CN102057570B - 具有高温度稳定性的hbar谐振器 - Google Patents

具有高温度稳定性的hbar谐振器 Download PDF

Info

Publication number
CN102057570B
CN102057570B CN200980121075.2A CN200980121075A CN102057570B CN 102057570 B CN102057570 B CN 102057570B CN 200980121075 A CN200980121075 A CN 200980121075A CN 102057570 B CN102057570 B CN 102057570B
Authority
CN
China
Prior art keywords
transducer
temperature coefficient
equal
thickness
angle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN200980121075.2A
Other languages
English (en)
Chinese (zh)
Other versions
CN102057570A (zh
Inventor
S·巴朗德拉
D·加雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Universite de Franche-Comte
Original Assignee
University Franche Comte
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by University Franche Comte, Centre National de la Recherche Scientifique CNRS filed Critical University Franche Comte
Publication of CN102057570A publication Critical patent/CN102057570A/zh
Application granted granted Critical
Publication of CN102057570B publication Critical patent/CN102057570B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02062—Details relating to the vibration mode
    • H03H9/02078—Details relating to the vibration mode the vibration mode being overmoded
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02015—Characteristics of piezoelectric layers, e.g. cutting angles
    • H03H9/02031—Characteristics of piezoelectric layers, e.g. cutting angles consisting of ceramic
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02047—Treatment of substrates
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/171—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator implemented with thin-film techniques, i.e. of the film bulk acoustic resonator [FBAR] type
    • H03H9/172—Means for mounting on a substrate, i.e. means constituting the material interface confining the waves to a volume
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/42—Piezoelectric device making

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
CN200980121075.2A 2008-06-04 2009-05-29 具有高温度稳定性的hbar谐振器 Expired - Fee Related CN102057570B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0853689 2008-06-04
FR0853689A FR2932333B1 (fr) 2008-06-04 2008-06-04 Resonateur hbar a stabilite en temperature elevee
PCT/FR2009/051011 WO2009156658A1 (fr) 2008-06-04 2009-05-29 Resonateur hbar a stabilite en temperature elevee

Publications (2)

Publication Number Publication Date
CN102057570A CN102057570A (zh) 2011-05-11
CN102057570B true CN102057570B (zh) 2014-04-23

Family

ID=40023981

Family Applications (1)

Application Number Title Priority Date Filing Date
CN200980121075.2A Expired - Fee Related CN102057570B (zh) 2008-06-04 2009-05-29 具有高温度稳定性的hbar谐振器

Country Status (6)

Country Link
US (1) US8829764B2 (enExample)
EP (1) EP2301150B1 (enExample)
JP (1) JP5438101B2 (enExample)
CN (1) CN102057570B (enExample)
FR (1) FR2932333B1 (enExample)
WO (1) WO2009156658A1 (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2938136B1 (fr) * 2008-11-05 2011-03-11 Centre Nat Rech Scient Elements de filtres par couplage transverse sur structures resonantes a ondes de volume a resonances harmoniques multiples.
FR2970827B1 (fr) 2011-01-21 2013-03-01 Centre Nat Rech Scient Capteur de temperature comportant un resonateur a ondes de volumes a modes harmoniques elevees
JP5751278B2 (ja) * 2013-05-15 2015-07-22 株式会社村田製作所 圧電バルク波共振子
CN104181403B (zh) * 2014-08-07 2017-06-27 中国科学院声学研究所 压电薄膜厚度机电耦合系数的检测方法
CN104467732B (zh) * 2014-12-10 2017-10-13 中国电子科技集团公司第二十六研究所 一种小步进s波段声学梳谱信号处理方法及系统
JP6633544B2 (ja) * 2014-12-24 2020-01-22 シチズン時計株式会社 弾性表面波デバイス
CN105047811B (zh) * 2015-05-29 2018-04-24 北京信息科技大学 基于不同厚度的压电材料层的叠堆压电换能器
JP7251560B2 (ja) * 2019-02-12 2023-04-04 株式会社村田製作所 圧電デバイス
CN112737541B (zh) * 2020-12-24 2023-09-29 北京航天微电科技有限公司 一种tc-saw谐振器、制作方法和滤波器
CN113037245B (zh) * 2021-03-11 2023-02-03 天津大学 基于压电薄膜换能的石英谐振器以及电子设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3401275A (en) * 1966-04-14 1968-09-10 Clevite Corp Composite resonator
CN1224248A (zh) * 1997-10-03 1999-07-28 株式会社村田制作所 压电谐振器的制造方法
CN1311563A (zh) * 1999-12-21 2001-09-05 Eta草图制造公司 具有改善的热特性的低频石英晶体振荡器器件
CN1823471A (zh) * 2003-07-18 2006-08-23 日本电波工业株式会社 Sc切割晶体谐振器

