JP2011523828A5 - - Google Patents
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- Publication number
- JP2011523828A5 JP2011523828A5 JP2011512180A JP2011512180A JP2011523828A5 JP 2011523828 A5 JP2011523828 A5 JP 2011523828A5 JP 2011512180 A JP2011512180 A JP 2011512180A JP 2011512180 A JP2011512180 A JP 2011512180A JP 2011523828 A5 JP2011523828 A5 JP 2011523828A5
- Authority
- JP
- Japan
- Prior art keywords
- equal
- acoustic
- resonator
- frequency
- cutting angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 40
- 239000000463 material Substances 0.000 claims description 32
- 230000010287 polarization Effects 0.000 claims description 15
- 239000010453 quartz Substances 0.000 claims description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 8
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 claims description 6
- 230000008878 coupling Effects 0.000 claims description 5
- 238000010168 coupling process Methods 0.000 claims description 5
- 238000005859 coupling reaction Methods 0.000 claims description 5
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 claims description 4
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 4
- UKDIAJWKFXFVFG-UHFFFAOYSA-N potassium;oxido(dioxo)niobium Chemical compound [K+].[O-][Nb](=O)=O UKDIAJWKFXFVFG-UHFFFAOYSA-N 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 2
- -1 ammonium nitride Chemical class 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- PSHMSSXLYVAENJ-UHFFFAOYSA-N dilithium;[oxido(oxoboranyloxy)boranyl]oxy-oxoboranyloxyborinate Chemical compound [Li+].[Li+].O=BOB([O-])OB([O-])OB=O PSHMSSXLYVAENJ-UHFFFAOYSA-N 0.000 claims description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 2
- 229910052737 gold Inorganic materials 0.000 claims description 2
- 239000010931 gold Substances 0.000 claims description 2
- 229910052738 indium Inorganic materials 0.000 claims description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 2
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 229910000154 gallium phosphate Inorganic materials 0.000 claims 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0853689 | 2008-06-04 | ||
| FR0853689A FR2932333B1 (fr) | 2008-06-04 | 2008-06-04 | Resonateur hbar a stabilite en temperature elevee |
| PCT/FR2009/051011 WO2009156658A1 (fr) | 2008-06-04 | 2009-05-29 | Resonateur hbar a stabilite en temperature elevee |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011523828A JP2011523828A (ja) | 2011-08-18 |
| JP2011523828A5 true JP2011523828A5 (enExample) | 2013-12-12 |
| JP5438101B2 JP5438101B2 (ja) | 2014-03-12 |
Family
ID=40023981
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2011512180A Expired - Fee Related JP5438101B2 (ja) | 2008-06-04 | 2009-05-29 | 高い温度安定性を有する高バルク音響共振器タイプの共振器 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US8829764B2 (enExample) |
| EP (1) | EP2301150B1 (enExample) |
| JP (1) | JP5438101B2 (enExample) |
| CN (1) | CN102057570B (enExample) |
| FR (1) | FR2932333B1 (enExample) |
| WO (1) | WO2009156658A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2938136B1 (fr) * | 2008-11-05 | 2011-03-11 | Centre Nat Rech Scient | Elements de filtres par couplage transverse sur structures resonantes a ondes de volume a resonances harmoniques multiples. |
| FR2970827B1 (fr) | 2011-01-21 | 2013-03-01 | Centre Nat Rech Scient | Capteur de temperature comportant un resonateur a ondes de volumes a modes harmoniques elevees |
| JP5751278B2 (ja) * | 2013-05-15 | 2015-07-22 | 株式会社村田製作所 | 圧電バルク波共振子 |
| CN104181403B (zh) * | 2014-08-07 | 2017-06-27 | 中国科学院声学研究所 | 压电薄膜厚度机电耦合系数的检测方法 |
| CN104467732B (zh) * | 2014-12-10 | 2017-10-13 | 中国电子科技集团公司第二十六研究所 | 一种小步进s波段声学梳谱信号处理方法及系统 |
| JP6633544B2 (ja) * | 2014-12-24 | 2020-01-22 | シチズン時計株式会社 | 弾性表面波デバイス |
| CN105047811B (zh) * | 2015-05-29 | 2018-04-24 | 北京信息科技大学 | 基于不同厚度的压电材料层的叠堆压电换能器 |
| JP7251560B2 (ja) * | 2019-02-12 | 2023-04-04 | 株式会社村田製作所 | 圧電デバイス |
| CN112737541B (zh) * | 2020-12-24 | 2023-09-29 | 北京航天微电科技有限公司 | 一种tc-saw谐振器、制作方法和滤波器 |
| CN113037245B (zh) * | 2021-03-11 | 2023-02-03 | 天津大学 | 基于压电薄膜换能的石英谐振器以及电子设备 |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3401275A (en) * | 1966-04-14 | 1968-09-10 | Clevite Corp | Composite resonator |
| JPS60116217A (ja) * | 1983-11-28 | 1985-06-22 | Nippon Telegr & Teleph Corp <Ntt> | 複合共振子 |
| JPS60126907A (ja) * | 1983-12-12 | 1985-07-06 | Nippon Telegr & Teleph Corp <Ntt> | 単一応答複合圧電振動素子 |
| US6378367B1 (en) * | 1997-02-05 | 2002-04-30 | Sports Sensors, Inc. | Miniature sports radar speed measuring device |
| JP3147834B2 (ja) * | 1997-10-03 | 2001-03-19 | 株式会社村田製作所 | 圧電共振子の製造方法 |
| CA2327576C (en) * | 1999-12-21 | 2008-09-30 | Eta Sa Fabriques D'ebauches | Low frequency quartz oscillator device with improved thermal characteristics |
| US20040129958A1 (en) * | 2002-03-08 | 2004-07-08 | Koh Philip J. | Compact microwave/millimeter wave filter and method of manufacturing and designing thereof |
| JP4516021B2 (ja) * | 2003-07-18 | 2010-08-04 | 日本電波工業株式会社 | Ｓｃカット水晶振動子 |
| KR100646135B1 (ko) * | 2003-07-21 | 2006-11-23 | 쌍신전자통신주식회사 | 실리콘 체적탄성파 소자 및 그 제조방법 |
| EP1742355A1 (en) * | 2004-04-30 | 2007-01-10 | Murata Manufacturing Co., Ltd. | Piezoelectric thin film vibrator |
| FR2889375B1 (fr) * | 2005-07-29 | 2008-02-15 | Temex Sas Soc Par Actions Simp | Structure resonnante hybride |
-
2008
- 2008-06-04 FR FR0853689A patent/FR2932333B1/fr active Active
-
2009
- 2009-05-29 CN CN200980121075.2A patent/CN102057570B/zh not_active Expired - Fee Related
- 2009-05-29 EP EP09769499.6A patent/EP2301150B1/fr active Active
- 2009-05-29 JP JP2011512180A patent/JP5438101B2/ja not_active Expired - Fee Related
- 2009-05-29 WO PCT/FR2009/051011 patent/WO2009156658A1/fr not_active Ceased
- 2009-05-29 US US12/995,805 patent/US8829764B2/en active Active
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