FR2932333B1 - Resonateur hbar a stabilite en temperature elevee - Google Patents

Resonateur hbar a stabilite en temperature elevee

Info

Publication number
FR2932333B1
FR2932333B1 FR0853689A FR0853689A FR2932333B1 FR 2932333 B1 FR2932333 B1 FR 2932333B1 FR 0853689 A FR0853689 A FR 0853689A FR 0853689 A FR0853689 A FR 0853689A FR 2932333 B1 FR2932333 B1 FR 2932333B1
Authority
FR
France
Prior art keywords
high temperature
temperature stability
hbar resonator
hbar
resonator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR0853689A
Other languages
English (en)
French (fr)
Other versions
FR2932333A1 (fr
Inventor
Sylvain Ballandras
Dorian Gachon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
L'universite De Franche Comte Fr
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR0853689A priority Critical patent/FR2932333B1/fr
Priority to PCT/FR2009/051011 priority patent/WO2009156658A1/fr
Priority to EP09769499.6A priority patent/EP2301150B1/fr
Priority to JP2011512180A priority patent/JP5438101B2/ja
Priority to US12/995,805 priority patent/US8829764B2/en
Priority to CN200980121075.2A priority patent/CN102057570B/zh
Publication of FR2932333A1 publication Critical patent/FR2932333A1/fr
Application granted granted Critical
Publication of FR2932333B1 publication Critical patent/FR2932333B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H03H9/02078—Details relating to the vibration mode the vibration mode being overmoded
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02047—Treatment of substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
FR0853689A 2008-06-04 2008-06-04 Resonateur hbar a stabilite en temperature elevee Active FR2932333B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0853689A FR2932333B1 (fr) 2008-06-04 2008-06-04 Resonateur hbar a stabilite en temperature elevee
PCT/FR2009/051011 WO2009156658A1 (fr) 2008-06-04 2009-05-29 Resonateur hbar a stabilite en temperature elevee
EP09769499.6A EP2301150B1 (fr) 2008-06-04 2009-05-29 Resonateur hbar a stabilite en temperature elevee
JP2011512180A JP5438101B2 (ja) 2008-06-04 2009-05-29 高い温度安定性を有する高バルク音響共振器タイプの共振器
US12/995,805 US8829764B2 (en) 2008-06-04 2009-05-29 HBAR resonator with high temperature stability
CN200980121075.2A CN102057570B (zh) 2008-06-04 2009-05-29 具有高温度稳定性的hbar谐振器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0853689A FR2932333B1 (fr) 2008-06-04 2008-06-04 Resonateur hbar a stabilite en temperature elevee

Publications (2)

Publication Number Publication Date
FR2932333A1 FR2932333A1 (fr) 2009-12-11
FR2932333B1 true FR2932333B1 (fr) 2010-08-13

Family

ID=40023981

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0853689A Active FR2932333B1 (fr) 2008-06-04 2008-06-04 Resonateur hbar a stabilite en temperature elevee

Country Status (6)

Country Link
US (1) US8829764B2 (enExample)
EP (1) EP2301150B1 (enExample)
JP (1) JP5438101B2 (enExample)
CN (1) CN102057570B (enExample)
FR (1) FR2932333B1 (enExample)
WO (1) WO2009156658A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2938136B1 (fr) * 2008-11-05 2011-03-11 Centre Nat Rech Scient Elements de filtres par couplage transverse sur structures resonantes a ondes de volume a resonances harmoniques multiples.
FR2970827B1 (fr) 2011-01-21 2013-03-01 Centre Nat Rech Scient Capteur de temperature comportant un resonateur a ondes de volumes a modes harmoniques elevees
JP5751278B2 (ja) * 2013-05-15 2015-07-22 株式会社村田製作所 圧電バルク波共振子
CN104181403B (zh) * 2014-08-07 2017-06-27 中国科学院声学研究所 压电薄膜厚度机电耦合系数的检测方法
CN104467732B (zh) * 2014-12-10 2017-10-13 中国电子科技集团公司第二十六研究所 一种小步进s波段声学梳谱信号处理方法及系统
JP6633544B2 (ja) * 2014-12-24 2020-01-22 シチズン時計株式会社 弾性表面波デバイス
CN105047811B (zh) * 2015-05-29 2018-04-24 北京信息科技大学 基于不同厚度的压电材料层的叠堆压电换能器
JP7251560B2 (ja) * 2019-02-12 2023-04-04 株式会社村田製作所 圧電デバイス
CN112737541B (zh) * 2020-12-24 2023-09-29 北京航天微电科技有限公司 一种tc-saw谐振器、制作方法和滤波器
CN113037245B (zh) * 2021-03-11 2023-02-03 天津大学 基于压电薄膜换能的石英谐振器以及电子设备

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3401275A (en) * 1966-04-14 1968-09-10 Clevite Corp Composite resonator
JPS60116217A (ja) * 1983-11-28 1985-06-22 Nippon Telegr & Teleph Corp <Ntt> 複合共振子
JPS60126907A (ja) * 1983-12-12 1985-07-06 Nippon Telegr & Teleph Corp <Ntt> 単一応答複合圧電振動素子
US6378367B1 (en) * 1997-02-05 2002-04-30 Sports Sensors, Inc. Miniature sports radar speed measuring device
JP3147834B2 (ja) * 1997-10-03 2001-03-19 株式会社村田製作所 圧電共振子の製造方法
CA2327576C (en) * 1999-12-21 2008-09-30 Eta Sa Fabriques D'ebauches Low frequency quartz oscillator device with improved thermal characteristics
US20040129958A1 (en) * 2002-03-08 2004-07-08 Koh Philip J. Compact microwave/millimeter wave filter and method of manufacturing and designing thereof
JP4516021B2 (ja) * 2003-07-18 2010-08-04 日本電波工業株式会社 Ｓｃカット水晶振動子
KR100646135B1 (ko) * 2003-07-21 2006-11-23 쌍신전자통신주식회사 실리콘 체적탄성파 소자 및 그 제조방법
EP1742355A1 (en) * 2004-04-30 2007-01-10 Murata Manufacturing Co., Ltd. Piezoelectric thin film vibrator
FR2889375B1 (fr) * 2005-07-29 2008-02-15 Temex Sas Soc Par Actions Simp Structure resonnante hybride

Also Published As

Publication number Publication date
EP2301150A1 (fr) 2011-03-30
CN102057570A (zh) 2011-05-11
US20110279187A1 (en) 2011-11-17
JP2011523828A (ja) 2011-08-18
US8829764B2 (en) 2014-09-09
EP2301150B1 (fr) 2019-07-03
JP5438101B2 (ja) 2014-03-12
WO2009156658A1 (fr) 2009-12-30
CN102057570B (zh) 2014-04-23
FR2932333A1 (fr) 2009-12-11

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Legal Events

Date Code Title Description
AU Other action affecting the ownership or exploitation of an industrial property right

Effective date: 20121219

TQ Partial transmission of property

Owner name: L'UNIVERSITE DE FRANCHE COMTE, FR

Effective date: 20121219

Owner name: CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE -, FR

Effective date: 20121219

CL Concession to grant licences

Name of requester: ETAT FRANCAIS, MINISTERE DE LA DEFENSE, FR

Effective date: 20140122

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