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60116217A (ja) * 1983-11-28 1985-06-22 Nippon Telegr & Teleph Corp <Ntt> 複合共振子
JPS60126907A (ja) * 1983-12-12 1985-07-06 Nippon Telegr & Teleph Corp <Ntt> 単一応答複合圧電振動素子
US6378367B1 (en) * 1997-02-05 2002-04-30 Sports Sensors, Inc. Miniature sports radar speed measuring device
US20040129958A1 (en) * 2002-03-08 2004-07-08 Koh Philip J. Compact microwave/millimeter wave filter and method of manufacturing and designing thereof
KR100646135B1 (ko) * 2003-07-21 2006-11-23 쌍신전자통신주식회사 실리콘 체적탄성파 소자 및 그 제조방법
EP1742355A1 (en) * 2004-04-30 2007-01-10 Murata Manufacturing Co., Ltd. Piezoelectric thin film vibrator
FR2889375B1 (fr) * 2005-07-29 2008-02-15 Temex Sas Soc Par Actions Simp Structure resonnante hybride

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3401275A (en) * 1966-04-14 1968-09-10 Clevite Corp Composite resonator
CN1224248A (zh) * 1997-10-03 1999-07-28 株式会社村田制作所 压电谐振器的制造方法
CN1311563A (zh) * 1999-12-21 2001-09-05 Eta草图制造公司 具有改善的热特性的低频石英晶体振荡器器件
CN1823471A (zh) * 2003-07-18 2006-08-23 日本电波工业株式会社 Sc切割晶体谐振器

Also Published As

Publication number Publication date
EP2301150A1 (fr) 2011-03-30
CN102057570A (zh) 2011-05-11
US20110279187A1 (en) 2011-11-17
JP2011523828A (ja) 2011-08-18
US8829764B2 (en) 2014-09-09
EP2301150B1 (fr) 2019-07-03
FR2932333B1 (fr) 2010-08-13
JP5438101B2 (ja) 2014-03-12
WO2009156658A1 (fr) 2009-12-30
FR2932333A1 (fr) 2009-12-11

Similar Documents

Publication Publication Date Title
CN102057570B (zh) 具有高温度稳定性的hbar谐振器
US5446330A (en) Surface acoustic wave device having a lamination structure
JP3435789B2 (ja) 表面弾性波素子
US7609132B2 (en) Hybrid resonant structure
US10270420B2 (en) Surface elastic wave device comprising a single-crystal piezoelectric film and a crystalline substrate with low visoelastic coefficients
US9843304B2 (en) Transducer with bulk waves surface-guided by synchronous excitation structures
US20040036381A1 (en) Saw filter device and method employing normal temperature bonding for producing desirable filter production and performance characteristics
JPH027525B2 (enExample)
CN112737541A (zh) 一种tc-saw谐振器、制作方法和滤波器
US9459156B2 (en) Temperature sensor comprising a high-overtone bulk acoustic resonator
JP2011523828A5 (enExample)
CN102084590B (zh) 具有高集成度的hbar共振器
JP2012507902A (ja) 複数の調和的共振を有するバルク波を有する共振構造体における交差結合フィルタ要素
WO2019082806A1 (ja) 弾性波素子
Wu et al. A new class of high-overtone bulk acoustic resonators using lithium niobate on conductive silicon carbide
WO2022230723A1 (ja) 弾性波装置
JP4339604B2 (ja) 圧電薄膜素子
JP2003273691A (ja) 表面弾性波素子
JPH01103310A (ja) 表面弾性波素子
JP2021013133A (ja) 振動子およびセンサ素子
Wittstruck et al. Properties of transducers and substrates for high frequency resonators and sensors
Matsumoto et al. Multilayer film piezoelectric Lamb wave resonator for several GHz applications
JP2006298694A (ja) 圧電複合基板及びその製造方法
Fujiwara et al. Temperature characteristics of sh-type acoustic waves in a rotated y-cut litao3 thin plate
JPS60116217A (ja) 複合共振子

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
ASS Succession or assignment of patent right

Owner name: UNIVERSIT DE FRANCHE-COMT

Effective date: 20130220

C41 Transfer of patent application or patent right or utility model
TA01 Transfer of patent application right

Effective date of registration: 20130220

Address after: France

Applicant after: Centre National de La Recherche Scientifique (CNRS)

Applicant after: Univ Franche Comte

Address before: France

Applicant before: Centre National de La Recherche Scientifique (CNRS)

C14 Grant of patent or utility model
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20140423

Termination date: 20200529