JP2019129324A5 - - Google Patents
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- Publication number
- JP2019129324A5 JP2019129324A5 JP2019011420A JP2019011420A JP2019129324A5 JP 2019129324 A5 JP2019129324 A5 JP 2019129324A5 JP 2019011420 A JP2019011420 A JP 2019011420A JP 2019011420 A JP2019011420 A JP 2019011420A JP 2019129324 A5 JP2019129324 A5 JP 2019129324A5
- Authority
- JP
- Japan
- Prior art keywords
- layer
- microactuator
- pzt
- lower electrode
- island portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000725 suspension Substances 0.000 claims 22
- 239000000853 adhesive Substances 0.000 claims 5
- 230000001070 adhesive effect Effects 0.000 claims 5
- 239000002184 metal Substances 0.000 claims 2
- 238000000926 separation method Methods 0.000 claims 2
- 230000000712 assembly Effects 0.000 claims 1
- 238000000429 assembly Methods 0.000 claims 1
- 238000010276 construction Methods 0.000 claims 1
Images
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862621990P | 2018-01-25 | 2018-01-25 | |
| US62/621,990 | 2018-01-25 | ||
| US16/254,240 US10748564B2 (en) | 2018-01-25 | 2019-01-22 | Multi-layer microactuators for hard disk drive suspensions |
| US16/254,240 | 2019-01-22 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2019129324A JP2019129324A (ja) | 2019-08-01 |
| JP2019129324A5 true JP2019129324A5 (https=) | 2022-02-02 |
| JP7145771B2 JP7145771B2 (ja) | 2022-10-03 |
Family
ID=67299416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019011420A Active JP7145771B2 (ja) | 2018-01-25 | 2019-01-25 | ハードディスクドライブサスペンション用多層マイクロアクチュエータ |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US10748564B2 (https=) |
| JP (1) | JP7145771B2 (https=) |
| CN (1) | CN110085269B (https=) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10607642B2 (en) * | 2013-03-18 | 2020-03-31 | Magnecomp Corporation | Multi-layer PZT microactuator with active PZT constraining layers for a DSA suspension |
| US9741376B1 (en) | 2013-03-18 | 2017-08-22 | Magnecomp Corporation | Multi-layer PZT microactuator having a poled but inactive PZT constraining layer |
| US11205449B2 (en) | 2013-03-18 | 2021-12-21 | Magnecomp Corporation | Multi-layer PZT microacuator with active PZT constraining layers for a DSA suspension |
| US10128431B1 (en) | 2015-06-20 | 2018-11-13 | Magnecomp Corporation | Method of manufacturing a multi-layer PZT microactuator using wafer-level processing |
| US10748564B2 (en) | 2018-01-25 | 2020-08-18 | Magnecomp Corporation | Multi-layer microactuators for hard disk drive suspensions |
| JP2020135906A (ja) * | 2019-02-15 | 2020-08-31 | 株式会社東芝 | ヘッドサスペンションアッセンブリおよびディスク装置 |
| JP2020145514A (ja) * | 2019-03-04 | 2020-09-10 | 株式会社東芝 | マイクロアクチュエータ、ヘッドサスペンションアッセンブリおよびディスク装置 |
| US11348608B2 (en) * | 2020-02-06 | 2022-05-31 | Magnecomp Corporation | Tri-stage design for actuator attachment on flexure |
| US12144258B2 (en) * | 2020-02-07 | 2024-11-12 | Magnecomp Corporation | Suspension design with improved microactuator sensitivity and microactuator configurations |
| US11152024B1 (en) | 2020-03-30 | 2021-10-19 | Western Digital Technologies, Inc. | Piezoelectric-based microactuator arrangement for mitigating out-of-plane force and phase variation of flexure vibration |
| US11557318B1 (en) * | 2022-03-29 | 2023-01-17 | Sae Magnetics (H.K.) Ltd. | Head gimbal assembly, manufacturing method thereof, and disk drive unit |
| US20250336415A1 (en) * | 2024-04-24 | 2025-10-30 | Magnecomp Corporation | Head Gimbal Assembly With Gimbal Tethers For Hard Disk Drive Device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4443729A (en) * | 1981-06-22 | 1984-04-17 | Rockwell International Corporation | Piezoceramic bender element having an electrode arrangement suppressing signal development in mount region |
| JPS604279A (ja) * | 1983-06-22 | 1985-01-10 | Nippon Soken Inc | 積層型圧電体 |
| GB2370153B (en) | 1999-04-20 | 2003-10-22 | Seagate Technology Llc | Electrode patterning for a differential pzt activator |
| US6501625B1 (en) * | 1999-06-29 | 2002-12-31 | Hutchinson Technology Incorporated | Disk drive suspension with multi-layered piezoelectric actuator controlled gram load |
| US6512323B2 (en) * | 2000-03-22 | 2003-01-28 | Caterpillar Inc. | Piezoelectric actuator device |
