022462.4A patent/CN111937302A/zh active Pending
- 2019-03-20 EP EP19711372.3A patent/EP3776855B1/fr active Active
- 2019-03-20 WO PCT/EP2019/056933 patent/WO2019185415A1/fr unknown
- 2019-03-20 US US17/042,768 patent/US11437973B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
CN111937302A (zh) | 2020-11-13 |
WO2019185415A1 (fr) | 2019-10-03 |
US11437973B2 (en) | 2022-09-06 |
EP3776855B1 (fr) | 2024-02-21 |
FR3079667A1 (fr) | 2019-10-04 |
US20210028760A1 (en) | 2021-01-28 |
EP3776855A1 (fr) | 2021-02-17 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PLFP | Fee payment |
Year of fee payment: 2 |
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PLSC | Publication of the preliminary search report |
Effective date: 20191004 |
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RM | Correction of a material error |
Effective date: 20200102 |
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PLFP | Fee payment |
Year of fee payment: 3 |
|
PLFP | Fee payment |
Year of fee payment: 4 |
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PLFP | Fee payment |
Year of fee payment: 5 |
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PLFP | Fee payment |
Year of fee payment: 6 |
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TP | Transmission of property |
Owner name: SOITEC, FR Effective date: 20230823 |
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PLFP | Fee payment |
Year of fee payment: 7 |