| JP2001347499A (ja) * | 2000-06-05 | 2001-12-18 | Sony Corp | 微細装置の製造方法 |
| US6590748B2 (en) * | 2000-06-06 | 2003-07-08 | Seagate Technology Llc | Combined servo-tracking and preload-controlling microactuator |
| JP2002133803A (ja) * | 2000-10-31 | 2002-05-10 | Tdk Corp | ヘッド素子の微小位置決め用アクチュエータ、該アクチュエータを備えたヘッドジンバルアセンブリ、該ヘッドジンバルアセンブリを備えたディスク装置、該アクチュエータの製造方法及び該ヘッドジンバルアセンブリの製造方法 |
| JP3975688B2 (ja) * | 2001-04-23 | 2007-09-12 | 新科實業有限公司 | ヘッド素子の微小位置決め用アクチュエータ、該アクチュエータを備えたヘッドジンバルアセンブリ及び該アクチュエータの製造方法 |
| DE10121270A1 (de) * | 2001-04-30 | 2003-02-06 | Epcos Ag | Passivierungsmaterial für ein elektrisches Bauteil sowie piezoelektrisches Bauteil in Vielschichtbauweise |
| US6614144B2 (en) * | 2001-10-04 | 2003-09-02 | Force International, Corp. | Multilayer piezoelectric transformer |
| JP2004064877A (ja) * | 2002-07-29 | 2004-02-26 | Matsushita Electric Ind Co Ltd | 圧電アクチュエータ、圧電アクチュエータを用いたディスク装置、および圧電アクチュエータの製造方法 |
| US20070007863A1 (en) * | 2005-07-11 | 2007-01-11 | Siemens Medical Solutions Usa. Inc. | Drilled multi-layer ultrasound transducer array |
| US7459835B1 (en) * | 2006-03-06 | 2008-12-02 | Magnecomp Corporation | Loading-protected bending microactuator in additive suspensions |
| US7414351B2 (en) * | 2006-10-02 | 2008-08-19 | Robert Bosch Gmbh | Energy harvesting device manufactured by print forming processes |
| JP2008253058A (ja) * | 2007-03-30 | 2008-10-16 | Japan Aviation Electronics Industry Ltd | アクチュエータ及び入力デバイス |
| US7872834B1 (en) * | 2007-05-03 | 2011-01-18 | Hutchinson Technology Incorporated | Head suspension with asymmetric linkage and asymmetric microactuator in plane of mounting region to provide a pseudosymmetric configuration |
| JP2009076132A (ja) | 2007-09-19 | 2009-04-09 | Hitachi Global Storage Technologies Netherlands Bv | マイクロアクチュエータ、ヘッドジンバルアセンブリ及び磁気ディスク装置 |
| JP4840788B2 (ja) * | 2007-10-05 | 2011-12-21 | 東芝ストレージデバイス株式会社 | マイクロアクチュエータ装置並びにヘッドサスペンションアセンブリおよび記憶媒体駆動装置 |
| CN101499287B (zh) * | 2008-02-02 | 2012-11-14 | 新科实业有限公司 | 压电元件、压电微致动器、磁头折片组合及磁盘驱动单元 |
| US10170685B2 (en) * | 2008-06-30 | 2019-01-01 | The Regents Of The University Of Michigan | Piezoelectric MEMS microphone |
| JP5939468B2 (ja) * | 2012-09-19 | 2016-06-22 | 大日本印刷株式会社 | サスペンション用基板、サスペンション、ヘッド付サスペンションおよびハードディスクドライブ |
| US8780503B2 (en) * | 2012-10-16 | 2014-07-15 | Seagate Technology Llc | Multi-layer piezoelectric transducer with inactive layers |
| US9117468B1 (en) * | 2013-03-18 | 2015-08-25 | Magnecomp Corporation | Hard drive suspension microactuator with restraining layer for control of bending |
| US9330694B1 (en) * | 2013-03-18 | 2016-05-03 | Magnecomp Corporation | HDD microactuator having reverse poling and active restraining layer |
| US9330696B1 (en) * | 2013-03-18 | 2016-05-03 | Magnecomp Corporation | DSA suspension having PZT with overhanging constraint layer and electrical connection thereto |
| US9330698B1 (en) | 2013-03-18 | 2016-05-03 | Magnecomp Corporation | DSA suspension having multi-layer PZT microactuator with active PZT constraining layers |
| US9741376B1 (en) * | 2013-03-18 | 2017-08-22 | Magnecomp Corporation | Multi-layer PZT microactuator having a poled but inactive PZT constraining layer |
| US9318136B1 (en) * | 2014-12-22 | 2016-04-19 | Hutchinson Technology Incorporated | Multilayer disk drive motors having out-of-plane bending |
| JP6690141B2 (ja) * | 2015-07-03 | 2020-04-28 | Tdk株式会社 | 圧電素子及び圧電アクチュエータ |
| US10134431B2 (en) * | 2016-04-27 | 2018-11-20 | Magnecomp Corporation | Multi-layer shear mode PZT microactuator for a disk drive suspension, and method of manufacturing same |
| US10679652B2 (en) * | 2017-12-21 | 2020-06-09 | Magnecomp Corporation | Partial etched polyimide for non-conductive adhesive containment |
| US10748564B2 (en) | 2018-01-25 | 2020-08-18 | Magnecomp Corporation | Multi-layer microactuators for hard disk drive suspensions |
-
2019
- 2019-01-22 US US16/254,240 patent/US10748564B2/en active Active
- 2019-01-25 CN CN201910073286.9A patent/CN110085269B/zh active Active
- 2019-01-25 JP JP2019011420A patent/JP7145771B2/ja active Active
-
2020
- 2020-07-16 US US16/930,768 patent/US10867628B2/en active Active
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